JPH04255B2 - - Google Patents
Info
- Publication number
- JPH04255B2 JPH04255B2 JP12793084A JP12793084A JPH04255B2 JP H04255 B2 JPH04255 B2 JP H04255B2 JP 12793084 A JP12793084 A JP 12793084A JP 12793084 A JP12793084 A JP 12793084A JP H04255 B2 JPH04255 B2 JP H04255B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- mirror
- laser beam
- chopper mirror
- laser light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 17
- 239000000126 substance Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Optical Elements Other Than Lenses (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Description
【発明の詳細な説明】
産業上の利用分野
本発明はレーザ光を利用して加工を行うレーザ
加工機等に用いられるチヨツパーミラーに関する
ものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a chopper mirror used in a laser processing machine that performs processing using laser light.
従来例の構成とその問題点
チヨツパーミラーはレーザ光が透過または反射
する部分より構成されており、一本のレーザ光を
２つ以上に分割するためのものである。ここで、
第１図にチヨツパーミラーの従来例を示す。同図
ａは正面図、同図ｂは同図ａのＡ−A′における
断面図である。基板１上に、透過用の穴２を空け
ている。基板１は表面を鏡面加工し反射率を98％
以上にしたものである。センター３を軸中心とし
て回転し、レーザー光をチヨツピングする。この
チヨツパーミラーの場合には、次のような問題点
がある。第１に基板１に穴加工をするため、基板
１の平面度が良く出来ず、また経年変化も起こ
る。第２にチヨツパーミラーを回転して用いる場
合に穴２があるために風切り音が発生し、騒音と
なる。また、空気を引き込むことになり反射面に
空気が当たり空気中の埃などが鏡面を傷つける。
第３に基板１の厚みによりビームをケルことにな
るため穴形状が必要以上に大きくなり、チヨツパ
ーミラーの形状が大きなものになる。Structure of conventional example and its problems A chopper mirror is composed of a part through which laser light is transmitted or reflected, and is used to split one laser light into two or more parts. here,
Figure 1 shows a conventional example of a chopper mirror. Figure a is a front view, and figure b is a sectional view taken along line A-A' in figure a. A transparent hole 2 is made on a substrate 1. Substrate 1 has a mirror-finished surface with a reflectance of 98%.
This is what I did above. It rotates around center 3 and tips the laser beam. This chopper mirror has the following problems. First, since holes are formed in the substrate 1, the flatness of the substrate 1 cannot be improved, and deterioration occurs over time. Second, when the chopper mirror is rotated and used, wind noise is generated due to the presence of the hole 2, resulting in noise. Also, since air is drawn in, the air hits the reflective surface and dust in the air damages the mirror surface.
Thirdly, since the beam is distorted due to the thickness of the substrate 1, the shape of the hole becomes larger than necessary, and the shape of the chopper mirror becomes large.
発明の目的
本発明は、以上に示した問題点を解決し、高精
度で長寿命であり、騒音を発生しないチヨツパー
ミラーを提供することを目的とするものである。OBJECTS OF THE INVENTION It is an object of the present invention to solve the above-mentioned problems and provide a chopper mirror that is highly accurate, has a long life, and does not generate noise.
発明の構成
レーザ光を透過する基板表面上の一部にレーザ
光を反射する物質を形成し、前記基板を回転させ
ることでレーザ光を透過または反射によつて２方
向に分割することによつて、上記目的を達成する
チヨツパーミラーを提供するものである。Structure of the Invention A substance that reflects the laser beam is formed on a part of the surface of the substrate that transmits the laser beam, and by rotating the substrate, the laser beam is divided into two directions by transmission or reflection. The object of the present invention is to provide a chopper mirror that achieves the above object.
