JPH04164581A - Micro/machine - Google Patents
Micro/machineInfo
- Publication number
- JPH04164581A JPH04164581A JP2294812A JP29481290A JPH04164581A JP H04164581 A JPH04164581 A JP H04164581A JP 2294812 A JP2294812 A JP 2294812A JP 29481290 A JP29481290 A JP 29481290A JP H04164581 A JPH04164581 A JP H04164581A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- light
- displacement
- opening
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 claims abstract description 21
- 230000000694 effects Effects 0.000 claims abstract description 10
- 230000003287 optical effect Effects 0.000 claims abstract description 9
- 239000000919 ceramic Substances 0.000 claims description 3
- 229910052746 lanthanum Inorganic materials 0.000 claims description 3
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 239000010936 titanium Substances 0.000 claims description 2
- 229910052726 zirconium Inorganic materials 0.000 claims description 2
- 230000008054 signal transmission Effects 0.000 abstract description 4
- 230000005855 radiation Effects 0.000 abstract 2
- 239000013307 optical fiber Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000005611 electricity Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 229910003781 PbTiO3 Inorganic materials 0.000 description 1
- 229910020698 PbZrO3 Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000009351 contact transmission Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000001727 in vivo Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000005291 magnetic effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Manipulator (AREA)
- Electrically Driven Valve-Operating Means (AREA)
- Micromachines (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、微小で精密な動作が可能なマイクロ・マシン
に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a micromachine capable of minute and precise operation.
近年、バイオテクノロジーや半導体産業など超精密さ、
微小な動きなどを要求される技術、産業が急激に増加し
ている。この流れに呼応するように微小な動作を行うマ
イクロ・マニピュレータ、マイクロ・バルブなどのマイ
クロ・マシンの開発が進められている。しかし、これら
の従来のマイクロ・マシンには、駆動装置として小形化
の要請から静電気や磁気などの作用を利用したアクチュ
エータが主に用いられている。In recent years, ultra-precision, such as biotechnology and semiconductor industries,
The number of technologies and industries that require minute movements is rapidly increasing. The development of micro-machines such as micro-manipulators and micro-valves that perform minute movements in response to this flow is underway. However, in response to the demand for miniaturization, these conventional micromachines mainly use actuators that utilize electrostatic or magnetic effects as driving devices.
そのため、従来技術のマイクロ・マシンでは動力源や信
号伝達に電気が使われており、動作自由度が多くなるに
従い配線の数がほぼ比例して増加し、それぞれが有線に
よって接続されるため繁雑になる。また、生体内、水中
などのように絶縁等の問題で電気の使用が困難な使用環
境では、従来技術のマイクロ・マシンは大きな制釣を受
けるという問題があった。Therefore, in conventional micromachines, electricity is used as a power source and signal transmission, and as the degree of freedom of movement increases, the number of wiring increases almost proportionally, and each is connected by wire, making it complicated. Become. Furthermore, in environments where it is difficult to use electricity due to insulation problems, such as in vivo or underwater, the micromachines of the prior art are subject to severe restrictions.
そこで、本発明は動力源の供給や通信手段に電気を使用
しないで駆動可能なマイクロ・マシンを提供することを
その課題とする。Therefore, an object of the present invention is to provide a micromachine that can be driven without using electricity as a power source or as a communication means.
本発明のマイクロ・マシンは、光の照射により歪を生ず
る光歪効果を有する圧電性素子と、前記圧電性素子に発
生した光歪を所定方向への設定変位量に変換する変位変
換手段と、前記変位変換手段によって所定の動作をする
作用手段と、を有することを特徴とする。前記圧電性素
子は鉛、ランタン、ジルコニウム、チタンを含むセラミ
ック系圧電素子とすることができる。また、前記作用手
段としてバルブを用いマイクロ・バルブにも適用できる
。The micromachine of the present invention includes a piezoelectric element having a photostriction effect that causes distortion when irradiated with light, and a displacement converting means that converts the optical distortion generated in the piezoelectric element into a set displacement amount in a predetermined direction. It is characterized in that it has an action means that performs a predetermined operation by the displacement conversion means. The piezoelectric element may be a ceramic piezoelectric element containing lead, lanthanum, zirconium, or titanium. Further, the present invention can also be applied to a micro-valve using a valve as the acting means.
