JPH0423341Y2 - - Google Patents

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Publication number
JPH0423341Y2
JPH0423341Y2 JP1984075888U JP7588884U JPH0423341Y2 JP H0423341 Y2 JPH0423341 Y2 JP H0423341Y2 JP 1984075888 U JP1984075888 U JP 1984075888U JP 7588884 U JP7588884 U JP 7588884U JP H0423341 Y2 JPH0423341 Y2 JP H0423341Y2
Authority
JP
Japan
Prior art keywords
thickness
conductor
film
chromium
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984075888U
Other languages
Japanese (ja)
Other versions
JPS60190060U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7588884U priority Critical patent/JPS60190060U/en
Publication of JPS60190060U publication Critical patent/JPS60190060U/en
Application granted granted Critical
Publication of JPH0423341Y2 publication Critical patent/JPH0423341Y2/ja
Granted legal-status Critical Current

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  • Parts Printed On Printed Circuit Boards (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Description

【考案の詳細な説明】[Detailed explanation of the idea]

[考案の目的] (1) 産業上の利用分野 本考案は、優れた耐湿性導電体パターンを有す
るフレキシブルプリント回路板に関する。 (2) 従来の技術 従来、フレキシブルプリント回路板には、可撓
性のあるポリエチレンテレフタレートフイルム
(PET)にアルミニウムあるいは銅を真空蒸着法
で500〜2000Åの厚みに付着させた回路パターン
に、更にその上からカーボン塗膜を積層したもの
が一般的に使用されている。 (3) 考案が解決しようとする問題点 上記の従来品は金属導電体層の耐湿性が不充分
のために腐食されやすく、経時により電気伝導性
が損われる欠点を有している。 本考案は、金属導電体薄膜層としてアルミニウ
ム、銅、銀等の耐蝕性の劣悪な高導電性金属とク
ロムあるいはクロムを含有する耐食性金属の薄膜
を交互に多層積層し、その上からカーボン塗膜を
積層した構成にすることにより導電体の表面抵抗
が1Ω/□以下で、従来のものより耐蝕性に優れ
た安価で実用上良好なフレキシブルプリント回路
板を提供する。 [考案の構成] 本考案において、可撓性を有するフイルムとは
ポリエチレン、ポリプロピレンで代表されるポリ
オレフイン系、ナイロン6、ナイロン66、ナイロ
ン12で代表されるポリアミド系、ポリエチレンテ
レフタレート、ポリブチレンテレフタレートで代
表されるポリエステル系、ポリニトロセルロー
ス、ポリ酢酸セルロースで代表されるセルロース
系、ポリビニルアルコール、3フツ化ポリエチレ
ン、ポリカーボネート、ポリメチルメタクリレー
ト、ポリイミド等の有機樹脂からなるフイルムで
例示されるものであり、これらは単層でも2層以
上が貼り合されたものであつてもよい。しかし、
可撓性のある該フイルムはパターンの精度を向上
させるために熱収縮がなく寸法安定性の高い必要
があるため、二軸延伸されたもので、更にアニー
リングされたものが好ましい。 該フイルムの厚みは5μm以上、300μm以下が好
ましく、ハンドリングのしやすさ、外部からの衝
撃に対する耐久性の点で25μm以上、100μm以下
が特に好ましい。すなわち、25μm以下では耐久
性が悪く、100μm以上では可撓性に乏しくなる。 また、本考案において高導電性金属とは、銅、
アルミニウム、銀およびこれらの合金等を意味
し、これらの高導電性の金属と、クロムあるいは
クロムを含有する耐蝕性の金属の薄膜は一般的に
は真空蒸着法、スパツタリング法、イオンプレー
テイング法等で基材の可撓性のあるフイルムの表
面に均一に真空蒸着させる。より具体的には10-2
〜10-7mmHgの高真空雰囲気中で金属を抵抗加熱
方式、誘導加熱方式、高周波加熱方式で加熱して
蒸着するか、アルゴンガス等不活性ガスを導入し
た10-2〜10-4mmHgの高真空中で金属ターゲツト
材料の薄膜をスパツタリングして基材の可撓性フ
イルム上に付着させる。 該金属の厚みは回路の通電容量、回路の導体幅
と長さによつても違うが、安定した通電性を得る
ためには銅、アルミニウム、銀等の高導電性金属
の0.005μm以上の膜厚を必要とする。 また、該耐蝕性のクロムあるいはクロムを含有
する金属の薄膜は銅、アルミニウム、銀等の高導
電性金属の耐蝕性不足を保護するために0.005μm
以上の膜厚を必要とし、0.05〜0.039μmの範囲が
好ましい。この場合、クロムは耐蝕性に優れてい
るが、展性に乏しいので必要に応じてニツケル等
との合金を使用することが好ましい。 これら2種類の電気伝導性、耐蝕性の異なる金
属の積層回数に特に制限があるものではないが金
属薄膜積層の総厚みは0.01〜0.1μmの範囲とする
必要があり、0.02〜0.09μmの範囲が好ましい。金
属薄膜積層の総厚みが0.01μm未満の場合には、
通電性あるいは耐食性の低下が発生する。また前
記総厚みが0.1μmを越える場合に場合には、金属
薄膜積層の表面に亀裂が入り、導電体としての連
続的な通電性が損われる。また、該可撓性フイル
ム表面への2種類の金属の積層順にも特に制限は
ないが、耐蝕性の金属層を表面とするものが耐蝕
性の効果がより著しい。 また、本考案におけるカーボン層は、導電性向
上およびパターンの強度補強の目的で金属薄膜の
多層積層の上から印刷等により積層されたもので
あり、粒度の細い粒子が連続した0.1μm以上の厚
みの電気伝導性のある塗膜であり、30μm未満の
厚さのものが好ましい。 [考案の効果] 以下、本考案に係るフレキシブルプリント回路
板の実施例を従来の比較例とともに図によつて説
明する。 第1、2、3図は、本考案に係る実施例の断面
図であり、1は基材の可撓性フイルム、2,3,
4は積層導体部を示す。2は電気導電性の500Å
の厚みのアルミニウム蒸着膜、3は400Åの厚み
の耐蝕性のクロムあるいはニツケル・クロム合金
(合金重量比率80/20)のスパツタ膜、4は1μm
の厚みのカーボン塗膜膜を示す。これらの図で
2,3の部分はさらに複数層交互に積層されても
よい。 第4図は従来のフレキシブルプリント回路板断
面図で、金属導体部は、この電気伝導性の金属の
みから構成されているために、耐蝕性が不充分で
高湿度雰囲気中では金属層の腐食の問題が発生す
る。一方、耐蝕性のクロムあるいはクロムを含有
する金属のみの導体の場合には電気伝導性が不足
で、表面抵抗値にして、厚膜蒸着の場合でもせい
ぜい10Ω/□が限度となる。すなわち、本考案の
様に上述の2種類の金属薄膜層を交互に積層した
導体を使用して初めて電気伝導性、耐湿性両方の
性質に優れたフレキシブルプリント回路板を与え
ることが出来るのである。 以下、実施例と比較例とをより詳細に説明す
る。 50μm厚の二軸延伸ポリエチレンテレフタレー
トフイルム(PET)の片面に2×10-4mmHgの
真空度でベルジヤー型真空蒸着器を使つてAl又
はCuを400Åの厚みに、また、ニツケル・クロム
合金(合金重量比率80/20)、またはクロムを5
×10-3mmHgの真空度のマグネトロン型スパツタ
装置により400Åの厚みになるように付着させ、
その上からカーボン塗料を1μmの厚みにスクリー
ン印刷法により幅2μm全長1mの連続した櫛模様
の導体パターンを積層する。そしてカーボン印刷
部以外を塩化第二鉄5%、フツ酸5%の水溶液の
エツチング液に浸漬溶解し、第1表および第2表
のような構成のフレキシブルプリント回路板をつ
くつた。沸騰水中に浸漬前後の導体抵抗値を測定
した。この結果を第1表、第2表に示す。
