JPH0418958U - - Google Patents
Info
- Publication number
- JPH0418958U JPH0418958U JP5922090U JP5922090U JPH0418958U JP H0418958 U JPH0418958 U JP H0418958U JP 5922090 U JP5922090 U JP 5922090U JP 5922090 U JP5922090 U JP 5922090U JP H0418958 U JPH0418958 U JP H0418958U
- Authority
- JP
- Japan
- Prior art keywords
- field emission
- electron gun
- control device
- warning
- warning display
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000011010 flushing procedure Methods 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims 1
- 238000012544 monitoring process Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図、第２図、第３図は本考案の一実施例を
示すブロツク図、第４図は電界放出電流の経時変
化を示す図である。
１……電界放出電流発生部、２……電子銃鏡筒
、３……電界放出チツプ、４……アノード電極、
５……フラツシング電流電源回路、６……引き出
し電圧電源回路、７……加速電圧電源回路、８…
…制御部、９……フラツシング電流印加信号、１
０……高電圧状態信号、１１……警告表示タイマ
、１２……警告表示信号、１３……警告表示ラン
プ、１４……高電圧遮断タイマ、１５……高電圧
遮断信号、１６……Ｉ／Ｏインターフエース、１
７……コンピユータ、１８……メモリ、１９……
タイマーカウンタ、２０……警告表示時間データ
、２１……高電圧遮断時間データ。
FIGS. 1, 2, and 3 are block diagrams showing one embodiment of the present invention, and FIG. 4 is a diagram showing changes in field emission current over time. DESCRIPTION OF SYMBOLS 1... Field emission current generating part, 2... Electron gun barrel, 3... Field emission chip, 4... Anode electrode,
5... Flushing current power supply circuit, 6... Output voltage power supply circuit, 7... Accelerating voltage power supply circuit, 8...
...Control unit, 9...Flushing current application signal, 1
0...High voltage status signal, 11...Warning display timer, 12...Warning display signal, 13...Warning display lamp, 14...High voltage cutoff timer, 15...High voltage cutoff signal, 16...I/ O interface, 1
7...Computer, 18...Memory, 19...
Timer counter, 20...warning display time data, 21...high voltage cutoff time data.
Claims (1)
化のためのフラツシング手段を有する電子顕微鏡
およびその類似装置において、前回フラツシング
後の使用時間を監視する機能と、あらかじめ設定
された上記時間が経過したら警告を発する手段を
有することを特徴とした電界放出型電子銃の制御
装置。 ２ 請求項１の警告表示は、専用の表示器を有す
ることを特徴とする電界放出型電子銃の制御装置
。 ３ 請求項１の警告表示は、画像表示ＣＲＴに表
示することを特徴とする電界放出型電子銃の制御
装置。 ４ 請求項１の警告表示は、音、又は音声を用い
ることを特徴とする電界放出型電子銃の制御装置
。 ５ 警告表示後、一定時間経過した場合には、電
子銃電源電圧を遮断する手段を有することを特徴
とする電界放出型電子銃の制御装置。 ６ 請求項５の使用時間は、任意に設定できるこ
とを特徴とする電界放出型電子銃の制御装置。[Scope of Claim for Utility Model Registration] 1. In an electron microscope and similar equipment having a field emission electron gun and a flushing means for cleaning the surface of a field emission chip, a function for monitoring the operating time after the previous flushing and a function for setting the field emission chip in advance. A control device for a field emission type electron gun, comprising means for issuing a warning when the above-mentioned time period has elapsed. 2. A control device for a field emission electron gun, wherein the warning display according to claim 1 has a dedicated display. 3. A control device for a field emission type electron gun, wherein the warning display according to claim 1 is displayed on an image display CRT. 4. A control device for a field emission electron gun, wherein the warning display according to claim 1 uses sound or voice. 5. A control device for a field emission type electron gun, characterized in that it has means for cutting off the electron gun power supply voltage when a certain period of time has elapsed after displaying a warning. 6. The control device for a field emission electron gun according to claim 5, wherein the operating time can be set arbitrarily.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5922090U JPH0418958U (en) | 1990-06-06 | 1990-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5922090U JPH0418958U (en) | 1990-06-06 | 1990-06-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0418958U true JPH0418958U (en) | 1992-02-18 |
Family
ID=31585527
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5922090U Pending JPH0418958U (en) | 1990-06-06 | 1990-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0418958U (en) |
-
1990
- 1990-06-06 JP JP5922090U patent/JPH0418958U/ja active Pending
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