JPH0416223Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Technical Field of the Invention] The present invention provides a vibrator for an ultrasonic microscope that enables smooth attachment and detachment of an acoustic lens without applying excessive force to the support means of the vibrating body. The present invention relates to a vibrating body fixing device.

[Technical background of the invention and its problems] In recent years, ultrasonic beams have been collected and irradiated onto a sample while being manipulated two-dimensionally, and the reflected waves or transmitted waves are converted into electrical signals and transmitted to cathode ray tubes, etc. Ultrasonic microscopes that display information have been put into practical use, and the acoustic information obtained is now being used in various fields.

The above-mentioned ultrasonic microscope generally uses an acoustic lens as its scanning mechanism to make reciprocating motion (vibratory motion) in one axis at a frequency of several tens of Hz, while scanning the sample side in a direction perpendicular to this axis to perform two-dimensional scanning. By doing so, a two-dimensional ultrasound image of the sample can be obtained.

The device that vibrates the acoustic lens in one axis is generally called a vibrator, and a conventional example thereof is, for example, Japanese Patent Application No. 58-204717 (Japanese Unexamined Patent Publication No. 60-97259).
There are some suggestions.

In this conventional example, frame 1 is shown in FIG.
The yoke part is fixed to the yoke, and a voice coil 2 is loosely fitted around the outer periphery of a pole piece attached to a permanent magnet inside the yoke so as to be able to reciprocate. One end is fixed to this voice coil 2 and arrow A
A support rod (arm) 3 that can freely vibrate in any direction is configured such that an acoustic lens 4 can be screwed into the central portion of the longitudinal direction of the support rod (arm) 3.
is elastically supported by the frame 1 via leaf springs 5, 5 attached to the frame 1.

In the above-mentioned conventional vibrator, the arm 3 is supported only by the two leaf springs 5, 5, so when the acoustic lens 4 is rotated when replacing it, the arm 3 is moved in a direction perpendicular to the direction in which the arm 3 is reciprocated. When a force is applied to the plate springs 5, 5, the plate springs 5, 5 are displaced in that direction. There are drawbacks such as damage to the

Also, if you are careful when replacing the acoustic lens 4 and avoid applying unnecessary large force, the above-mentioned drawbacks can be prevented to some extent, but the ease of attaching and detaching when replacing, such as not being able to replace quickly, is reduced. do. In addition, in long-term use, since replacement is repeated, the support state of the leaf springs 5, 5 tends to change from the initial state, resulting in problems such as changes in the scanning state and resulting in unreliability. There is.

[Purpose of the invention] The present invention has been made in view of the above-mentioned points, and it is possible to prevent the support means from being damaged by preventing excessive force from being applied to the support means of the arm when replacing the arm, and to prevent the support means from being damaged. It is an object of the present invention to provide an arm fixing device for an ultrasonic microscope exciter that can ensure operability and reliability such as preventing any hindrance to the reciprocating movement of the arm.

[Summary of the invention] The present invention provides a fixing means for fixing and holding a vibrating body (an arm or a lens connector holder, hereinafter) in a frame, and keeps this fixing means in a non-operating state during excitation motion. The vibrating body is fixedly held by being activated when the lens is attached and detached, and the acoustic lens can be smoothly attached and detached without applying excessive force to the supporting means of the vibrating body.

[Embodiments of the invention] The invention will be specifically described below with reference to the drawings.

1 to 3 relate to a first embodiment of the present invention, FIG. 1 is a cross-sectional view showing a vibrator equipped with the first embodiment, and FIG. 2 is a cross-sectional view taken along the line - in FIG. 3 are cross-sectional views showing the state when the acoustic lens is attached and detached.

The vibrator 11 provided with the first embodiment has a yoke 13 fixed to a frame 12.
A permanent magnet (not shown) is attached to the inside of the magnet, and a pole piece (not shown) is attached to the permanent magnet, and a voice coil 14 is loosely fitted around the outer periphery of the pole piece so as to be able to reciprocate (vibrate). ing.

