JPH0424855Y2 - - Google Patents

Description

[Detailed explanation of the invention] [Purpose of the invention] (Field of industrial use) This invention relates to a high-purity material storage container, and is a high-purity etching material used in semiconductor manufacturing, etc.
Photoresist materials, doping sources, cleaning materials,
Alternatively, in containers for storing high-purity materials such as those used in biotechnology, impurities (hereinafter referred to as particles) generated due to the sliding between the container mouth and the lid when the lid is attached to seal the container. ) is prevented from being mixed into the high purity material inside the container.

(Prior art) Conventionally, when storing high-purity materials such as those mentioned above, they are placed in a special container made of synthetic resin such as polyethylene or fluororesin, and the lid is secured with a screw. This ensures that it is kept tightly sealed to prevent any particles from entering.

On the other hand, as a tank cap, JP-A-54-127784
In the publication, in order to prevent the sealing member from being twisted when the outer cover is rotated and screwed on, the seal member is screwed onto the outer periphery of the tank inlet at a predetermined operating angle, and at a larger operating angle. In this case, there is an outer cover which rotates idly, an inner cover which is fitted with a sealing member that is slidably provided inside the outer cover and faces and abuts against the edge of the tank inlet, and the sealing member is urged toward the edge of the tank inlet. A method has been proposed that includes a biasing means that generates a predetermined sealing pressure.

(Problems to be solved by the invention) <Problems with conventional technology> However, even in containers that are strictly stored in this way, particle contamination has not yet been completely prevented.

Therefore, as a result of further investigation into the cause of this particle contamination, the following points have been largely focused on as the cause of particle contamination.

That is, there were almost no problems with the inner surface of the container body, but there was a problem with the capping structure of the lid.

The capping structure of the lid of the conventional high-purity material storage container is
A bottomed cylindrical lid with a plurality of threads threaded on its inner circumferential surface, a mouth portion into which the lid is screwed together, and a space between the inner bottom surface of the lid and the opening end surface of the mouth portion. It consists of a packing that is interposed to maintain a sealed state.

Therefore, when the lid is rotated when the lid is attached, the opening end surface of the opening remains stationary with respect to the rotation of the lid, so the packing often rotates at the same time as the lid rotates. As a result, the packing and the end surface of the mouth opening rub against each other, and some very small particles are generated due to the sliding movement. The particles then fall into the container and mix with the high-purity material inside. In this case, particles of this size pose no problem for ordinary liquids, etc., but when it comes to high-purity materials, even particles of this size pose a major problem in terms of its function and operation. Further, particles were also generated at the threaded portion of the screw, and particles often entered the container when the lid was removed.

Therefore, if the structure of the tank cap proposed in JP-A No. 54-127784 is used, the packing will hardly rotate at the same time as the lid, so the particles will not be inside the container as described above. However, this is only theoretical; in reality, this structure is designed to prevent the sealing member from being twisted to the extent that it does not impair the sealing effect. It gets twisted a little. In other words,
The major structural problem lies in the use of a biasing means, specifically a spring, to generate a predetermined sealing pressure, and although the difference in frictional resistance between the sealing member and the spring is utilized to some extent, As the outer cover is rotated, the biasing pressure is gradually increased, so even when the biasing pressure becomes considerably strong, the screwing is not completely stopped, so the screwing is not completely stopped at that delicate stage. The seal member will rotate, albeit slightly. In order to eliminate this to some extent, it is designed to be screwed into the outer periphery of the tank inlet at a predetermined operating angle, and to idle at an operating angle beyond that, and this structure has proven that. There is.

However, there is no problem with this structure as long as the torsion does not impair the sealing effect of the sealing member. In this case, the rotation of the sealing member must be suppressed to an extent that is less than the twist that does not impair the sealing effect of the sealing member, in order to fulfill its role as a lid. There were problems in that the existing tank cap structure could not fulfill its role, and it also had the problem of becoming structurally complicated.

<Technical Issues> In view of the above-mentioned problems, this invention was developed to improve the quality of high-purity etching materials used in semiconductor manufacturing, photoresist materials, doping sources, cleaning materials, and materials used in biotechnology. When attaching a lid to a container for storing high-purity materials such as those that are to be sealed, it is necessary to prevent particles generated by sliding between the container opening and the lid from entering the container, and to prevent the lid from attaching to the lid. This was devised with the aim of making it easy to perform the process, while also being able to maintain a sufficiently airtight state.

