JPH04252007A - Magnetic head and magnetic recording and replay apparatus usint the same - Google Patents

Magnetic head and magnetic recording and replay apparatus usint the same

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Publication number
JPH04252007A
JPH04252007A JP828991A JP828991A JPH04252007A JP H04252007 A JPH04252007 A JP H04252007A JP 828991 A JP828991 A JP 828991A JP 828991 A JP828991 A JP 828991A JP H04252007 A JPH04252007 A JP H04252007A
Authority
JP
Japan
Prior art keywords
magnetic
head
magnetic head
heat treatment
microcrystalline grains
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP828991A
Other languages
Japanese (ja)
Inventor
Masaya Yasukochi
安河内正也
Yoshitsugu Miura
三浦義従
Akihisa Obata
小幡明久
Toshio Tsuchiya
土屋敏雄
Yoshihiko Noro
野呂良彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP828991A priority Critical patent/JPH04252007A/en
Publication of JPH04252007A publication Critical patent/JPH04252007A/en
Pending legal-status Critical Current

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  • Magnetic Heads (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明はVTR,DATあるいは
FDDなどに用いられる高保磁力の磁気記録媒体に対し
、高精度に情報を記録,再生するのに適した磁気ヘッド
に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head suitable for recording and reproducing information with high precision on a high coercive force magnetic recording medium used in a VTR, DAT, FDD, or the like.

【0002】0002

【従来の技術】磁気記録の分野においては、短波長化に
よる高密度記録化が進められており、高保磁力,高残留
磁束密度を持つ記録媒体が開発されている。短波長化に
対応するためには、ギャップロスを低減させるためにギ
ャップ長を小さくしなければならない。狭ギャップ長に
なると媒体へのヘッド磁界が弱まり、かつ上記したよう
に媒体は高保磁力となっているのでヘッドの記録能力を
大幅に向上する必要がある。また狭ギャップ長ではヘッ
ド分配効率それ自身が低下するので再生効率の確保も重
要な問題となる。これについて図を用いて詳述する。図
16はヘッド分配効率とギャップ長の関係である。図に
示したようにギャップ長が0.35μm以下になるとヘ
ッドの分配効率は急激に低くなる。すなわちギャップ長
0.35μm以下のヘッドでは再生効率の確保が特に重
要な問題となる。
2. Description of the Related Art In the field of magnetic recording, high-density recording is progressing by shortening wavelengths, and recording media with high coercive force and high residual magnetic flux density are being developed. In order to respond to shorter wavelengths, the gap length must be reduced in order to reduce gap loss. As the gap length becomes narrower, the head magnetic field applied to the medium becomes weaker, and as mentioned above, the medium has a high coercive force, so it is necessary to significantly improve the recording ability of the head. Furthermore, with a narrow gap length, the head distribution efficiency itself decreases, so ensuring reproduction efficiency is also an important issue. This will be explained in detail using figures. FIG. 16 shows the relationship between head distribution efficiency and gap length. As shown in the figure, when the gap length becomes 0.35 μm or less, the distribution efficiency of the head decreases rapidly. That is, for heads with a gap length of 0.35 μm or less, ensuring reproduction efficiency is a particularly important issue.

【0003】現在、ヘッドコア材として主流をなすフェ
ライト,CoNbZr,FeAlSiなどの材料を用い
た磁気ヘッドは、再生効率は比較的良好であるが、その
飽和磁束密度がそれぞれ0.5T,0.9T,1.1T
程度であるため記録媒体の保磁力が1000エルステッ
ド以上(たとえばメタルテープ)になると記録が不十分
になるという欠点があった。
At present, magnetic heads using materials such as ferrite, CoNbZr, and FeAlSi, which are the mainstream materials for head cores, have relatively good reproduction efficiency, but their saturation magnetic flux densities are 0.5T, 0.9T, and 0.9T, respectively. 1.1T
Therefore, if the coercive force of the recording medium exceeds 1000 oersteds (for example, a metal tape), recording becomes insufficient.