Through-holes 12a, 1 are provided in the frame 12 at portions that face each other along the movable direction of the voice coil 14.
2b is provided, and the cylindrical arm 15 is passed through it. One end of this arm 15 is fixed to the voice coil 14, and is pressed in the direction of pressing, for example, by leaf springs 16a, 16b serving as supporting means attached to the outer surfaces of the through holes 12a, 12b in the frame 12. The arm 15 is elastically supported near each end of the arm 15 in a biased state. A lens connector receiver 18 is attached to the central portion of the arm 15 in the longitudinal direction, and has a female thread that engages with a threaded portion formed on the outer periphery of the base side of the acoustic lens 17 . However,
By passing an alternating current for excitation drive through the voice coil 14, the arm 15 is moved as indicated by the arrow B in FIG.
The acoustic lens 17 reciprocates in the axial direction indicated by , and the acoustic lens 17 also reciprocates in that direction so that a sample (not shown) facing the acoustic lens 17 can be scanned in the B direction.

Incidentally, the frame 12 is provided with means for fixing the arm 15 as described below. That is, a pair of holes 1 are formed at a predetermined interval on the side of the arm 15 in a direction orthogonal to the lens connector receiver 18.
5a and 15b are provided, and this hole 15
There is a through hole 1 in the frame 12 facing a and 15b.
2c and 12d are provided. This through hole 12
A U-shaped fixing rod 19 is fitted in the insides of the rods 12c and 12d so as to be slidable in the direction of arrow C. moreover,
This fixed rod 19 is provided with stoppers 19a and 19b that restrict the movement range of the fixed rod 19. When this fixing rod 19 is pressed in the direction of arrow C, the through holes 12c and 12d of the frame 12
and its free end is inserted into hole 1 of arm 15.
5a and 15b, and can be set in a fixed state (locked state) in which the arm 15 is fixed to the frame 12 via the fixing rod 19 so as not to move in the axial direction or in the direction perpendicular to the axis. Further, by moving the fixing rod 19 in the opposite direction and releasing its free end through the holes 15a and 15b of the arm 15, it can be brought into the released state.

The operation of the fixing device of the first embodiment configured in this way will be explained below.

When operating the vibrator 11, as shown in FIG. It can be detected by coming into contact with the wall surface of the frame 12.

Therefore, when replacing the acoustic lens 17 after using the exciter 11 or during the use, the excitation signal sent to the voice coil 14 is cut off, and the fixed rod 1
9 is moved in the direction of arrow C, the free end of the fixing rod 19 aligns with the hole 15 of the arm 15, as shown in FIG.
a, 15b, and the arm 15 is in a fixed state in which it cannot move in any direction, such as left and right or up and down.

Therefore, in this state, even if the acoustic lens 17 is rotated to be removed or attached, it can be done without applying almost any force to the leaf springs 16a, 16b, which serve as elastic support means for the arm 15. death,
Even if the rotation operation is performed quickly, the leaf springs 16a, 16
Since no unreasonable force is applied to b, the replacement work or attachment/detachment work can be quickly completed.
In other words, the attachment/detachment operation can be performed easily and quickly.

When exchanging the vibration exciter 11 and operating it, move the fixing rod 19 in the opposite direction to remove its free end from the holes 15a and 15b of the arm 15, and
The arm 15 is placed in the released state as shown in the figure.

Incidentally, in the first embodiment, a U-shaped fixing rod 19 is used.
Alternatively, as shown in FIG. 4, the through hole 12b (12a) of the frame 12 may be
The fixing rod 19 may be arranged in the hole 12c of the portion and configured to be engaged with and detached from the hole 15c of the arm 15. Furthermore, the fixing rod 19 can be installed in either the upper or lower position. Alternatively, a threaded portion may be formed at the free end of the fixing rod 19 for threaded connection.

5 and 6 show a second embodiment of the invention.

In this second embodiment, the same members as those in the first embodiment are denoted by the same reference numerals, and a detailed explanation of the structure thereof will be omitted.

The vibrating body fixing device of the second embodiment has a fixing member 20 at a position opposite to the lens connector receiver 18.
a, 20b, and these fixing members 20a, 20
Arc-shaped recesses 21a and 21b, which engage and disengage from the lens connector receiver 18, are formed at opposing positions of b, respectively. Further, the fixing members 20a and 20b are movable along a guide rod 22 installed on the frame 12 in the same direction as the moving direction of the arm 15. Further, the fixing members 20a and 20b are connected to the threaded portion 23 of the threaded rod 23 installed on the frame 12.
By rotating the handle 24 of the threaded rod 23, the fixing members 20a and 20b can be brought closer to each other as shown by arrow D.
It is configured to keep it away. During the vibration motion, the recesses 21a and 21a of the fixing members 20a and 20b, as shown in FIGS. 5 and 6,
21b are spaced apart from the wall surface of the lens connector receiver 18 and facing each other.