[Purpose of the invention] (1) Industrial application field The present invention relates to a flexible printed circuit board having an excellent moisture-resistant conductor pattern. (2) Conventional technology Conventionally, flexible printed circuit boards are made by attaching aluminum or copper to a thickness of 500 to 2000 Å on flexible polyethylene terephthalate film (PET) using a vacuum evaporation method. A layer with a carbon coating layered on top is generally used. (3) Problems to be Solved by the Invention The above-mentioned conventional products have the disadvantage that the metal conductor layer has insufficient moisture resistance and is easily corroded, resulting in loss of electrical conductivity over time. The present invention consists of alternately laminating multiple layers of highly conductive metals with poor corrosion resistance, such as aluminum, copper, and silver, and thin films of chromium or corrosion-resistant metals containing chromium, as metal conductor thin film layers, and then applying a carbon coating on top. By having a laminated structure, the surface resistance of the conductor is 1Ω/□ or less, and an inexpensive and practically good flexible printed circuit board with superior corrosion resistance than conventional ones is provided. [Structure of the invention] In the present invention, flexible films include polyolefins such as polyethylene and polypropylene, polyamides such as nylon 6, nylon 66, and nylon 12, polyethylene terephthalate, and polybutylene terephthalate. Examples include films made of organic resins such as polyester-based, cellulose-based such as polynitrocellulose and polycellulose acetate, polyvinyl alcohol, trifluorinated polyethylene, polycarbonate, polymethyl methacrylate, and polyimide. may be a single layer or two or more layers bonded together. but,
The flexible film needs to have no heat shrinkage and high dimensional stability in order to improve pattern accuracy, so it is preferably biaxially stretched and further annealed. The thickness of the film is preferably 5 μm or more and 300 μm or less, and particularly preferably 25 μm or more and 100 μm or less in terms of ease of handling and durability against external impact. That is, if the thickness is 25 μm or less, the durability is poor, and if the thickness is 100 μm or more, the flexibility is poor. In addition, in this invention, highly conductive metals include copper,
This refers to aluminum, silver, and their alloys, etc., and thin films of these highly conductive metals and chromium or corrosion-resistant metals containing chromium are generally produced by vacuum evaporation, sputtering, ion plating, etc. The film is vacuum-deposited uniformly onto the surface of the flexible film base material. More specifically 10 -2
Metals are heated and vapor-deposited using resistance heating , induction heating, or high-frequency heating in a high vacuum atmosphere of ~ 10 -7 mmHg, or vapor deposition is performed using an inert gas such as argon gas. A thin film of metal target material is sputtered in a high vacuum to deposit it onto the flexible film of the substrate. The thickness of the metal varies depending on the current carrying capacity of the circuit and the width and length of the conductor in the circuit, but in order to obtain stable electrical conductivity, a film of 0.005 μm or more of highly conductive metal such as copper, aluminum, or silver is required. Requires thickness. In addition, the corrosion-resistant chromium or chromium-containing metal thin film is 0.005 μm in thickness to protect against the lack of corrosion resistance of highly conductive metals such as copper, aluminum, and silver.