本発明のマイクロ・マシンは、駆動手段たるアクチュエ
ータとして光の照射により歪を生ずる光歪効果を有する
圧電性素子を用いている。この圧電性素子は、紫外線を
含む光を照射することで、歪が生じ変形する。このよう
に光のエネルギーを熱などに変換した形で使用するので
はなく、光そのものとして光エネルギーを機械的エネル
ギーに変換している。この変形を変位量に変換する変位
変換手段によって、バルブ、マニピュレータ、グリッパ
−などの作用手段を動作させる。The micromachine of the present invention uses a piezoelectric element having a photostrictive effect that causes distortion when irradiated with light as an actuator serving as a driving means. This piezoelectric element is distorted and deformed by being irradiated with light including ultraviolet rays. In this way, rather than using light energy in the form of heat or the like, it converts light energy into mechanical energy as light itself. A displacement converting means that converts this deformation into a displacement amount operates operating means such as a valve, a manipulator, and a gripper.
本発明のマイクロ・マシンは、このように動作するため
、駆動源や信号の伝達の主たる手段として光が使用でき
る。光は主に光ファイバーを経路として伝達されるが、
それ以外にも空気中、水中、真空などを特別な伝達手段
を用いずに、直接伝達することもでき、非接触による接
続も可能である。Since the micromachine of the present invention operates in this manner, light can be used as a driving source and as a main means of signal transmission. Light is mainly transmitted through optical fibers,
In addition, it is also possible to directly transmit data in air, water, vacuum, etc. without using any special transmission means, and non-contact connection is also possible.
また、多数の信号を同じに、しかもクロストークやノイ
ズの影響をほとんど受けず、外部に対しても外乱を与え
ずに伝達できるという非常にすぐれた特性を有している
。Furthermore, it has the excellent property of being able to transmit a large number of signals at the same time, almost without being affected by crosstalk or noise, and without causing external disturbances.
（１！ｉｌ実施例）
本発明にかかるマイクロ・マシンの第１実施例を第１図
から第３図を参照して説明する。(1!il Embodiment) A first embodiment of the micromachine according to the present invention will be described with reference to FIGS. 1 to 3.
本実施例はマイクロ・バルブの場合を示しており、第１
図に示すように駆動源としての圧電性素子１と、変位変
換手段である変位拡大装置２と、作用手段であるバルブ
装置３と、駆動エネルギーの供給源である紫外線照射装
置４と、を有している。圧電性素子１はＰＬＺＴと一般
に呼ばれるセラミック系の圧電素子で、その組成がラン
タンの含有量３％、ＰｂＺｒＯ３とＰｂＴｉＯ３（Ｄモ
ル比５２：４８である。本実施例では、その大きさが数
ｍｍ程度で厚み２ｍｍ程度の板状に形成されており、そ
の一つの面を紫外線照射面１１とし紫外線照射面Ｗ４か
らの紫外線が照射される。This example shows the case of a micro valve, and the first
As shown in the figure, it has a piezoelectric element 1 as a driving source, a displacement magnifying device 2 as a displacement converting means, a valve device 3 as an action means, and an ultraviolet irradiation device 4 as a driving energy supply source. are doing. The piezoelectric element 1 is a ceramic piezoelectric element generally called PLZT, and its composition is 3% lanthanum and PbZrO3 and PbTiO3 (D molar ratio 52:48. In this example, the size is several mm. It is formed into a plate shape with a thickness of approximately 2 mm, and one surface thereof serves as the ultraviolet irradiation surface 11, and ultraviolet rays from the ultraviolet ray irradiation surface W4 are irradiated.