【0004】そこでFeの微結晶粒を主成分とし、飽和
磁束密度1.3T以上の耐熱性の高い金属磁性膜(例え
ば第13回日本応用磁気学会学術講演梗要集,25aD
−3「Fe−M−C(M=Ti,Zr,Hf,V,Nb
,Ta)膜の結晶化挙動」)を用いた磁気ヘッドが提案
されつつある。
[0004] Therefore, a highly heat-resistant metallic magnetic film with a saturation magnetic flux density of 1.3 T or higher and containing Fe microcrystalline grains as a main component (for example, the 13th Japanese Society of Applied Magnetics Academic Lecture Abstracts, 25aD
-3 “Fe-M-C (M=Ti, Zr, Hf, V, Nb
, Ta) film crystallization behavior") are being proposed.

【0005】[0005]

【発明が解決しようとする課題】しかしながら上記従来
技術では、高保磁力媒体への記録能力が、フェライト,
CoNbZr,FeAlSiなどの材料を用いた磁気ヘ
ッドに比べ優れているものの、ヘッド基本性能の重要項
目である再生効率が相当劣る(特に3MHz以上の高周
波領域)という問題があった。
[Problems to be Solved by the Invention] However, in the above-mentioned prior art, the recording ability on a high coercive force medium is limited to ferrite,
Although it is superior to magnetic heads using materials such as CoNbZr and FeAlSi, there is a problem in that the reproduction efficiency, which is an important item in the basic performance of the head, is considerably inferior (particularly in the high frequency region of 3 MHz or higher).

【0006】本発明は上記の点に鑑みなされたもので、
その目的とするところは、飽和磁束密度≧1.3T以上
のコア材,ギャップ長≦0.35μmを有する、記録能
力に優れた、再生効率の高い磁気ヘッドを提供すること
にある。
[0006] The present invention has been made in view of the above points.
The purpose is to provide a magnetic head with excellent recording ability and high reproduction efficiency, which has a core material with a saturation magnetic flux density ≧1.3T or more and a gap length ≦0.35 μm.

【0007】[0007]

【課題を解決するための手段】本発明は上記した目的を
達成するために、飽和磁束密度≧1.3T以上のコア材
,ギャップ長≦0.35μmを有する磁気ヘッドにおい
て、該磁気ヘッドの磁気コアに所望方向を磁化容易軸と
する一軸異方性を有させたものである。
[Means for Solving the Problems] In order to achieve the above object, the present invention provides a magnetic head having a core material having a saturation magnetic flux density ≧1.3T or more and a gap length ≦0.35 μm. The core has uniaxial anisotropy with the axis of easy magnetization in a desired direction.

【0008】また本発明において好ましくは、上記磁気
コアの一軸異方性が、磁場中熱処理によって付与された
ものである。
[0008] Also, preferably in the present invention, the uniaxial anisotropy of the magnetic core is imparted by heat treatment in a magnetic field.

【0009】また本発明において好ましくは、上記磁場
中熱処理が、ヘッド製造プロセスにおける最初の熱処理
工程である。
[0009] Also, preferably in the present invention, the heat treatment in a magnetic field is the first heat treatment step in the head manufacturing process.

【0010】また本発明において好ましくは、上記磁場
中熱処理における印加磁界がヘッド形状における反磁界
の最大値以上である。
[0010] Also, preferably in the present invention, the applied magnetic field in the heat treatment in a magnetic field is greater than or equal to the maximum value of the demagnetizing field in the head shape.

【0011】また本発明において好ましくは、上記コア
材が、Fe100−xMx(0≦x≦20,原子%:M
=Ti,V,Zr,Nb,Mo,Ta,Hf,W,Al
,Si,B,C,Ga,Ge,Co,Ni,Ir,Pt
,Au,Rh,Ruの少なくとも一種を含む)の微結晶
粒(粒径500Å以下)を含む磁性膜である。
[0011] Also preferably in the present invention, the core material is Fe100-xMx (0≦x≦20, atomic %: M
=Ti, V, Zr, Nb, Mo, Ta, Hf, W, Al
, Si, B, C, Ga, Ge, Co, Ni, Ir, Pt
, Au, Rh, and Ru) containing microcrystalline grains (grain size of 500 Å or less).

