JPH04205703A - Magnetic head - Google Patents
Magnetic headInfo
- Publication number
- JPH04205703A JPH04205703A JP33339390A JP33339390A JPH04205703A JP H04205703 A JPH04205703 A JP H04205703A JP 33339390 A JP33339390 A JP 33339390A JP 33339390 A JP33339390 A JP 33339390A JP H04205703 A JPH04205703 A JP H04205703A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- metal layer
- saturation
- flux density
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000004907 flux Effects 0.000 claims abstract description 27
- 239000000463 material Substances 0.000 claims abstract description 15
- 239000002184 metal Substances 0.000 claims description 81
- 229910052751 metal Inorganic materials 0.000 claims description 81
- 239000010409 thin film Substances 0.000 claims description 11
- 239000000203 mixture Substances 0.000 claims description 8
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 abstract description 6
- 239000010408 film Substances 0.000 description 14
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000035699 permeability Effects 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- 101000993059 Homo sapiens Hereditary hemochromatosis protein Proteins 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000005300 metallic glass Substances 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 229910000702 sendust Inorganic materials 0.000 description 1
Abstract
Description
固定ディスク用の磁気ヘッドとして、第２図に示すメタ
ルインギャップ型といわれる形式のものが知られている
。これは、フェライトからなる一対の磁気コア１ａ、１
ｂの一方１ａの対向端面に、例えば、Ｆｅ −Ａ ｌ−
Ｓｉ系合金（センダスト）、パーマロイ、アルモファス
金属等の磁性金属からなる金属層２を例えば１５μｍ厚
設けると共に、この磁性金属の金属層２と他方の磁気コ
ア１ｂの対向端面との間に、Ｓ １０２等の非磁性体か
らなるキャップ層３により磁気キャップを形成した構成
のものである。
このようなメタルインギャップ型の磁気ヘットは、磁気
コア１ａ、１ｂの対向端面に何も設（Ｊない一般的な磁
気へりト′に比較して、強くしかも鋭い記録磁界を得ら
れるという利点かあり、今後の活用か期待されている。A so-called metal-in-gap type magnetic head shown in FIG. 2 is known as a magnetic head for fixed disks. This consists of a pair of magnetic cores 1a and 1 made of ferrite.
For example, on the opposite end surface of one side 1a of b
A metal layer 2 made of a magnetic metal such as Si-based alloy (Sendust), permalloy, or amorphous metal is provided with a thickness of, for example, 15 μm, and S 102 is provided between the metal layer 2 of the magnetic metal and the opposing end surface of the other magnetic core 1b. The structure is such that a magnetic cap is formed by a cap layer 3 made of a non-magnetic material such as. This type of metal-in-gap magnetic head has the advantage of being able to obtain a stronger and sharper recording magnetic field than a general magnetic edge, which does not have anything on the opposing end surfaces of the magnetic cores 1a and 1b. It is expected that it will be used in the future.