On the other hand, when replacing the acoustic lens 17 after using the vibrator 11 or during the use, the handle 24 is rotated, thereby fixing the fixing member 20a screwed into the threaded portions 23a and 23b of the screw shaft 23. ，
20b are brought close to each other, and the recessed portions 21a, 21b are
This is to fix the lens connector receiver 18.

Therefore, in this state, even if the acoustic lens 17 is rotated and removed or attached, the arm 15
Leaf springs 16a, 16b as elastic support means for
This can be done without applying almost any force to the leaf springs 16a, 16a, even if the rotation operation is performed quickly.
Since no excessive force is applied to 16b,
Attachment and removal work can be quickly completed during replacement work.

In order to operate the vibrator 11 after replacing the vibration exciter 11, by rotating the handle 24 in the opposite direction, the fixing members 20a and 20b screwed into the threaded portions 23a and 23b of the threaded rod 23 move away from each other, and the lens The lens connector receiver 18 is separated from the lens connector receiver 18, and the lens connector receiver 18 is released as shown in FIGS. 5 and 6.

In addition, in the above embodiment, the fixing members 20a, 20b
Although the lens connector receiver 8 is fixedly held by a pair of fixing members 20a and 20b as shown in FIG. 7, the arm 15 may be fixedly held by a pair of fixing members 20a and 20b. In addition, as shown in FIG.
The screws 25a and 25b are installed in the screw holes 12e and 12e of the frame 12 so as to be rotatable.
12f and by rotating the heads of the screws 25a and 25b in the direction of the arrow, the fixing member 20
The recesses 21a and 21b of the arms 15a and 20b may be moved toward and away from the arm 15. Furthermore, the ninth
As shown in the figure, the pair of fixing members 20a, 20
b is integrally or separately fixed to the plunger of the solenoids 26a, 26b, so that the solenoids 26a, 26
By the operation of b, the recesses 2 of the fixing members 20a, 20b
1a and 21b may be configured to move toward and away from the arm 15. Further, although not shown, the pair of fixing members 20a and 20b may be reciprocated by a mechanism such as a combination of a rack and a pinion so as to move toward and away from the arm 15. In any of these cases, the same effects as in the second embodiment can be obtained.

FIG. 10 shows a third embodiment of the present invention.

In this third embodiment, the same members as those in FIG. 1 are given the same reference numerals, and a detailed explanation of the structure will be omitted.

The vibrating body fixing device of this third embodiment has an arm 1
A screw hole 15d along the axial direction is provided at one end of the arm 15, and a U-shaped bracket 27 is attached to one side of the frame 12 via a screw 28.
A bolt 29, which is a fixing member, is screwed into the bolt d. During excitation motion, this causes the bolt 29 of the bracket 27 to tighten as shown in Figure 10.
The free end of the arm 15 is separated from the screw hole 15d of the arm 15.

On the other hand, when replacing the acoustic lens 17 after using the vibrator 11 or during the use, the bolt 2
9 is rotated by an appropriate means and moved in the direction of arrow E, and its free end is inserted into the screw hole 15d of the arm 15.
The arm 15 is fixed by screwing the arm 15 inward.

Therefore, in this state, even if the acoustic lens 17 is rotated and removed or attached, the arm 15
leaf springs 16a, 16b as elastic support means for
This can be done without applying much force to the leaf springs 16a, 16a, even if the rotation operation is performed quickly.
Since no unreasonable force is applied to 16b,
Replacement work or attachment/detachment work can be quickly completed.

In order to operate the vibrator 11 after replacing it, the free end of the bolt 29 is removed from the screw hole 15d of the arm 15 by rotating the bolt 29 in the opposite direction, as shown in FIG. The arm 15 is released as shown in FIG. In place of the bolt 28,
Similar effects can be obtained by fixing the arm 15 by engaging a pin in a hole in the arm 15.

FIG. 11 shows a fourth embodiment of the present invention.

In this fourth embodiment, the same members as in FIG. 1 are given the same reference numerals, and a detailed explanation of the structure will be omitted.

