JPH0422710U - - Google Patents

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Publication number
JPH0422710U
JPH0422710U JP6375790U JP6375790U JPH0422710U JP H0422710 U JPH0422710 U JP H0422710U JP 6375790 U JP6375790 U JP 6375790U JP 6375790 U JP6375790 U JP 6375790U JP H0422710 U JPH0422710 U JP H0422710U
Authority
JP
Japan
Prior art keywords
optical fiber
vacuum
flange
window
mounting body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6375790U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6375790U priority Critical patent/JPH0422710U/ja
Publication of JPH0422710U publication Critical patent/JPH0422710U/ja
Pending legal-status Critical Current

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  • Instruments For Viewing The Inside Of Hollow Bodies (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案に係る真空装置用光フアイバ機
器の取付体の一実施例の説明図である。 １０……フランジ、１１……透孔、１２……筒
体、２０……フレキシブル管、３０……光学窓、
３１……窓取付部材、３２……窓おさえ、４０…
…プローブ。 FIG. 1 is an explanatory diagram of an embodiment of a mounting body for an optical fiber device for a vacuum apparatus according to the present invention. 10...Flange, 11...Through hole, 12...Cylinder, 20...Flexible tube, 30...Optical window,
31...Window mounting member, 32...Window retainer, 40...
…probe.

Claims (1)

【実用新案登録請求の範囲】 １ フアイバスコープ、光フアイバセンサ等の光
フアイバ機器で用いるプローブを真空装置に取り
付ける真空装置用光フアイバ機器の取付体であつ
て、 前記プローブを挿入する透孔が設けられ、真空
チヤンバのフランジポートに取り付けられるフラ
ンジと、 被観察部を透視するための光学窓を気密に支持
する窓取付部材と、 該窓取付部材と前記フランジの透孔位置との間
を気密に接続するフレキシブル管とを有すること
を特徴とする真空装置用光フアイバ機器の取付体
。 ２ 請求項１記載の真空装置用光フアイバ機器の
取付体に、前記光学窓に前端面を臨ませて前記フ
ランジ側からフレキシブル管内にプローブを挿入
してセツトしたことを特徴とする真空装置用光フ
アイバ機器。[Claims for Utility Model Registration] 1. A mounting body for an optical fiber device for a vacuum device in which a probe used in an optical fiber device such as a fiberscope or an optical fiber sensor is attached to a vacuum device, the mounting body having a through hole into which the probe is inserted. a flange that is attached to a flange port of a vacuum chamber; a window mounting member that airtightly supports an optical window for seeing through the observed area; and an airtight space between the window mounting member and the through-hole position of the flange. A mounting body for optical fiber equipment for vacuum equipment, characterized by having a flexible tube for connection. 2. A light for a vacuum device, characterized in that a probe is inserted into the flexible tube from the flange side with the front end face facing the optical window and set in the mounting body of the optical fiber device for the vacuum device according to claim 1. Fiber equipment.
JP6375790U 1990-06-15 1990-06-15 Pending JPH0422710U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6375790U JPH0422710U (en) 1990-06-15 1990-06-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6375790U JPH0422710U (en) 1990-06-15 1990-06-15

Publications (1)

Publication Number Publication Date
JPH0422710U true JPH0422710U (en) 1992-02-25

Family

ID=31594090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6375790U Pending JPH0422710U (en) 1990-06-15 1990-06-15

Country Status (1)

Country Link
JP (1) JPH0422710U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01276047A (en) * 1988-04-28 1989-11-06 Matsushita Electric Ind Co Ltd Optical device for observation in vacuum tank

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01276047A (en) * 1988-04-28 1989-11-06 Matsushita Electric Ind Co Ltd Optical device for observation in vacuum tank

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