前記メタルインギャップ型の磁気ヘッドにおいては、そ
の記録特性、即ち記録磁界Ｈｘや磁界勾配θＨｘ／ Ｂ
ｘ （ｆｉｅｌｄ ｇｒａｄｉｅｎｔ）を良好なも
のとするためには、金属層２に飽和磁束密度Ｂｓの高い
材質のものを用いれば良いが、飽和磁束密度Ｂｓがある
値に至った以降は、記録磁界Ｈｘや磁場勾配は飽和値に
達し、Ｂｓの上昇によってもこれらの値は改善されない
ことが明らかになっている。（ＩＥＥＥ Ｔｒａｎｓ
、ｏｎ Ｍａｇｎ、ＭＡＧ−２４゜ｐｐ、２６２３−２
６２５．Ｎｏｖ、１９８８）これは、磁気コアに使用さ
れるフェライト等の飽和磁束密度Ｂｓの値が低いことに
起因すると考えられる。
一方、同様の目的で金属層２の膜厚を厚くすることも考
えられるが（同論文）、金属層２は磁気コア１ａの端面
にスパッタリングにより金属薄膜を形成することにより
作成されるため、膜厚の増加は即ちスパッタ時間の増加
につながり、製造上の難点がある。
そこで本願発明者等は上記問題を解決した磁気ヘッドを
特願平２−１０７１４３号にて特許出願している。
この特許出願された磁気ヘットは、磁気コアに形成され
た磁気ギャップ内に磁性金属からなる金属層が設けられ
てなるメタルインギャップ型の磁気ヘッドにおいて、前
記金属層を、その飽和磁束密度が磁気コアのそれよりも
高い材質で形成された複数の薄膜層から構成すると共に
、これら薄膜層を、前記磁気ギャップにより近い位置の
薄膜層（第２金属層）のほうが、手前の薄膜層（第１金
属層）よりその飽和磁束密度が高い材質で形成したもの
である。
この磁気ヘッドによれば、従来、磁気コアの飽和磁束密
度の低さに起因して起こっていた記録磁界、磁界勾配の
飽和という現象を避け、複数の薄膜層の存在によりこれ
ら薄膜層（特に磁気キャップ近傍の薄膜層）の存する飽
和磁束密度の高さを有効に利用して、記録磁界、磁界勾
配の改善を図ることができる。また、金属層全体の厚み
を増加させずに十分な特性を確保することが可能であり
、スパッタ時間の増加といった製造上の難点も回避でき
た。
しかしながら、第２金属層をＦｅのみからなる材質で形
成すると、飽和磁束密度Ｂｓは良好であるが、さらに磁
気特性を向上すべく金属層の膜厚を大きくすると、軟磁
気特性の劣化およびザビ等の発生の可能性が生じてしま
うものである。
本発明は前記事情に鑑みてなされたものであり、メタル
インギャップ型の磁気ヘッドにおいて、その記録特性の
向上を図ることができ、しかも製造」二の難点もない磁
気ヘッドで、かつ上記金属層の組成を限定することで、
軟磁気特性の劣化およびザビの発生等の不具合を生じさ
せることなく、金属層の厚みを増加させて磁気特性をさ
らに向上さ且ることのできる磁気ヘッドの提供を目的と
している。In the metal-in-gap type magnetic head, its recording characteristics, that is, the recording magnetic field Hx and the magnetic field gradient θHx/B
In order to improve x (field gradient), a material with a high saturation magnetic flux density Bs may be used for the metal layer 2, but after the saturation magnetic flux density Bs reaches a certain value, the recording magnetic field Hx It has become clear that the magnetic field gradients and magnetic field gradients reach saturation values, and that these values are not improved by increasing Bs. (IEEE Trans
, on Magn, MAG-24゜pp, 2623-2
625. (Nov, 1988) This is thought to be due to the low saturation magnetic flux density Bs of ferrite and the like used in the magnetic core. On the other hand, it is also possible to increase the thickness of the metal layer 2 for the same purpose (same paper), but since the metal layer 2 is created by forming a thin metal film on the end face of the magnetic core 1a by sputtering, An increase in thickness leads to an increase in sputtering time, which poses manufacturing difficulties. Therefore, the inventors of the present invention have filed a patent application for a magnetic head that solves the above problem in Japanese Patent Application No. 107143/1999. This patented magnetic head is a metal-in-gap magnetic head in which a metal layer made of a magnetic metal is provided in a magnetic gap formed in a magnetic core. It is composed of a plurality of thin film layers made of a material higher in quality than that of the core, and the thin film layer (second metal layer) located closer to the magnetic gap is higher than the thin film layer (first metal layer) located closer to the magnetic gap. The metal layer is made of a material whose saturation magnetic flux density is higher than that of the metal layer. According to this magnetic head, the phenomenon of saturation of the recording magnetic field and magnetic field gradient, which conventionally occurred due to the low saturation magnetic flux density of the magnetic core, is avoided, and the presence of multiple thin film layers allows these thin film layers (especially magnetic By effectively utilizing the high saturation magnetic flux density of the thin film layer near the cap, it is possible to improve the recording magnetic field and magnetic field gradient. Furthermore, it was possible to ensure sufficient characteristics without increasing the overall thickness of the metal layer, and manufacturing difficulties such as an increase in sputtering time could be avoided. However, when the second metal layer is formed of a material consisting only of Fe, the saturation magnetic flux density Bs is good, but when the thickness of the metal layer is increased to further improve the magnetic properties, the soft magnetic properties deteriorate and rust etc. There is a possibility that this may occur. The present invention has been made in view of the above circumstances, and is a magnetic head that can improve the recording characteristics of a metal-in-gap magnetic head, has no manufacturing difficulties, and has the metal layer as described above. By limiting the composition of
The object of the present invention is to provide a magnetic head whose magnetic properties can be further improved by increasing the thickness of a metal layer without causing problems such as deterioration of soft magnetic properties and generation of rust.