変位拡大装ｆ２は、一方が圧電性素子ｌに接触する入力
部２１、他方がバルブ装置３に接続する出力部２２を有
する第２図に示すようなｒてこ」を利用する装置で、圧
゛電性素子ｌに発生する歪を数十倍に拡大して所定の方
向に変位し、バルブ装ｆ３との接続点を移動させる。The displacement magnifying device f2 is a device that uses a lever as shown in FIG. The strain generated in the electric element l is magnified several tens of times and displaced in a predetermined direction, thereby moving the connection point with the valve assembly f3.
バルブ装置Ｆ３は、数ｍｍ程度の大きさであり、第３図
に示すように流入口３１．流出口３２、流路３３ ａ
、３３ｂ ｓ開閉部３４、開閉Ｃ７／ド３５、開閉用弾
性１１１ｊ３６とを有している。流体は流入口３１より
バルブ本体に流入し、流路３３ａを通り開閉部３４に達
し、流通、遮断の操作を受けた後、流路３３ｂを通り流
出口３２より外部に流出する構造になっている。開閉部
３４は、開閉用弾性膜３６を開閉ロッド３５によって押
圧して開閉部３４の流路口３７を塞ぐことによって流路
を遮断することでバルブの開閉を行う構造となっている
。The valve device F3 has a size of about several mm, and as shown in FIG. Outlet 32, flow path 33a
, 33b s opening/closing part 34, opening/closing C7/do 35, and opening/closing elastic 111j36. The fluid flows into the valve body through the inlet 31, passes through the flow path 33a, reaches the opening/closing part 34, and after being subjected to a flow/blocking operation, flows through the flow path 33b and flows out from the outlet 32. There is. The opening/closing section 34 has a structure in which the opening/closing elastic membrane 36 is pressed by the opening/closing rod 35 to close the channel opening 37 of the opening/closing section 34, thereby blocking the flow path and thereby opening and closing the valve.
紫外線照射装置４は、紫外線用水銀ランプ４１と光ファ
イバー４２とを有している。紫外線用水銀ランプ４１は
、本実施例で用いたＰＬＺＴタイプ圧電性素子に対して
効果的に光歪効果を発生させ易い光である波長３６５ｎ
ｍの紫外線を多く含む光を発光できるタイプを用いてい
る。そして、その光は光ファイバー４２によって圧電性
素子１の紫外線照射面１１に照射される。この光ファイ
バー４２は、紫外線に対する減衰が少ない紫外線透過型
光ファイバーが用いられている。また、照射強度は、本
実施例では１０ｍＷ／ｃｍ２ 以上としている。The ultraviolet ray irradiation device 4 includes a mercury lamp 41 for ultraviolet rays and an optical fiber 42. The ultraviolet mercury lamp 41 emits light with a wavelength of 365n, which is light that can easily cause an effective photostriction effect on the PLZT type piezoelectric element used in this example.
A type that can emit light containing a lot of ultraviolet rays is used. The light is then irradiated onto the ultraviolet irradiation surface 11 of the piezoelectric element 1 through the optical fiber 42. This optical fiber 42 is an ultraviolet transmitting optical fiber that has little attenuation against ultraviolet rays. Further, the irradiation intensity is set to 10 mW/cm2 or more in this example.
本実施例のマイクロ・バルブは、次のように作用する。The micro valve of this embodiment operates as follows.
圧電性素子ｌの紫外線照射面１１に紫外線透過型の光フ
ァイバー４２を経由して紫外線照射装置４によって発生
した紫外線を照射すると、圧電性素子１には光歪効果に
よる数μｍ程度の歪が発生し、圧電性素子１は開閉ロッ
ド３５の軸方向に伸びる。この歪は、圧電性素子ｌに接
続された変位拡大波Ｗ２によって数十〜数百μｍ程度に
拡大され、バルブ装置３の開閉ロッド３５を押圧する。When the ultraviolet ray irradiation surface 11 of the piezoelectric element 1 is irradiated with ultraviolet rays generated by the ultraviolet irradiation device 4 via the ultraviolet ray transmission type optical fiber 42, a distortion of about several μm occurs in the piezoelectric element 1 due to the photostriction effect. , the piezoelectric element 1 extends in the axial direction of the opening/closing rod 35. This strain is expanded to about several tens to hundreds of μm by the displacement expansion wave W2 connected to the piezoelectric element 1, and presses the opening/closing rod 35 of the valve device 3.
