JPH04206227A - Baking method of applied tube for fluorescent lamp and device therefor - Google Patents

Baking method of applied tube for fluorescent lamp and device therefor

Info

Publication number
JPH04206227A
JPH04206227A JP33262790A JP33262790A JPH04206227A JP H04206227 A JPH04206227 A JP H04206227A JP 33262790 A JP33262790 A JP 33262790A JP 33262790 A JP33262790 A JP 33262790A JP H04206227 A JPH04206227 A JP H04206227A
Authority
JP
Japan
Prior art keywords
tube
fluorescent lamp
firing
furnace
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP33262790A
Other languages
Japanese (ja)
Inventor
Yasuhisa Nakahara
中原 康久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NITSUPO DENKI KK
Original Assignee
NITSUPO DENKI KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NITSUPO DENKI KK filed Critical NITSUPO DENKI KK
Priority to JP33262790A priority Critical patent/JPH04206227A/en
Publication of JPH04206227A publication Critical patent/JPH04206227A/en
Pending legal-status Critical Current

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  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)

Abstract

PURPOSE:To apply for the baking of an applied tube for thin cylindrical fluorescent lamp which is longer than standard size by rotating a long and thin cylindrical hollow glass tube laterally, by rotating it around the shaft, and whereby heating it for each length in the furnace, so as to bake it. CONSTITUTION:A baking device is composed of a plurality of rotational rollers 5 for rotating a straight applied tube 1 for fluorescent lamp laterally, and for thus retaing it, an annular furnace 3 provided with a heating band 7 on the inside surface, a supporting board 4 for supporting the furnace and the rotational roller 5, and of a wire 6 for winding one end on a take-up means, and for mounting other end on the applied tube 1. Regarding the baking method, while the applied tube 1 for fluorescent lamp to which fluorescent paint is applied, is put laterally, the baking device is rotated around the shaft of the applied tube 1, in such a way that the applied tube is heated for each part of length from one end to the other end, so as to be baked. The applied tube 1 for thin cylindrical fluorescent lamp which is longer than standard size can thus be appropriately baked, while an applied tube 1 of standard size can also be baked.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、一般的に広く利用されている蛍光ランプ用塗
布管の焼成方法および装置に関し、特に直線状で全長寸
法の長い蛍光ランプ用塗布管の焼成に有用な蛍光ランプ
用塗布管の焼成方法および装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method and apparatus for firing coating tubes for fluorescent lamps, which are generally widely used. The present invention relates to a method and apparatus for firing coated tubes for fluorescent lamps, which are useful for firing tubes.

(従来の技術) 現在、直線状の蛍光ランプは主に家庭用、工業用の照明
器具として広く利用されている。
(Prior Art) Currently, linear fluorescent lamps are widely used mainly as home and industrial lighting equipment.

蛍光ランプは中空ガラス管の内面に蛍光体を塗布し、こ
の中空ガラス管内の放電により該蛍光体を発光させ、照
明等用の光源として利用するものである。
In a fluorescent lamp, a phosphor is coated on the inner surface of a hollow glass tube, the phosphor is caused to emit light by an electric discharge inside the hollow glass tube, and is used as a light source for illumination or the like.

蛍光体(例えばハロリン酸カルシウム)は、−般に粉末
状に精製されており、この粉末状の蛍光体を直接、中空
ガラス管の内面に均一に定着させることはできない。そ
こで一般的には、この粉末状の蛍光体をいったん粘性を
もつ有機溶剤(例えばニトロセルロース)に混入して液
状の蛍光塗料を作り、この蛍光塗料を中空ガラス管の内
面に均一に塗布する方法が用いられている。この蛍光塗
料塗布後の中空ガラス管を蛍光ランプ用塗布管という。
Phosphors (for example, calcium halophosphate) are generally refined into powder, and it is not possible to directly and uniformly fix this powdered phosphor onto the inner surface of a hollow glass tube. Generally speaking, this powdered phosphor is mixed with a viscous organic solvent (e.g. nitrocellulose) to make a liquid fluorescent paint, and then this fluorescent paint is uniformly applied to the inner surface of a hollow glass tube. is used. The hollow glass tube coated with fluorescent paint is called a coated tube for fluorescent lamps.