[Structure of the invention] (Means for solving the problem) This invention is a high-purity material storage container that is sealed by attaching an outer lid to the mouth of the container that does not contain any impurities. An appropriate number of threaded threads with large leads are formed on the outer periphery of the lid, and the outer lid has a bottomed cylindrical shape with the bottom as a top plate, and the inner periphery has the threaded parts. A threaded part is provided to allow the cap to be attached with a small amount of rotation, and an inner lid is interposed between the open end of the container mouth and the inner surface of the outer lid top plate, and the inner lid is fitted into the mouth. forming a flange at one end of the column that cannot be fitted into the mouth;
The end surface of one end where the flange is formed is formed into a surface with excellent lubricity, and the inner lid is further provided with a sealing ring made of an elastic material with high frictional resistance such as a rubber material. A relief is provided to be placed between the flange and the end surface of the mouth portion when the inner lid is fitted into the inner lid, and to minimize contact with the end surface of one end where the flange of the inner lid is formed on the inner surface of the top plate. The contact friction between the sealing ring and the end surface of the container mouth with the flange of the inner lid against the contact friction resistance between the inner surface of the top plate and the end surface of one end where the flange of the inner lid is formed by forming a concave portion. The above-mentioned problem is solved by making the resistor much larger.

(Function) In a high-purity material storage container that is sealed by attaching an outer lid to the mouth of the container in which particles are not present inside, a sealing ring is fitted onto the column of the inner lid, and then this column is inserted into the mouth. It can be inserted and overturned. By doing so, the sealing ring will come into contact with the flange of the inner lid,
In addition, the sealing ring is also in contact with the opening end surface of the mouth portion, that is, the sealing ring is interposed between the opening end surface and the flange. In addition, by providing an escape recess on the inner surface of the top plate and forming one end surface of the inner lid on which the flange is formed into a surface with excellent smoothness, the inner surface of the top plate and the flange of the inner lid can be easily moved. The formed end face has a small contact surface and is very slippery. Therefore, when the outer lid is attached to the mouth with a small rotation, a sealing ring made of an elastic material is interposed between the flange and the opening end surface, and its elasticity makes it difficult to slip.

At that time, the sealing ring is made of an elastic material with high frictional resistance, such as a rubber material, so that the inner lid can resist the contact frictional resistance between the inner surface of the top plate and the end surface of one end where the flange of the inner lid is formed. By significantly increasing the contact friction resistance between the flange, sealing ring, and end surface of the container mouth, the contact surface of the inner lid slides against the inner surface of the top plate, and the inner lid does not rotate at all with respect to the mouth. The container is sealed by the outer lid via the inner lid and the sealing ring while the container is kept in a closed state.

The movement is achieved by a screw part with an appropriate number of large leads on the outer circumference of the mouth that can be screwed in with a small amount of rotation, and a screw part that is screwed into the threaded part of the outer lid and can be screwed in with a small amount of rotation. It is performed with little rotation with the joint,
Moreover, it is carried out instantaneously by surface contact between solid objects.

(Embodiment) An embodiment of this invention will be described below with reference to the drawings.

That is, the reference numeral 1 shown in the figure is the container body,
It consists of a body part 2 and a mouth part 3.

The container body 1 is made of a material with excellent corrosion resistance, such as stainless steel, and is coated with a special fluorine coating from its inner surface to the outer circumferential surface of the tip 16 of the mouth 3 to further improve its corrosion resistance. .

A threaded portion 14 is formed on the outer peripheral surface of the mouth portion 3 near the body portion 2. This screw part 14
When attaching the outer lid 4 to the mouth portion 3, it is possible to attach the outer lid 4 with a small amount of rotation, for example, about 1/6 rotation.
A screw groove 15 with a large inclination divides the circumference into three equal parts and is provided with one groove in each, for a total of three grooves.
The capping is completed when the screws are fitted to about half of the screw grooves 15.

On the other hand, an outer lid 4 having a cylindrical shape with a bottom is attached to the opening 3, and an inner lid 5 is interposed between the inner surface of the top plate 7 serving as the bottom of the outer lid 4 and the open end 17 of the opening 3. It's becoming like that.

The outer lid 4 is provided with screw engagement protrusions 8 at three locations on its inner peripheral surface as screw engagement portions that are screwed into the respective screw grooves 15, and the top plate 7.
A circular relief recess 9 is provided on the inner surface concentrically with the outer lid 4. The escape recess 9 has a diameter slightly smaller than the flange 11 described later, and is intended to minimize the contact area between the top plate 7 of the outer lid 4 and the contact surface 12 of the inner lid 5, described later.

