JPH04196455A - Tester of lead bend in electronic component - Google Patents

Tester of lead bend in electronic component

Info

Publication number
JPH04196455A
JPH04196455A JP32663090A JP32663090A JPH04196455A JP H04196455 A JPH04196455 A JP H04196455A JP 32663090 A JP32663090 A JP 32663090A JP 32663090 A JP32663090 A JP 32663090A JP H04196455 A JPH04196455 A JP H04196455A
Authority
JP
Japan
Prior art keywords
lead
electronic component
leads
light
beams
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP32663090A
Other languages
Japanese (ja)
Inventor
Kazuo Sato
一男 佐藤
Yoji Sugaya
菅谷 洋治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Silicon Electronics Co Ltd
Original Assignee
Sanyo Silicon Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Silicon Electronics Co Ltd filed Critical Sanyo Silicon Electronics Co Ltd
Priority to JP32663090A priority Critical patent/JPH04196455A/en
Publication of JPH04196455A publication Critical patent/JPH04196455A/en
Pending legal-status Critical Current

Links

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  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To sense whether lead bend is proper or not by comparing output signals from two beams of light and by testing respective leads for bend one after another. CONSTITUTION:A measuring apparatus 3 comprises a light source 10 such as semiconductor laser which emits two measuring beams of light 8,9 almost in parallel with a component support base 1 and a sensor 11 such as photodetector. The beams of light 8,9 irradiating electronic component leads 13 from the light source 10 are sensed with a slight time difference t in data of position sensing for example with two beams of light in the case of bent leads 14: this allows immediate sensing of lead bend. Thus, abnormality such as bend of leads 14 can be simply sensed without arithmetic operation which causes miscalculation.

Description

【発明の詳細な説明】 [産業上の利用分野〕 この発明は、パフケージ集積回路などの電子部品のリー
ド形状を検査する装置に関し、特に、リード曲りを検査
する検査装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an apparatus for inspecting the shape of a lead of an electronic component such as a puff cage integrated circuit, and particularly relates to an inspection apparatus for inspecting lead bending.

[従来の技術〕 従来のこの種の電子部品のリード曲り検査装置は、例え
ば、特開平1−297541号公報に示されているよう
な、リードのシルエットを撮影して検査する装置と、特
開昭57−122557号分報に示されているような光
によるリードの測定検査の方法とがある。前者は集4図
に示すように撮傷部によって”リードの横方向のシルエ
ットを検出してリード部品の厚みを測定し、あらかじめ
設定された厚みと比較4演算して艮、不良を判断するも
のであり1、後者は、第5図に示すように、光源から出
たビーム光をリードに透過走査し、これを受光素子で受
けて、リードの状態、リードピッチを算出し、その結果
が基準内にあるかどうかによって電子部品のリードの良
否を判断しているものであった・ [発明が解決しようとする課N] しかしながら1、このような従来の技術のうち、撮像部
によってリードの横方向のシルエットを検出し、基準値
との比較演算によってて良、不良を判断するものでは、
装置が複雑になる上に、照明の当て方、焦点の調整、基
準値の設定などの細密な調整が必要となったり、検査そ
のものが不可能となることがあった。また、光源から出
たビーム光を受光素子で受けて、リードピッチを算出し
[Prior Art] Conventional electronic component lead bending inspection devices of this type include, for example, a device that photographs and inspects the silhouette of a lead as shown in Japanese Patent Laid-Open No. 1-297541, and a device that inspects the lead by photographing the silhouette of the lead. There is a method of measuring and inspecting leads using light, as disclosed in Publication No. 122557/1982. The former, as shown in Figure 4, detects the lateral silhouette of the lead using the wound imaging section, measures the thickness of the lead component, compares it with a preset thickness, and determines whether it is defective or defective. 1. In the latter case, as shown in Figure 5, the beam light emitted from the light source is transmitted through the lead and scanned, received by the light receiving element, the lead condition and lead pitch are calculated, and the results are used as the standard. The quality of the lead of an electronic component was judged based on whether the lead was located inside the lead or not. A device that detects a silhouette in the direction and determines whether it is good or bad by comparing it with a reference value.
Not only does this make the equipment complex, but it also requires detailed adjustments such as how to apply lighting, adjust focus, and set reference values, and sometimes the inspection itself becomes impossible. In addition, the light beam emitted from the light source is received by the light receiving element and the lead pitch is calculated.