ところが、この有機溶剤は塗布後は不必要となるので、
何らかの方法で塗布後に除去しなければならない。そこ
で、蛍光体は高温でも変質しないが、有機溶剤は高温に
加熱すると燃えて蒸発するという性質を利用して、蛍光
ランプ用塗布管を炉で加熱し、有機溶剤を燃焼により除
去して蛍光体のみを中空ガラス管の内側面に定着させる
方法が一般的に用いられている。
However, this organic solvent is unnecessary after application, so
It must be removed in some way after application. Therefore, by taking advantage of the property that phosphors do not deteriorate even at high temperatures, but organic solvents burn and evaporate when heated to high temperatures, we heated the coated tube for fluorescent lamps in a furnace, removed the organic solvents by combustion, and produced phosphors. A commonly used method is to fix the material to the inner surface of a hollow glass tube.

この方法を蛍光ランプ用塗布管の焼成という。This method is called firing of coated tubes for fluorescent lamps.

現在、焼成は、蛍光ランプ用塗布管全体を同時に−加熱
する方法が一般的で、このため焼成用の炉は塗布管全体
を覆う大きさが必要である。
Currently, the common method for firing is to simultaneously heat the entire coated tube for a fluorescent lamp, and therefore the firing furnace needs to be large enough to cover the entire coated tube.

前記したように蛍光ランプは主に照明用として広く利用
されているのでその需要量が多い。そのため、現在では
蛍光ランプは、長さや径などを規格化して大量生産され
ており、焼成用の炉も蛍光ランプのサイズに適応した大
きさのものが作られ使用されている。
As mentioned above, fluorescent lamps are widely used mainly for illumination and are therefore in high demand. Therefore, fluorescent lamps are now mass-produced with standardized lengths and diameters, and firing furnaces are also made and used in sizes that suit the size of the fluorescent lamps.

一方、蛍光ランプを照明用としてではなく製品の寸法検
査に利用する技術等、特殊な用途で使用する場合には、
検査する製品幅より長いランプが必要となることがある
。しかし、従来の規格化された蛍光ランプでは上記条件
を満足することができない。そのため、上記条件を満足
させる全長寸法の長い直線状の蛍光ランプを特別に製造
することが必要になる場合がある。
On the other hand, when fluorescent lamps are used for special purposes, such as technology that uses them for dimensional inspection of products rather than for lighting,
A lamp that is longer than the width of the product being inspected may be required. However, conventional standardized fluorescent lamps cannot satisfy the above conditions. Therefore, it may be necessary to specially manufacture a linear fluorescent lamp with a long overall length that satisfies the above conditions.

(発明か解決しようとする課題) 規格寸法より長い蛍光ランプを製造するには、いくつか
の問題点があり、その問題点の一つが焼成用の炉に関す
るものである。すなわち、前記したように従来の蛍光ラ
ンプ用塗布管の焼成方法は、蛍光ランプのサイズに応じ
た専用の炉で、蛍光ランプ用塗布管全体を加熱する方法
が一般的である。
(Problems to be Solved by the Invention) There are several problems in manufacturing fluorescent lamps that are longer than standard dimensions, one of which concerns the firing furnace. That is, as described above, the conventional method for firing coated tubes for fluorescent lamps is generally to heat the entire coated tube for fluorescent lamps in a dedicated furnace depending on the size of the fluorescent lamp.

したがって、従来の焼成方法で規格寸法より長い蛍光ラ
ンプ用塗布管を焼成するためには、焼成用の炉をその長
さに応じた大型の炉にする必要がある。ところが、この
ような長い蛍光ランプの需要は少ないので、そのための
専用の大型炉を作ることはコスト面から見て望ましくな
い。
Therefore, in order to fire a coated tube for a fluorescent lamp that is longer than the standard size using the conventional firing method, it is necessary to use a large-sized firing furnace corresponding to the length. However, since there is little demand for such long fluorescent lamps, it is undesirable from a cost standpoint to construct a large furnace specifically for them.