The inner lid 5 is a cylinder 10 having a diameter that can be fitted into the opening 3 and has a flange 11 formed at one end thereof. This flange 11 can be inserted into the outer lid 4 and has a diameter larger than the inner circumference of the mouth part 3, so that when the inner lid 5 of the mouth part 3 is overturned, the inner lid 5 is inserted into the container body 1. When it functions to stop the O-ring 6 from falling inward, it also serves as a holding plate for interposing the O-ring 6 between it and the opening end 17 of the mouth portion 3 by concentrically abutting the O-ring 6 described below. Moreover, the cylinder 10
The end surface on the flange 11 side and one surface of the flange 11 are continuous, and this surface becomes a contact surface 12 that comes into contact with the inner surface of the top plate 7.

Further, a sealing ring such as an O-ring 6 made of an elastic material with high frictional resistance is fitted onto the cylinder 10 of the inner lid 5. An O-ring fitting groove 13 is provided around the entire circumference near the flange 11 on the cylinder 10 of the inner lid 5.
3 is engaged with and held by an O-ring 6.

The outer lid 4 and inner lid 5 thus formed are attached to the mouth portion 3 in the following manner.

That is, first, as described above, the O-ring 6 is externally fitted onto the inner lid 5, and is placed and held at the position of the O-ring fitting groove 13. At this time, the O-ring 6 is selected to have an inner diameter slightly smaller than the diameter of the cylinder 10 of the inner lid 5, and when fitting onto the cylinder 10, the O-ring 6 is expanded slightly and inserted into the O-ring fitting groove 1. When it comes to this position, it should be in a state where it is exactly fitted on the outside.

Inner lid 5 with O-ring 6 fitted in this way
can be covered by inserting the cylinder 10 into the mouth part 3.
Then, as shown in FIG.
The ring 6 and the flange 11 are in contact with each other.

Next, the outer cover 4 is covered and fitted from above, and the screw engaging protrusion 8 is engaged with the screw groove 15 to approximately 1/6
Attach the crown by rotating it a certain amount. At that moment,
The depth of the outer lid 4 is set such that the contact surface 12 of the inner lid 5 is pressed against the inner surface of the top plate 7 after the crown attachment is completed.

As a result, the sliding resistance between the inner surface of the top plate 7 of the outer lid 4 and the contact surface 12 of the inner lid 5 is very small because the contact area is small and it is easy to slip. The sliding resistance of is very large because the pressure contact is made through an elastic material with high frictional resistance, and the difference is much larger.If the opening 3 is fixed, the inner lid 5 will not rotate and will make contact. The outer lid 4 is attached to the mouth portion 3 while the surface 12 and the inner surface of the point plate 7 are in a sliding state. Therefore, since sliding is performed outside the inner lid 5, particles generated by the sliding do not enter the container body 1 and do not mix with the high-purity material inside.

[Effects of the invention] This invention constructed as described above has a structure for attaching a cap to a high-purity material storage container, and has an appropriate number of large leads that can be screwed onto the outer periphery of the opening 3 of the container with a small amount of rotation. A threaded portion 14 is formed, and the outer lid 4
has a bottomed cylindrical shape with a top plate 7 at the bottom, and has a threaded part on its inner circumferential surface that is threaded into the threaded part 14 and can be attached with a small amount of rotation in order to obtain a sealed state. The work of putting on the crown can be done very easily and instantaneously, and in some cases it can be done with one hand.

Moreover, the end surface of the inner lid 5 at one end where the flange 11 is formed is formed into a surface with excellent smoothness,
Furthermore, a sealing ring 6 made of an elastic material with high frictional resistance, such as a rubber material, is attached to the inner lid 5 between the flange 11 and the end surface of the opening 3 when the inner lid 5 is fitted into the opening 3. A relief recess 9 is formed on the inner surface of the top plate 7 to minimize contact with one end surface on which the flange 11 of the inner lid 5 is formed. The contact friction resistance between the flange 11 of the inner lid 5, the sealing ring 6, and the end surface of the container opening 3 is greater than the contact friction resistance between the flange 11 of the inner lid 5 and the end surface of the inner lid 5 on which the flange 11 is formed. Due to the significantly larger size, when the column is fitted into the mouth part 3 and the inner lid 5 can be covered with the mouth part 3, an O is formed between the flange 11 of the inner lid 5 and the opening end 17 of the mouth part 3. A ring 6 will be interposed. As a result, the sliding resistance of the inner lid 5 against the opening 3 becomes very large because the inner lid 5 is pressed against the opening 3 through the elastic material, and if the opening 3 is fixed, the inner lid 5 is difficult to turn. Since the O-ring 5 is made of an elastic material, by pressing the inner lid 5 against the opening 3, a very good sealing state can be obtained.