そこで本発明は、磁気コアに形成された磁気ギャップ内
に磁性金属からなる金属層が設置Ｊられてなるメタルイ
ンギャップ型の磁気ヘットにおいて、前記金属層は、そ
の飽和磁束密度が磁気コアのそれよりも高い材質で形成
された第１金属層と第２金属層の２層の薄膜層から構成
されると共に、前記磁気コアに面する第１金属層の組成
は、Ｆｅを主組成分とし、Ｓｌを８〜１１重量％、Ａｌ
を５〜８重量％含有し、第１金属層と前記磁気コアの間
に介在する第２金属層の組成は、Ｆｅを主組成分とし、
Ｓｌを３〜７重量％、Ａｌを１〜５重量％含有すること
により、前記課題を解決せんとしている。Therefore, the present invention provides a metal-in-gap magnetic head in which a metal layer made of a magnetic metal is installed in a magnetic gap formed in a magnetic core, in which the metal layer has a saturation magnetic flux density that is higher than that of the magnetic core. It is composed of two thin film layers, a first metal layer and a second metal layer, which are made of a material higher than that of the magnetic core, and the composition of the first metal layer facing the magnetic core is mainly Fe. 8-11% by weight of Sl, Al
The composition of the second metal layer interposed between the first metal layer and the magnetic core is mainly Fe,
The above problem is attempted to be solved by containing 3 to 7% by weight of Sl and 1 to 5% by weight of Al.
本発明では、金属層をその飽和磁束密度が磁気コアのそ
れよりも高い材質で形成された第１金属層と第２金属層
の２層の薄膜層から構成し、さらに第２金属層の方が第
１金属層より飽和磁束密度が高い材質で形成したので、
従来、磁気コアの飽和磁束密度の低さに起因して起こっ
ていた記録磁界、磁界勾配の飽和という現象を避け、複
数の薄膜層の存在によりこれら薄膜層（特に第２金属層
）の有する飽和磁束密度の高さを有効に利用し、記録磁
界、磁界勾配の改善を図ることができる。
さらに、本発明では、第１金属層および第２金属層の材
質を限定したことにより、金属層の膜厚をさらに厚くし
て磁気特性を向上させたとしてもなんら問題の生じない
磁気ヘッドとすることができる。In the present invention, the metal layer is composed of two thin film layers, the first metal layer and the second metal layer, which are made of a material whose saturation magnetic flux density is higher than that of the magnetic core, and the second metal layer is made of a material with a saturation magnetic flux density higher than that of the magnetic core. is made of a material with higher saturation magnetic flux density than the first metal layer, so
The saturation of the recording magnetic field and magnetic field gradient, which conventionally occurred due to the low saturation magnetic flux density of the magnetic core, is avoided, and the presence of multiple thin film layers reduces the saturation of these thin film layers (especially the second metal layer). By effectively utilizing the high magnetic flux density, it is possible to improve the recording magnetic field and magnetic field gradient. Furthermore, in the present invention, by limiting the materials of the first metal layer and the second metal layer, the magnetic head can be obtained without causing any problems even if the thickness of the metal layer is further increased to improve the magnetic properties. be able to.