本発明は上記課題に鑑み、従来の規格寸法より長い略細
長円筒型蛍光ランプ用塗布管の焼成に適し、かつ従来の
規格寸法の蛍光ランプ用塗布管の焼成にも適応可能で、
しかも簡単にかつ低コストで実現可能な蛍光ランプ用塗
布管の焼成方法および装置を提供することを目的とする
ものである。
In view of the above-mentioned problems, the present invention is suitable for firing coated tubes for fluorescent lamps having a substantially elongated cylindrical shape longer than conventional standard dimensions, and is also applicable to firing coated tubes for fluorescent lamps having conventional standard dimensions.
Moreover, it is an object of the present invention to provide a method and apparatus for firing a coated tube for a fluorescent lamp, which can be realized simply and at low cost.

(課題を解決するための手段) 上記課題を解決するため、本発明による蛍光ランプ用塗
布管の焼成方法は、蛍光塗料塗布後の略細長円筒型の中
空ガラス管を、横にして、該ガラス管の軸のまわりに回
転させながら、その一端部から他端部までを部分長ごと
に加熱して焼成することを特徴とするものである。
(Means for Solving the Problems) In order to solve the above problems, the method for firing a coated tube for a fluorescent lamp according to the present invention is to lay down a substantially elongated cylindrical hollow glass tube after coating with fluorescent paint, This method is characterized by heating and firing each section from one end to the other end while rotating the tube around its axis.

また上記課題を解決するため、本発明による蛍光ランプ
用塗布管の焼成装置は、略円環状で、その内側面に加熱
手段(例えばガスバーナー)を有する炉と、蛍光塗料塗
布後の中空ガラス管を、その軸のまわりに回転させなが
ら保持する回転保持手段と、該回転保持手段または前記
略円環状の炉の少なくとも一方を、該回転保持手段の保
持す擾前記中空ガラス管が、該略円環状の炉の中央を軸
方向に通過するように移動させる移動手段とを有し、前
記焼成方法を行なうことを特徴とするものである。
Further, in order to solve the above problems, the present invention provides a baking device for coated tubes for fluorescent lamps, which includes a furnace that is approximately circular and has a heating means (for example, a gas burner) on its inner surface, and a hollow glass tube after coating with fluorescent paint. a rotary holding means for holding the glass tube while rotating it around its axis; The apparatus is characterized in that it has a moving means for moving the annular furnace so as to pass through the center of the annular furnace in the axial direction, and performs the firing method described above.

ここでいう回転保持手段としては、例えば軸方向に充分
な長さを有する細長い2本の回転ローラを互いに平行で
水平、かつ互いの外周面が接近した位置に設置し、塗布
管を、この2本の回転ローラの軸方向に平行に、かつそ
の外周面が2本のローラの外周面にともに当接するよう
に設置して、この2本の回転ローラをその軸のまわりに
互いに同一方向に回転して、該塗布管を回転させながら
保持するものがある。
As the rotation holding means here, for example, two elongated rotating rollers having a sufficient length in the axial direction are installed parallel to each other, horizontally, and at positions where their outer peripheral surfaces are close to each other. The book is installed parallel to the axial direction of the rotating roller, and its outer circumferential surface is in contact with the outer circumferential surface of the two rollers, and the two rotating rollers are rotated in the same direction around the axis. There is a device that holds the application tube while rotating it.

(作用および効果) 本発明による蛍光ランプ用塗布管の焼成方法および装置
は、蛍光塗料塗布後の略細長円筒型の中空ガラス管を、
横にして、該ガラス管の軸のまわりに回転させながら、
その一端部から他端部までを部分長ごとに炉で加熱して
焼成するので、従来の焼成方法のように、ガラス管全体
を同時に加熱する必要がなく、規格寸法より長い略細長
円筒型の蛍光ランプ用塗布管の焼成に適し、かつ規格寸
法の蛍光ランプ用塗布管の焼成に適応可能で、しかも簡
単にかつ低コストの設備で実現できるなどの種々の顕著
な効果を奏する。
(Operations and Effects) The method and apparatus for firing a coated tube for a fluorescent lamp according to the present invention is a method and apparatus for firing a coated tube for a fluorescent lamp.
While lying on its side and rotating around the axis of the glass tube,
Since each part of the glass tube is heated and fired in a furnace from one end to the other, there is no need to heat the entire glass tube at the same time as in conventional firing methods, and it is possible to create an approximately elongated cylindrical tube that is longer than the standard size. It is suitable for firing coated tubes for fluorescent lamps, is adaptable to firing coated tubes for fluorescent lamps of standard dimensions, and can be realized simply and with low-cost equipment.

