JPH0418659U - - Google Patents
Info
- Publication number
- JPH0418659U JPH0418659U JP5819290U JP5819290U JPH0418659U JP H0418659 U JPH0418659 U JP H0418659U JP 5819290 U JP5819290 U JP 5819290U JP 5819290 U JP5819290 U JP 5819290U JP H0418659 U JPH0418659 U JP H0418659U
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- atmospheric pressure
- chemical vapor
- deposition apparatus
- pressure chemical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Description
第１図はこの考案による連続式常圧化学気相成
長装置の構成説明図である。第２図はこの考案装
置による処理数とパーテイクルの増加の関係を示
すグラフである。第３図は従来の連続式常圧化学
気相成長装置の構成説明図である。第４図は従来
装置による処理数とパーテイクルの増加の関係を
示すグラフである。
１……ウエーハ、２……トレー、３……トレー
コンベア、４……デイスパージヨンヘツド、５…
…排気フード、６……ヒーター、７……ローダー
、９……スプロケツト、１０……回転ブラシ、１
１……ダスト吸引装置。
FIG. 1 is an explanatory diagram of the configuration of a continuous atmospheric pressure chemical vapor deposition apparatus according to this invention. FIG. 2 is a graph showing the relationship between the number of processes and the increase in particles by this device. FIG. 3 is an explanatory diagram of the configuration of a conventional continuous atmospheric pressure chemical vapor deposition apparatus. FIG. 4 is a graph showing the relationship between the number of processes and the increase in particles by the conventional apparatus. 1... wafer, 2... tray, 3... tray conveyor, 4... dispersion head, 5...
...Exhaust hood, 6...Heater, 7...Loader, 9...Sprocket, 10...Rotating brush, 1
1...Dust suction device.
Claims (1)
圧化学気相成長装置において、 反応炉外の所要位置に、トレーコンベアの被処
理材載置面側に当接する回転ブラシと、回転ブラ
シを包囲するダスト吸引装置とからなる連続清掃
装置を設けたことを特徴とする連続式常圧化学気
相成長装置。[Scope of Claim for Utility Model Registration] In an atmospheric pressure chemical vapor deposition apparatus in which the material to be processed is continuously conveyed by a tray conveyor, a rotating device that comes into contact with the surface of the tray conveyor on which the material to be processed is placed at a predetermined position outside the reactor. A continuous atmospheric pressure chemical vapor deposition apparatus characterized by being provided with a continuous cleaning device consisting of a brush and a dust suction device surrounding the rotating brush.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5819290U JPH0418659U (en) | 1990-05-31 | 1990-05-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5819290U JPH0418659U (en) | 1990-05-31 | 1990-05-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0418659U true JPH0418659U (en) | 1992-02-17 |
Family
ID=31583577
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5819290U Pending JPH0418659U (en) | 1990-05-31 | 1990-05-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0418659U (en) |
-
1990
- 1990-05-31 JP JP5819290U patent/JPH0418659U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0418659U (en) | ||
| JPS6242598U (en) | ||
| JPS6295712U (en) | ||
| JPH039313U (en) | ||
| JPS62187693U (en) | ||
| JPH0534108Y2 (en) | ||
| FR2345225A1 (en) | Cheese surface dusting machine - has fluidised bed of powdered salt in chamber blown over cheeses on conveyor by air nozzles | |
| JPH10165903A5 (en) | ||
| JPH0325234U (en) | ||
| JPS586547Y2 (en) | electromagnetic feeder | |
| JPH069500Y2 (en) | Centrifugal dehydrator | |
| JPH069502Y2 (en) | Semiconductor manufacturing equipment | |
| JPH0231127U (en) | ||
| JPH0252436U (en) | ||
| JPS6232533U (en) | ||
| JPS6352859U (en) | ||
| JPS6358684U (en) | ||
| JPS57104970A (en) | Cleaning device | |
| JPS61104051U (en) | ||
| JPS61194490U (en) | ||
| JPS63177151U (en) | ||
| JPH0415845U (en) | ||
| JPH01174920U (en) | ||
| JPH01121899U (en) | ||
| JPH02137041U (en) |