JPH04255902A - Magnetic head and manufacture thereof - Google Patents
Magnetic head and manufacture thereofInfo
- Publication number
- JPH04255902A JPH04255902A JP3944491A JP3944491A JPH04255902A JP H04255902 A JPH04255902 A JP H04255902A JP 3944491 A JP3944491 A JP 3944491A JP 3944491 A JP3944491 A JP 3944491A JP H04255902 A JPH04255902 A JP H04255902A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- magnetic
- layer
- layers
- magnetic head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 87
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 239000010409 thin film Substances 0.000 claims abstract description 51
- 239000002184 metal Substances 0.000 claims abstract description 27
- 229910052751 metal Inorganic materials 0.000 claims abstract description 27
- 239000011521 glass Substances 0.000 claims abstract description 26
- 239000000758 substrate Substances 0.000 claims abstract description 26
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 23
- 238000010030 laminating Methods 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 11
- 238000010586 diagram Methods 0.000 description 7
- 238000004544 sputter deposition Methods 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 239000010408 film Substances 0.000 description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 229910000702 sendust Inorganic materials 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- 229910001199 N alloy Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003302 ferromagnetic material Substances 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910017086 Fe-M Inorganic materials 0.000 description 1
- 206010021143 Hypoxia Diseases 0.000 description 1
- 229910000676 Si alloy Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910000808 amorphous metal alloy Inorganic materials 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Abstract
Description
【０００１】0001
【産業上の利用分野】本発明は、ハイビジョン等のＨＤ
−ＴＶに対応した高密度記録用のＶＴＲに好適に使用さ
れる磁気ヘッドとその製造方法に関する。[Industrial Field of Application] The present invention is applicable to HD such as high-definition.
- A magnetic head suitable for use in a high-density recording VTR compatible with a TV, and a method for manufacturing the same.
【０００２】0002
【従来の技術】ハイビジョンやＨＤ−ＴＶに対応した高
密度記録再生用のＶＴＲには、例えば図１０に示す磁気
ヘッドが使用されている。この磁気ヘッドは、一般のＶ
ＴＲ用の磁気ヘッドチップとは異なり、渦電流損失を低
減させ高周波特性を向上させるために非磁性である一対
の非磁性基板１，１、１１ ，１１ 間に強磁性体層２
，２と非磁性体層３，３とを交互に例えば、スパッタリ
ング等により複数層（図では強磁性体層２が４層）それ
ぞれ積層形成して金属軟磁性薄膜層４が形成され、ガラ
ス層５，５を介在させて貼着一体として一組のチップ本
体１０，１０１ が形成されており、チップ本体１０，
１０１ 間にはギャップスペーサ膜（不図示）を設けて
トラック溝６にそれぞれガラス７，７を充填して溶着一
体とした上でトラック幅を規制した磁気ギャップ９が形
成されたものとなっている。2. Description of the Related Art A magnetic head shown in FIG. 10, for example, is used in a VTR for high-density recording and reproduction compatible with high-definition television and HD-TV. This magnetic head is a general V
Unlike magnetic head chips for TR, a ferromagnetic layer 2 is provided between a pair of non-magnetic substrates 1, 1, 11, 11 in order to reduce eddy current loss and improve high frequency characteristics.
, 2 and non-magnetic layers 3, 3 are alternately laminated, for example, by sputtering or the like, to form a metal soft magnetic thin film layer 4 (four ferromagnetic layers 2 in the figure), and a glass layer. A pair of chip bodies 10, 101 is formed as a single piece by adhering the chip bodies 10, 5 in between.
101 A gap spacer film (not shown) is provided in between, and the track grooves 6 are filled with glasses 7, 7, respectively, and are welded together, forming a magnetic gap 9 that regulates the track width. .
【０００３】0003
【発明が解決しようとする課題】しかしながら、近時の
磁気ヘッドにおいては、トラック幅の狭化が進み、非磁
性基板１，１１ 間に積層される強磁性体層２と非磁性
体層３との積層膜である金属軟磁性薄膜層４のガラス層
５，５を介した接合強度を高めるといった耐久性の向上
が要求されるようになってきた。[Problems to be Solved by the Invention] However, in recent magnetic heads, the track width has become narrower, and the ferromagnetic layer 2 and the nonmagnetic layer 3 laminated between the nonmagnetic substrates 1 and 11 have become smaller. It has become necessary to improve the durability of the metal soft magnetic thin film layer 4, which is a laminated film, by increasing the bonding strength between the glass layers 5, 5.
