JPH04220609A - Method for forming spot size converting portion - Google Patents

Method for forming spot size converting portion

Info

Publication number
JPH04220609A
JPH04220609A JP2412743A JP41274390A JPH04220609A JP H04220609 A JPH04220609 A JP H04220609A JP 2412743 A JP2412743 A JP 2412743A JP 41274390 A JP41274390 A JP 41274390A JP H04220609 A JPH04220609 A JP H04220609A
Authority
JP
Japan
Prior art keywords
core
spot size
optical waveguide
enlarged
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2412743A
Other languages
Japanese (ja)
Inventor
Kenji Kono
健治 河野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP2412743A priority Critical patent/JPH04220609A/en
Publication of JPH04220609A publication Critical patent/JPH04220609A/en
Pending legal-status Critical Current

Links

Landscapes

  • Optical Couplings Of Light Guides (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
  • Light Guides In General And Applications Therefor (AREA)

Abstract

PURPOSE:To enable local heating for forming a core enlarged portion by subjecting only that portion of the optical waveguide line at which its core is enlarged to laser beam machining. CONSTITUTION:The diameter of a core 9 positioned near the end portion of an optical waveguide line is made larger than the core diameter of the portion of the optical waveguide line positioned in other positions so as to form a core enlarged portion and also the core refractive index at the core enlarged portion is made lower than that at the portion of the optical waveguide line in other positions except those near the end portion and one part of the optical waveguide line is heated by laser 7 at the time of forming a spot size converting portion which enlarges spot size at the core enlarged portion. In this case, the higher the power with which CO2 laser 7 for example is applied, the larger the core diameter of the core enlarged portion is and the lower the refractive index of the core becomes. The spot size of waveguide light at the core enlarged portion is therefore enlarged by raising the power with which the CO2 laser 7 is applied.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明はスポットサイズ変換部に
ついて製作性・再現性のよい形成方法を提供するもので
ある。
FIELD OF INDUSTRIAL APPLICATION The present invention provides a method for forming a spot size converter with good manufacturability and reproducibility.

【0002】0002

【従来の技術とその課題】一般に、半導体光変調器など
の半導体光素子における導体光のスポットサイズと単一
モード光ファイバのスポットサイズとは、数倍程度異な
っている。したがって、半導体光素子とこの光ファイバ
とをそのまま直接結合させた場合には、結合損失が生じ
てしまう。
2. Description of the Related Art Generally, the spot size of a conductor light in a semiconductor optical device such as a semiconductor optical modulator and the spot size of a single mode optical fiber are several times different. Therefore, if the semiconductor optical device and this optical fiber are directly coupled as they are, coupling loss will occur.

【0003】この結合損失を少なくするために光ファイ
バ端部付近のコアのスポットサイズを拡大させたものが
ある。すなわち、図4に示すように、コア拡大光ファイ
バ[柳、白石、川上他:熱拡散によるコア拡大ファイバ
の伝搬特性:1990年度電子情報通信学会秋期全国大
会C−172]においては、光導体路部付近のコア径が
広くなっているとともに、端部付近のコアの屈折率は他
の部分のコア1のものに比べて低くなっている。従って
、端部付近のコア拡大部3のスポットサイズは従来形の
単一モード光ファイバのスポットサイズと比較して大き
くなっている。
In order to reduce this coupling loss, there is an optical fiber in which the spot size of the core near the end of the optical fiber is enlarged. In other words, as shown in FIG. The core diameter near the end portion is wide, and the refractive index of the core near the end portion is lower than that of the core 1 at other portions. Therefore, the spot size of the enlarged core portion 3 near the end is larger than that of a conventional single mode optical fiber.

【0004】このコア拡大形光ファイバの製造法として
は、図5に示すように従来、熱拡散炉4を用いて光ファ
イバ5を加熱する方法が使用されてきた。即ち、熱拡散
炉4の中に光ファイバ5を入れ、ヒータ6にて高温で保
持しておくことによりコア1の屈折率をクラッド2の屈
折率よりも高くしている物質がクラッド内に拡散される
。その結果、コア径が拡大されるとともにコアの屈折率
が低くなり、導波光のスポットサイズを拡大できること
になる。この光ファイバを途中で切断することにより、
端部にコア拡大部3を形成した光ファイバを製造するこ
とができる。
[0004] Conventionally, as a method for manufacturing this expanded core optical fiber, a method has been used in which an optical fiber 5 is heated using a thermal diffusion furnace 4, as shown in FIG. That is, by putting the optical fiber 5 into the thermal diffusion furnace 4 and keeping it at high temperature with the heater 6, the substance that makes the refractive index of the core 1 higher than the refractive index of the cladding 2 is diffused into the cladding. be done. As a result, the core diameter is enlarged and the refractive index of the core is lowered, making it possible to enlarge the spot size of the guided light. By cutting this optical fiber midway,
It is possible to produce an optical fiber with a core enlargement 3 formed at its end.

