JPH0421939U - - Google Patents
Info
- Publication number
- JPH0421939U JPH0421939U JP6288590U JP6288590U JPH0421939U JP H0421939 U JPH0421939 U JP H0421939U JP 6288590 U JP6288590 U JP 6288590U JP 6288590 U JP6288590 U JP 6288590U JP H0421939 U JPH0421939 U JP H0421939U
- Authority
- JP
- Japan
- Prior art keywords
- housing
- diaphragm
- center
- pressure side
- side chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000009530 blood pressure measurement Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図は本考案の一実施例の要部構成説明図、
第２図、第３図、第４図は第１図の動作説明図、
第５図は本考案の他の実施例の要部構成説明図、
第６図は第５図の動作説明図、第７図は従来より
一般に使用されている従来例の構成説明図。
１……ハウジング、２……高圧側フランジ、３
……低圧側フランジ、４，５……導入口、６……
圧力測定室、６Ａ，６Ｂ，１０Ａ，１１Ａ……バ
ツクプレート、８……シリコンダイアフラム、９
……支持体、１０，１１……圧力導入室、１２，
１３……隔液ダイアフラム、１４，１５，１６，
１７……連通孔、８０……ストレインゲージ、２
１，３１……センタダイアフラム、２２，３２…
…環状突起、３１１……中央厚肉部、１０１，１
０２……封入液。
FIG. 1 is an explanatory diagram of the main part configuration of an embodiment of the present invention,
Figures 2, 3, and 4 are explanatory diagrams of the operation of Figure 1;
FIG. 5 is an explanatory diagram of the main part configuration of another embodiment of the present invention,
FIG. 6 is an explanatory diagram of the operation of FIG. 5, and FIG. 7 is an explanatory diagram of the configuration of a conventional example that has been generally used. 1...Housing, 2...High pressure side flange, 3
...Low pressure side flange, 4, 5...Inlet, 6...
Pressure measurement chamber, 6A, 6B, 10A, 11A... Back plate, 8... Silicon diaphragm, 9
... Support body, 10, 11 ... Pressure introduction chamber, 12,
13... Separate liquid diaphragm, 14, 15, 16,
17...Communication hole, 80...Strain gauge, 2
1, 31... Center diaphragm, 22, 32...
... Annular projection, 311 ... Central thick part, 101,1
02...Enclosed liquid.
Claims (1)
イアフラムと、 該隔液ダイアフラムが一定以上ハウジング側に
変位しないように設けられた移動阻止手段と、 前記ハウジング内に設けられた圧力−電気変換
素子を有するシリコンダイアフラムと、 前記ハウジングに該シリコンダイアフラムと共
に高圧側室と低圧側室とに２分するように設けら
れたセンタダイアフラムと、 前記低圧側室内の該センタダイアフラムと対向
する壁面に設けられセンタダイアフラムの中心と
同心円を成す環状突起とを、 具備したことを特徴とする差圧測定装置。[Scope of Claim for Utility Model Registration] A housing filled with a sealed liquid, a pair of liquid separating diaphragms provided on both sides of the housing, and a pair of liquid separating diaphragms provided so as not to be displaced beyond a certain level toward the housing. a silicon diaphragm having a pressure-to-electricity conversion element provided in the housing; a center diaphragm provided in the housing together with the silicon diaphragm so as to be divided into a high-pressure side chamber and a low-pressure side chamber; A differential pressure measuring device comprising: an annular projection provided on a wall surface facing the center diaphragm in the low-pressure side chamber and forming a concentric circle with the center of the center diaphragm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990062885U JPH081468Y2 (en) | 1990-06-14 | 1990-06-14 | Differential pressure measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990062885U JPH081468Y2 (en) | 1990-06-14 | 1990-06-14 | Differential pressure measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0421939U true JPH0421939U (en) | 1992-02-24 |
| JPH081468Y2 JPH081468Y2 (en) | 1996-01-17 |
Family
ID=31592440
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990062885U Expired - Lifetime JPH081468Y2 (en) | 1990-06-14 | 1990-06-14 | Differential pressure measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH081468Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020016507A (en) * | 2018-07-24 | 2020-01-30 | アズビル株式会社 | Pressure sensor chip |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3931542A1 (en) | 2019-02-27 | 2022-01-05 | Kistler Holding AG | Sensor |
-
1990
- 1990-06-14 JP JP1990062885U patent/JPH081468Y2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020016507A (en) * | 2018-07-24 | 2020-01-30 | アズビル株式会社 | Pressure sensor chip |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH081468Y2 (en) | 1996-01-17 |
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