JPH04237002A - Liquid injecting and discharging mechanism integrated with sensor - Google Patents

Abstract

PURPOSE:To provide the liquid injecting mechanism integrated with a sensor which can be positioned at a desired differential point at a high speed with high accuracy and can inject and discharge liquid with high reliability. CONSTITUTION:A reflection pattern 18 embedded in the spacing between matrix optical switches or near the switches is illuminated to image this reflection pattern 18 on a photodetector 15. The liquid is injected and discharged to and from the spacing by a capillary 12 at the center of an objective lens 11 in accordance with this image.

Description

[Detailed description of the invention]

0001

[Industrial Application Field] The present invention involves injecting a refractive index matching liquid having a refractive index similar to that of an optical waveguide core into a minute gap provided at the intersection of a matrix optical switch used in an optical communication system. This relates to the liquid injection/drainage mechanism.

0002

[Prior Art] Aiming at application to optical communication systems, a small, low-loss, large-scale matrix optical switch has been proposed that switches optical paths by replacing materials with different refractive indexes in minute gaps provided at the intersections of matrix optical waveguides. (Tokugan Sho 6)
2-204845). The minute gap (hereinafter referred to as the difference point groove) of this matrix optical switch is formed with a width of about 10 μm from the viewpoint of reducing transmission loss, and the difference point groove pitch is also several hundred μm.
The degree and density are arranged. Therefore, the liquid injection mechanism that injects and discharges liquid into the difference groove of such a matrix optical switch is required to detect the target difference groove and accurately inject and discharge a minute amount of liquid into the difference groove. Ru. Furthermore, in order to ensure the reliability of the system, it is required to verify whether or not the liquid has been injected and discharged into the target point groove.

[0003]No prior art example has been found that satisfies these requirements with a single mechanism or device. A conceivable configuration combining the current technology is a configuration in which a dispenser for injecting solder or epoxy resin is combined with a CCD camera for detecting the difference point groove. (a) of FIG. 7 is
71 is a z-moving mechanism, 72 is an x-y moving stage, 73 is a CCD camera, 73a is an optical axis of the CCD camera 73, and 74 is a diagram showing a conventional example configured by this combination.
is a CRT, 75 is a dispenser, 76 is an injection/discharge nozzle, 76a is an injection/discharge shaft, 77 is a pipe, and 23 is a pump.

To position the target point groove 20 provided on the optical waveguide 17, as shown in FIG.
After focusing the CD camera 73, the xy moving stage 72 is moved, and the target difference point groove 20 is detected and positioned based on the image captured on the CRT 74. Next, in order to inject and discharge the liquid into the target difference groove 20, the optical axis 73a of the CCD camera 73 and the injection/discharge axis 76 of the injection/discharge nozzle 76 are
After moving the xy moving stage 72 by the offset amount δ with respect to a and positioning the injection/discharge shaft 76a at the center of the difference point groove 20, the pipe 77 is pressurized with the pump 23, and the injection/discharge nozzle 7
6, the liquid 22 is injected into the difference point groove 20. When discharging liquid, as in the case of injection, after detecting and positioning the target point groove 20 with the CCD camera 73, the xy moving stage 72 is moved by the offset amount δ to position the pouring and discharging shaft 76a in the point groove 20. decide. Thereafter, the pressure is reduced by the pump 23, and the liquid is discharged from the difference groove 20 by the injection/discharge nozzle 76.

As described above, in the liquid injection and discharge method using this device, the optical axis 73a of the CCD camera 73 that detects the target difference point groove 20 and the injection and discharge axis 76a of the injection and discharge nozzle 76 that injects and discharges the liquid are mismatched. After detecting the target difference point groove 20, the liquid injection mechanism must be blindly fed by the offset amount δ. Furthermore, since it is not possible to inject liquid into the target difference point groove 20 and monitor the discharge state, highly reliable liquid injection and
The disadvantage is that it cannot be discharged.