【0005】ところが、この方法では光ファイバ全体を
ある長さにわたって熱拡散炉に入れて加熱するため、コ
アを拡大すべき、光ファイバのごく一部分のみを加熱す
ることは、困難である。しかも、加熱面積が大きく局部
加熱ができないので、石英系光導波路での光出射端部や
光入射端部のみを加熱し、その端部のみのコアを拡大す
ることも実際上不可能であり、この従来の製造法では石
英系光導波路の光入射あるいは光出射端部のみのコアを
拡大することはできなかった。
However, in this method, the entire optical fiber is placed in a thermal diffusion furnace over a certain length and heated, so it is difficult to heat only a small portion of the optical fiber whose core is to be expanded. Moreover, since the heating area is large and local heating is not possible, it is practically impossible to heat only the light output end or the light input end of the silica-based optical waveguide and enlarge the core of only that end. With this conventional manufacturing method, it was not possible to enlarge the core only at the light input or light output end of the silica optical waveguide.

【0006】本発明は光導波路や光ファイバのごく一部
のみを加熱しコア拡大形光ファイバやコア拡大形光導波
路を形成する方法の提供を目的とするものでる。
An object of the present invention is to provide a method for forming an expanded core optical fiber or an expanded core optical waveguide by heating only a small portion of the optical waveguide or optical fiber.

【0007】[0007]

【課題を解決するための手段】上述の目的を達成する本
発明は、光導波路の端部付近のコア径をこの端部付近以
外の部分のコア径よりも拡大してコア拡大部を形成する
と共に、このコア拡大部のコア屈折率を上記端部付近以
外の部分のコア屈折率よりも低くし、上記コア拡大部で
のスポットサイズを大きくするスポットサイズ変換部の
形成方法において、上記コア拡大部の形成に当っては光
導波路の一部をレーザにより加熱することを特徴とする
[Means for Solving the Problems] The present invention, which achieves the above-mentioned objects, forms a core enlarged portion by enlarging the core diameter near the end of the optical waveguide compared to the core diameter at a portion other than the end. In addition, in the method for forming a spot size converting portion, the core refractive index of the core enlarged portion is made lower than the core refractive index of a portion other than the vicinity of the end portion, and the spot size in the core enlarged portion is increased. In forming the optical waveguide, a part of the optical waveguide is heated by a laser.

【0008】[0008]

【作用】炭酸ガス(CO2 )レーザのような高出力レ
ーザを用いることにより光導波路や光ファイバのごく一
部のみを加熱できる。
[Operation] By using a high-power laser such as a carbon dioxide (CO2) laser, only a small portion of the optical waveguide or optical fiber can be heated.

【0009】図1は石英系光導波路に本発明を適用した
場合の実施例を示す。図1はCO2 レーザ7を用い、
基板8上に形成された石英系光導波路の導波路端部を加
熱している。本実施例では高出力の例えばCO2 レー
ザを用いるため、従来用いられてきた熱拡散炉と異なっ
て、光導波路の光入射端部あるいは光出射端部など、光
導波路の一部のみのコア9やクラッド10の加熱が可能
となった。
FIG. 1 shows an embodiment in which the present invention is applied to a silica-based optical waveguide. Figure 1 uses a CO2 laser 7,
The waveguide end of the quartz optical waveguide formed on the substrate 8 is heated. Since this embodiment uses a high-power CO2 laser, for example, unlike a conventionally used thermal diffusion furnace, the core 9 or It became possible to heat the cladding 10.

【0010】図2には、照射時間を一定とした場合にお
けるCO2 レーザの光出力(P)とコア拡大部のスポ
ットサイズとの関係を表す。図からわかるように、CO
2 レーザの照射パワーが高いほどコア拡大部のコア径
は大きくなり、コアの屈折率は低くなる。従って、図3
に示すようにCO2レーザ7の照射パワーを高くすると
、コア拡大部の導波光のスポットサイズを大きくするこ
とができる。また、こうした加熱用高出力レーザは、光
出力、加熱時間、加熱位置などをコンピュータにより正
確に制御することが容易であるので、コア拡大部のテー
パ形状を含め、精度よく大量出産できるという利点もあ
る。更に、石英系光導波路の先端を溶融し、光導波路の
コア拡大部の先端にレンズを形成ことも可能である。
FIG. 2 shows the relationship between the optical output (P) of the CO2 laser and the spot size of the core enlarged portion when the irradiation time is constant. As can be seen from the figure, CO
2. The higher the laser irradiation power, the larger the core diameter of the core enlarged portion and the lower the refractive index of the core. Therefore, Figure 3
If the irradiation power of the CO2 laser 7 is increased as shown in FIG. In addition, these high-power lasers for heating can easily control the optical output, heating time, heating position, etc. accurately using a computer, so they have the advantage of being able to accurately produce large quantities of babies, including the tapered shape of the core expansion part. be. Furthermore, it is also possible to melt the tip of the quartz-based optical waveguide and form a lens at the tip of the expanded core portion of the optical waveguide.

