JPH0423323U - - Google Patents
Info
- Publication number
- JPH0423323U JPH0423323U JP6539490U JP6539490U JPH0423323U JP H0423323 U JPH0423323 U JP H0423323U JP 6539490 U JP6539490 U JP 6539490U JP 6539490 U JP6539490 U JP 6539490U JP H0423323 U JPH0423323 U JP H0423323U
- Authority
- JP
- Japan
- Prior art keywords
- inductance
- circuit
- power source
- high frequency
- frequency power
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measurement Of Current Or Voltage (AREA)
- Particle Accelerators (AREA)
Description
第１図は本考案の一実施例として示した高周波
装置の概略図を示したもの、第２図は従来の高周
波装置の概略図を示したもの、第３図は変流器の
概略図を示したものである。
１……高周波電源、２……整合回路、２Ａ……
第１容量可変手段、２Ｂ……第２容量可変手段、
２Ｃ……インダクタンス素子、３……負荷、４…
…検出回路、５……変流器、６……フエライトコ
ア、７……コイル、８……インダクタンス素子、
９……コンデンサ素子、１０……抵抗、１１……
検波回路、１２……制御装置。
Fig. 1 shows a schematic diagram of a high frequency device shown as an embodiment of the present invention, Fig. 2 shows a schematic diagram of a conventional high frequency device, and Fig. 3 shows a schematic diagram of a current transformer. This is what is shown. 1... High frequency power supply, 2... Matching circuit, 2A...
First variable capacity means, 2B... second variable capacity means,
2C...Inductance element, 3...Load, 4...
...detection circuit, 5 ... current transformer, 6 ... ferrite core, 7 ... coil, 8 ... inductance element,
9... Capacitor element, 10... Resistor, 11...
Detection circuit, 12...control device.
Claims (1)
回路を介して供給される負荷と、該整合回路の第
１のインダクタンス素子と、互いに直列接続され
た第２のインダクタンス素子及びコンデンサ素子
より成る回路であつて、前記第１のインダクタン
ス素子に並列接続された回路と、該第２のインダ
クタンス素子とコンデンサ素子の接続点に該各素
子に直列に接続された抵抗素子と、該抵抗素子に
印加される電圧を検出する回路と、該検出された
電圧、第２のインダクタンス素子のインダクタン
ス値、前記コンデンサ素子の容量値、前記抵抗素
子の抵抗値、及び前記高周波電源の周波数に基づ
いて負荷電流を算出する手段とを具備した高周波
装置。 A circuit consisting of a high frequency power source, a load to which the high frequency power from the power source is supplied via a matching circuit, a first inductance element of the matching circuit, a second inductance element and a capacitor element connected in series with each other. a circuit connected in parallel to the first inductance element, a resistance element connected in series to each element at a connection point between the second inductance element and the capacitor element, and an applied voltage to the resistance element. A circuit for detecting voltage, and calculating a load current based on the detected voltage, an inductance value of a second inductance element, a capacitance value of the capacitor element, a resistance value of the resistor element, and a frequency of the high-frequency power source. A high frequency device comprising means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6539490U JPH0423323U (en) | 1990-06-20 | 1990-06-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6539490U JPH0423323U (en) | 1990-06-20 | 1990-06-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0423323U true JPH0423323U (en) | 1992-02-26 |
Family
ID=31597186
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6539490U Pending JPH0423323U (en) | 1990-06-20 | 1990-06-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0423323U (en) |
-
1990
- 1990-06-20 JP JP6539490U patent/JPH0423323U/ja active Pending
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