JPH0420241U - - Google Patents
Info
- Publication number
- JPH0420241U JPH0420241U JP6039690U JP6039690U JPH0420241U JP H0420241 U JPH0420241 U JP H0420241U JP 6039690 U JP6039690 U JP 6039690U JP 6039690 U JP6039690 U JP 6039690U JP H0420241 U JPH0420241 U JP H0420241U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- view
- plan
- wafer carrier
- lid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 description 9
Description
第１図ａ，ｂは本考案の押え板付ウエハーキヤ
リアの一実施例の平面図であり、第１図ａはウエ
ハーすべて固定した場合の平面図、第１図ｂは任
意のウエハーのみを出し入れ可能にした場合の平
面図、第２図は第１図ａのＡ−Ａ′線に沿つた断
面図、第３図は本考案の他の実施例の押え板を有
するウエハーキヤリアの平面図、第４図は本考案
の更に他の実施例のフタを兼ねた押え板を有する
ウエハーキヤリアの平面図、第５図は第４図のＢ
−Ｂ′線に沿つた断面図、第６図は従来のウエハ
ーキヤリアの断面図である。
１……軸、２ａ……スライダー溝ウエハー出し
入れ時位置、２ｂ……スライダー溝ウエハースト
ツパー時位置、３……ウエハー、４……押え板、
５……フタ、６……ウエハーキヤリア本体。
Figures 1a and 1b are plan views of an embodiment of the wafer carrier with a holding plate of the present invention. Figure 1a is a plan view when all wafers are fixed, and Figure 1b is a plan view in which only arbitrary wafers can be taken in and out. FIG. 2 is a cross-sectional view taken along the line A-A' in FIG. Fig. 4 is a plan view of a wafer carrier having a presser plate which also serves as a lid according to still another embodiment of the present invention, and Fig. 5 is a plan view of B of Fig. 4.
6 is a cross-sectional view of a conventional wafer carrier, taken along the line -B'. 1...Axis, 2a...Slider groove wafer loading/unloading position, 2b...Slider groove wafer stopper position, 3...Wafer, 4...Press plate,
5...Lid, 6...Wafer carrier body.
Claims (1)
その両方を持つことを特徴とするウエハーキヤリ
ア。 A wafer carrier characterized by having a stopper and/or a lid on a wafer loading/unloading surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6039690U JPH0420241U (en) | 1990-06-07 | 1990-06-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6039690U JPH0420241U (en) | 1990-06-07 | 1990-06-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0420241U true JPH0420241U (en) | 1992-02-20 |
Family
ID=31587727
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6039690U Pending JPH0420241U (en) | 1990-06-07 | 1990-06-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0420241U (en) |
-
1990
- 1990-06-07 JP JP6039690U patent/JPH0420241U/ja active Pending