【0011】以上、光導波路として石英系の光導波路を
例にとって説明してきたが、本発明は光ファイバにも適
用できることは言うまでもない。
[0011] The above description has been made by taking a quartz-based optical waveguide as an example of the optical waveguide, but it goes without saying that the present invention can also be applied to optical fibers.

【0012】0012

【発明の効果】以上説明したように、本発明では微細加
工に適している高出力レーザにより光導波路や光ファイ
バを加熱することによりコアの拡大と屈折率の低減を行
うので、光導波路や光ファイバの端部のみの加工が可能
となった。
Effects of the Invention As explained above, the present invention expands the core and reduces the refractive index by heating the optical waveguide or optical fiber with a high-power laser suitable for microfabrication. It is now possible to process only the end of the fiber.

【図面の簡単な説明】[Brief explanation of the drawing]

【図1】本発明の実施例の説明図である。FIG. 1 is an explanatory diagram of an embodiment of the present invention.

【図2】レーザ照射パワーとコア径、コア屈折率との特
性図である。
FIG. 2 is a characteristic diagram of laser irradiation power, core diameter, and core refractive index.

【図3】レーザ照射パワーとスポットサイズとの特性図
である。
FIG. 3 is a characteristic diagram of laser irradiation power and spot size.

【図4】コア拡大形光ファイバの構造図である。FIG. 4 is a structural diagram of an expanded core optical fiber.

【図5】熱拡散炉による加熱状態の説明図である。FIG. 5 is an explanatory diagram of a heating state by a thermal diffusion furnace.

【符号の説明】[Explanation of symbols]

7  CO2 レーザ 8  基板 9  コア 10  クラッド 7 CO2 laser 8 Board 9 core 10 Clad

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】  光導波路の端部付近のコア径をこの端
部付近以外の部分のコア径よりも拡大してコア拡大部を
形成すると共に、このコア拡大部のコア屈折率を上記端
部付近以外の部分のコア屈折率よりも低くし、上記コア
拡大部でのスポットサイズを大きくするスポットサイズ
変換部の形成方法において、上記コア拡大部の形成に当
っては光導波路の一部をレーザにより加熱することを特
徴とするスポットサイズ変換部の形成方法。
1. A core enlarged portion is formed by enlarging the core diameter near the end of the optical waveguide compared to the core diameter at a portion other than the end portion, and the core refractive index of the core enlarged portion is set to be the same as that of the end. In the method for forming a spot size converting section that increases the spot size at the core enlarged section by making the core refractive index lower than the core refractive index of a portion other than the vicinity, in forming the core enlarged section, a part of the optical waveguide is 1. A method for forming a spot size converting section, the method comprising: heating the spot size converting section.
JP2412743A 1990-12-21 1990-12-21 Method for forming spot size converting portion Pending JPH04220609A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2412743A JPH04220609A (en) 1990-12-21 1990-12-21 Method for forming spot size converting portion

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2412743A JPH04220609A (en) 1990-12-21 1990-12-21 Method for forming spot size converting portion

Publications (1)

Publication Number Publication Date
JPH04220609A true JPH04220609A (en) 1992-08-11

Family

ID=18521521

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2412743A Pending JPH04220609A (en) 1990-12-21 1990-12-21 Method for forming spot size converting portion

Country Status (1)

Country Link
JP (1) JPH04220609A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6442315B1 (en) 1997-11-18 2002-08-27 Samsung Electronics Co., Ltd. Optical waveguide chip and method of formation thereof
KR100418255B1 (en) * 2002-03-19 2004-02-14 학교법인 성균관대학 Expanded core waveguide for high coupling efficiency and method for fabricating as the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6442315B1 (en) 1997-11-18 2002-08-27 Samsung Electronics Co., Ltd. Optical waveguide chip and method of formation thereof
KR100418255B1 (en) * 2002-03-19 2004-02-14 학교법인 성균관대학 Expanded core waveguide for high coupling efficiency and method for fabricating as the same

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