JPH0418448U - - Google Patents
Info
- Publication number
- JPH0418448U JPH0418448U JP5802090U JP5802090U JPH0418448U JP H0418448 U JPH0418448 U JP H0418448U JP 5802090 U JP5802090 U JP 5802090U JP 5802090 U JP5802090 U JP 5802090U JP H0418448 U JPH0418448 U JP H0418448U
- Authority
- JP
- Japan
- Prior art keywords
- housing body
- wafer
- carrier
- top plate
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 5
Description
第１図は本考案のウエハキヤリアの実施例を示
す平面図。第２図は本考案のウエハキヤリアの実
施例を示す正面図。
１……ウエハキヤリア、２……上板、３ａ，３
ｂ……ハウジング本体、４……ウエハ出入口、５
……ウエハ、６……ウエハキヤリア後部、７……
ウエハ収容溝、８……ロボツトハンド、θ１，θ
２……広がり角、Ｌ１……ウエハ収容溝内寸法、
Ｌ２……ウエハ外形寸法。
FIG. 1 is a plan view showing an embodiment of the wafer carrier of the present invention. FIG. 2 is a front view showing an embodiment of the wafer carrier of the present invention. 1...Wafer carrier, 2...Top plate, 3a, 3
b...Housing body, 4...Wafer entrance/exit, 5
...Wafer, 6...Wafer carrier rear, 7...
Wafer storage groove, 8... Robot hand, θ1, θ
2... Spread angle, L1... Wafer storage groove internal dimension,
L2...Wafer external dimensions.
Claims (1)
体と、このハウジング本体に収容されたウエハの
キヤリア内部での位置決めが容易になるように、
ハウジング本体の取付が出来る形状を持つた上板
から成るウエハキヤリアにおいて、前記ハウジン
グ本体は、ウエハ出入口に向かつて広がり角を持
つような加工形状を有した上板に取り付けられて
いることを特徴とするウエハキヤリア。 A housing body that accommodates wafers in and out, and a housing body that allows the wafers housed in the housing body to be easily positioned within the carrier.
A wafer carrier comprising a top plate having a shape to which a housing body can be attached, characterized in that the housing body is attached to the top plate having a processed shape such that it has a widening angle toward the wafer entrance/exit. Wafer carrier.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5802090U JPH0418448U (en) | 1990-06-01 | 1990-06-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5802090U JPH0418448U (en) | 1990-06-01 | 1990-06-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0418448U true JPH0418448U (en) | 1992-02-17 |
Family
ID=31583253
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5802090U Pending JPH0418448U (en) | 1990-06-01 | 1990-06-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0418448U (en) |
-
1990
- 1990-06-01 JP JP5802090U patent/JPH0418448U/ja active Pending