開閉ロッド３５は、開閉部３４の流路口３７を開閉用弾
性膜３６で塞ぎ流路を閉じる。また、紫外線照射を停止
すると、伸びていた圧電性素子１が元に縮むことにより
、バルブ装置３の開閉部３４の流路口３７を開く。The opening/closing rod 35 closes the channel opening 37 of the opening/closing section 34 with an opening/closing elastic membrane 36 to close the channel. Furthermore, when the ultraviolet irradiation is stopped, the piezoelectric element 1 that has been extended contracts back to its original state, thereby opening the flow path opening 37 of the opening/closing portion 34 of the valve device 3.
（第２実施例）
第２実施例としてバルブ装置が第４図に示すような構造
とすることも可能である。このバルブ装ｆ５は、貫通口
Ｃ１が形成された複数のシート状部材６２を有するバル
ブ開閉部６を、それぞれ互いに相対的にスライドさせ貫
通口の重なりを変化させて流量をコントロールするもの
である。第２実施例では、バルブ開閉部６として固定シ
ート状部材６２ａと可動シート状部材６２ｂとの２つの
シート状部材を重ね合せている。それぞれのシート状部
材には、多数の貫通口６１が形成されている。可動シー
ト状部材６２ｂには、開閉ロッド６３が接続されており
、開閉ロッド６３を操作することで可動シート状部材６
２ｂを移動させ、それらの貫通口６１の重なりの割合い
を変化させる。(Second Embodiment) As a second embodiment, the valve device may have a structure as shown in FIG. 4. This valve device f5 controls the flow rate by sliding the valve opening/closing section 6 having a plurality of sheet-like members 62 each having a through-hole C1 relative to each other to change the overlapping of the through-holes. In the second embodiment, two sheet-like members, a fixed sheet-like member 62a and a movable sheet-like member 62b, are stacked together as the valve opening/closing part 6. A large number of through holes 61 are formed in each sheet-like member. An opening/closing rod 63 is connected to the movable sheet-like member 62b, and by operating the opening/closing rod 63, the movable sheet-like member 6
2b is moved to change the overlapping ratio of their through holes 61.
この第２実施例においては、第５図のように格子状に貫
通口を設けており、貫通部分のシート状部材６２面積に
対する割合いは、重なり度が０（零）の０％から、完全
に重なった場合における６０％程度まで大きく変化する
。なお、貫通口の形状を種々に変えることにより、可動
シート状部材６２ｂの移動量に対する貫通部分の割合い
を任意に設定することができる。そのため、光の照射に
対する歪発生量が時間的に非線形であっても、その影響
を補正して線形化することもできる。In this second embodiment, the through holes are provided in a grid pattern as shown in FIG. It greatly changes to about 60% in the case where it overlaps with . Note that by changing the shape of the through hole variously, the ratio of the through portion to the amount of movement of the movable sheet-like member 62b can be arbitrarily set. Therefore, even if the amount of distortion generated with respect to light irradiation is temporally non-linear, the influence can be corrected to make it linear.
その他に関しては、Ｉｌｌ冥施例と大略において同様で
あるため、説明を省略する。As for other aspects, since they are roughly the same as those in the first example, their explanation will be omitted.
（第３冥施例）
第３実施例として、作用手段がグリッパであるマイクロ
・グリッパを簡単に説明する０本実施例のマイクロ・グ
リッパは、１１６図に示すように圧電性素子７１と、変
位拡大装置７２、グリッパ７３とを有する。本実施例で
は、変位拡大装置７２とグリッパ７３を一体として形成
し、支点７４、作用部７５を有している。(Third Example) As a third example, a micro-gripper whose action means is a gripper will be briefly explained. The micro-gripper of this example has a piezoelectric element 71 and a displacement as shown in FIG. 116. It has an enlarging device 72 and a gripper 73. In this embodiment, the displacement magnifying device 72 and the gripper 73 are integrally formed, and have a fulcrum 74 and an action portion 75.