これにより電子部品のリードの良否を判断しているもの
では、リードの欠落や曲りは比較的簡単に検出できても
、スラントリード(すべてのリードが−様な足曲りを生
じたもめ)の検出はほとんど不可能に近いものであり、
スラントリードを横1できる改良された装置でも、個々
の電子部品の検査ごとに測定基準点を決めてからリード
にビーム光を当てるために、検査結果にばらつきが多く
、実用に即きないものであった。
This method is used to judge the quality of the leads of electronic components, and although it is relatively easy to detect missing or bent leads, it can also detect slanted leads (all leads are bent in a negative manner). is almost impossible,
Even with improved equipment that can horizontally slant leads, the measurement reference point is determined for each electronic component inspection before applying a beam of light to the leads, so the inspection results vary widely and are not suitable for practical use. there were.

そ仁で、この発明は、比較的簡単な装置と゛操作で電子
部品のリードの曲りの良否を検出できるようにしたもの
である。
Accordingly, the present invention makes it possible to detect whether or not the lead of an electronic component is bent or not using a relatively simple device and operation.

[問題点を解決する手段] このような問題点を解決するために、本発明は、検蒼さ
ねる電子部品のリードの配列に対して交叉し、かつ、リ
ードの長さ方向に直交する光軸を持つ2本のビーム光に
よって信々のリードの位置を測定させる測定装置と、こ
の測定装置と電子部品のリードの配列方向との相対移動
をおこない、測定された各リードごとの複数の位置デー
タを基に各リード間の距離または傾きを演算して求める
演算処理部とによって、リード曲りを判定するようにし
た電子部品のリード曲り検査装置である。
[Means for Solving the Problems] In order to solve the above problems, the present invention provides a light beam that intersects the arrangement of the leads of the electronic component to be inspected and is orthogonal to the length direction of the leads. A measurement device that measures the position of a reliable lead using two light beams with axes, and a relative movement between this measurement device and the direction in which the leads of the electronic component are arranged, allows multiple positions of each lead to be measured. This is an electronic component lead bending inspection device that determines lead bending using a calculation processing unit that calculates the distance or inclination between each lead based on data.

[作用] この発明の電子部品のリード曲り検査装置によれば、2
本のビーム光による出力信号を比較して、その結果から
各リーFごとの曲がりを順次検査することができ、かつ
、外部基準を設けなくても、容易にスラントリーrの検
出ができるものである。
[Function] According to the electronic component lead bending inspection device of the present invention, 2
It is possible to compare the output signals of the main beam light and sequentially inspect the bending of each tree F based on the results, and it is also possible to easily detect the slant tree r without setting an external reference. be.

[実施例] 以下に図面に従ってこの発明の詳細な説明する。第1図
および第2図はこの発明による電子部品のり−ド曲り検
査装置の一実施例を示すものであり、第1図は全体のシ
ステムを示す概念図、第2図は測定装置の一例を示す構
成説明図、li!3図は測定装置の要部構成図である。
[Example] The present invention will be described in detail below with reference to the drawings. 1 and 2 show an embodiment of an electronic component glue bending inspection device according to the present invention. FIG. 1 is a conceptual diagram showing the entire system, and FIG. 2 is an example of the measuring device. A configuration explanatory diagram showing li! FIG. 3 is a block diagram of the main parts of the measuring device.