【0012】また本発明において好ましくは、上記コア
材が、Fe100−x−yCoxMy(0≦x≦40,
0≦y≦20,原子%:M=Ti,V,Zr,Nb,M
o,Ta,Hf,W,Al,Si,B,C,Ga,Ge
,Ni,Ir,Pt,Au,Rh,Ruの少なくとも一
種を含む)の微結晶粒(粒径500Å以下)を含む磁性
膜である。
[0012] Also preferably in the present invention, the core material has Fe100-x-yCoxMy (0≦x≦40,
0≦y≦20, atomic %: M=Ti, V, Zr, Nb, M
o, Ta, Hf, W, Al, Si, B, C, Ga, Ge
, Ni, Ir, Pt, Au, Rh, and Ru).

【0013】また本発明において好ましくは、上記コア
材が、Co100−xMx(0≦x≦20,原子%:M
=Ti,V,Zr,Nb,Mo,Ta,Hf,W,Al
,Si,B,C,Ga,Ge,Fe,Ni,Ir,Pt
,Au,Rh,Ruの少なくとも一種を含む)の微結晶
粒(粒径500Å以下)を含む磁性膜である。
[0013] Also preferably in the present invention, the core material is Co100-xMx (0≦x≦20, atomic %: M
=Ti, V, Zr, Nb, Mo, Ta, Hf, W, Al
, Si, B, C, Ga, Ge, Fe, Ni, Ir, Pt
, Au, Rh, and Ru) containing microcrystalline grains (grain size of 500 Å or less).

【0014】[0014]

【作用】最初の熱処理工程が、ヘッド形状における反磁
界の最大値以上の磁界で磁場中熱処理を施された一軸異
方性を有するコア材は、高周波領域でのヘッド再生効率
を向上するように働く。
[Effect] The core material, which has uniaxial anisotropy and is heat-treated in a magnetic field in a magnetic field greater than the maximum value of the demagnetizing field in the head shape in the first heat treatment process, improves the head reproduction efficiency in the high frequency region. work.

【0015】そして上記の理由からそのコア材は、Fe
100−xMx(0≦x≦20,原子%:M=Ti,V
,Zr,Nb,Mo,Ta,Hf,W,Al,Si,B
,C,Ga,Ge,Co,Ni,Ir,Pt,Au,R
h,Ruの少なくとも一種を含む)の微結晶粒(粒径5
00Å以下)を含む磁性膜、あるいはFe100−x−
yCoxMy(0≦x≦40,0≦y≦20,原子%:
M=Ti,V,Zr,Nb,Mo,Ta,Hf,W,A
l,Si,B,C,Ga,Ge,Ni,Ir,Pt,A
u,Rh,Ruの少なくとも一種を含む)の微結晶粒(
粒径500Å以下)を含む磁性膜、あるいはCo100
−xMx(0≦x≦20,原子%:M=Ti,V,Zr
,Nb,Mo,Ta,Hf,W,Al,Si,B,C,
Ga,Ge,Fe,Ni,Ir,Pt,Au,Rh,R
uの少なくとも一種を含む)の微結晶粒(粒径500Å
以下)を含む磁性膜であることが好ましい。
[0015] For the above reasons, the core material is Fe.
100-xMx (0≦x≦20, atomic %: M=Ti, V
, Zr, Nb, Mo, Ta, Hf, W, Al, Si, B
, C, Ga, Ge, Co, Ni, Ir, Pt, Au, R
microcrystalline grains (grain size 5) containing at least one of h, Ru
00 Å or less) or Fe100-x-
yCoxMy(0≦x≦40, 0≦y≦20, atomic%:
M=Ti, V, Zr, Nb, Mo, Ta, Hf, W, A
l, Si, B, C, Ga, Ge, Ni, Ir, Pt, A
microcrystalline grains (containing at least one of u, Rh, Ru)
magnetic film containing grain size of 500 Å or less) or Co100
-xMx (0≦x≦20, atomic %: M=Ti, V, Zr
, Nb, Mo, Ta, Hf, W, Al, Si, B, C,
Ga, Ge, Fe, Ni, Ir, Pt, Au, Rh, R
microcrystalline grains (grain size 500 Å) containing at least one type of
It is preferable that the magnetic film contains the following:

【0016】[0016]

【実施例】以下、本発明を図示した実施例によって説明
する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be explained below with reference to illustrated embodiments.