以下、本発明の実施例について図面を参照して説明する
。
第１図は本発明の一実施例である磁気ヘッドを示す図で
ある。なお、以下の実施例の説明において、前記従来例
と同一の構成要素については同一の符号を付し、その説
明を省略する。
本実施例の磁気ヘッドと前記従来例の磁気ヘッドとの相
違点は、その金属層２にある。即ち、本実施例では、金
属層２は第１金属層２ａと第２金属層２ｂの２層から構
成されている。
これら第１金属層２ａ、第２金属層２ｂは、その材質が
磁性金属で構成されていると共に、磁気コア１ａに面す
る側の第１金属層２ａは、Ｓｉを８〜１１重量％、Ａｌ
を５〜８重量％含有する鉄合金で形成され、一方、磁気
ギャップ３に而する側の第２金属層２ｂは、Ｓｉを３〜
７重出％、Δ１を１〜５重量％含有する鉄合金で形成さ
れることで、磁気ギャップ３により近い位置の第２金属
層２ｂのほうが、手前の第１金属層２ａよりその飽和磁
束密度Ｂｓが高いように構成するとともに、耐錆性等に
優れたものとしている。
第２金属層の組成を請求範囲外、例えばＦｅ含含量量多
い組成にすると飽和磁束密度は高くなるが、磁気ヘッド
として必要な軟磁気特性が損なわれ、透磁率が低くなり
保磁力が大きくなってしまう。またＳｉ及びＡｌの含有
量を増加させるとＦｅの含有量が少なく飽和磁束密度が
低くなり目的を達成しなくなる。
次に、第１図に示される磁気ヘッドにおいて、第１金属
層２ａをＳｉ：９．６２重量％、Ａｌ：５．３８重量％
、残部をＦｅとした材料から形成し、第２金属層２ｂを
Ｓｉ：５．５８重里％、Ａｌ＋２．７４重量％、残部を
Ｆｅとした材料から形成し、第２金属層２ｂの膜厚を変
化させた時の磁気特性を測定した。この時の第１金属層
２ａの膜厚は１５μＭで一定とし、各グラフにお１プる
横軸を第２金属層２ｂの膜厚とした。
尚、比較例として、第２図に示される如〈従来例の１層
の金属層を磁気コア１ａに設けた磁気ヘッドを製造し、
同様に磁気特性を測定した。
膜厚と飽和磁束密度Ｂｓの関係を示す結果を第３図に、
膜厚と透磁率μの関係を示す結果を第４図に、膜厚と保
磁力Ｈｃの関係を示す結果を第５図に示した。
第３図から明らかなように、従来例の１層の金属層から
なる磁気ヘッドにおいては、その膜厚を変化させても飽
和磁束密度Ｂｓは一定であるが、本実施例の磁気ヘッド
においては膜厚とともにその飽和磁束密度Ｂｓが格段に
増加していることがわかる。
ざらｌこ、第４図と第５図から、従来例の磁気ヘッドに
おいては膜厚とμ及びＨｃは無関係であるにもかかわら
ず、本実施例の磁気ヘッドにおいては、膜厚とともにμ
は減少し、Ｈｃは増加することがわかる。
従って、本実施例の磁気ヘッドにおいては、その第２金
属層２ｂの膜厚を調整することにより、所望のＢｓ、μ
、Ｈｅをもつ磁気ヘッドを得ることができる。
さらに本実施例の磁気ヘッドでは、膜厚を厚くしても錆
等の不具合の生じないものである。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing a magnetic head that is an embodiment of the present invention. In the following description of the embodiment, the same components as those of the conventional example will be denoted by the same reference numerals, and the description thereof will be omitted. The difference between the magnetic head of this embodiment and the conventional magnetic head is in the metal layer 2. That is, in this embodiment, the metal layer 2 is composed of two layers: a first metal layer 2a and a second metal layer 2b. The first metal layer 2a and the second metal layer 2b are made of magnetic metal, and the first metal layer 2a on the side facing the magnetic core 1a contains 8 to 11% by weight of Si and Al.