The film thickness is preferably in the range of 0.05 to 0.039 μm. In this case, chromium has excellent corrosion resistance but poor malleability, so it is preferable to use an alloy with nickel or the like as necessary. There is no particular limit to the number of times these two types of metals with different electrical conductivity and corrosion resistance can be laminated, but the total thickness of the metal thin film lamination must be in the range of 0.01 to 0.1 μm, and should be in the range of 0.02 to 0.09 μm. is preferred. If the total thickness of the metal thin film stack is less than 0.01 μm,
Deterioration of electrical conductivity or corrosion resistance occurs. If the total thickness exceeds 0.1 μm, cracks will appear on the surface of the laminated metal thin film, impairing its continuous electrical conductivity as a conductor. Further, there is no particular restriction on the order in which the two types of metals are laminated on the surface of the flexible film, but a film having a corrosion-resistant metal layer on the surface has a more remarkable effect on corrosion resistance. In addition, the carbon layer in the present invention is a layer laminated by printing or other methods on top of a multilayer stack of metal thin films for the purpose of improving conductivity and reinforcing the strength of the pattern, and has a thickness of 0.1 μm or more and is made up of continuous fine particles. An electrically conductive coating with a thickness of less than 30 μm is preferred. [Effects of the invention] Examples of the flexible printed circuit board according to the invention will be described below with reference to the drawings together with conventional comparative examples. 1, 2, and 3 are cross-sectional views of embodiments of the present invention, in which 1 is a flexible film as a base material, 2, 3,
4 indicates a laminated conductor portion. 2 is electrically conductive 500Å
3 is a sputtered film of corrosion-resistant chromium or nickel-chromium alloy (alloy weight ratio 80/20) with a thickness of 400 Å, 4 is a 1 μm thick sputtered film
The carbon coating film has a thickness of . In these figures, a plurality of layers may be alternately laminated in parts 2 and 3. Figure 4 is a cross-sectional view of a conventional flexible printed circuit board.Since the metal conductor part is composed only of this electrically conductive metal, its corrosion resistance is insufficient and the metal layer is prone to corrosion in a high humidity atmosphere. A problem occurs. On the other hand, in the case of a conductor made only of corrosion-resistant chromium or a metal containing chromium, the electrical conductivity is insufficient, and the surface resistance value is limited to 10Ω/□ at most even in the case of thick film deposition. That is, only by using a conductor in which the two types of metal thin film layers described above are alternately laminated as in the present invention can a flexible printed circuit board with excellent electrical conductivity and moisture resistance be obtained. Examples and comparative examples will be described in more detail below. One side of a 50 μm thick biaxially stretched polyethylene terephthalate film (PET) was coated with Al or Cu to a thickness of 400 Å using a Bergier type vacuum evaporator at a vacuum level of 2 × 10 -4 mmHg. weight ratio 80/20) or chromium 5
It was deposited to a thickness of 400 Å using a magnetron type sputtering device with a vacuum level of ×10 -3 mmHg.
On top of that, a continuous comb-like conductor pattern with a width of 2 μm and a total length of 1 m was laminated using carbon paint to a thickness of 1 μm using the screen printing method. Then, the parts other than the carbon printed parts were immersed and dissolved in an etching solution containing 5% ferric chloride and 5% hydrofluoric acid to produce flexible printed circuit boards having the configurations shown in Tables 1 and 2. The conductor resistance values were measured before and after immersion in boiling water. The results are shown in Tables 1 and 2.