【0017】図1は、本発明による磁気ヘッドの再生出
力の周波数特性である。図示したように本発明によれば
、飽和磁束密度≧1.3T以上のコア材,ギャップ長≦
0.35μmを有する磁気ヘッドにおいて、低周波領域
での記録能力が従来のFe微結晶粒を主成分とするコア
材の磁気ヘッドと同等以上で、かつ高周波領域での再生
効率がフェライトヘッドと同等以上の磁気ヘッドが得ら
れる。高周波領域での再生効率が優れているということ
は、すなわちヘッドコア材に用いている磁性材料の軟磁
気特性の周波数特性が優れていることに他ならない。 以下これについて詳細に説明する。
FIG. 1 shows the frequency characteristics of the reproduction output of the magnetic head according to the present invention. As shown in the figure, according to the present invention, the core material has a saturation magnetic flux density ≧1.3T or more, and the gap length ≦
In a magnetic head with a diameter of 0.35 μm, the recording ability in the low frequency range is equal to or higher than that of a conventional magnetic head with a core material mainly composed of Fe microcrystalline grains, and the reproduction efficiency in the high frequency range is equivalent to that of a ferrite head. The above magnetic head can be obtained. The fact that reproduction efficiency in the high frequency region is excellent means that the frequency characteristics of the soft magnetic properties of the magnetic material used for the head core material are excellent. This will be explained in detail below.

【0018】図2は従来のFe微結晶粒を主成分とする
軟磁性膜の構造、図3はそのBHカーブ、図4はその比
透磁率である。Feは結晶磁気異方性が大きいにもかか
わらず軟磁気特性を示す要因は、その結晶粒が小さく(
500Å程度以下)結晶粒間の交換相互作用が働くため
と考えられている。しかしながら従来は、図3に示した
ように保磁力が小さく軟磁気特性は得られるものの、そ
の比透磁率はいわゆるMs2/2K(Ms:飽和磁化,
K:異方性磁界)より小さく、その周波数特性も劣って
いた。そこで我々は以下に詳述する手法で磁気異方性を
制御し、軟磁気特性の向上を図った。
FIG. 2 shows the structure of a conventional soft magnetic film mainly composed of Fe microcrystalline grains, FIG. 3 shows its BH curve, and FIG. 4 shows its relative magnetic permeability. The reason Fe exhibits soft magnetic properties despite its large magnetocrystalline anisotropy is that its crystal grains are small (
This is thought to be due to exchange interaction between crystal grains (approximately 500 Å or less). However, as shown in Fig. 3, in the past, although the coercive force was small and soft magnetic properties were obtained, the relative magnetic permeability was so-called Ms2/2K (Ms: saturation magnetization,
K: anisotropic magnetic field), and its frequency characteristics were also inferior. Therefore, we aimed to improve the soft magnetic properties by controlling the magnetic anisotropy using the method detailed below.

【0019】図5は本発明によるFe100−XMx微
結晶粒(0≦x≦20,原子%:M=Ti,V,Zr,
Nb,Mo,Ta,Hf,W,Al,Si,B,C,G
a,Ge,Co,Ni,Ir,Pt,Au,Rh,Ru
の少なくとも一種を含む)を主成分とする軟磁性膜の構
造、図6はそのBHカーブ、図7はその比透磁率である
。従来のFe微結晶粒をFe100−XMx微結晶粒と
し、磁場中熱処理を施すことで一軸異方性(異方性磁界
:320A/m程度)を有する軟磁性膜を得た。またそ
の比透磁率は、ほぼMs2/2K(Ms:飽和磁化,K
:異方性磁界)に従い周波数特性も優れている。またこ
のとき磁歪定数は5/107以下となる。さらに我々は
一軸異方性を有する磁性材料特有の磁壁の存在を、磁気
カー効果の測定により確認した。これについて以下詳述
する。
FIG. 5 shows Fe100-XMx microcrystalline grains (0≦x≦20, atomic %: M=Ti, V, Zr,
Nb, Mo, Ta, Hf, W, Al, Si, B, C, G
a, Ge, Co, Ni, Ir, Pt, Au, Rh, Ru
FIG. 6 shows its BH curve, and FIG. 7 shows its relative magnetic permeability. A soft magnetic film having uniaxial anisotropy (anisotropic magnetic field: about 320 A/m) was obtained by replacing conventional Fe microcrystalline grains with Fe100-XMx microcrystalline grains and subjecting them to heat treatment in a magnetic field. In addition, its relative magnetic permeability is approximately Ms2/2K (Ms: saturation magnetization, K
: anisotropic magnetic field) and has excellent frequency characteristics. Further, at this time, the magnetostriction constant becomes 5/107 or less. Furthermore, we confirmed the existence of domain walls unique to magnetic materials with uniaxial anisotropy by measuring the magnetic Kerr effect. This will be explained in detail below.

