JPH0416858U - - Google Patents

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Publication number
JPH0416858U
JPH0416858U JP5827790U JP5827790U JPH0416858U JP H0416858 U JPH0416858 U JP H0416858U JP 5827790 U JP5827790 U JP 5827790U JP 5827790 U JP5827790 U JP 5827790U JP H0416858 U JPH0416858 U JP H0416858U
Authority
JP
Japan
Prior art keywords
conductor
insulating tube
annular body
ion source
source current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5827790U
Other languages
English (en)
Other versions
JP2506769Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990058277U priority Critical patent/JP2506769Y2/ja
Publication of JPH0416858U publication Critical patent/JPH0416858U/ja
Application granted granted Critical
Publication of JP2506769Y2 publication Critical patent/JP2506769Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【図面の簡単な説明】
第１図は本考案のイオン源電流導入端子の１実
施例の切断正面図、第２図は第１図の一部の平面
図、第３図は従来例の切断正面図である。 １……チヤンバ上蓋、３……環状体、４……Ｏ
リング、７……絶縁管、９……導体、１４……フ
イラメント、１８……つば部、１９……水冷ハウ
ジング、２０……Ｏリング、２３……流通路、２
６……押え体。

Claims (1)

  1. 【実用新案登録請求の範囲】 チヤンバ上蓋の挿通口に挿通されフイラメン
    トが接続された導体と、該導体の上端部が貫通し
    た水冷ハウジングと、前記導体の周面と前記ハウ
    ジングとの間に形成された冷却水の流通路とを備
    えたイオン源電流導入端子。 チヤンバ上蓋の挿通口の周縁に気密に装着さ
    れた環状体と、該環状体にＯリングを介してつば
    部が着脱自在に載置された絶縁管と、該絶縁管を
    貫通しフイラメントが接続された導体と、該導体
    と前記絶縁管との間をシールしたＯリングと、前
    記絶縁管を前記上蓋に着脱自在に押圧して装着し
    た押え体とを備えたイオン源電流導入端子。
JP1990058277U 1990-05-31 1990-05-31 イオン源電流導入端子 Expired - Lifetime JP2506769Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990058277U JP2506769Y2 (ja) 1990-05-31 1990-05-31 イオン源電流導入端子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990058277U JP2506769Y2 (ja) 1990-05-31 1990-05-31 イオン源電流導入端子

Publications (2)

Publication Number Publication Date
JPH0416858U true JPH0416858U (ja) 1992-02-12
JP2506769Y2 JP2506769Y2 (ja) 1996-08-14

Family

ID=31583743

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990058277U Expired - Lifetime JP2506769Y2 (ja) 1990-05-31 1990-05-31 イオン源電流導入端子

Country Status (1)

Country Link
JP (1) JP2506769Y2 (ja)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6241657U (ja) * 1985-08-30 1987-03-12
JPS6370650U (ja) * 1986-10-27 1988-05-12
JPS6377248U (ja) * 1986-11-08 1988-05-23

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6241657U (ja) * 1985-08-30 1987-03-12
JPS6370650U (ja) * 1986-10-27 1988-05-12
JPS6377248U (ja) * 1986-11-08 1988-05-23

Also Published As

Publication number Publication date
JP2506769Y2 (ja) 1996-08-14

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