JPH04215312A - Crystal resonator of longitudinal vibration - Google Patents

Abstract

PURPOSE:To obtain longitudinal vibrations of a low resonance resistance from a crystal plate by an etching method. CONSTITUTION:Vibrating arms which vibrate longitudinally are formed of two pieces and the respective parts where distortions are small are coupled. In addition, supporting parts are provided in the central parts of the respective vibrating arms. These supporting parts are extended to a mounting part via a bridge part and are fixed. These parts are integrally constituted. Many pieces are simultaneously produced from the crystal plate by etching.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the shape of a vertical quartz crystal resonator in which a vibrating part and a supporting part are integrally formed by etching. In particular, ICs with strong demands for miniaturization and low power consumption
This invention relates to a vertical crystal resonator with a new shape that is ideal as a reference signal source for portable devices such as cards, pagers, and mobile radios.

0002

[Prior Art] A conventional vertical quartz crystal resonator in which a vibrating part and a supporting part are integrally formed by etching has a single vibrating arm.
Since it is a book, it was not possible to reduce the equivalent series resistance R1.

0003

[Problems to be Solved by the Invention] Conventional vertical crystal oscillators have only one vibrating arm, so their mass is small, and the asymmetry of the shape due to the etching process caused by the anisotropy of the crystal has a negative effect on vibration. give. For this reason, extremely important issues remain, such as large vibration leakage due to the support of the vibrator and an increase in R1. Furthermore, R1 is relatively large at approximately 300Ω, and in order to reduce power consumption, it is desired that R1 be even smaller.

0004

SUMMARY OF THE INVENTION Therefore, the present invention solves the conventional problems in the following manner. That is, 2
This is a vertical crystal oscillator in which the vibrating arm and the supporting part of the book are integrally formed by etching.The two vibrating arms are connected to each other at the part where the distortion becomes small, and a bridge part is provided in the center of each vibrating arm. The object of the present invention is achieved by configuring the vibrator so that it is connected to the frame through the vibrator, and the two frames are integrally connected at their ends.

[0005]

[Operation] As described above, the present invention is composed of two vibrating arms and a support section. Two vibrating arms are naturally heavier than one, and they hold more potential energy. Therefore,
A vertical crystal resonator with a small equivalent series resistance R1 can be obtained.

[0006]

[Examples] Next, the present invention will be specifically described based on examples. FIG. 1 is a plan view showing an embodiment of the shape of a vertical crystal resonator according to the present invention. The vibrator 1 includes a vibrating section 2 and a support section 3 connected via a bridge section 4. Further, the vibrating section 2 has a structure in which the two vibrating arms 2' are connected at a position where almost no distortion occurs, that is, a connecting section 8 forms a hole 9. On the other hand, the support section is connected to a bridge section 4 provided approximately in the center of the vibrating arm 2', and is composed of a frame 6 of a bending section 5 and a mount section 7, which performs bending vibration. Furthermore, excitation electrodes (not shown) are arranged so that the two vibrating arms 2' vibrate in the same direction. As a result, at the time of vibration resonance, compared to one vibrating arm, the equivalent inductance is about half, the equivalent capacitance is about twice, and the equivalent series resistance R1 is about half. As an example, when there is one vibrating arm and the frequency f≒450KHz, R
1 = 380Ω. By using two vibrating arms according to the present invention, R1 was able to be extremely small as 195Ω. FIG. 2 is a plan view showing another embodiment of the vertical crystal resonator shape of the present invention. The vibrator 1 is composed of a vibrating part 2 and a support part 3, and the vibrating part 2 has a structure consisting of two vibrating arms 2' and a connecting part 8, similar to the vibrator shown in FIG. The support part 3 has a structure that further confines the vibration energy of the vibrating part 2 inside the vibrating part, and has a bent part 5 connected to the bridge part 4 and a frame 6 connected through both ends thereof so as to form a hole 9. and a mount section 7. With this configuration, it is possible to reduce R1 and at the same time confine the vibration energy inside the vibrating section, so that an excellent vertical crystal resonator without vibration leakage can be obtained. Further, although the vibrator of the present invention has a complicated shape, it can be easily formed by chemical etching.

[0007]

[Effects of the Invention] As described above, the resonator of the present invention consists of a vibrating part and a support part, and by proposing a vertical quartz resonator with a new shape that is integrally formed by an etching method, the resonator achieves the following: It has a remarkable effect. (2) By providing two vibrating arms, the equivalent series resistance R1 can be reduced to approximately half that of one vibrating arm.

[0008] In this vibrator, the vibrating part and the supporting part are integrally formed by an etching method, so that it can be made smaller and thinner. ■ By improving the shape of the support part, a vertical crystal resonator with no vibration leakage can be obtained. Therefore, a vibrator with a small R1 can be obtained even if it is supported and fixed to a lead wire or the like at the mount portion.

■ Since it is mounted on a lead wire or the like on one side, manufacturing is easy and inexpensive.

[Brief explanation of the drawing]

FIG. 1 is a plan view of an embodiment of the shape of a vertical crystal resonator of the present invention.

FIG. 2 is a plan view of another embodiment of the vertical crystal resonator shape of the present invention.

[Explanation of symbols]

1. Oscillator 2 Vibration part 2′ Vibrating arm 3 Support part 4 Bridge part 5　Bending part 6 Frame 7 Mount part 8 Connection part 9 holes

Claims (1)

[Claims] [Claim 1] A vertical quartz crystal resonator in which two vibrating arms and a support part are integrally formed by an etching method, and the two vibrating arms are connected to each other at a portion where strain is small, and the center of each vibrating arm is 1. A vertical crystal resonator, characterized in that a portion thereof is connected to a frame via a bridge portion, and both frames are connected integrally at an end portion.