[0006] On the other hand, against the background of advances in bio-related technology, liquid injection/discharge devices have been developed that are capable of monitoring the injection/discharge conditions, which was not possible in the prior art. FIG. 8 shows a conventional example of a liquid injection/discharge device constructed by combining a microscope and an injection/discharge nozzle with a fine movement mechanism, in which 80 is a microscope, 81 is an xy sample stage, 82 is an objective lens, 83 is a z movement mechanism, 84
85 is a three-dimensional fine movement table for an injection/discharge nozzle, 85 is an injection/discharge nozzle, and 85a is an injection/discharge shaft.

With reference to FIG. 8, the positioning of the optical waveguide to the target point groove and the method of injecting and discharging liquid will be explained. Positioning to the target difference point groove 20 is performed by focusing the objective lens 82 of the microscope 80 on the target difference point groove 20 of the optical waveguide 17 mounted on the xy sample stage 81 using the z moving mechanism 83.
Based on the image on CRT74 captured by CD camera 73x
Move the y sample stage 81 and detect the target difference groove 20. Next, a liquid is injected from the injection/discharge nozzle 85 into the focal point of the objective lens 82 of the microscope 80 using the three-dimensional fine movement table 84 for the injection/discharge nozzle. To discharge the liquid, focus the objective lens 82 of the microscope 80 on the target difference groove 20 in the same way as during injection, and after detecting the target difference groove 20,
Position the injection/discharge nozzle 85 at the focal point of pump 2.
The pressure is reduced according to step 3.

As described above, the liquid injection and discharge method using this apparatus has the advantage that the injection and discharge state can be monitored using the microscope 80. However, since the optical axis 73a of the CCD camera 73 and the injection/ejection axis 85a of the injection/emission nozzle 85 do not match, the positioning must be performed twice: the positioning of the difference point groove 20 with respect to the objective lens 82 and the positioning with respect to the injection/ejection nozzle 85. Must be.

[0009]

[Problems to be Solved by the Invention] In both of the above-mentioned conventional examples, it is difficult to miniaturize the device, and the target difference point groove is manually detected from a large number of difference point grooves arranged in a matrix. There is a drawback that high speed and high precision positioning to the target difference point groove and high reliability of liquid injection and discharge cannot be achieved.

[0010] An object of the present invention is to provide a sensor-body fluid injection/drainage mechanism that enables high-speed, high-accuracy positioning to the target difference point groove and highly reliable liquid injection/drainage.

[0011]

[Means for solving the problem] In claim 1 of the present invention, 2
The refractive index of the optical waveguide core is approximated to the gap of the matrix optical switch, which has an optical waveguide arranged in a dimensional matrix and a gap forming a predetermined angle with the optical axis of the optical waveguide at the intersection of the optical waveguide. In a liquid injection/discharge mechanism that injects a refractive index matching liquid having a refractive index or discharges the refractive index matching liquid from the gap, means for illuminating a reflective pattern buried in or near the gap; The apparatus includes a means for forming an image of the reflection pattern on a light receiving element, a microtube at the center of the objective lens, and a means for injecting and discharging a liquid into the microtube. Furthermore, in a second aspect of the present invention, the refractive index matching liquid and a liquid tank portion for storing the refractive index matching liquid are provided inside the objective lens. Furthermore, in a third aspect of the present invention, a focus detection means is provided.

0012

[Operation] According to claim 1, the reflection pattern buried in the gap or the vicinity of the matrix optical switch is illuminated,
The reflection pattern is imaged on the light receiving element, and based on this image, liquid is injected into the gap using a microtube at the center of the objective lens.
Perform discharge. According to a second aspect of the present invention, the refractive index matching liquid is injected into and discharged from the liquid tank in the objective lens into the gap. Claim 3
According to the method, a focus detection means performs focus detection, and a reflection pattern is imaged on a light receiving element.

