JPH0418780A - Pulse laser oscillation device - Google Patents

Abstract

PURPOSE:To obtain a pulse laser oscillation device stable in discharge at a low cost by a method wherein a side electrode support plate is split into pieces, the split plate pieces are linked together with a conductive frame plate, and openings are provided. CONSTITUTION:A side electrode support plate is composed of two parts vertically split, a first side electrode support plate 8 disposed at an upper part and a second side electrode support plate 9 disposes at a lower part. Fine grooves 13 are provided in the first and the second side electrode support plate, 8 and 9, at the opposed positions corresponding to the arrangement intervals P of pre-ionization electrodes. The width of the groove 13 is slightly smaller than the thickness of a frame plate 12 which is press-fitted into the groove 13. As shown on a figure 2, the frame plates 12 are press-fitted into the fine grooves 13, whereby the vertically separated electrode support plates are formed in an integral structure to constitute a side electrode support plate. In this case, the frame plates 12 can be fitted to the grooves at the same interval with the arrangement space P of pre-ionization electrodes 3 and peaking capacitors 4, so that turbulence inducing factors can be lessened in a discharge cavity.

Description

DETAILED DESCRIPTION OF THE INVENTION [Objective of the Invention] (Industrial Application Field) The present invention relates to a pulsed laser oscillation device in which the configuration of a laser gas flow path to a discharge electrode portion is improved.

(Prior Art) Conventionally, in a gas-mediated laser, in order to obtain good laser oscillation, it is necessary to generate a spatially uniform discharge in the laser gas, but TEA.

In a pulse laser oscillation device that generates short pulse laser light, such as a TEMA-CO2 laser ximer laser, the operating pressure is as high as the diffuse pressure. but,
It is extremely difficult to make each of the discharge electrode, blower, blower tact, cooler, etc. that constitute a pulsed laser oscillation device have a pressure-resistant structure.

Therefore, these components are housed in a pressure vessel,
By setting the pressure to be the same, each component is simplified, and the power source and discharge electrode arranged outside the pressure vessel are electrically connected.

FIG. 4 is a diagram showing an example of a conventional pulse laser oscillation device. That is, the discharge electrode section 27 consisting of a main electrode, a preliminary ionization electrode, a peaking capacitor, etc., includes a -1-line electrode support plate 34, a lower electrode support plate 35, and a side electrode support plate 24.
．． 25 to the laser vessel] 6. Further, each of the side electrode support plates 24 and 25 has an opening 2.
6 is formed, and this opening 26 serves as a flow path for laser gas. Furthermore, a blower duct 31 equipped with a cooler 29 and a blower 28 is disposed inside the laser container 16, and one end of the duct 31 (the end on the laser gas supply side to the discharge electrode section) is provided with a gas flow. A ventilation duct 30 with a rectifier plate is attached, which has a rectifier plate 32 disposed therein for uniformity. The laser gas is supplied to the cooler 29 and the blower 28.
The discharge electrode section 27 is configured to circulate the discharge electrode in a cooled state. Note that among the electrode support plates,
The one-part electrode support plate 35, 24.25 is made of a conductive material.

(Problems to be Solved by the Invention) However, the conventional pulsed laser oscillation device having the above configuration has the following problems to be solved. That is, as shown in FIG. 5, the blower duct 30 with a straightening plate is usually made of a thin plate, and since the straightening plate 32 is attached to the blower duct 30 by welding, it is likely to be thermally deformed during welding, making it difficult to manufacture. The process had become complicated. Moreover, since the openings 26 formed in the side electrode support plates 24 and 25 are formed to have almost the same opening size as the opening size of the air duct 30 with rectifying plates, they extend over almost the entire width of the side electrode support plates 24 and 25. will be formed. Therefore,
Despite being constructed using a conductive material, the side electrode support plates 24 and 25 cannot be used as a discharge electric circuit, and a connecting conductor is disposed on the side that does not face the laser gas flow in the longitudinal direction of the electrode. I had to have it. As a result, the electric discharge circuit becomes longer and the circuit inductance increases, which causes deterioration of the discharge characteristics.

Therefore, in order to solve this stock price drawback, a pulsed laser oscillation device as shown in FIGS. 6 and 7 has been proposed. That is, as shown in FIG. 6, the main electrodes 1 and 2 forming a pair
, the discharge electrode section consisting of the pre-ionization electrode 3, the peaking capacitor 4, etc., which is disposed on the upper part, is connected to the electrode section holding plate 6 made of a conductive phase and the upper electrode support plate 5 made of an insulating material. , supported by the laser container 16. Further, among the discharge electrode parts, those disposed at the lower part are supported by the upper electrode support plate 5 by the side electrode support plates 20, 2] and the lower electrode support plate 7.

