JPH039313U - - Google Patents
Info
- Publication number
- JPH039313U JPH039313U JP6972789U JP6972789U JPH039313U JP H039313 U JPH039313 U JP H039313U JP 6972789 U JP6972789 U JP 6972789U JP 6972789 U JP6972789 U JP 6972789U JP H039313 U JPH039313 U JP H039313U
- Authority
- JP
- Japan
- Prior art keywords
- transport tray
- pair
- tray
- rotating brushes
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000001947 vapour-phase growth Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Description
第１図および第２図はこの考案の一実施例を示
し、第１図はＣＶＤ装置の構成図、第２図は洗浄
装置の回転ブラシと駆動モータとの関係を示す斜
視図である。
４……搬送トレイ、５……ウエハ、１３……洗
浄装置、１４……回転ブラシ、１５……駆動モー
タ、１６……排気ダクト。
1 and 2 show an embodiment of this invention, with FIG. 1 being a configuration diagram of a CVD device, and FIG. 2 being a perspective view showing the relationship between a rotating brush and a drive motor of a cleaning device. 4... Transfer tray, 5... Wafer, 13... Cleaning device, 14... Rotating brush, 15... Drive motor, 16... Exhaust duct.
Claims (1)
置して搬送する搬送トレイと、 前記搬送トレイの進行方向に対し直交して配置
され、かつ前記搬送トレイの表面および裏面をブ
ラツシングする上下一対の回転ブラシと、 前記一対の回転ブラシを前記搬送トレイの移動
速度よりも早い速度で回転させる駆動モータと、 前記一対の回転ブラシによつて前記搬送トレイ
から掻き落とされた残さ物を排気する排気ダクト
と、 を具備してなるウエハ搬送トレイの洗浄装置。[Claims for Utility Model Registration] A transport tray on which a wafer on which a thin film is to be formed by vapor phase growth is placed and transported; and a surface of the transport tray that is disposed orthogonal to the traveling direction of the transport tray. and a pair of upper and lower rotating brushes that brush the back surface; a drive motor that rotates the pair of rotating brushes at a speed faster than the moving speed of the transport tray; A cleaning device for a wafer transfer tray, comprising: an exhaust duct for exhausting residual materials;
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6972789U JPH039313U (en) | 1989-06-16 | 1989-06-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6972789U JPH039313U (en) | 1989-06-16 | 1989-06-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH039313U true JPH039313U (en) | 1991-01-29 |
Family
ID=31605279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6972789U Pending JPH039313U (en) | 1989-06-16 | 1989-06-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH039313U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005343449A (en) * | 2004-06-02 | 2005-12-15 | Bayerische Motoren Werke Ag | Outside mirror |
-
1989
- 1989-06-16 JP JP6972789U patent/JPH039313U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005343449A (en) * | 2004-06-02 | 2005-12-15 | Bayerische Motoren Werke Ag | Outside mirror |
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