【表】【table】

【表】【table】 【図面の簡単な説明】[Brief explanation of the drawing]

第1図〜第3図は本考案に係るフレキシブルプ
リント回路板の実施例の断面図、第4図は従来の
フレキシブルプリント回路板の断面図である。 1……可撓性フイルム、2……電気伝導性に優
れた金属の蒸着薄膜、3……クロムあるいはクロ
ムを含有する耐蝕性金属の蒸着薄膜、4……カー
ボン粉末からなる塗膜。
1 to 3 are cross-sectional views of an embodiment of a flexible printed circuit board according to the present invention, and FIG. 4 is a cross-sectional view of a conventional flexible printed circuit board. 1... Flexible film, 2... Vapor deposited thin film of a metal with excellent electrical conductivity, 3... Vapor deposited thin film of chromium or a corrosion-resistant metal containing chromium, 4... Coating film made of carbon powder.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 可撓性を有するフイルムに金属薄膜導電体を設
けたフレキシブルプリント回路板において、該導
電体を高導電性金属と、クロムあるいはクロムを
含有する耐蝕性金属との、2層以上の交互多層積
層体で構成するとともに、該導電体の総厚みを
0.01〜0.1μmとし、さらにその上に0.1μm以上の
膜厚のカーボン層を積層したことを特徴とする耐
湿性導電体パターンを有するフレキシブルプリン
ト回路板。
In a flexible printed circuit board in which a metal thin film conductor is provided on a flexible film, the conductor is an alternating multilayer laminate of two or more layers of a highly conductive metal and chromium or a corrosion-resistant metal containing chromium. The total thickness of the conductor is
1. A flexible printed circuit board having a moisture-resistant conductor pattern having a thickness of 0.01 to 0.1 μm and further laminated thereon with a carbon layer having a thickness of 0.1 μm or more.
JP7588884U 1984-05-25 1984-05-25 Flexible printed circuit board with moisture-resistant conductor pattern Granted JPS60190060U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7588884U JPS60190060U (en) 1984-05-25 1984-05-25 Flexible printed circuit board with moisture-resistant conductor pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7588884U JPS60190060U (en) 1984-05-25 1984-05-25 Flexible printed circuit board with moisture-resistant conductor pattern

Publications (2)

Publication Number Publication Date
JPS60190060U JPS60190060U (en) 1985-12-16
JPH0423341Y2 true JPH0423341Y2 (en) 1992-05-29

Family

ID=30617524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7588884U Granted JPS60190060U (en) 1984-05-25 1984-05-25 Flexible printed circuit board with moisture-resistant conductor pattern

Country Status (1)

Country Link
JP (1) JPS60190060U (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50146869A (en) * 1974-05-15 1975-11-25
JPS5328295A (en) * 1976-08-27 1978-03-16 Hitachi Ltd Constructing nicr-au-sio2 conductor
JPS53138060A (en) * 1977-05-06 1978-12-02 Sharp Kk Thin film wiring
JPS5548469A (en) * 1978-09-29 1980-04-07 Toshiba Corp Soldering unit

Also Published As

Publication number Publication date
JPS60190060U (en) 1985-12-16

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