JPH0417828U - - Google Patents
Info
- Publication number
- JPH0417828U JPH0417828U JP5785190U JP5785190U JPH0417828U JP H0417828 U JPH0417828 U JP H0417828U JP 5785190 U JP5785190 U JP 5785190U JP 5785190 U JP5785190 U JP 5785190U JP H0417828 U JPH0417828 U JP H0417828U
- Authority
- JP
- Japan
- Prior art keywords
- partition wall
- hole
- chemical liquid
- drive shaft
- processing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Description
第１図は本考案に従つて構成した薬液処理装置
の仕切壁の概念的な要部断面構成図、第２図は本
考案による薬液処理装置の上部仕切壁を上方にず
らした状態の説明図、そして、第３図は従来構造
による薬液処理装置の仕切壁を説明する為の概念
的要部断面構成図である。
１……薬液槽本体、２……薬液槽の仕切壁、３
……基板貫通用穴、４……コンベア駆動軸、５…
…駆動軸用貫通穴、６……上部仕切壁、７……基
板搬送用切欠き、８……下部仕切壁、９……駆動
軸の挿通用切欠き、１０……駆動軸の挿通用切欠
き、１１……上部仕切壁ガイド。
Fig. 1 is a conceptual cross-sectional view of the main parts of a partition wall of a chemical liquid processing apparatus constructed according to the present invention, and Fig. 2 is an explanatory diagram of the chemical liquid processing apparatus according to the present invention in a state in which the upper partition wall is shifted upward. , and FIG. 3 is a conceptual cross-sectional configuration diagram of essential parts for explaining a partition wall of a chemical liquid processing apparatus having a conventional structure. 1... Chemical tank main body, 2... Partition wall of the chemical tank, 3
...Board penetration hole, 4...Conveyor drive shaft, 5...
... Through hole for drive shaft, 6 ... Upper partition wall, 7 ... Notch for board transfer, 8 ... Lower partition wall, 9 ... Notch for insertion of drive shaft, 10 ... Notch for insertion of drive shaft Notch, 11... Upper partition wall guide.
Claims (1)
処理装置に於いて、上記仕切壁に設けるべき基板
搬送用穴に関しては該穴の上縁又は下縁の部分で
、また、コンベア駆動軸用貫通穴に関しては該穴
の水平中心線近傍の部分でこの仕切壁を上部仕切
壁と下部仕切壁とに分離形成し、且つ前記上部仕
切壁を着脱可能な構造に構成したことを特徴とす
る薬液処理装置の仕切壁。 In a chemical liquid processing apparatus configured to provide a partition wall between chemical liquid tanks, a hole for substrate conveyance to be provided in the partition wall is provided at the upper or lower edge of the hole, and through the conveyor drive shaft. Regarding the hole, the partition wall is formed separately into an upper partition wall and a lower partition wall in the vicinity of the horizontal center line of the hole, and the upper partition wall is configured to be detachable. Equipment partition wall.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5785190U JPH0417828U (en) | 1990-05-31 | 1990-05-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5785190U JPH0417828U (en) | 1990-05-31 | 1990-05-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0417828U true JPH0417828U (en) | 1992-02-14 |
Family
ID=31582934
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5785190U Pending JPH0417828U (en) | 1990-05-31 | 1990-05-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0417828U (en) |
-
1990
- 1990-05-31 JP JP5785190U patent/JPH0417828U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6059257U (en) | Processing liquid tank | |
| JPS6348475U (en) | ||
| JPH0417828U (en) | ||
| JPS6134151U (en) | Processing liquid tank for photosensitive material processing equipment, etc. | |
| JPH0160532U (en) | ||
| JPS60163234U (en) | Treatment tank with drain pipe | |
| JPS639287U (en) | ||
| JPS5993630U (en) | Solid disinfectant dissolving device | |
| JPH03124635U (en) | ||
| JPS62153374U (en) | ||
| JPS5964969U (en) | surface treatment equipment | |
| JPS6376369U (en) | ||
| JPS59176637U (en) | Stirring device using pump discharge fluid | |
| JPS5858883U (en) | Cleaning liquid circulation cleaning device | |
| JPH01116435U (en) | ||
| JPS63100828U (en) | ||
| JPS6094063U (en) | hydroponic cultivation equipment | |
| JPS5810682U (en) | Float of chemical container in agricultural sprayer | |
| JPS5969199U (en) | cleaning equipment | |
| JPH0211481U (en) | ||
| JPS61157086U (en) | ||
| JPS5958570U (en) | tank equipment | |
| JPH0319650U (en) | ||
| JPS593365U (en) | Ultrasonic flaw detection equipment | |
| JPS59177554U (en) | work vehicle |