JPH0422335B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a handling device used in a semiconductor device inspection device.

[Prior art]

In general, inspection equipment used in the process of testing the electrical characteristics of semiconductor devices in the manufacturing process of semiconductor devices (transistors, ICs, etc.) can be broadly classified into measuring equipment and handling equipment.

The present invention relates to the configuration of a measuring section for holding a semiconductor device of the handling device and connecting it to a measuring contactor, and provides a configuration that can prevent damage to the measuring device during electrical measurements.

Generally, the measuring part of the handling device is shown in Figure 2a,
As shown in FIG. 3B, it is composed of a shooter 2 for moving a semiconductor device 1, and a holding section 5 for electrically connecting the semiconductor device to a measurement contactor 4 attached to a test head 3 of a measuring device.

In such a handling device, when measuring the electrical characteristics of a semiconductor device under test, interference signals such as hum and noise generated in the handling device are transmitted to the device under test via the holding section 5 of the handling device. In some cases, the particles were guided to the semiconductor device 1, causing trouble in measuring electrical characteristics.

In particular, when measuring semiconductor devices for small signal amplification with low noise and electric voltage gain, there was a problem that stable measurements could not be made.

[Purpose of the invention]

The present invention solves the conventional drawbacks and provides a structure in which electrical environmental conditions are determined by a measuring device when measuring the electrical characteristics of a semiconductor device moving within a handling device.

[Structure of the invention]

The present invention provides a handling device used in an inspection device for testing semiconductor devices, in which a holding portion for holding a semiconductor device and inserting it into a measurement contactor is made of a conductive material, and the holding portion is connected to a housing of the handling device. This is a handling device for a semiconductor device, characterized in that the holding portion is electrically connected to a measuring device.

〔Example〕

Hereinafter, the present invention will be explained in detail according to the embodiment shown in FIGS. 1a and 1b.

In the present invention, the basic structure of the shooter 2 for moving the semiconductor device 1 is substantially the same as that of the conventional example shown in FIG. 2, and the test head 3 and contactor 4 of the measuring device are also substantially the same. In the present invention, the portion 5 that holds the semiconductor device 1 is made of a dielectric, and the electrode rod 6 is implanted in the test head 3.

Further, the holding part 5 made of the conductive material is attached to the housing 8 of the handling device via an insulating part 7 made of an insulating material. Therefore, in this embodiment, when the semiconductor device under test 1 is inserted into the contactor 4, the holding part 5 and the electrode rod 6 are brought into contact, and the test head 3 of the measuring device and the holding part 5 are electrically connected. Connect so that they are at the same potential.

By adopting such a configuration, the mechanism that holds the semiconductor device under test 1 operates as a handling device, but the holding section 5 electrically functions as a part of the measuring device. In particular, if the semiconductor device 1 is surrounded by the holding portion 5 made of a conductive material, an electrical shielding effect (or guarding effect) can be obtained, and interference signals from the handling device can be effectively prevented.

Therefore, in this embodiment, by changing the configuration of the portion of the handling device that holds the semiconductor device used in the inspection device that inspects the electrical characteristics of the semiconductor device, the handling device using the conventional technology can be easily replaced. This shows that it can be improved.

〔Effect of the invention〕

As explained above, the present invention can eliminate interference signals that affect the measurement performance of semiconductor device inspection equipment, eliminate the negative influence on measurement performance from handling equipment, and accurately measure the electrical characteristics of semiconductor devices. It has a measurable effect.

[Brief explanation of drawings]

FIGS. 1a and 1b are schematic explanatory diagrams showing one embodiment of a handling device for semiconductor devices according to the present invention;
2 is a front view, b is a side view, and FIGS. 2a and 2b are explanatory diagrams of a conventional device, where a is a front view and b is a side view. 1... Semiconductor device to be measured, 2... Shooter, 3... Test head, 4... Contactor,
5... Holding part, 6... Electrode rod, 7... Insulator, 8
...The housing of the handling device.

Claims (1)

[Claims] 1. In a handling device used in an inspection device for testing semiconductor devices, the holding portion that holds the semiconductor device and inserts it into the measurement contactor is made of a conductor, and the holding portion is electrically connected to the housing of the handling device. A handling device for a semiconductor device, characterized in that the device is mounted insulated and the holding portion is electrically connected to a measuring device.