【0020】図8は本発明によるFe100−XMx微
結晶粒(0≦x≦20,原子%:M=Ti,V,Zr,
Nb,Mo,Ta,Hf,W,Al,Si,B,C,G
a,Ge,Co,Ni,Ir,Pt,Au,Rh,Ru
の少なくとも一種を含む)を主成分とする軟磁性膜の磁
化容易軸方向のカー効果、図9は従来のFe微結晶粒を
主成分とする軟磁性膜のカー効果である。図8に示した
ように、磁壁移動がある場合特有のカー効果が得られた
ことから磁壁の存在を確認した。このことは、本発明に
よる軟磁性膜が良好な一軸異方性を有することを立証す
るものである。一方、従来のFe微結晶粒を主成分とす
る軟磁性膜では、そのどこを測定しても磁壁の存在は認
められなかった。
FIG. 8 shows Fe100-XMx microcrystalline grains (0≦x≦20, atomic %: M=Ti, V, Zr,
Nb, Mo, Ta, Hf, W, Al, Si, B, C, G
a, Ge, Co, Ni, Ir, Pt, Au, Rh, Ru
Fig. 9 shows the Kerr effect in the direction of the easy axis of magnetization of a soft magnetic film whose main component is Fe microcrystalline grains. As shown in FIG. 8, the existence of a domain wall was confirmed because the Kerr effect, which is unique when there is domain wall movement, was obtained. This proves that the soft magnetic film according to the present invention has good uniaxial anisotropy. On the other hand, in the conventional soft magnetic film mainly composed of Fe microcrystalline grains, the presence of domain walls was not observed anywhere on the film.

【0021】次に本発明の重大要素である磁場中熱処理
について重要な知見を得たので詳述する。図10ないし
図12は、熱処理工程の違いによるBHカーブ差の比較
である。図10は本発明による磁場中熱処理を施した軟
磁性膜のBHカーブ、図11,図12はそれぞれ良好な
一軸異方性が得られなかった軟磁性膜のBHカーブであ
る。特に図11に示したように、一度無磁場中熱処理を
施すとその後磁場中熱処理を施しても良好な一軸異方性
は得にくいことがわかった。また磁場中スパッタをした
後に無磁場中熱処理を施しても良好な一軸異方性は得ら
れなかった。すなわち本発明のように最初の熱処理工程
が磁場中熱処理であることが、良好な一軸異方性を得る
上で重要である。もちろん、ヘッド製造工程においても
最初の熱処理工程が磁場中熱処理であることが重要なこ
とは明らかである。この際この工程がガラスボンディン
グ工程であっても磁場中ガラスボンディングを施せばよ
い。このように微結晶粒を主成分とする軟磁性材料では
、その活性化エネルギーが、従来磁気異方性が比較的容
易に制御できたアモルファス材料のそれに比べて大きい
ため、最初の熱処理工程が磁場中熱処理であることが、
極めて重要である。
Next, important findings regarding heat treatment in a magnetic field, which is an important element of the present invention, will be described in detail. 10 to 12 are comparisons of BH curve differences due to different heat treatment steps. FIG. 10 shows the BH curve of a soft magnetic film subjected to heat treatment in a magnetic field according to the present invention, and FIGS. 11 and 12 show BH curves of soft magnetic films in which good uniaxial anisotropy was not obtained. In particular, as shown in FIG. 11, it has been found that once heat treatment is performed in a non-magnetic field, it is difficult to obtain good uniaxial anisotropy even if heat treatment is performed in a magnetic field thereafter. Further, good uniaxial anisotropy could not be obtained even if heat treatment was performed in a non-magnetic field after sputtering in a magnetic field. That is, it is important for obtaining good uniaxial anisotropy that the first heat treatment step is heat treatment in a magnetic field as in the present invention. Of course, it is obvious that it is important that the first heat treatment step in the head manufacturing process is heat treatment in a magnetic field. At this time, even if this step is a glass bonding step, glass bonding may be performed in a magnetic field. In this way, the activation energy of soft magnetic materials mainly composed of microcrystalline grains is larger than that of amorphous materials, whose magnetic anisotropy can be controlled relatively easily. Medium heat treatment is required.
extremely important.