Note that the side electrode support plates 20 and 21 and the lower electrode support plate 7
is made of a conductive material. Also, side electrode support plates 20 and 2 disposed on the side surface of the discharge electrode portion facing the gas flow.
] A plurality of openings 23 are formed. As shown in FIG. 7, the plurality of openings 23 are arranged so that the frame plate 22 is spaced between adjacent openings so as to have a preset interval P.
It is composed of the following. An open end of the blower duct 5 is disposed near the opening 23, and is configured to introduce laser gas into the discharge electrode section.

Here, the reason why the air duct with a rectifying plate as shown in FIG. This is because the provided frame plate 22 can be used as a rectifying plate for the laser gas flow. Further, since the frame plate 22 is made of a conductive material, it can be used as a part of a discharge electric circuit. Further, a power source (not shown) disposed outside the laser container 16 and the main electrode 1 are electrically connected via a terminal 17 penetrating the electrode support plate 5 . Also, a side electrode support plate 20.

21 is electrically connected to a power source (not shown) disposed outside the laser container 16 via a terminal 18 that partially penetrates the electrode support plate 5 .

However, the conventional pulsed laser oscillation device configured in this manner has the following problems to be solved. That is, as shown in FIG. 7, the side electrode support plate 20.
In order to form the opening 23 in 21, a plurality of (
It is necessary to pressurize several dozen holes. Furthermore, as mentioned above, in order to provide the frame plate 22 formed between adjacent openings with the function of a rectifying plate, the shape of the hole needs to be rectangular. It is necessary to perform chamfering. Furthermore, since the frame plate is thin at 2 to 3 mm, it easily deforms, and since it is processed using machine tools such as milling machines, it takes a long time to manufacture, complicating the manufacturing process and increasing costs. .

The present invention was proposed in order to eliminate the above-mentioned drawbacks, and the first objective is to be able to supply laser gas in a laminar flow state to the discharge electrode portion, and to shorten the discharge electric circuit. The object of the present invention is to provide an inexpensive pulsed laser oscillation device that can obtain stable discharge.

]]Structure of the Invention] (Means for Solving the Problems) In the present invention, a discharge electrode portion including a pair of main electrodes arranged opposite to each other, a pre-ionization electrode, and a capacitor is connected to a laser beam by a plurality of electrode support plates. A pulse laser oscillation device in which a plurality of openings are provided in a side electrode support plate supported by a container and disposed on a side surface of the electrode support plate facing the laser gas flow of the discharge electrode portion to form a laser gas flow path. The side electrode support plate is divided into a plurality of parts, which are connected to each other by a conductive frame, and have a plurality of openings.

(Function) According to the pulsed laser oscillation device of the present invention, since the side electrode support plate is divided into a plurality of parts, the installation interval between them becomes a laser gas flow path.

In addition, the frame plate that connects the divided side electrode support plates can not only be used as a rectifying plate (also, since a part of the discharge electric circuit can be used as an old one, the length of the discharge electric circuit can be shortened). As a result, circuit inductance can be reduced, and excellent discharge characteristics can be maintained.

(Example) Hereinafter, an example of the present invention will be specifically described based on FIGS. 1 to 3. Incidentally, the same members as those of the conventional type shown in FIGS. 6 and 7 are given the same reference numerals, and explanations thereof will be omitted.

In this embodiment, as shown in FIG.
1-lower 2 of the second side electrode holding plate 9 disposed below.
It is divided into two parts.

Further, the first and second side electrode support plates 8 and 9 include:
A plurality of narrow grooves 1 are formed in accordance with the arrangement interval P of the pre-ionization electrodes.
3 are formed at opposing positions. The width of this narrow groove 13 is formed to be slightly smaller than the thickness of the frame plate 1-2 that is press-fitted therein. Then, as shown in FIG. 2, by press-fitting the frame plate 12 into the narrow groove 1-3, the electrode support plate divided into upper and lower halves is integrated to form a side electrode support plate. ing.

Note that the first side electrode support plate 8 is similar to the upper electrode support plate 5.
The second side electrode support plate 9 is connected to the lower electrode support plate 7.