Also, the contact surface 12 of the inner lid 5 with the inner surface of the top plate 7
is a surface with excellent smoothness, and the inner surface of the top plate 7 is provided with an escape recess 9 that minimizes contact with the contact surface 12, so that the inner surface of the top plate 7 and the flange 11 of the inner lid 5 are The end surface of one end formed thereon has few connecting surfaces and is in a very slippery state.
Therefore, when the outer lid 4 is attached to the mouth portion 3 with a small rotation, the sealing ring 6 made of an elastic material is interposed between the flange 11 and the surface of the opening end 17, and its elasticity makes it difficult to slip.

At this time, the sealing ring 6 is made of an elastic material with high frictional resistance, such as a rubber material, so that it can resist the contact frictional resistance between the inner surface of the top plate 7 and the end surface of the inner lid 5 at one end where the flange 11 is formed. , flange 1 of inner lid 5
1, the sealing ring 6, and the end surface of the container opening 3, by significantly increasing the contact friction resistance of each,
The contact surface of the inner lid 5 slides against the inner surface of the top plate 7, and the inner lid 5 does not rotate at all with respect to the mouth part 3, and the container is closed to the outer lid via the inner lid 5 and the sealing ring 6. sealed by.

The movement is achieved by screwing the outer circumference of the mouth part 3 with an appropriate number of screw threads 14 with large leads that can be screwed with a small rotation, and by screwing into the threaded part 14 of the outer lid 4, the crown can be fastened with a small rotation. This is done with a small amount of rotation of the threaded part, and it is done instantaneously by surface contact between solids. As a result, in combination with the above-mentioned good sealing condition, particles due to slippage will not enter the container at all.

This is done almost instantaneously, especially in surface contact with solid objects, so it is possible to gradually apply pressure, such as in the tank cap structure proposed in JP-A No. 54-127784, which uses a spring. Compared to the case where the rotation increases, the inner lid 5 remains completely unrotated with respect to the mouth portion 3. Therefore, particles are completely prevented from falling into the container.

As explained above, according to this invention, in a high-purity material storage container that is sealed by attaching an outer lid to the mouth of the container in which no particles exist inside,
It has a very simple structure, and can completely prevent particles from entering, and by extension, from mixing with the high-purity material inside.
It is easy to attach the container, and furthermore, since the container is not structurally complex, there is no increase in manufacturing cost compared to conventional containers, which is a practical advantage.

[Brief explanation of drawings]

The drawing shows one embodiment of this invention.
The figure is a partially cutaway exploded perspective view, and FIG. 2 is a front view of the crown attached. 1... Container body, 2... Body, 3... Mouth, 4
...Outer cover, 5...Inner cover, 6...O ring, 7...
Top plate, 8...screw engagement protrusion, 9...relief recess, 1
0... Cylinder, 11... Flange, 12... Contact surface, 13... O-ring fitting groove, 14... Threaded part,
15... Thread groove, 16... Tip, 17... Open end.

Claims (1)

[Scope of utility model registration request] In a high-purity material storage container that is sealed by attaching an outer lid to the mouth of the container that does not contain any impurities,
An appropriate number of threads with large leads are formed on the outer periphery of the mouth of this container, allowing for screwing with a small amount of rotation.
The outer lid has a bottomed cylindrical shape with the bottom as a top plate, and has a threaded part on its inner circumferential surface that screws into the threaded part to enable the cap to be attached with a small amount of rotation. An inner lid is interposed between the lid and the inner surface of the top plate, and the inner lid is a column that fits into the mouth and has a flange formed at one end thereof that cannot be fitted into the mouth. The inner lid has a sealing ring made of an elastic material with high frictional resistance, such as rubber, which is fitted into the opening of the inner lid. The inner lid is fitted externally to be disposed between the flange and the end surface of the mouth part, and an escape recess is formed on the inner surface of the top plate to minimize contact with the end surface of the one end where the flange of the inner lid is formed. , compared to the contact friction resistance between the inner surface of the top plate and the end surface of one end where the flange of the inner lid is formed, the contact friction resistance between the sealing ring and the end surface of the container opening with the flange of the inner lid is significantly higher. A high-purity material storage container characterized by a large size.