【０００４】0004
【課題を解決するための手段】上記課題を解決するため
に、本発明の磁気ヘッドは、一対の非磁性基板間に、強
磁性体層と非磁性体層とを交互に積層してなる金属軟磁
性薄膜層と酸化物薄膜層とガラス層とをそれぞれ接合一
体としたことを特徴とする。[Means for Solving the Problems] In order to solve the above problems, the magnetic head of the present invention has a magnetic head made of a metal material formed by alternately laminating ferromagnetic layers and non-magnetic layers between a pair of non-magnetic substrates. It is characterized in that the soft magnetic thin film layer, the oxide thin film layer, and the glass layer are each integrally bonded.
【０００５】また、本発明の磁気ヘッドの製造方法は、
一方の非磁性基板上に、最外面に強磁性体層が位置する
ように強磁性体層と非磁性体層とを積層して金属軟磁性
薄膜層を形成し、該金属軟磁性薄膜層の最外面の強磁性
体層に酸化物薄膜層を積層してからガラス層を積層して
他方の非磁性基板を接合一体とする工程を含むことを特
徴とする。[0005] Furthermore, the method for manufacturing a magnetic head of the present invention includes:
A ferromagnetic layer and a non-magnetic layer are laminated on one non-magnetic substrate so that the ferromagnetic layer is located on the outermost surface to form a metal soft magnetic thin film layer. It is characterized in that it includes the steps of laminating an oxide thin film layer on the outermost ferromagnetic layer, then laminating a glass layer, and bonding the other non-magnetic substrate together.
【０００６】[0006]
【作用】上記構成の磁気ヘッドでは、非磁性基板，金属
軟磁性薄膜層，酸化物薄膜層，ガラス層，非磁性基板の
順で接合一体となっており、金属軟磁性薄膜層と酸化物
薄膜層との接合強度が向上し、金属軟磁性薄膜層と非磁
性基板とのガラス層を介した接合強度がより高められた
磁気ヘッドとなる。[Operation] In the magnetic head with the above configuration, the nonmagnetic substrate, the metal soft magnetic thin film layer, the oxide thin film layer, the glass layer, and the nonmagnetic substrate are joined together in this order, and the metal soft magnetic thin film layer and the oxide thin film layer are bonded together. This improves the bonding strength between the metal soft magnetic thin film layer and the nonmagnetic substrate through the glass layer, resulting in a magnetic head.
【０００７】また、本発明の磁気ヘッドの製造方法によ
ると、一方の非磁性基板上に積層された金属軟磁性薄膜
層の最外面の強磁性体層の上に酸化物薄膜層を積層して
からガラス層を積層することにより、金属軟磁性薄膜層
の強磁性体層と酸化物薄膜層との接合強度が高められる
ようになり、金属軟磁性薄膜層と他方の非磁性基板との
ガラス層を介した接続強度がより高められた磁気ヘッド
が製造される。According to the method for manufacturing a magnetic head of the present invention, an oxide thin film layer is laminated on the outermost ferromagnetic layer of the metal soft magnetic thin film layer laminated on one nonmagnetic substrate. By laminating the glass layer from above, the bonding strength between the ferromagnetic layer of the metal soft magnetic thin film layer and the oxide thin film layer can be increased, and the glass layer between the metal soft magnetic thin film layer and the other non-magnetic substrate can be increased. A magnetic head with improved connection strength is manufactured.
【０００８】尚、本発明において、金属軟磁性薄膜層と
はセンダストやアモルファス合金ばかりでなくＦｅ−Ｍ
−Ｎ合金（Ｍは、Ｔａ，Ｚｒ，Ｔｉ，Ｈｆ等の添加物金
属）等の窒化膜層をも含む概念としている。In the present invention, the metal soft magnetic thin film layer includes not only sendust and amorphous alloys but also Fe-M.
The concept also includes a nitride film layer such as -N alloy (M is an additive metal such as Ta, Zr, Ti, Hf, etc.).
【０００９】[0009]
【実施例】以下、図面を参照して本発明の一実施例を説
明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.