[0013]

[Embodiment] Fig. 1 is a configuration diagram showing an embodiment of the present invention, and Fig. 2
3 is a diagram for explaining the difference point positioning method, and FIG. 3 is a diagram for explaining liquid injection and discharge. In the figure, 1 is a semiconductor laser, 2
is a collimator lens, 3 is a beam shaping prism, 4 is a linearly polarized parallel beam, 4a is a circularly polarized beam, 5 is a total reflection prism, 6 is an optical axis of the parallel beam, 7 is polarized light Beam splitter, 8 is a λ/4 plate, 9 is a transparent glass plate, 10 is a lens holder, 11 is an objective lens, 12 is a transparent microtube, 1
3 is a circularly polarized reflected beam, 13a is a linearly polarized reflected beam,
14 is an imaging lens, 15 is a CCD element, 16 is a transparent pipe, 17 is a matrix optical waveguide, 18 is a reflection pattern indicating the address of the difference point groove 20 provided in the optical waveguide 17, and 19 is provided near the difference point groove 20. 20 is a difference point groove, 21 is a liquid tank, 22 is a refractive index matching liquid (hereinafter referred to as liquid), 23 is a pump, 1
00,101 is a casing.

In this embodiment, the purpose of injecting and discharging liquid into the difference groove is achieved by simplifying the liquid injection mechanism by easing positioning,
In order to save money and improve the reliability of liquid injection and discharge, the liquid is positioned in a liquid reservoir provided near the difference groove, and the liquid is injected and discharged into the difference groove through this liquid reservoir. Hereinafter, a method for positioning the liquid reservoir provided at the side of the objective difference point groove will be explained using FIGS. 1 and 2. The emitted light from the semiconductor laser 1 passes through a collimator lens 2 and a beam shaping prism 3, and is converted into a linearly polarized parallel beam 4 shaped into a circular shape. The optical path of the beam is bent and the beam enters the polarizing beam splitter 7. Here, the total reflection prism 5 is used to downsize the irradiation optical system, and the semiconductor laser 1 and the collimator lens 2 are aligned in the x direction.
, the beam shaping prism 3 may be arranged on a straight line of the optical axis 6 of the parallel beam. The linearly polarized parallel beam 4 incident on the polarizing beam splitter 7 is totally reflected in the z direction by the polarizing beam splitter 7, and then the linearly polarized parallel beam 4 is transformed into a circularly polarized beam by the λ/4 plate 8. - is converted to system 4a. Thereafter, this circularly polarized beam 4a passes through a transparent glass plate 9, is focused by an objective lens 11 held in a lens holder 10, and is reflected by a reflection pattern 18 embedded in a liquid reservoir 19 on an optical waveguide 17. irradiate. The diameter of the irradiated circularly polarized beam 4a is slightly larger than the reflection pattern 18, as shown in FIG. 2(a). The circularly polarized reflected beam 13 reflected from this reflection pattern 18 passes through the λ/4 plate 8 and the polarizing beam splitter 7, and then returns to the previously outgoing circularly polarized beam 4.
The reflected linearly polarized beam 13a is converted into a linearly polarized reflected beam 13a having a phase 90 degrees different from that of the reflected beam 13a, and completely passes through the polarized beam splitter 7. By combining the linearly polarized parallel beam 4 of the semiconductor laser 1 with the polarization characteristics of the polarizing beam splitter 7 and the λ/4 plate 8, the semiconductor laser is
Efficient use of light can be realized by reducing the return light noise of the laser 1 and by total reflection (outward path) and total transmission (return path) of the light beam at the polarizing beam splitter 7. The linearly polarized reflected beam 13a emitted from the polarized beam splitter 7 forms an enlarged image of a reflected pattern 18 on the CCD element 15 by the imaging lens 14. As shown in FIG. 2(b), the CCD element 1
The address position of the difference point groove 20 is calculated from the type of reflection pattern 18 captured on 5, and the light gravity center position of the reflection pattern 18 is calculated by image processing. By moving the liquid injection mechanism so as to move the liquid injection mechanism, the target liquid reservoir 19 can be positioned.