圧電性素子７１に紫外線が照射されると、光歪が発生し
伸長する。支点７４から作用部７５までの距離が、支点
７４から圧電性素子７１接続部７６までの距離に比べ大
きく設定されているため、圧電性素子７１の光歪が拡大
され作用部７５の変位となっている。そして、この作用
部７５で細胞等の微小物体を梱むことができる。When the piezoelectric element 71 is irradiated with ultraviolet rays, optical distortion occurs and it expands. Since the distance from the fulcrum 74 to the acting part 75 is set larger than the distance from the fulcrum 74 to the connecting part 76 of the piezoelectric element 71, the optical distortion of the piezoelectric element 71 is expanded and the acting part 75 is displaced. ing. Then, microscopic objects such as cells can be packed in this action section 75.
本発明のマイクロ・マシンは、上述した実施例に示した
マイクロ・バルブ、マイクロ・グリッパに特に限定され
ず、光によって光歪が発生する光歪効果を有する圧電性
素子７１を用いたマイクロ・マシンであれば、マイクロ
・マニピュレータなどの各種マイクロ・マシンを含む。The micromachine of the present invention is not particularly limited to the microvalve and microgripper shown in the embodiments described above, but may include a micromachine using a piezoelectric element 71 having a photostrictive effect in which optical distortion is generated by light. If so, it includes various micro machines such as micro manipulators.
なお、本実施例で例示したマイクロ・バルブなどのマイ
クロ・マシンは大きさが１ｃｍ程度であるが、もつと小
さくすることも当然可能であり、１ｍｍ以下の大きさに
形成することもできる。Note that although the micromachine such as the microvalve illustrated in this embodiment has a size of about 1 cm, it is naturally possible to make it smaller, and it can also be formed to a size of 1 mm or less.
以上の説明より明らかなように、本発明のマイクロ・マ
シンは駆動手段として光の照射によって光歪が発生する
光歪効果を有する圧電性素子を用いた全く新しいタイプ
のマイクロ・マシンであり、駆動源が光であるため、従
来の電気等で駆動されるマイクロ・マシンに比べ、駆動
源や信号の伝達の主たる手段として光が使用できるため
、光ファイバーの他、非接触伝達も可能である。As is clear from the above explanation, the micromachine of the present invention is a completely new type of micromachine that uses a piezoelectric element having a photostriction effect that generates photodistortion when irradiated with light as a driving means. Since the source is light, compared to conventional micromachines that are driven by electricity, light can be used as the driving source and the main means of signal transmission, so non-contact transmission in addition to optical fibers is also possible.
また、多数の信号を同時に、しかもクロストークやノイ
ズの影響をほとんど受けず、外部に対しても外乱を与え
ずに伝達できるという非常にすぐれた特性を有しており
、従来技術に比べ安定性、安全性、さらに、操作性、多
重伝達特性などにすぐれている。In addition, it has an extremely superior characteristic of being able to transmit a large number of signals simultaneously, almost unaffected by crosstalk and noise, and without causing external disturbances, making it more stable than conventional technology. It has excellent safety, operability, multiple transmission characteristics, etc.