【００１０】図１は本発明の一実施例に係る磁気ヘッド
の斜視図であり、図２はその要部の拡大平面図である。
図に示す磁気ヘッドは、例えば、ハイビジョンやＨＤ−
ＴＶ，Ｓ−ＶＨＳ等に対応するＶＴＲ等の高密度記録再
生用に使用されるものである。図において、１１，１１
１ は一組のチップ本体であり、該チップ本体１１，１
１１ は、例えば、セラミック等の非磁性体よりなる一
対の非磁性基板１，１及び１１ ，１１ の中央部分に
、渦電流損失を低減するために、センダスト（Ｆｅ−Ａ
ｌ−Ｓｉ合金）や、Ｃｏ−Ｍ系アモルファス合金や、Ｆ
ｅ−Ｍ−Ｎ合金（Ｍは先述のとおりの添加物金属）等の
窒化膜層等の強磁性体の薄膜層２（図では４層）と酸化
シリコンやアルミナ等の非磁性体の極薄膜層３（図では
３層）とが交互に積層された金属軟磁性薄膜層４が形成
されている。上記強磁性体層２と非磁性体層３は何れも
近時の狭トラック化に対応して強磁性体層２が例えば約
５μｍ、非磁性体層３が０．１μｍ程度の薄膜に積層さ
れている。FIG. 1 is a perspective view of a magnetic head according to an embodiment of the present invention, and FIG. 2 is an enlarged plan view of the main parts thereof. The magnetic head shown in the figure is, for example, a high-definition or HD-
It is used for high-density recording and reproduction of VTRs and the like that are compatible with TVs, S-VHS, and the like. In the figure, 11, 11
1 is a pair of chip bodies, and the chip bodies 11, 1
For example, Sendust (Fe-A
l-Si alloy), Co-M amorphous alloy, F
A thin film layer 2 (4 layers in the figure) of a ferromagnetic material such as a nitride film layer such as an e-M-N alloy (M is an additive metal as described above) and an ultra-thin film of a non-magnetic material such as silicon oxide or alumina. A metal soft magnetic thin film layer 4 is formed in which layers 3 (three layers in the figure) are alternately laminated. Both the ferromagnetic layer 2 and the non-magnetic layer 3 are laminated into thin films, for example, with the ferromagnetic layer 2 having a thickness of approximately 5 μm and the non-magnetic layer 3 having a thickness of approximately 0.1 μm, in response to the recent narrowing of tracks. ing.
【００１１】更に、該金属軟磁性薄膜層４の最外面に積
層された強磁性体層２，２にはアルミナ等の酸化物薄膜
層８，８が同様に約０．５μｍ程度の薄膜に形成されて
おり、さらに該酸化物薄膜層８，８にガラス層５，５が
それぞれ約１μｍ程度の厚みで積層され、他方の非磁性
基板１，１１ が該ガラス層５，５に接合されてチップ
本体１１，１１１ が形成されている。Further, on the ferromagnetic material layers 2, 2 laminated on the outermost surface of the metal soft magnetic thin film layer 4, oxide thin film layers 8, 8 of alumina or the like are similarly formed as a thin film of about 0.5 μm. Further, glass layers 5, 5 are laminated on the oxide thin film layers 8, 8 with a thickness of about 1 μm, respectively, and the other non-magnetic substrate 1, 11 is bonded to the glass layers 5, 5 to form a chip. Main bodies 11, 111 are formed.
【００１２】そして、一方の非磁性基板１１ ，１１
に形成されたトラック溝６，６にそれぞれ接合用のガラ
ス７，７を充填し、トラック幅を規制した上で両チップ
本体１１，１１１ を酸化シリコン等のギャップスペー
サ膜（不図示）により磁気ギャップ９を形成して溶着一
体としている。[0012] Then, one of the non-magnetic substrates 11, 11
The track grooves 6, 6 formed in the track grooves 6, 6 are filled with glasses 7, 7 for bonding, respectively, and after regulating the track width, both chip bodies 11, 111 are separated by a magnetic gap using a gap spacer film (not shown) such as silicon oxide. 9 and are integrally welded.