Next, using FIG. 3, inject the liquid into the target difference point groove,
Explain how to discharge. To inject the liquid into the target difference groove 20, after positioning it in the liquid reservoir 19 provided on the side of the difference groove 20, the liquid 22 in the liquid tank 21 is pumped through the transparent pipe 16 and the fine tube 1 using the pump 23.
2 to inject the liquid 22 into the liquid reservoir 19. The liquid 22a injected into the liquid reservoir 19 flows into the difference point groove 20 due to the surface tension of the wall or bottom of the liquid reservoir 19 and the surface tension of the difference point groove 20.
Naturally injected into the body. At this time, the liquid injection into the liquid reservoir 19 is as follows:
The liquid 22a, which has become spherical at the tip of the microtube 12a, is brought into contact with the wall or bottom of the liquid reservoir 19, which is the injection destination. In addition, the liquid is discharged from the difference groove 20 after positioning it to the liquid reservoir 19.
Put the fine tube 12 into the liquid 22b of the liquid reservoir 19, and pump the pump 23.
This creates a negative pressure inside the transparent pipe 16 and the microtube 12, and the liquid in the difference groove 20 is sucked and discharged through the microtube 12.

The transparent pipe 16 is fixed to the transparent glass plate 9 with a transparent adhesive or the like, and the fine tube 12 disposed at the center of the objective lens 11 is also made of a transparent material.
6. The microtube 12 has almost no effect on the imaging characteristics. Here, transparent refers to having a refractive index substantially equal to the refractive index of the objective lens 11 and having no absorption.

FIG. 4 shows another embodiment, in which
41 is a refractive index matching liquid tank, and 42 is a minute volume change element. In this embodiment, a refractive index matching liquid tank 41 is provided inside the objective lens 11, and a minute volume change element 42 is placed inside the refractive index matching liquid tank 41.
This is an example in which a small amount of liquid is injected and discharged by using the volume change of the small volume change element 42. The method of positioning the liquid into the liquid reservoir provided on the side of the target difference point groove is the same as in the first embodiment, so the explanation will be omitted, and only the method of injecting and discharging a small amount of liquid will be explained. When the volume of the micro volume change element 42 provided in the refractive index matching liquid tank 41 is increased by a small amount, a pressure difference is generated between the refractive index matching liquid tank 41 and the micro tube tip 12a, and the volume of the micro volume change element 42 provided in the refractive index matching liquid tank 41 is increased. A liquid 22 flows within the microtube 12 . The liquid that flows out becomes a spherical droplet 22a with a volume corresponding to the volume change at the tip 12a of the microtube, so a minute amount of liquid can be controlled.
can be done. The liquid is injected into the target difference groove 20 using the surface tension of the wall surface of the liquid reservoir and the difference groove, as in the first embodiment. Next, the target liquid discharge from the difference point groove 20 is performed by performing the opposite operation to the injection, that is, by returning the volume of the minute volume change element 42 that increased by a minute amount at the time of injection, to the same amount as the previously injected amount. This is done by aspirating the liquid.

FIG. 5 shows another embodiment in which a focus detection function is added to the embodiment shown in FIG. 4, and FIG. 6 is a diagram for explaining the focus detection function. In the figure, 50 is a critical angle prism, 51 is the incident light to the critical angle prism 50, 51a is the optical axis of the incident light to the critical angle prism 50, 52 is the screen light, and 52a is above the optical axis 51a of the screen light 52. 15L is the left surface of the CCD element 15, 15R is the right surface of the CCD element 15, 53 is the diverging light, and 53a is the light below the optical axis 51a of the diverging light 53.

The difference point positioning method and the liquid injection/discharge method in this embodiment are the same as those in the previous embodiment, so their explanation will be omitted, and the focus detection method will be explained below. In FIG. 5, the polarizing beam splitter 7 is reflected from the reflective pattern 18.
The linearly polarized beam 13a that has completely passed through the rays is incident on a critical angle prism 50 having an inclined surface formed at a certain angle (critical angle .theta.c). Light 51 incident on the critical angle prism 50
When in focus, the light is totally reflected by the critical angle prism 50 (FIG. 6(b)).