第1図において、〈1)は検査される電子部品(12)
を支持する部品支持台、(2)は部品支持台を矢印の方
向に移動する壓動機溝2 (3〉は部品支持台の側方に
配置された測定装置であり、(4)は、この測定装置(
3)からの信号を受けて、リードの曲りの有無を演算し
、その結果を表示器(5)に表示し、かつ、転送処理機
構(6)へ補号を出して、リード面りを矯正する加工装
置(7)にリード曲りのある電子部品を送って再加工さ
せるようにする演算処理部である。
In Fig. 1, <1) is the electronic component (12) to be inspected.
(2) is a cylinder groove 2 that moves the component support in the direction of the arrow. (3) is a measuring device placed on the side of the component support. measuring device(
3) Receiving the signal, calculates whether the lead is bent or not, displays the result on the display (5), and sends a complement to the transfer processing mechanism (6) to correct the lead surface. This is an arithmetic processing unit that sends electronic components with bent leads to a processing device (7) for reprocessing.

測定装置(3)は、第2図に示すように1部品支持台(
1)に対して、はぼ平行に測定用の2個のビーム光<8
)(9)を出す例えば半導体レーザなどの光源(]0)
と、この光源(10)に対向した位置において光源から
出射され、電子部品のリードの配列間を透過してくる光
を受ける受光素子などのセンサ(11)などから構成さ
れている。また、光源く10)は、第3図のように、単
一のレーザ光源に2つの穴のあいたマスクを付け、この
光源から2本の測定用ビーム光(8)  (9)を照射
する構造、または、2個のレーザ光源を用いる構造が使
用され、このような光1. (10)から電子部品のり
−ド(13)に照射されたビーム光(8)<9)は、リ
ード(13〉が正常な時は、第4図の(a)のように遮
断され、リードがないときは、同じく(b)のようにセ
ンサに到達するが、曲がったリード(14)のときは1
例えば、第4図の(C)のくうに、2本のビーム光によ
る位置検出のデータにわずかな時間の差△tのをもって
検出されこれによってリードの曲がりが直ちに検出され
るものである。
The measuring device (3) consists of a one-component support stand (as shown in Fig. 2).
For 1), two light beams for measurement are approximately parallel to each other <8
)(9) A light source such as a semiconductor laser (]0)
It is composed of a sensor (11) such as a light receiving element that receives light emitted from the light source and transmitted between the arrays of leads of the electronic component at a position facing the light source (10). The light source 10) has a structure in which a mask with two holes is attached to a single laser light source, and two measurement beams (8) and (9) are emitted from this light source, as shown in Figure 3. , or a structure using two laser light sources is used, such that the light 1. When the lead (13) is normal, the beam light (8)<9) irradiated from the lead (10) to the electronic component lead (13) is blocked as shown in Fig. 4 (a). When there is no lead, it reaches the sensor as shown in (b), but when there is a bent lead (14), 1
For example, as shown in FIG. 4C, there is a slight time difference .DELTA.t between the data of the position detection using the two light beams, and the bending of the lead is immediately detected.

このような電子部品のリード曲り検査装置において、部
品支持台(−1)で電子部品(12)を順次測定装置(
3)に送ると、部品支持台(1)の移動量に応じて台(
1)の位置情報が演算装置(4)に出力される一方、測
定される電子部品のり−F(13)が、光源(10)と
センサ(11)の間を通過することにより、光源(lO
)からセンサに伝わる2本のビーム光(8)(9)は、
個々のリード(13)の位置と曲がり具合に応じて例え
ば、第4図のような形で変化し5その変化信号がセンサ
(11)を経て演算処理部(4)で演算され、例えば、
第4図のような形で、正常、リードに曲がり有り、スラ
ントリード有りなどの内容で外部に表示されたり、リー
ドの■りを矯正加工するラインへ転送する処理11!構
(6)へ信号を出すな□どの作動が外部に対し゛て行わ
れる。
In such a lead bending inspection device for electronic components, electronic components (12) are sequentially measured on a component support stand (-1) by a measuring device (
3), the table (1) is moved according to the amount of movement of the component support table (1).
1) is output to the arithmetic unit (4), while the electronic component glue-F (13) to be measured passes between the light source (10) and the sensor (11), causing the light source (lO
) The two beams of light (8) and (9) transmitted to the sensor are:
Depending on the position and degree of bending of each lead (13), it changes, for example, in the form shown in FIG.
Process 11: In the form shown in Figure 4, information such as normal, bent lead, slanted lead, etc. is displayed externally, and lead bending is transferred to the line for correction processing! Operations such as sending a signal to the structure (6) are performed externally.