第１図は、本発明に係る第１実施例のマイクロ・バルブ
の概略構成図であり、第２図はその変位拡大装置の概略
図であり、ｇＩ４３図は同じくバルブ装置の概略図であ
る。第４図は第２実施例のマイクロ・バルブのバルブ装
置の概略図であり、第５図は同じくバルブ装置の可動シ
ート状部材の格子のパターン図である。８６図は第３実
施例のマイクロ・グリッパの概略構成図である。
１．７１・・・・・・圧電性素子
２．７２・−・・・・変位拡大装置（変位変換手段）３
．５ ・・・・・・バルブ装置（作用手段）４ ・
・・−・・紫外線照射装置
７３ ・・・・・・グリッパ（作用手段）特許出願人
日本電産株式会社
代表者 永守重信
特許出願人 福 １） 敏 実
弟１図
］
第２図
第３図
第４図
第５図 第６図FIG. 1 is a schematic diagram of a micro valve according to a first embodiment of the present invention, FIG. 2 is a schematic diagram of its displacement amplifying device, and FIG. gI43 is a schematic diagram of the valve device. FIG. 4 is a schematic diagram of the valve device of the micro valve according to the second embodiment, and FIG. 5 is a pattern diagram of the lattice of the movable sheet-like member of the valve device. FIG. 86 is a schematic configuration diagram of the micro gripper of the third embodiment. 1.71...Piezoelectric element 2.72...Displacement magnifying device (displacement converting means) 3
．． 5... Valve device (acting means) 4 ・
... Ultraviolet irradiation device 73 ...Gripper (acting means) Patent applicant Nidec Corporation Representative Shigenobu Nagamori Patent applicant Fuku 1) Toshi younger brother 1] Fig. 2 Fig. 3 Figure 4 Figure 5 Figure 6
Claims (3)
素子と、 前記圧電性素子に発生した光歪を所定方向への設定変位
量に変換する変位変換手段と、 前記変位変換手段によつて所定の動作をする作用手段と
、 を有することを特徴とするマイクロ・マシン。1. a piezoelectric element having a photostrictive effect that causes distortion when irradiated with light; a displacement converting means for converting the optical distortion generated in the piezoelectric element into a predetermined amount of displacement in a predetermined direction; A micromachine characterized in that it has an action means that performs the following operations.
タンを含むセラミック系圧電素子であることを特徴とす
る請求項１記載のマイクロ・マシン。2. 2. The micromachine according to claim 1, wherein the piezoelectric element is a ceramic piezoelectric element containing lead, lanthanum, zirconium, and titanium.
とを特徴とする請求項１又は請求項２記載のマイクロ・
マシン。3. 3. The microcontroller according to claim 1 or 2, wherein the acting means is a valve or a gripper.
machine.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP02294812A JP3029450B2 (en) | 1990-10-30 | 1990-10-30 | Micro machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP02294812A JP3029450B2 (en) | 1990-10-30 | 1990-10-30 | Micro machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04164581A true JPH04164581A (en) | 1992-06-10 |
| JP3029450B2 JP3029450B2 (en) | 2000-04-04 |
Family
ID=17812572
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP02294812A Expired - Fee Related JP3029450B2 (en) | 1990-10-30 | 1990-10-30 | Micro machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3029450B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006103725A1 (en) * | 2005-03-25 | 2006-10-05 | Hirata Corporation | Micro gripper |
| JP2009184100A (en) * | 2008-02-11 | 2009-08-20 | Denshi Buhin Kenkyuin | Gripper and driving method thereof |
| JP2012533274A (en) * | 2009-07-10 | 2012-12-20 | ヴァイキング エーティー，エルエルシー | Small smart material actuator and energy capture device |
| US8850892B2 (en) | 2010-02-17 | 2014-10-07 | Viking At, Llc | Smart material actuator with enclosed compensator |
| US10276776B2 (en) | 2013-12-24 | 2019-04-30 | Viking At, Llc | Mechanically amplified smart material actuator utilizing layered web assembly |
-
1990
- 1990-10-30 JP JP02294812A patent/JP3029450B2/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006103725A1 (en) * | 2005-03-25 | 2006-10-05 | Hirata Corporation | Micro gripper |
| JP2009184100A (en) * | 2008-02-11 | 2009-08-20 | Denshi Buhin Kenkyuin | Gripper and driving method thereof |
| JP2012533274A (en) * | 2009-07-10 | 2012-12-20 | ヴァイキング エーティー，エルエルシー | Small smart material actuator and energy capture device |
| US8850892B2 (en) | 2010-02-17 | 2014-10-07 | Viking At, Llc | Smart material actuator with enclosed compensator |
| US8879775B2 (en) | 2010-02-17 | 2014-11-04 | Viking At, Llc | Smart material actuator capable of operating in three dimensions |
| US10276776B2 (en) | 2013-12-24 | 2019-04-30 | Viking At, Llc | Mechanically amplified smart material actuator utilizing layered web assembly |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3029450B2 (en) | 2000-04-04 |
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