When the reflection pattern 18 is away from the focal point, the light 51 incident on the critical angle prism 50 becomes a flashing light 52, and the light 52a above the optical axis 51a passes through the critical angle prism 50. As a result, the right surface 15R on the CCD element 15 becomes dark (FIG. 6(a)). Conversely, when the reflection pattern 18 approaches the focal point, the light 51 incident on the critical angle prism 50 becomes a diverging light 53 and the optical axis 51
The light 53a at the lower part of a passes through the critical angle prism 50, and as a result, the left surface 15L on the CCD element 15 becomes dark (Fig. 6
(c)). Therefore, by slightly moving the mechanism in the z direction so that the amount of light on the left and right surfaces of the CCD element 15 is always equal, the position in the focal direction can be controlled. In this embodiment, a focus detection method using the critical angle method has been described, but as another focus detection method, a knife edge is arranged at the focus position f of the imaging lens 14 shown in FIG. The edge method may also be used. Note that this embodiment can also be applied to a case where a focus detection function is added to the structure shown in FIG.

In the embodiments described above, coherent light from a semiconductor laser was used as illumination light for the reflection pattern on the optical waveguide, but incoherent light from an LED may also be used. Since the above-mentioned return optical noise to the semiconductor laser is not relevant, a simple beam splitter may be used instead of the combination of the polarizing beam splitter and the λ/4 plate described in the embodiment.

[0022]

As described above, according to claims 1 to 3, the optical axis on the light-receiving element and the liquid injection/discharge axis can be arranged to coincide with each other, so that high-speed and high-accuracy delivery to the target difference point groove can be achieved. Positioning and highly reliable liquid injection and discharge can be achieved. Also, claim 2
According to this method, the mechanism can be made more compact. Furthermore, according to claim 3, more accurate positioning and more reliable liquid injection and discharge can be realized.

[Brief explanation of the drawing]

FIG. 1 is a schematic diagram showing an embodiment of the present invention.

[Figure 2] Diagram explaining the difference point positioning method

[Figure 3] Diagram explaining liquid injection and discharge

[Fig. 4] Schematic diagram showing another embodiment

[Fig. 5] Schematic diagram showing another embodiment

[Figure 6] Diagram explaining focus detection

[Figure 7] Schematic diagram showing one conventional example

[Fig. 8] Schematic diagram showing another conventional example

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1... Semiconductor laser, 2... Collimator lens, 3... Beam shaping prism, 5... Total reflection prism, 7... Polarizing beam splitter, 8... λ/4 plate, 9... Transparent glass plate, 10... Lens holder, 11... Objective lens, 12... Microtube, 14...
Imaging lens, 15... CCD element, 16... Transparent piping, 17
...Matrix optical waveguide, 18...Reflection pattern, 19...Liquid reservoir, 20...Difference groove, 21...Liquid tank, 22...Refractive index matching liquid,
23... Pump, 41... Refractive index matching liquid tank, 42... Minute volume change element.

Claims (3)

[Claims] 1. A matrix optical switch has an optical waveguide arranged in a two-dimensional matrix and a gap forming a predetermined angle with the optical axis of the optical waveguide at the intersection of the optical waveguide. In a liquid injection/discharge mechanism that injects a refractive index matching liquid having a refractive index similar to that of the core or discharges the refractive index matching liquid from the gap, a reflective pattern embedded in or near the gap. a means for illuminating the reflection pattern on a light-receiving element, a means for forming an image of the reflection pattern on a light-receiving element, and a means for having a microtube at the center of the objective lens and for injecting and discharging a liquid into the microtube. sensor - body fluid injection/drainage mechanism. 2. The sensor-body fluid injection/drainage mechanism according to claim 1, further comprising the refractive index matching liquid and a liquid tank section for storing the refractive index matching liquid inside the objective lens. 3. The sensor-body fluid injection/drainage mechanism according to claim 1 or 2, further comprising focus detection means.