The vibrating body fixing device of this fourth embodiment has an arm 15.
A pair of truncated conical contact bodies 30a and 30b are provided at a predetermined interval in the center of the
Stoppers 33a and 33b, which are fixed bodies, are loosely fitted into the arm 15 and have recesses 32a and 32b having substantially the same slopes as the sloped surfaces 31a and 31b of the contacting bodies 30a and 30b at positions close to the contacting bodies 30a and 30b. . This pair of stoppers 33a, 33b
are connected by a connecting rod 34, and an extension 34a of this connecting rod 34 is disposed within a solenoid 35 as a plunger attached to the frame 12. In the figure, 36 is a return spring.

With this configuration, during the excitation motion, the solenoid 35 is de-energized, as shown in FIG.
It is in a state separated from a and 30b.

On the other hand, when replacing the acoustic lens 17 after using the vibrator 11 or during the use, the solenoid 35 is excited by DC voltage and the connecting rod 34 is
is moved in the direction of arrow F against the biasing force of spring 36. As a result, the stoppers 33a, 33 of the connecting rod
b comes into contact with the contact bodies 30a, 30b of the arm 15, fixing the arm 15.

Therefore, in this state, even if the acoustic lens 17 is rotated and removed or attached, the arm 15
Leaf springs 16a, 16b as elastic support means for
This can be done without applying almost any force to the leaf springs 16a, 16a, even if the rotation operation is performed quickly.
Since no excessive force is applied to 16b,
Replacement work or attachment/detachment work can be quickly completed.

When replacing the vibration exciter 11, the solenoid 35 is de-energized and the connecting rod 34 is connected to the spring 3.
The connecting rod 34 is pressed and moved by the urging force of 6.
The stoppers 33a, 33b of the arm 15 are separated from the contact members 30a, 30b of the arm 15, and the arm 15 is brought into a released state as shown in FIG.

12 and 13 show a fifth embodiment of the present invention.

In this fifth embodiment, the same members as those shown in the first embodiment are given the same reference numerals, and detailed explanations of their configurations will be omitted.

The vibrating body fixing device 15 of this fifth embodiment has a first
One end of the link 38 is pivoted to the frame 12, and the other end is moved in the direction of arrow _G1 by a driving member such as a cam 39. One end of the second link 40 is pivotally supported, an intermediate portion of the second link 40 is pivotally supported on the frame 12, and a fixing member 41a is attached to the other end of the second link 40.
Further, the first link 38 has a fixing member 4 at a position opposite to the fixing member 41 with the arm 15 sandwiched therebetween.
1b is placed. Reference numeral 42 is a spring that is brought into pressure contact with the cam 39.

With this structure, during the vibration motion, the pair of fixing members 41a and 41b are fixed to the arm 15 by the cam 39 via the first link 38 and the second link 40, as shown in FIG. in a more remote state.

On the other hand, when replacing the acoustic lens 17 after or during use of the vibrator 11, the cam 39 is rotated by a drive source (not shown), and the first link 38 is moved against the biasing force of the spring 42. Press down. The first link 38 and the second link 40 move the pair of fixing members 41a and 41b in the directions of arrows _G1 and _G2 . As a result, the fixing release members 41a and 41b of the first and second links 38 and 40 are pressed against the arm 15, thereby fixing the arm 15.

Therefore, in this state, even if the acoustic lens 17 is rotated and removed or attached, the arm 15
leaf springs 16a, 16b as elastic support means for
This can be done without applying much force to the leaf springs 16a, 16a, even if the rotation operation is performed quickly.
Since no unreasonable force is applied to 16b,
Replacement work or attachment/detachment work can be quickly completed.

When replacing the vibrator 11 and operating the vibrator 11, rotate the cam 39 and use the biasing force of the spring 42 to
The second link 38 is rotated clockwise and the second link 40 is rotated counterclockwise to separate the pair of fixing members 41a and 41b attached to each link 38 and 40 from the arm 15, The arm 15 shown in FIG. 13 is brought into a released state.