【００１３】上記構成の磁気ヘッドでは、金属軟磁性薄
膜層４，４の強磁性体層２，２と酸化物薄膜層８，８と
の接合強度が直接金属軟磁性薄膜層４，４とガラス層５
，５とを接合した場合と比べて高められるようになり、
従って、金属軟磁性薄膜層４と非磁性基板１および１１
との全体的な接合強度が従来の磁気ヘッドと比べて大
幅に向上する。In the magnetic head having the above structure, the bonding strength between the ferromagnetic layers 2, 2 and the oxide thin film layers 8, 8 of the metal soft magnetic thin film layers 4, 4 is directly determined by the bonding strength between the metal soft magnetic thin film layers 4, 4 and the glass thin film layers 4, 4. layer 5
, 5 is increased compared to the case where the
Therefore, the metal soft magnetic thin film layer 4 and the nonmagnetic substrates 1 and 11
The overall bonding strength with the magnetic head is significantly improved compared to conventional magnetic heads.
【００１４】上記構成の磁気ヘッドは次のような順で製
造される。即ち、図３に示すように、非磁性基板となる
セラミック等のブロック１ａ，１ａ１ を準備し、図４
に示すように、その片面に蒸着又はスパッタリング等に
よりセンダスト等の強磁性体層２，２とアルミナ等の非
磁性体層３，３を交互に積層する。例えば、強磁性体層
２，２を四層、非磁性体層３，３を三層それぞれ積層し
て強磁性体層２，２を最外面に積層して金属軟磁性薄膜
層４，４を構成して形成する。次に図５に示すように、
上記金属軟磁性薄膜層４，４の最外面の強磁性体層２，
２上にアルミナ等の酸化物薄膜層８，８を同様に蒸着又
はスパッタリング等によって積層する。The magnetic head having the above structure is manufactured in the following order. That is, as shown in FIG.
As shown in FIG. 2, ferromagnetic layers 2, 2 such as sendust and non-magnetic layers 3, 3 such as alumina are alternately laminated on one side by vapor deposition or sputtering. For example, four ferromagnetic layers 2, 2 and three non-magnetic layers 3, 3 are laminated, the ferromagnetic layers 2, 2 are laminated on the outermost surface, and the metal soft magnetic thin film layers 4, 4 are laminated. Compose and form. Next, as shown in Figure 5,
The outermost ferromagnetic layer 2 of the metal soft magnetic thin film layers 4, 4,
2, oxide thin film layers 8, 8 of alumina or the like are similarly laminated by vapor deposition, sputtering, or the like.
【００１５】そして、図６に示すように、ガラス層５，
５をスパッタリング等によって積層してから、図７に示
すように、他のブロック１ａ，１ａ１ を重ね合わせて
接合一体とする。さらに、図８に示すように、該非磁性
基板１，１１ の上に、上記図４から図７までの工程を
繰り返し、非磁性基板１，１１ 間に金属軟磁性薄膜層
４，４と酸化物薄膜層８，８とガラス層５，５とを積層
して非磁性のブロック体１ｂ，１ｂ１ を形成する。Then, as shown in FIG. 6, the glass layer 5,
5 are laminated by sputtering or the like, and then, as shown in FIG. 7, other blocks 1a and 1a1 are superimposed and joined together. Furthermore, as shown in FIG. 8, the steps from FIG. 4 to FIG. The thin film layers 8, 8 and the glass layers 5, 5 are laminated to form nonmagnetic block bodies 1b, 1b1.
【００１６】それから、一方のブロック体１ｂ１ の各
ブロック１ａ１ の接合面側にトラック溝６，６を形成
し、該トラック溝６，６にガラス７，７を溶着させた状
態で各ブロック体１ｂ及び１ｂ１ 間にギャップスペー
サ膜（図示せず）を形成し、図９に示すように、上記ガ
ラス７，７によって両者を溶着一体として磁気ギャップ
９を規制し、一点鎖線で示すトラック溝６，６の位置で
スライスしてからテープ摺動面を曲面研磨して図１に示
すようにな磁気ヘッドが製造される。Next, track grooves 6, 6 are formed on the joining surface side of each block 1a1 of one block body 1b1, and glasses 7, 7 are welded to the track grooves 6, 6, and each block body 1b and 1b1, a gap spacer film (not shown) is formed between them, and as shown in FIG. A magnetic head as shown in FIG. 1 is manufactured by slicing the tape at certain positions and polishing the tape sliding surface into a curved surface.