【0022】さらに印加磁界についても重要な知見を得
たので詳述する。図17は印加磁界強度と再生出力の関
係である。図から明らかなように、印加磁界はヘッド形
状での反磁界の最大値以上が望ましい。
Furthermore, important findings regarding the applied magnetic field have been obtained, which will be described in detail. FIG. 17 shows the relationship between applied magnetic field strength and reproduction output. As is clear from the figure, it is desirable that the applied magnetic field is equal to or greater than the maximum value of the demagnetizing field in the head shape.

【0023】次に本発明のその他の実施例を示す。図1
3は本発明によるFe100−x−yCoxMy微結晶
粒(0≦x≦40,0≦y≦20,原子%:M=Ti,
V,Zr,Nb,Mo,Ta,Hf,W,Al,Si,
B,C,Ga,Ge,Ni,Ir,Pt,Au,Rh,
Ruの少なくとも一種を含む)を主成分とする軟磁性膜
の構造、図14はそのBHカーブ、図15はその比透磁
率である。このように本発明によれば、さらに良好な一
軸異方性が得られる。
Next, other embodiments of the present invention will be described. Figure 1
3 is Fe100-x-yCoxMy microcrystalline grain according to the present invention (0≦x≦40, 0≦y≦20, atomic %: M=Ti,
V, Zr, Nb, Mo, Ta, Hf, W, Al, Si,
B, C, Ga, Ge, Ni, Ir, Pt, Au, Rh,
FIG. 14 shows its BH curve, and FIG. 15 shows its relative magnetic permeability. As described above, according to the present invention, even better uniaxial anisotropy can be obtained.

【0024】[0024]

【発明の効果】以上のように本発明によれば、飽和磁束
密度≧1.3T以上のコア材,ギャップ長≦0.35μ
mを有する磁気ヘッドにおいて、磁気ヘッドのコア材で
ある軟磁性膜の磁気異方性を制御することは、低周波領
域での記録能力が従来のFe微結晶粒を主成分とするコ
ア材の磁気ヘッドと同等以上で、かつ高周波領域での再
生効率がフェライトヘッドと同等以上になるという効果
を奏する。
Effects of the Invention As described above, according to the present invention, the core material has a saturation magnetic flux density ≧1.3T or more, and the gap length ≦0.35μ.
Controlling the magnetic anisotropy of the soft magnetic film, which is the core material of the magnetic head, in the magnetic head having a The effect is that the reproduction efficiency in the high frequency region is equal to or higher than that of a magnetic head and equal to or higher than that of a ferrite head.

【図面の簡単な説明】[Brief explanation of the drawing]

【図1】本発明による磁気ヘッドの再生出力の周波数特
性図
[Fig. 1] Frequency characteristic diagram of reproduction output of the magnetic head according to the present invention

【図2】従来のFe微結晶粒を主成分とする軟磁性膜の
構造図
[Figure 2] Structural diagram of a conventional soft magnetic film mainly composed of Fe microcrystalline grains

【図3】従来のFe微結晶粒を主成分とする軟磁性膜の
BHカーブ特性図
[Figure 3] BH curve characteristic diagram of a conventional soft magnetic film mainly composed of Fe microcrystalline grains

【図4】従来のFe微結晶粒を主成分とする軟磁性膜の
比透磁率を示す図
[Fig. 4] A diagram showing the relative magnetic permeability of a conventional soft magnetic film mainly composed of Fe microcrystalline grains.

【図5】本発明によるFe100−XMx微結晶粒を主
成分とする軟磁性膜の構造図
[Fig. 5] Structural diagram of a soft magnetic film mainly composed of Fe100-XMx microcrystal grains according to the present invention

【図6】本発明によるFe100−XMx微結晶粒を主
成分とする軟磁性膜のBHカーブ特性図
[Fig. 6] BH curve characteristic diagram of the soft magnetic film mainly composed of Fe100-XMx microcrystalline grains according to the present invention

【図7】本発明によるFe100−XMx微結晶粒を主
成分とする軟磁性膜の比透磁率を示す図
FIG. 7 is a diagram showing the relative magnetic permeability of a soft magnetic film mainly composed of Fe100-XMx microcrystalline grains according to the present invention.