(実 施 例) 本発明による蛍光ランプ用塗布管の焼成方法および装置
の実施例を、以下図面により説明する。
(Example) Examples of the method and apparatus for firing a coated tube for a fluorescent lamp according to the present invention will be described below with reference to the drawings.

第1図は、本発明による蛍光ランプ用塗布管の焼成装置
の一実施例の全体構成を模式的に示す斜視図、第2図は
、その上面から見た図、第3図は、第2図のIII−I
II端面図、および第4図は、第2図のIV−IV端面
図である。
FIG. 1 is a perspective view schematically showing the overall configuration of an embodiment of the firing apparatus for fluorescent lamp coated tubes according to the present invention, FIG. 2 is a view seen from the top, and FIG. Figure III-I
II end view, and FIG. 4 is an IV-IV end view of FIG.

まず本実施例の焼成装置の構成について説明する。第1
図〜第3図に示すように、本実施例の焼成装置は、直線
状の蛍光ランプ用塗布管1を、横にして、回転させなが
ら保持する多数の回転ローラ5と、略円環状で、その内
側面に加熱帯7を有する炉3と、この炉と前記回転ロー
ラ5とを支持する支持架台4、および一端を図示されな
い巻取手段に捲着し、他端を前記塗布管1に取着したワ
イヤ6とからなる。
First, the configuration of the firing apparatus of this example will be explained. 1st
As shown in FIGS. 3 to 3, the baking device of the present embodiment includes a large number of rotating rollers 5 that hold a linear coating tube 1 for a fluorescent lamp while rotating it horizontally, and a substantially annular roller. A furnace 3 having a heating zone 7 on its inner surface, a support pedestal 4 that supports the furnace and the rotating roller 5, and one end of which is wound around a winding means (not shown) and the other end of which is attached to the application tube 1. It consists of a wire 6 attached.

回転ローラ5は、軸方向が横になるように図示されない
支持手段により支持され、図示されない駆動手段により
軸のまわりに回転力を付与される。
The rotating roller 5 is supported by a support means (not shown) so that its axial direction is horizontal, and a rotational force is applied around the axis by a driving means (not shown).

また回転ローラ5は2個1組で、互いの外周面を接近さ
せた状態に支持され、この1組ずつの回転ローラ5は軸
方向に1列に所定の間隔で設置されている。
The rotating rollers 5 are supported in sets of two with their outer peripheral surfaces close to each other, and each set of rotating rollers 5 is arranged in a row in the axial direction at a predetermined interval.

第4図に示すように、塗布管1は、その外周周面が2個
1組の回転ローラ5の各々の外周面に当接し、回転ロー
ラ5の矢印B方向への回転により、矢印C方向に回転し
ながら該回転ローラ5に保持される。また第1図〜第3
図に示すようにワイヤ6の塗布管1側には、連結部材8
が設けられており、塗布管1の回転でワイヤ6にねじれ
が生じるのを防止する。
As shown in FIG. 4, the outer circumferential surface of the application tube 1 comes into contact with the outer circumferential surface of each of the two rotating rollers 5, and as the rotating rollers 5 rotate in the direction of arrow B, the coating tube 1 is rotated in the direction of arrow C. It is held by the rotating roller 5 while rotating. Also, Figures 1 to 3
As shown in the figure, a connecting member 8 is attached to the coating tube 1 side of the wire 6.
is provided to prevent twisting of the wire 6 due to rotation of the coating tube 1.

次に本発明による蛍光ランプ用塗布管の焼成方法を、本
実施例の焼成装置の動作に基づいて説明する。
Next, a method of firing a coated tube for a fluorescent lamp according to the present invention will be explained based on the operation of the firing apparatus of this embodiment.

第1図〜第3図に示すように、蛍光ランプ用塗布管は、
回転ローラ5に回転保持されながら、−端部に取着され
たワイヤ6によって、円環状炉3の中央を矢印A方向に
通過するように移動する。
As shown in Figures 1 to 3, the coated tube for fluorescent lamps is
While being rotated and held by a rotating roller 5, it is moved to pass through the center of the circular furnace 3 in the direction of arrow A by a wire 6 attached to the negative end.