【００１７】上記した本発明製造方法では、強磁性体層
２と非磁性体層３よりなる金属軟磁性薄膜層４，４と非
磁性基板１，１１ との接合を、酸化物薄膜層８，８と
ガラス層５，５の積層を介して行うことでその接合強度
が従来と比べて遥かに向上した磁気ヘッドを容易に量産
できるようになる。具体的には、従来の磁気ヘッドでは
その非磁性基板１，１間の接合強度（せん断力）の平均
が０．５ｋｇ／ｍｍ２ 程度であったのに対し、本発明
の磁気ヘッドでは、酸化物薄膜層８，８を積層したこと
によりその接合強度の平均が１．２５ｋｇ／ｍｍ２ 程
度となり、約２．５倍程度の接合強度の向上が実測され
た。また、ガラス層５，５の積層工程においては、一般
にアルゴン等の不活性ガス雰囲気中で行なわれるが、こ
の雰囲気中に活性ガスである酸素ガスを混入させて酸素
欠乏を防止してスパッタリングを行うと、上記の非磁性
基板１，１間との接合強度が更に向上した。具体的には
、アルゴンガス：酸素ガス＝３：１程度の割合とした雰
囲気中でスパッタリングすると、アルゴンガスだけの雰
囲気中でスパッタリングした上記の接合強度と比べて更
に約１．５倍の強度アップが実測された。In the above-described manufacturing method of the present invention, the metal soft magnetic thin film layers 4, 4 consisting of the ferromagnetic layer 2 and the nonmagnetic layer 3 and the nonmagnetic substrates 1, 11 are bonded to each other by the oxide thin film layers 8, By laminating 8 and glass layers 5 and 5, it becomes possible to easily mass-produce a magnetic head whose bonding strength is much improved compared to the conventional one. Specifically, in the conventional magnetic head, the average bonding strength (shear force) between the nonmagnetic substrates 1 and 1 was about 0.5 kg/mm2, whereas in the magnetic head of the present invention, By laminating the thin film layers 8, 8, the average bonding strength was about 1.25 kg/mm2, and it was actually measured that the bonding strength was improved by about 2.5 times. In addition, the process of laminating the glass layers 5, 5 is generally performed in an inert gas atmosphere such as argon, but sputtering is performed by mixing oxygen gas, which is an active gas, into this atmosphere to prevent oxygen deficiency. The bonding strength between the above nonmagnetic substrates 1 and 1 was further improved. Specifically, sputtering in an atmosphere with a ratio of argon gas: oxygen gas = about 3:1 increases the bonding strength by about 1.5 times compared to the above bonding strength when sputtering in an atmosphere of argon gas only. was actually measured.
【００１８】尚、金属軟磁性薄膜層４と非磁性基板１と
を酸化物薄膜層８とガラス層５を介在させて接合強度を
高めて接合する方法は、実施例で示した磁気ヘッドに限
らず、他の磁性体と非磁性基板とをガラス層を介在させ
て接合すく場合に応用でき、顕著な接合強度の向上が図
れる。Note that the method of bonding the metal soft magnetic thin film layer 4 and the nonmagnetic substrate 1 by interposing the oxide thin film layer 8 and the glass layer 5 to increase the bonding strength is limited to the magnetic head shown in the embodiment. First, it can be applied to bonding another magnetic material and a nonmagnetic substrate with a glass layer interposed therebetween, and the bonding strength can be significantly improved.
【００１９】[0019]
【発明の効果】以上の説明から明らかなように、本発明
の磁気ヘッドでは、非磁性基板間に金属軟磁性薄膜層と
、酸化物薄膜層と、ガラス層とを介在させて接合一体と
することにより、その非磁性基板間の接合強度の大幅な
向上が実現でき、狭トラック化の図られた磁気ヘッドを
提供できるようになり、また、本発明の製造方法による
と、非磁性基板間の接合強度が高められた磁気ヘッドを
効率よく製造することができるといった効果を奏する。[Effects of the Invention] As is clear from the above description, in the magnetic head of the present invention, a metal soft magnetic thin film layer, an oxide thin film layer, and a glass layer are interposed between nonmagnetic substrates and are integrally bonded. As a result, the bonding strength between the nonmagnetic substrates can be significantly improved, and a magnetic head with narrower tracks can be provided. This has the effect that a magnetic head with increased bonding strength can be efficiently manufactured.
【図１】本発明の一実施例に係る磁気ヘッドの斜視図。FIG. 1 is a perspective view of a magnetic head according to an embodiment of the present invention.