【図8】本発明によるFe100−XMx微結晶粒を主
成分とする軟磁性膜の磁化容易軸方向のカー効果を示す
FIG. 8 is a diagram showing the Kerr effect in the easy axis direction of the soft magnetic film mainly composed of Fe100-XMx microcrystalline grains according to the present invention.

【図9】従来のFe微結晶粒を主成分とする軟磁性膜
のカー効果を示す図
[Fig. 9] A diagram showing the Kerr effect of a conventional soft magnetic film mainly composed of Fe microcrystalline grains.

【図10】本発明による熱処理工程によるBHカーブ特
性図
[Figure 10] BH curve characteristic diagram due to the heat treatment process according to the present invention

【図11】参考例による熱処理工程によるBHカーブ特
性図
[Figure 11] BH curve characteristic diagram due to heat treatment process according to reference example

【図12】参考例による熱処理工程によるBHカーブ特
性図
[Figure 12] BH curve characteristic diagram due to heat treatment process according to reference example

【図13】本発明によるFe100−x−yCoxMy
微結晶粒を主成分とする軟磁性膜の構造図
FIG. 13: Fe100-x-yCoxMy according to the present invention
Structural diagram of a soft magnetic film whose main component is microcrystalline grains

【図14】本発明によるFe100−x−yCoxMy
微結晶粒を主成分とする軟磁性膜のBHカーブ特性図
FIG. 14: Fe100-x-yCoxMy according to the present invention
BH curve characteristic diagram of soft magnetic film mainly composed of microcrystalline grains


図15】本発明によるFe100−x−yCoxMy微
結晶粒を主成分とする軟磁性膜の比透磁率を示す図
[
FIG. 15 is a diagram showing the relative magnetic permeability of a soft magnetic film mainly composed of Fe100-x-yCoxMy microcrystalline grains according to the present invention.

【図
16】ヘッド分配効率とギャップ長の関係を示す図
[Figure 16] Diagram showing the relationship between head distribution efficiency and gap length

【図
17】印加磁界強度と再生出力の関係を示す図
[Figure 17] Diagram showing the relationship between applied magnetic field strength and reproduction output

【符号の説明】[Explanation of symbols]

1...磁壁,  2...Fe微結晶粒,  3..
.Fe微結晶粒の磁気モーメント,  4...その他
の結晶粒,  5...Fe100−XMx微結晶粒,
6...Fe100−XMx微結晶粒の磁気モーメント
,  7...Fe100−x−yCoxMy微結晶粒
,  8...Fe100−x−yCoxMy微結晶粒
の磁気モーメント
1. .. .. Domain wall, 2. .. .. Fe microcrystalline grains, 3. ..
.. Magnetic moment of Fe microcrystalline grains, 4. .. .. Other crystal grains, 5. .. .. Fe100-XMx microcrystalline grains,
6. .. .. Magnetic moment of Fe100-XMx microcrystalline grains, 7. .. .. Fe100-x-yCoxMy microcrystalline grains, 8. .. .. Magnetic moment of Fe100-x-yCoxMy microcrystalline grains

Claims (8)