この時、第3図に示すように塗布管1は、炉3の内側面
の加熱帯7に加熱され、一端部から他端部までを部分長
ごとに焼成される。焼成されている間、塗布管1は軸の
まわりに回転しているので、塗布管に曲がりや反りが生
じるのを防止できる。
At this time, as shown in FIG. 3, the coating tube 1 is heated by the heating zone 7 on the inner surface of the furnace 3, and is fired in sections from one end to the other end. Since the coating tube 1 is rotating around the axis during firing, bending or warping of the coating tube can be prevented.

以上、本発明による蛍光ランプ用塗布管の焼成方法およ
び装置について一実施例に基づいて説明したが、本発明
はかかる実施例に限定されるものではない。例えば、前
記実施例では塗布管1をワイヤ6によって引張る構成と
したが、塗布管1を押しながら移動する構成としてもよ
い。また前記実施例では炉3は支持架台4に固設され、
塗布管1の方を移動可能としたが、炉3を可動にするこ
とも可能である。以下、炉3を可動にした場合について
の実施例を図面に基づいて説明する。
The method and apparatus for firing a coated fluorescent lamp tube according to the present invention have been described above based on one embodiment, but the present invention is not limited to this embodiment. For example, in the embodiment described above, the applicator tube 1 is pulled by the wire 6, but the applicator tube 1 may be moved while being pushed. Further, in the above embodiment, the furnace 3 is fixed to the support frame 4,
Although the coating tube 1 is made movable, it is also possible to make the furnace 3 movable. Hereinafter, an embodiment in which the furnace 3 is made movable will be described based on the drawings.

第5図は本発明による蛍光ランプ用塗布管の焼成装置の
別実施例の全体構成を示す斜視図である。
FIG. 5 is a perspective view showing the overall structure of another embodiment of the firing apparatus for a coated tube for a fluorescent lamp according to the present invention.

第5図に示すように、本実施例の焼成装置は、直線状の
蛍光ランプ用塗布管1を横にして、回転させながら保持
する2本の回転ローラ5と、略円環状で、その内側面に
加熱帯を有する炉3と、前記回転ローラ5を軸のまわり
に回転可能に支持し、前記炉3を図中矢印AB力方向移
動可能に支持する支持架台4とからなる。
As shown in FIG. 5, the baking device of this embodiment includes two rotating rollers 5 that hold a linear coating tube 1 for fluorescent lamps while rotating it horizontally, and a substantially annular roller 5 that holds the coating tube 1 horizontally. It consists of a furnace 3 having a heating zone on its side, and a support pedestal 4 that rotatably supports the rotary roller 5 around an axis and supports the furnace 3 so as to be movable in the direction of the arrow AB in the figure.

本実施例の特徴は、前記実施例では炉3が支持架台4に
固設されているのに対し、炉3が支持架台4上を移動可
能に設置されている点にある。塗布管lの焼成方法は、
前記実施例では塗布管1を移動させながら焼成したのに
対し、本実施例では、炉3が、移動しながら塗布管1の
一端部から他端部までを部分長ごとに焼成する点が異な
るが、本発明による蛍光ランプ用塗布管の焼成方法を行
なうという点では何ら変わりはない。
The feature of this embodiment is that the furnace 3 is installed movably on the support pedestal 4, whereas in the previous embodiment, the furnace 3 is fixedly installed on the support pedestal 4. The method of firing the coating tube l is as follows:
In the above embodiment, the coating tube 1 was fired while being moved, whereas in this embodiment, the furnace 3 is different in that the coating tube 1 is fired part by length from one end to the other end while moving. However, there is no difference in that the method for firing a coated tube for a fluorescent lamp according to the present invention is carried out.

