JPH0418309U - - Google Patents

Info

Publication number
JPH0418309U
JPH0418309U JP5940590U JP5940590U JPH0418309U JP H0418309 U JPH0418309 U JP H0418309U JP 5940590 U JP5940590 U JP 5940590U JP 5940590 U JP5940590 U JP 5940590U JP H0418309 U JPH0418309 U JP H0418309U
Authority
JP
Japan
Prior art keywords
electrostatic sensor
conductor
ceramic
moving table
type electrostatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5940590U
Other languages
English (en)
Other versions
JPH0750646Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990059405U priority Critical patent/JPH0750646Y2/ja
Publication of JPH0418309U publication Critical patent/JPH0418309U/ja
Application granted granted Critical
Publication of JPH0750646Y2 publication Critical patent/JPH0750646Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Details Of Measuring And Other Instruments (AREA)

Description

【図面の簡単な説明】
第１図は本考案の第１の実施例を示す要部断面
図、第２図は本考案の第２の実施例を示す要部断
面図、第３図は従来の装置を示す斜視図である。 １……導体移動台（移動台）、２……セラミツ
ク形静電センサ、３……送りねじ、４……送り機
構、５……被検出体、７……凹部、８……絶縁部
材、９……導体ケース、１０……検出電極。

Claims (1)

    【実用新案登録請求の範囲】
  1. 導体移動台に導体ケースで覆われたセラミツク
    形静電センサが装着され、前記導体移動台に連係
    する送り機構を駆動してセラミツク形静電センサ
    を導体移動台とともに送り移動するセラミツク形
    静電センサ装置において、前記セラミツク形静電
    センサを覆つている導体ケースと導体移動台との
    当接面間には絶縁部材が介設されていることを特
    徴とするセラミツク形静電センサ装置。
JP1990059405U 1990-06-05 1990-06-05 セラミック形静電センサ装置 Expired - Lifetime JPH0750646Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990059405U JPH0750646Y2 (ja) 1990-06-05 1990-06-05 セラミック形静電センサ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990059405U JPH0750646Y2 (ja) 1990-06-05 1990-06-05 セラミック形静電センサ装置

Publications (2)

Publication Number Publication Date
JPH0418309U true JPH0418309U (ja) 1992-02-17
JPH0750646Y2 JPH0750646Y2 (ja) 1995-11-15

Family

ID=31585871

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990059405U Expired - Lifetime JPH0750646Y2 (ja) 1990-06-05 1990-06-05 セラミック形静電センサ装置

Country Status (1)

Country Link
JP (1) JPH0750646Y2 (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58143215A (ja) * 1982-02-19 1983-08-25 Taiheiyo Kogyo Kk 電波シ−ルド用透明窓板
JPS59148841A (ja) * 1983-02-15 1984-08-25 Matsushita Electric Ind Co Ltd 圧力センサ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58143215A (ja) * 1982-02-19 1983-08-25 Taiheiyo Kogyo Kk 電波シ−ルド用透明窓板
JPS59148841A (ja) * 1983-02-15 1984-08-25 Matsushita Electric Ind Co Ltd 圧力センサ

Also Published As

Publication number Publication date
JPH0750646Y2 (ja) 1995-11-15

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term