【特許請求の範囲】[Claims] 【請求項1】飽和磁束密度≧1.3Tのコア材,ギャッ
プ長≦0.35μmを有する磁気ヘッドにおいて、該磁
気ヘッドの磁気コアが所望方向を磁化容易軸とする一軸
異方性を有している磁気ヘッド。
Claim 1: A magnetic head having a core material with a saturation magnetic flux density ≧1.3T and a gap length ≦0.35 μm, in which the magnetic core of the magnetic head has uniaxial anisotropy with a desired direction as the axis of easy magnetization. magnetic head.
【請求項2】上記磁気コアの一軸異方性が、磁場中熱処
理によって付与されたことを特徴とする請求項1に記載
の磁気ヘッド。
2. The magnetic head according to claim 1, wherein the uniaxial anisotropy of the magnetic core is imparted by heat treatment in a magnetic field.
【請求項3】上記磁場中熱処理が、ヘッド製造プロセス
における最初の熱処理工程であることを特徴とする請求
項1または2に記載の磁気ヘッド。
3. The magnetic head according to claim 1, wherein the heat treatment in a magnetic field is the first heat treatment step in a head manufacturing process.
【請求項4】上記磁場中熱処理における印加磁界が、ヘ
ッド形状における反磁界の最大値以上であることを特徴
とする請求項1,2または3に記載の磁気ヘッド。
4. The magnetic head according to claim 1, wherein the applied magnetic field in the magnetic field heat treatment is greater than or equal to the maximum value of the demagnetizing field in the head shape.
【請求項5】上記コア材が、Fe100−xMx(0≦
x≦20,原子%:M=Ti,V,Zr,Nb,Mo,
Ta,Hf,W,Al,Si,B,C,Ga,Ge,C
o,Ni,Ir,Pt,Au,Rh,Ruの少なくとも
一種を含む)の微結晶粒(粒径500Å以下)を含む磁
性膜であることを特徴とする請求項1,2,3または4
に記載の磁気ヘッド。
5. The core material is Fe100-xMx (0≦
x≦20, atomic %: M=Ti, V, Zr, Nb, Mo,
Ta, Hf, W, Al, Si, B, C, Ga, Ge, C
Claim 1, 2, 3, or 4, characterized in that the magnetic film is a magnetic film containing microcrystalline grains (grain size of 500 Å or less) containing at least one of O, Ni, Ir, Pt, Au, Rh, and Ru.
The magnetic head described in .
【請求項6】上記コア材が、Fe100−x−yCox
My(0≦x≦40,0≦y≦20,原子%:M=Ti
,V,Zr,Nb,Mo,Ta,Hf,W,Al,Si
,B,C,Ga,Ge,Ni,Ir,Pt,Au,Rh
,Ruの少なくとも一種を含む)の微結晶粒(粒径50
0Å以下)を含む磁性膜であることを特徴とする請求項
1,2,3または4に記載の磁気ヘッド。
6. The core material is Fe100-x-yCox
My(0≦x≦40, 0≦y≦20, atomic %: M=Ti
, V, Zr, Nb, Mo, Ta, Hf, W, Al, Si
, B, C, Ga, Ge, Ni, Ir, Pt, Au, Rh
, Ru) microcrystalline grains (grain size 50
5. The magnetic head according to claim 1, wherein the magnetic head is a magnetic film containing a magnetic film having a thickness of 0 Å or less.
【請求項7】上記コア材が、Co100−xMx(0≦
x≦20,原子%:M=Ti,V,Zr,Nb,Mo,
Ta,Hf,W,Al,Si,B,C,Ga,Ge,F
e,Ni,Ir,Pt,Au,Rh,Ruの少なくとも
一種を含む)の微結晶粒(粒径500Å以下)を含む磁
性膜であることを特徴とする請求項1,2,3または4
に記載の磁気ヘッド。
7. The core material is Co100-xMx (0≦
x≦20, atomic %: M=Ti, V, Zr, Nb, Mo,
Ta, Hf, W, Al, Si, B, C, Ga, Ge, F
Claim 1, 2, 3, or 4, characterized in that the magnetic film is a magnetic film containing microcrystalline grains (grain size of 500 Å or less) containing at least one of e, Ni, Ir, Pt, Au, Rh, and Ru.
The magnetic head described in .
【請求項8】請求項1,2,3,4,5,6または7に
記載の磁気ヘッドを用いた磁気記録再生装置。
8. A magnetic recording and reproducing apparatus using the magnetic head according to claim 1, 2, 3, 4, 5, 6, or 7.
JP828991A 1991-01-28 1991-01-28 Magnetic head and magnetic recording and replay apparatus usint the same Pending JPH04252007A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP828991A JPH04252007A (en) 1991-01-28 1991-01-28 Magnetic head and magnetic recording and replay apparatus usint the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP828991A JPH04252007A (en) 1991-01-28 1991-01-28 Magnetic head and magnetic recording and replay apparatus usint the same

Publications (1)

Publication Number Publication Date
JPH04252007A true JPH04252007A (en) 1992-09-08

Family

ID=11689017

Family Applications (1)

Application Number Title Priority Date Filing Date
JP828991A Pending JPH04252007A (en) 1991-01-28 1991-01-28 Magnetic head and magnetic recording and replay apparatus usint the same

Country Status (1)

Country Link
JP (1) JPH04252007A (en)

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