On the other hand, the second metal layer 2b on the side facing the magnetic gap 3 is made of an iron alloy containing 5 to 8% by weight of Si.
The second metal layer 2b located closer to the magnetic gap 3 has a higher saturation magnetic flux density Bs than the first metal layer 2a located closer to the magnetic gap 3. It is constructed to have a high corrosion resistance and has excellent rust resistance. If the composition of the second metal layer is outside the claimed range, for example, if the composition has a high Fe content, the saturation magnetic flux density will increase, but the soft magnetic properties necessary for a magnetic head will be impaired, the magnetic permeability will decrease, and the coercive force will increase. I end up. Moreover, if the content of Si and Al is increased, the content of Fe will be small and the saturation magnetic flux density will be low, making it impossible to achieve the purpose. Next, in the magnetic head shown in FIG. 1, the first metal layer 2a is made of Si: 9.62% by weight and Al: 5.38% by weight.
The second metal layer 2b is formed from a material containing Si: 5.58% by weight, Al+2.74% by weight, and the remainder is Fe, and the film thickness of the second metal layer 2b is The magnetic properties were measured when the magnetic properties were changed. The thickness of the first metal layer 2a at this time was constant at 15 μM, and the horizontal axis of each graph was taken as the thickness of the second metal layer 2b. As a comparative example, as shown in FIG.
Magnetic properties were similarly measured. The results showing the relationship between film thickness and saturation magnetic flux density Bs are shown in Figure 3.
The results showing the relationship between film thickness and magnetic permeability μ are shown in FIG. 4, and the results showing the relationship between film thickness and coercive force Hc are shown in FIG. As is clear from FIG. 3, in the conventional magnetic head consisting of a single metal layer, the saturation magnetic flux density Bs remains constant even if the film thickness is changed, but in the magnetic head of this embodiment, the saturation magnetic flux density Bs remains constant. It can be seen that the saturation magnetic flux density Bs significantly increases with the film thickness. From FIGS. 4 and 5, it can be seen that although the film thickness is unrelated to μ and Hc in the conventional magnetic head, in the magnetic head of this embodiment, μ and Hc are independent of the film thickness.
It can be seen that Hc decreases and Hc increases. Therefore, in the magnetic head of this embodiment, by adjusting the film thickness of the second metal layer 2b, desired Bs, μ
, He can be obtained. Furthermore, in the magnetic head of this embodiment, problems such as rust will not occur even if the film thickness is increased.
以上詳細に説明したように、本発明によれば、磁気コア
に形成された磁気ギャップ内に磁性金属からなる金属層
が設けられてなるメタルインギャップ型の磁気ヘッドに
おいて、前記金属層を、その飽和磁束密度か磁気コアの
それよりも高い材質で形成された第１金属層と第２金属
層から構成すると共に、これら金属層を、前記磁気ギャ
ップにより近い位置の第２金属層のほうが、手前の第１
金属層よりその飽和磁束密度か高い材質で形成したので
、記録磁界、磁界勾配の改善を図ることができる。
＝１０−
特に、第１金属層と第２金属層の組成をそれぞれ限定し
たことにより、膜厚を厚くしても錆等の発生のない良好
な磁気ヘッドとすることかできる。As described in detail above, according to the present invention, in a metal-in-gap magnetic head in which a metal layer made of a magnetic metal is provided in a magnetic gap formed in a magnetic core, the metal layer is It is composed of a first metal layer and a second metal layer formed of a material whose saturation magnetic flux density is higher than that of the magnetic core, and these metal layers are arranged such that the second metal layer located closer to the magnetic gap is closer to the front side. the first of
Since it is formed of a material whose saturation magnetic flux density is higher than that of the metal layer, it is possible to improve the recording magnetic field and magnetic field gradient. =10- In particular, by limiting the compositions of the first metal layer and the second metal layer, it is possible to obtain a good magnetic head that does not cause rust or the like even if the film thickness is increased.