In the pulsed laser oscillation device of this embodiment having such a configuration, the laser gas introduced into the discharge electrode portion is rectified as described below to obtain a stable discharge. That is, as described above, the frame plate 12 is inserted into the narrow groove 13 formed in the side electrode support plates 8 and 9 which are divided into two parts, upper and lower.
By press-fitting, a side-type pole support plate having a plurality of openings 19 is constructed. In this case, as shown in FIG. 3, the frame plate 12 can be installed so that it is the same as the installation interval P of the pre-ionization electrode 3 and the peening capacitor 4. It is possible to reduce turbulence generating elements.In addition, the side electrode support plates 8, 9 and 10.
-2, and by using the frame plate 42 as a part of the electric circuit, a discharge electric circuit can be constructed in the short direction of the discharge electrode, so the circuit length can be shortened. can. As a result, the circuit inductance is reduced and high energy can be injected into the discharge section in a short time, so that the discharge is stabilized and stable laser energy can be obtained. Further, since it is not necessary to form a plurality of openings in the side electrode support plate in advance, the manufacturing process is greatly simplified and costs can be reduced.

Note that since the frame plate 12 is press-fitted into the thin groove 13 having a smaller thickness, the fitting portion between the two is firmly fixed, and the fitting will not come off due to the wind pressure caused by the laser gas flow. Further, since the electrical connection state is also stable, there is no problem even if electricity is supplied.

In this way, according to this embodiment, the gas flow path can be easily formed by dividing the side electrode support plate disposed on the side surface of the discharge electrode section facing the laser gas flow into upper and lower halves. be done. Furthermore, by forming a narrow groove in the electrode support plate divided into two parts and press-fitting a conductive frame plate into the narrow groove, it is possible to rectify the laser gas flowing into the discharge section, and also to improve the discharge electricity. A circuit can be formed.

Note that the present invention is not limited to the embodiments described above, and the method for attaching the frame plate disposed between the upper and lower electrode support plates can be selected as appropriate. The protrusion-shaped attachment that holds the frame plate between the plates may be provided with a section.Also, the side electrode support plate, which is divided into upper and lower halves,
By setting the arrangement interval appropriately, it can be applied to various pulse laser oscillation devices, and furthermore, the installation interval of the frame plate can be changed appropriately according to the installation interval of the ionization electrode and the peaking capacitor. , the degree of freedom becomes very high and the scope of application is greatly increased.

Further, the side electrode support plate may be divided into a plurality of parts, and in this case as well, by connecting each other with a conductive frame, a plurality of openings and discharge electric circuits can be formed. can.

[Effects of the Invention] As described above, according to the present invention, the side electrode support plate is divided into a plurality of parts, which are connected to each other by a conductive frame plate, and a plurality of openings are formed. By arranging the Y-shaped structure, it is possible to supply laser gas in a laminar flow state to the discharge electrode section, and also to obtain stable discharge by controlling the discharge electric circuit. , it is possible to provide an inexpensive pulse laser oscillation device.

[Brief explanation of the drawing]

Figure 1 is a side view showing an embodiment of the side electrode support plate used in the pulsed laser oscillation device of the present invention, and Figure 2 is a side view of the side electrode support plate shown in Figure 1 with the frame plate attached. <Side view showing the single digit state, Figure 3 is a horizontal cross-sectional view of Figure 2, Figure 4 is a cross-sectional view of an example of a conventional pulsed laser oscillation device, Figure 5 is an enlarged view of the main part of Figure 4. 6 is a sectional view showing another example of a conventional pulse laser oscillation device, and FIG. 7 is a sectional view of a main part of FIG. 6. 1.2... Main electrode, 3... Pre-ionization electrode, 4...
Peaking capacitor, 5... Upper electrode support plate, 6.
... Electrode support plate, 7... Lower electrode support plate, 8.10.
... ] electrode support plate, 9, 11 ... second electrode support plate, ]-2 ... frame plate, 13 ... thin groove, 1, 5 ...
Air duct, 16... Laser container, 17.18...
Through terminal, 19... opening, 20. 21... side electrode support plate, 22... frame plate, 23... opening, 24.
25... Side electrode support plate, 26... Opening, 27.
. . . Discharge electrode part, 28 . . . Blower, 29 . . . Cooler, 30 .

Claims (1)

[Scope of Claims] A discharge electrode section including a pair of main electrodes arranged opposite to each other, a pre-ionization electrode, and a capacitor is supported in a laser container by a plurality of electrode support plates, and one of the electrode support plates is a discharge electrode section. In a pulse laser oscillation device in which a side electrode support plate disposed on a side surface of an electrode portion facing a laser gas flow is provided with a plurality of openings to form a laser gas flow path, the side electrode support plate is divided into a plurality of pieces. What is claimed is: 1. A pulse laser oscillation device characterized in that the pulse laser oscillation device is configured to have a plurality of openings, which are connected to each other by a conductive frame plate.