It should be noted that each of the above-mentioned embodiments is merely an example, and it goes without saying that each member can be replaced with another member having the same function. For example, the first
As shown in FIG. 4, guide grooves 43a and 43b are formed from the front side and the opposite side of the frame 12, respectively, and the guide grooves 43a and 43b have recesses 44a and 44b in their intermediate portions for engaging and disengaging the arm 15. and a N or S pole magnet 45a at both ends,
Fixing members 46a and 46b having 45b are respectively inserted and removed, and both fixing members 46a and 46b are attracted and fixed to the frame 12 by magnets 45a and 45b.At this time, the arm 15 is fixed by the recesses 44a and 44b, When removing it, it may be constructed so that it can be pulled out by grasping the handle. Further, when both ends of the arm 15 are open as shown in FIG. 15, rectangular engagement recesses 15e and 15f are formed in the axial direction at the end of the arm 15. First and second links 48 are located at opposing positions.
Engagement protrusion 49 attached to one end of a, 48b
a, 49b are arranged, and the first and second links 49a, 49b are pivotally supported by a lever 50 whose intermediate portion is pivoted, and by operating the lever 50, the engaging protrusions 49a, 49b are moved into the arm The arm 15 may be fixed by being engaged with and disengaged from the 15 engagement recesses 15e and 15f. Further, as shown in FIG. 16, engaging recesses 51a, 51b may be formed in the first and second links 48a, 48b, and engaging protrusions 52, 52b may be formed at the ends of the arm 15. good.

[Effects of the invention] As described above, according to the invention, the arm, lens connector holder, and other vibrating bodies can be fixed using the fixing means attached to the frame, so that the vibration objects can be quickly and reliably fixed with a simple operation. The vibrating body can be firmly fixed. Therefore, when replacing the acoustic lens, it is possible to prevent excessive force from being applied to the elastic support means of the vibrating body, and it is possible to prevent the support means of the vibrating body from being damaged or deformed. Even if the vibration exciter is replaced repeatedly, its function as an exciter does not deteriorate, and sufficient reliability or quality can be maintained.

[Brief explanation of the drawing]

1 to 3 relate to a first embodiment of the present invention, FIG. 1 is a sectional view showing a vibrator equipped with the first embodiment, and FIG. 2 is a sectional view taken along the line - in FIG. 1. , FIG. 3 is a sectional view showing the state of attachment and detachment of the acoustic lens, FIG. 4 is a sectional view showing a modification of the first embodiment, and FIGS. 5 and 6 are related to the second embodiment of the present invention. , FIG. 5 is a cross-sectional view showing the vibrator provided with the second embodiment, FIG. 6 is a cross-sectional view taken along the - line in FIG. 5, and FIG. 7 is a cross-sectional view showing a modification of the second embodiment. 8 and 9 are cross-sectional views showing other modifications of the second embodiment, respectively, and FIG. 10 is a third embodiment of the present invention, showing a vibrator equipped with the third embodiment. The cross-sectional view, FIG. 11, is related to the fourth embodiment of the present invention, and the cross-sectional view, FIG. 12, and FIG. 13 are related to the fifth embodiment of the present invention. , FIG. 12 is a sectional view showing the vibrator equipped with the fifth embodiment, and FIG.
14, 15, and 16 are sectional views taken along the line, and sectional views showing other embodiments, respectively.
FIG. 7 is a sectional view showing a conventional vibrator. 11...exciter, 12...frame, 14...
Voice coil, 15...Arm, 16a, 16b
...Plate spring, 17...Acoustic lens, 18...Lens connector holder.

Claims (1)

[Claims for Utility Model Registration] (1) A frame having one end fixed to a voice coil through which an excitation signal is sent and supporting a vibrating body via an elastic member that vibrates together with an acoustic lens detachably attached. 1. A vibrating body fixing device for an ultrasonic microscope vibrator, characterized in that a fixing means for fixing and holding the vibrating body is disposed on the frame. (2) The fixing means includes an engaging member provided on the frame and an engaging portion provided on the vibrating body,
The vibration exciter for an ultrasonic microscope according to claim 1, which is a registered utility model, characterized in that the engaging member is brought into contact with and separated from the engaging portion of the vibrating body to fix or release the vibrating body. Body immobilization device. (3) A utility model characterized in that the fixing release means comprises a pair of fixing members provided on the frame in proximity to the vibrating body, and both fixing members are moved toward and away from the vibrating body to hold or release the fixed member. A vibrating body fixing device for an ultrasonic microscope vibrator according to claim 1.