この場合において、測定装置く3〉と電子部品(412
)との相対移動をさせる移動機構(2)から、移動ごと
の移動距離データをデジタル信号として演算処理部(4
)に送り、この移動に同期させて一定時間間隔で各リー
ドごとの位置データをサンプリング(第4図d参照)す
るようにすると、その送り信号と測定装置(3)からの
2つの信号との比較で、直ちにリード(13)の曲りを
判断することができ、演算処理部の演算機構を簡略化で
きるものである。
In this case, the measuring device (3) and the electronic component (412)
) from the moving mechanism (2) that moves relative to the arithmetic processing unit (4
), and the position data of each lead is sampled at fixed time intervals in synchronization with this movement (see Figure 4 d), the transmission signal and the two signals from the measuring device (3) can be synchronized. By comparison, the bending of the lead (13) can be immediately determined, and the calculation mechanism of the calculation processing section can be simplified.

第2図は、このような測定装置を2台併置して、電子部
品の両側のリードを同時に検査できるようにした実施例
であるが、他の装置との組み合わせによっては、測定装
置は1台でも良く、又、上記の実施例では、測定装置(
3)による測定方法も、上記の実施例では光!(10)
とセンサ(l1)との間にリードを入れた透過型の構造
で説明したが、この関係は光源(lO)のビーム光をリ
ード(13)で反射させてこれをセンサで検出する反射
型の測定装置でも全(匍様に本発明の実施を可能にする
ものでどろ。
Figure 2 shows an example in which two such measuring devices are placed side by side so that leads on both sides of an electronic component can be inspected at the same time, but depending on the combination with other devices, only one measuring device can be used. Also, in the above embodiment, the measuring device (
The measurement method according to 3) also uses light! (10)
The explanation has been made using a transmission type structure in which a lead is inserted between the light source (lO) and the sensor (l1), but this relationship applies to a reflection type structure in which the beam light from the light source (lO) is reflected by the lead (13) and detected by the sensor. Measuring devices can also be used to fully implement the present invention.

[効果] このように、本発明による電子部品のリード曲り検査装
置は、測定されるパフケージ集積回路などの電子部品の
リードの配列に対し、2本のビーム光をリードの配夕1
1に対して交叉する方向に照射させて、この光の変位を
検知してリードの曲りなどの異常を、誤算の原因となる
演算をすることなく簡単に検出することができるように
したものであり、検査装置に順次、電子部品を流すだけ
で。
[Effect] As described above, the electronic component lead bending inspection device according to the present invention applies two beams to the lead arrangement of the electronic component such as a puff cage integrated circuit to be measured.
1, and by detecting the displacement of this light, abnormalities such as bent leads can be easily detected without performing calculations that can cause miscalculations. Yes, all you have to do is feed the electronic components one by one through the inspection equipment.

その検査を連続的にかつ、高速に行うことができるもの
である。
The inspection can be performed continuously and at high speed.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明による電子部品のリード曲り検査装置
の一例を示す全体概念図5第2図は測定装置の一例を示
、す構成説明図、第3図は測定装置の要部構成図、第4
図はこの発明による測定と処理結果例を説明するタイム
チャート、第5図、および第6図は従来の電子部品のリ
ード曲り検査装置の例を示す説明図である。 2・ ・−・移動機構53   ・ 測定装置、4・ 
  演算装置、8.9    ビーム光、12−  電
子部品、13     リード。
Fig. 1 is an overall conceptual diagram showing an example of a lead bending inspection device for electronic components according to the present invention; Fig. 2 is an explanatory diagram showing an example of a measuring device; Fig. 3 is a diagram showing the main parts of the measuring device; Fourth
The figure is a time chart illustrating examples of measurement and processing results according to the present invention, and FIGS. 5 and 6 are explanatory diagrams illustrating an example of a conventional electronic component lead bending inspection apparatus. 2. ---Moving mechanism 53 ・Measuring device, 4.
Arithmetic device, 8.9 Beam light, 12- Electronic components, 13 Lead.