以上説明したように、本発明による蛍光ランプ用塗布管
の焼成方法および装置は、その効果を損なうことなく種
々の変更が可能である。
As explained above, the method and apparatus for firing a coated tube for a fluorescent lamp according to the present invention can be modified in various ways without impairing its effects.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、本発明による蛍光ランプ用塗布管の焼成装置
の一実施例の全体構成を示す斜視図、第2図は、その上
面から見た図、第3図は、第2図ノJII iH端面図
、第4図は、第2図ノIV−Jv端面図、およびjf!
i5図は、本発明による蛍光ランプ用塗布管の焼成装置
の別実施例の全体構成を示す斜視図である。
FIG. 1 is a perspective view showing the overall configuration of an embodiment of the firing apparatus for fluorescent lamp coated tubes according to the present invention, FIG. 2 is a view seen from the top, and FIG. 3 is a JII iH end view, FIG. 4, FIG. 2 IV-Jv end view, and jf!
Figure i5 is a perspective view showing the overall configuration of another embodiment of the firing apparatus for a coated tube for a fluorescent lamp according to the present invention.

Claims (1)

【特許請求の範囲】 1)粉末状の蛍光体を、粘性をもつ有機溶剤に混入して
なる蛍光塗料を、略細長円筒型の中空ガラス管の内側面
に均一に塗布した後、該中空ガラス管を炉で加熱し、前
記蛍光塗料内の前記有機溶剤を除去して前記蛍光体のみ
を該中空ガラス管の内側面に定着させる蛍光ランプの焼
成方法において、前記蛍光塗料塗布後の中空ガラス管を
、横にして、該ガラス管の軸のまわりに回転させながら
、その一端部から他端部までを部分長ごとに前記炉で加
熱して焼成することを特徴とする蛍光ランプの焼成方法
。 2)略円環状で、その内側面に加熱手段を有する炉と、 前記蛍光塗料塗布後の中空ガラス管を、その軸のまわり
に回転させながら保持する回転保持手段と、 該回転保持手段または前記略円環状の炉の少なくとも一
方を、該回転保持手段が保持する前記中空ガラス管が、
該略円環状の炉の中央を軸方向に通過するように移動さ
せる移動手段とを有し、請求項1記載の蛍光ランプ用塗
布管の焼成方法を行なうことを特徴とする蛍光ランプ用
塗布管の焼成装置。
[Claims] 1) After uniformly applying a fluorescent paint made by mixing a powdered phosphor in a viscous organic solvent to the inner surface of a substantially elongated cylindrical hollow glass tube, In a method of firing a fluorescent lamp in which a tube is heated in a furnace to remove the organic solvent in the fluorescent paint and fix only the phosphor to the inner surface of the hollow glass tube, the hollow glass tube after the fluorescent paint is applied. 1. A method for firing a fluorescent lamp, which comprises heating and firing each length of the glass tube from one end to the other in the furnace while rotating the glass tube on its axis around its axis. 2) a substantially annular furnace having a heating means on its inner surface; a rotating holding means for holding the hollow glass tube coated with the fluorescent paint while rotating it around its axis; and the rotating holding means or the above-mentioned The hollow glass tube in which the rotation holding means holds at least one of the approximately annular furnaces,
A coated tube for a fluorescent lamp, comprising a moving means for moving the substantially annular furnace so as to pass through the center in the axial direction, and for carrying out the method for firing a coated tube for a fluorescent lamp according to claim 1. firing equipment.
JP33262790A 1990-11-29 1990-11-29 Baking method of applied tube for fluorescent lamp and device therefor Pending JPH04206227A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP33262790A JPH04206227A (en) 1990-11-29 1990-11-29 Baking method of applied tube for fluorescent lamp and device therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33262790A JPH04206227A (en) 1990-11-29 1990-11-29 Baking method of applied tube for fluorescent lamp and device therefor

Publications (1)

Publication Number Publication Date
JPH04206227A true JPH04206227A (en) 1992-07-28

Family

ID=18257071

Family Applications (1)

Application Number Title Priority Date Filing Date
JP33262790A Pending JPH04206227A (en) 1990-11-29 1990-11-29 Baking method of applied tube for fluorescent lamp and device therefor

Country Status (1)

Country Link
JP (1) JPH04206227A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008157590A (en) * 2006-12-26 2008-07-10 Tokyo Electron Ltd Heat treatment apparatus and heat treatment method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008157590A (en) * 2006-12-26 2008-07-10 Tokyo Electron Ltd Heat treatment apparatus and heat treatment method

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