【図２】本発明の一実施例に係る磁気ヘッドのヘッド面
の部分拡大平面図。FIG. 2 is a partially enlarged plan view of a head surface of a magnetic head according to an embodiment of the present invention.
【図３】本発明の磁気ヘッドの製造方法を順を追って示
す説明図。FIG. 3 is an explanatory diagram showing a method for manufacturing a magnetic head according to the present invention step by step.
【図４】本発明の磁気ヘッドの製造方法を順を追って示
す説明図。FIG. 4 is an explanatory diagram showing a method of manufacturing a magnetic head according to the present invention step by step.
【図５】本発明の磁気ヘッドの製造方法を順を追って示
す説明図。FIG. 5 is an explanatory diagram showing a method for manufacturing a magnetic head according to the present invention step by step.
【図６】本発明の磁気ヘッドの製造方法を順を追って示
す説明図。FIG. 6 is an explanatory diagram showing a method for manufacturing a magnetic head according to the present invention step by step.
【図７】本発明の磁気ヘッドの製造方法を順を追って示
す説明図。FIG. 7 is an explanatory diagram showing a method for manufacturing a magnetic head according to the present invention step by step.
【図８】本発明の磁気ヘッドの製造方法を順を追って示
す説明図。FIG. 8 is an explanatory diagram showing a method of manufacturing a magnetic head according to the present invention step by step.
【図９】本発明の磁気ヘッドの製造方法を順を追って示
す説明図。FIG. 9 is an explanatory diagram showing a method for manufacturing a magnetic head according to the present invention step by step.
【図１０】従来の磁気ヘッドの斜視図。FIG. 10 is a perspective view of a conventional magnetic head.
１，１１ 非磁性基板 ２ 強磁性体層 ３ 非磁性体層 ４ 金属軟磁性薄膜層 ５ ガラス層 ８ 酸化物薄膜層 ９ 磁気ギャップ 1,11 Non-magnetic substrate 2 Ferromagnetic layer 3 Non-magnetic layer 4 Metal soft magnetic thin film layer 5 Glass layer 8 Oxide thin film layer 9 Magnetic gap
Claims (2)
性体層とを交互に積層してなる金属軟磁性薄膜層と、酸
化物薄膜層と、ガラス層とをそれぞれ接合一体としたこ
とを特徴とする磁気ヘッド。Claim 1: A metal soft magnetic thin film layer formed by alternately laminating ferromagnetic layers and nonmagnetic layers, an oxide thin film layer, and a glass layer are each bonded and integrated between a pair of nonmagnetic substrates. A magnetic head characterized by:
層が位置するように強磁性体層と非磁性体層とを積層し
て金属軟磁性薄膜層を形成し、該金属軟磁性薄膜層の最
外面の強磁性体層に酸化物薄膜層を積層してからガラス
層を積層して他方の非磁性基板を接合一体とする工程を
含むことを特徴とする磁気ヘッドの製造方法。2. A metal soft magnetic thin film layer is formed by laminating a ferromagnetic layer and a nonmagnetic layer such that the ferromagnetic layer is located on the outermost surface on one nonmagnetic substrate, and Manufacture of a magnetic head characterized by including the steps of laminating an oxide thin film layer on the outermost ferromagnetic layer of the soft magnetic thin film layer, laminating a glass layer, and bonding the other nonmagnetic substrate together. Method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3944491A JPH04255902A (en) | 1991-02-08 | 1991-02-08 | Magnetic head and manufacture thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3944491A JPH04255902A (en) | 1991-02-08 | 1991-02-08 | Magnetic head and manufacture thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04255902A true JPH04255902A (en) | 1992-09-10 |
Family
ID=12553194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3944491A Pending JPH04255902A (en) | 1991-02-08 | 1991-02-08 | Magnetic head and manufacture thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04255902A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103846548A (en) * | 2012-11-28 | 2014-06-11 | 北京泰和磁记录制品有限公司 | Magnetic core combination method and system of magnetic-card magnetic read |
-
1991
- 1991-02-08 JP JP3944491A patent/JPH04255902A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103846548A (en) * | 2012-11-28 | 2014-06-11 | 北京泰和磁记录制品有限公司 | Magnetic core combination method and system of magnetic-card magnetic read |
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