Claims (1)

【特許請求の範囲】 1)検査される電子部品のリードの配列に対して交叉し
、かつ、リードの長さ方向に直交する光軸を持つ2本の
ビーム光を用いて個々のリードの位置を測定するように
した測定装置と、この測定装置と電子部品のリードの配
列方向との相対移動をおこなう移動機構と、測定装置で
測定した各リードごとの複数の位置データを比較し、こ
のデータを基に電子部品ごとに各リードの距離または傾
きを演算し、その演算結果またはリード曲りの良否の判
定結果を表示または外部に出力する演算処理部とを備え
ていることを特徴とする電子部品のリード曲り検査装置
。 2)検査される電子部品のリードの配列に対して交叉し
、かつ、リードの長さ方向に直交する光軸を持つ2本の
ビーム光を用いて個々のリードの位置を測定するように
した測定装置と、この測定装置と電子部品のリードの配
列方向との相対移動をおこなう移動機構と、測定装置で
測定した各リードごとの複数の位置データを一定時間間
隔でサンプリングし、このデータを基に電子部品ごとに
各リードの距離または傾きを演算し、その演算結果また
はリード曲りの良否の判定結果を表示または外部に出力
する演算処理部とを備えていることを特徴とする電子部
品のリード曲り検査装置。
[Claims] 1) Positioning of individual leads using two light beams having optical axes that intersect with the array of leads of the electronic component to be inspected and are perpendicular to the length direction of the leads. A measuring device designed to measure An electronic component comprising: a calculation processing unit that calculates the distance or inclination of each lead for each electronic component based on the above, and displays or outputs the calculation result or the result of determining whether the lead is bent or not. lead bending inspection device. 2) The position of each individual lead is measured using two beams whose optical axes intersect with the arrangement of the leads of the electronic component being inspected and are orthogonal to the length direction of the leads. A measuring device, a moving mechanism that moves the measuring device relative to the direction in which the leads of the electronic component are arranged, and a plurality of position data for each lead measured by the measuring device are sampled at regular time intervals and based on this data. 1. A lead for an electronic component, comprising: a calculation processing unit that calculates the distance or inclination of each lead for each electronic component, and displays or outputs the calculation result or the result of determining whether lead bending is good or bad. Bending inspection device.
JP32663090A 1990-11-28 1990-11-28 Tester of lead bend in electronic component Pending JPH04196455A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP32663090A JPH04196455A (en) 1990-11-28 1990-11-28 Tester of lead bend in electronic component

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32663090A JPH04196455A (en) 1990-11-28 1990-11-28 Tester of lead bend in electronic component

Publications (1)

Publication Number Publication Date
JPH04196455A true JPH04196455A (en) 1992-07-16

Family

ID=18189943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32663090A Pending JPH04196455A (en) 1990-11-28 1990-11-28 Tester of lead bend in electronic component

Country Status (1)

Country Link
JP (1) JPH04196455A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07306026A (en) * 1994-05-10 1995-11-21 Nec Yamagata Ltd Method and device for inspecting lead bend of semiconductor device
WO2017188454A1 (en) * 2016-04-28 2017-11-02 川崎重工業株式会社 Component inspecting device and method
JP2024136727A (en) * 2023-03-24 2024-10-04 三菱電機株式会社 Terminal inspection device and semiconductor device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07306026A (en) * 1994-05-10 1995-11-21 Nec Yamagata Ltd Method and device for inspecting lead bend of semiconductor device
WO2017188454A1 (en) * 2016-04-28 2017-11-02 川崎重工業株式会社 Component inspecting device and method
JP2017198616A (en) * 2016-04-28 2017-11-02 川崎重工業株式会社 Component inspection device and method
CN109073567A (en) * 2016-04-28 2018-12-21 川崎重工业株式会社 Part check device and method
US10746535B2 (en) 2016-04-28 2020-08-18 Kawasaki Jukogyo Kabushiki Kaisha Inspecting device and method for component with two wires
JP2024136727A (en) * 2023-03-24 2024-10-04 三菱電機株式会社 Terminal inspection device and semiconductor device

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