第１図は本発明の一実施例である磁気ヘットを示す断面
図である。
第２図は従来例の磁気ヘットを示す断面図である。
第３図は金属層の膜厚と飽和磁束密度の関係を示す測定
結果のグラフである。
第４図は金属層の膜厚と透磁率の関係を示す測定結果の
グラフである。
第５図は金属層の膜厚と保磁力の関係を示す測定結果の
グラフ□である。
Ｉａ 、Ｉｂ・・・・・・磁気コア、２・・・・・・金
属層、２ａ・・・・・・第１金属層、２ｂ・・・・・・
第２金属層、３・・・・・・磁気ギャップ。
出願人 アルプス電気株式会社
代表者 片 岡 政 隆
＝１１−
第１図
第２図
膜厚（Ａ）
膜厚（Ａ）
特開平４−２０５７０３ （’））FIG. 1 is a sectional view showing a magnetic head which is an embodiment of the present invention. FIG. 2 is a sectional view showing a conventional magnetic head. FIG. 3 is a graph of measurement results showing the relationship between the thickness of the metal layer and the saturation magnetic flux density. FIG. 4 is a graph of measurement results showing the relationship between the thickness of the metal layer and the magnetic permeability. FIG. 5 is a graph □ of measurement results showing the relationship between the thickness of the metal layer and the coercive force. Ia, Ib...Magnetic core, 2...Metal layer, 2a...First metal layer, 2b...
Second metal layer, 3...magnetic gap. Applicant Alps Electric Co., Ltd. Representative Masataka Kataoka = 11- Figure 1 Figure 2 Film thickness (A) Film thickness (A) JP-A-4-205703 ('))
Claims (1)
る金属層が設けられてなるメタルインギャップ型の磁気
ヘッドにおいて、前記金属層は、その飽和磁束密度が磁
気コアの飽和磁束密度よりも高い材質で形成された第１
金属層と第２金属層の２層の薄膜層から構成されると共
に、前記磁気コアに面する第１金属層の組成は、Ｆｅを
主組成分とし、Ｓｉを８〜１１重量％、Ａｌを５〜８重
量％含有し、第１金属層と前記磁気ギャップの間に介在
する第２金属層の組成は、Ｆｅを主組成分とし、Ｓｉを
３〜７重量％、Ａｌを１〜５重量％含有することを特徴
とする磁気ヘッド。In a metal-in-gap magnetic head in which a metal layer made of a magnetic metal is provided in a magnetic gap formed in a magnetic core, the metal layer is made of a material whose saturation magnetic flux density is higher than that of the magnetic core. The first formed by
It is composed of two thin film layers, a metal layer and a second metal layer, and the composition of the first metal layer facing the magnetic core is mainly Fe, 8 to 11% by weight of Si, and Al. The composition of the second metal layer interposed between the first metal layer and the magnetic gap is mainly Fe, 3 to 7 weight% Si, and 1 to 5 weight% Al. A magnetic head characterized by containing %.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33339390A JPH04205703A (en) | 1990-11-29 | 1990-11-29 | Magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33339390A JPH04205703A (en) | 1990-11-29 | 1990-11-29 | Magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04205703A true JPH04205703A (en) | 1992-07-27 |
Family
ID=18265619
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP33339390A Pending JPH04205703A (en) | 1990-11-29 | 1990-11-29 | Magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04205703A (en) |
-
1990
- 1990-11-29 JP JP33339390A patent/JPH04205703A/en active Pending
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