JPH0419617B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION Other industrial fields The present invention is applicable to video discs, digital audio discs (such as compact discs), still images,
The present invention relates to a method of manufacturing a digital signal recording/reproducing disk such as a document file.

Conventional structure and its problems This type of digital signal recording/reproducing disk is
Due to its extremely high information density, low S/N ratio, and low noise, it is seen as a promising information medium, and has been commercialized as video discs, digital audio discs, etc.

FIG. 1 shows an overview of a general digital audio disk. In this system, a PCM-converted digital signal is recorded on a plastic disk in a concave and convex manner, and this is reproduced by a semiconductor laser. In FIG. 1, 1 is the entire disk, 2 is a plastic substrate, 3 is a digital signal engraved in an uneven manner on the surface of the plastic substrate 2, 4 is a reflective film formed on the surface, and 5 is the surface of the reflective film 4. A protective film 6 is coated on the disk 1, and a semiconductor laser 6 for reproduction is irradiated from the back surface of the disk 1.

Here, the reflective film 4 is necessary to reflect the irradiated light when the digital signal 3 is reproduced by the semiconductor laser 6.

FIG. 2 shows a conventional method for forming a reflective film using a vacuum evaporation method.

A base material 8 in which the disks 1 are arranged as shown in FIG. create.

In this case, it is difficult to automate the device, there is a limit to the number of disks that can be processed, making mass production unsuitable, and there is no mechanism for heating the disk substrate, so the adhesion of the reflective film 4 is weak. However, there are drawbacks such as the complexity of the equipment, making it unsuitable for mass production.

Purpose of the Invention The present invention provides a method for manufacturing a digital signal recording/reproducing disk that eliminates these drawbacks and can produce reflective films in large quantities, continuously, quickly, and with stable performance. It is.

Structure of the Invention The present invention provides disk take-out/take-out sections at two or more locations in the same vacuum container, and the same number of reflective film forming devices, and holds the disk vertically around the outer periphery of a turntable placed at the center. death,
By rotating this turntable, the disks are taken out and taken out, and a reflective film is deposited on the surface of the disk in sequence, thereby forming a reflective film on the surface of the digital signal recording/reproducing disk.

DESCRIPTION OF EMBODIMENTS FIG. 3 shows an embodiment of the method for manufacturing a digital signal recording/reproducing task of the present invention. Here, the entire device is shown in a top view since the disk is held vertically.

FIG. 3 shows an embodiment in which the process of taking out and taking out a disk and the process of forming a reflective film are provided at two locations in the same vacuum container 11.

The disk 1 is connected to the vacuum container 1 through the preliminary vacuum 10.
1 and provided on the outer periphery of the turntable 12 (disk ejection/unloading position) 13
mounted on. Next, the turntable 12 rotates, and the disc 1 moves to the second rotational position (sputtering position).
14 and now by target 15
Al is sputtered to form a reflective film on the surface of the disk 1.

Next, the turntable 12 rotates and moves to the third rotational position (disk ejection/removal position) 16, where the disk 1 is ejected through the preliminary vacuum chamber 17. At the same time, another disk 1 is now introduced into the third rotational position 16 through the prevacuum chamber 7 .

Next, the disk 1 is moved to a fourth rotational position (sputtering position) 18, where Al is sputtered from a target 19 to form a reflective film on the surface of the disk 1.

Next, this disk 1 is again moved to the first rotational position 1.
3, and is taken out from the vacuum container 11 through the preliminary vacuum chamber 10.

As described above, according to the above embodiment, since the two disk ejecting/unloading sections 10 and 17 are provided and the two reflective film forming devices (targets 15 and 19) are provided,
The disks 1 can be mass-produced compared to the case where only one disk ejecting/unloading section is provided.

FIG. 4 shows another embodiment of the present invention, in which two disk take-out/take-out sections and the same number of substrate heating steps and reflective film forming steps are provided.

Disk 1 taken from preliminary vacuum chamber 10
3, the substrate is heated by the heater 21 at the rotational position (substrate heating position) 20, and then at the rotational position 14 (Al
After the sputtering process), the preliminary vacuum chamber 17
taken out from At the same time, the preliminary vacuum chamber 17
Another disk 1 is taken in, the substrate is heated by the heater 23 at the rotation position (substrate heating position) 22, and then taken out from the preliminary vacuum chamber 10 through the rotation position (Al sputtering process) 18.

The reflective film can be formed by vacuum deposition, sputtering,
It is desirable to create it by physical vapor deposition such as ion plating.

Effects of the Invention As described above, according to the present invention, two or more disk take-out/take-out sections and the same number of reflective film forming devices are provided in the same vacuum container, and the disk held perpendicularly to the outer periphery of the turntable can be turned. Since the reflective film is created by rotating the table together with the table, it is more efficient than a device that only has one disk ejector and ejector, and if a heating process is added, reliability is improved, and automation is possible, making it cheaper. An excellent effect can be obtained in that a disk can be created.

[Brief explanation of drawings]

Figures 1a to 1c are a plan view, a cross-sectional view, and a cross-sectional view of main parts of a general digital signal recording/reproducing disk;
2a and 2b are diagrams illustrating an outline of a conventional method for manufacturing a digital signal recording/reproducing disk, and a perspective view showing a state in which the disk is attached to its substrate; FIG. 3 is a top view of an embodiment of the present invention; FIG. 4 is a top view of another embodiment of the invention. 1...Disk, 2...Plastic board,
3...Digital signal, 4...Reflection film, 5...Protective film, 10, 17...Preliminary vacuum chamber, 11...Vacuum container, 12...Turntable, 13...First rotational position (disk ejection) position), 14...2nd
rotational position (sputtering position), 15...target, 16... third rotational position (disk ejection/unloading position), 18... fourth rotational position (sputtering position),
19...Target, 20, 22...Substrate heating position, 21, 23...Heater.

Claims (1)

[Scope of Claims] 1. Two or more disk take-out/take-out portions are provided in the same vacuum container, and the same number of reflective film forming devices are provided, and a digital signal recording/reproducing disk is provided on the outer periphery of a turntable provided at the center of the vacuum container. is held in a vertical direction, and by rotating this turntable, the disks are taken out and taken out, and a reflective film is deposited on the disk surface in sequence, thereby creating a reflective film on the surface of the digital signal recording/reproducing disk. A method for manufacturing a digital signal recording/reproducing disk characterized by: 2. The method for manufacturing a digital signal recording/reproducing disk according to claim 1, characterized in that a substrate heating step is provided between the disk take-out/take-out step and the vapor deposition step. 3. The method for manufacturing a digital signal recording/reproducing disk according to claim 1, wherein the reflective film is formed by physical vapor deposition such as vacuum evaporation, sputtering, or ion plating.