実施例の説明
第２図に本発明の一実施例におけるチヨツパー
ミラーの概観図を示す。この実施例はレーザ光と
してCO2レーザを用いた場合のチヨツパーミラー
である。基板４の素材としてはCO2レーザ光を透
過するZnSeである。表面は研磨し、レーザ光を
透過する際損傷しないようになつている。その表
面の一部に反射部５として、金を蒸着している。
金を蒸着していない領域は透過部６となる。第３
図に本実施例のチヨツパーミラーがレーザ光を分
割する例を示す。レーザ光７は反射部５で反射し
レーザ光７−１となり、一方透過部６ではレーザ
光７−２として進む。このように構成されるチヨ
ツパーミラーは基板４上に窓用の穴加工を必要と
しないため、表面の平面度を良くすることが可能
であり、さらに回転して用いる場合に動バランス
が良いため高精度な回転が可能となり、チヨツパ
ーミラーとして高精度なものとなる。また加工に
より歪がないため、平面度の経年変化もない。基
板４がレーザ光を透過するため基板４の厚さに変
化なくチヨツパーミラー径を決定できるため小型
化ができる。DESCRIPTION OF EMBODIMENTS FIG. 2 shows an overview of a chopper mirror in an embodiment of the present invention. This embodiment is a chopper mirror that uses a CO 2 laser as the laser beam. The material of the substrate 4 is ZnSe, which transmits CO 2 laser light. The surface is polished to prevent damage when laser light passes through it. Gold is vapor-deposited on a part of its surface as a reflective part 5.
The region on which gold is not vapor-deposited becomes a transparent section 6. Third
The figure shows an example in which the chopper mirror of this embodiment splits laser light. The laser beam 7 is reflected by the reflecting section 5 and becomes a laser beam 7-1, while it travels through the transmitting section 6 as a laser beam 7-2. Since the chopper mirror configured in this way does not require drilling holes for windows on the substrate 4, it is possible to improve the flatness of the surface, and when used in rotation, it has good dynamic balance, so it can achieve high precision. This makes it possible to rotate the mirror, making it a highly accurate chipper mirror. Also, since there is no distortion due to processing, there is no change in flatness over time. Since the substrate 4 transmits the laser beam, the diameter of the chopper mirror can be determined without changing the thickness of the substrate 4, which allows miniaturization.
また本実施例のチヨツパーミラー表面には凹凸
がないため、高速回転した際に風切り音を発生せ
ず、騒音の問題がない。また回転している際に引
き込む空気量が少ないので、空気中の埃などによ
り表面を損傷することが少なくなる。 Further, since the chopper mirror surface of this embodiment has no irregularities, no wind noise is generated when rotating at high speed, and there is no noise problem. Also, since the amount of air drawn in during rotation is small, the surface is less likely to be damaged by dust in the air.
なお本発明の基板としては使用されるレーザ光
を透過する物質であれば他のものであつても良い
ことはもちろんである。 It goes without saying that the substrate of the present invention may be made of any other material as long as it transmits the laser beam used.
発明の効果
以上要するに本発明はレーザ光を透過する物質
よりなる基板表面上の一部にレーザ光を反射する
物質を形成し、前記基板を回転させることでレー
ザ光を透過または反射によつて２方向に分割する
チヨツパーミラーを提供するもので高精度であ
り、それを長く保つことができ、また騒音の発生
を押えることができる。Effects of the Invention In summary, the present invention forms a material that reflects laser light on a part of the surface of a substrate made of a material that transmits laser light, and rotates the substrate to transmit or reflect the laser light. It provides a chopper mirror that is divided into directions, and is highly accurate, can be maintained for a long time, and can suppress the generation of noise.
第１図ａは従来のチヨツパーミラーの正面図、
同図ｂは同図ａのＡ−A′における断面図、第２
図は本発明の一実施例におけるチヨツパーミラー
の正面図、第３図は本実施例によるレーザ光を分
割する例を説明する図である。
４……基板、５……反射部、６……透過部。
Figure 1a is a front view of a conventional chopper mirror.
Figure b is a sectional view taken along line A-A' in figure a;
The figure is a front view of a chopper mirror in one embodiment of the present invention, and FIG. 3 is a diagram illustrating an example of dividing laser light according to the present embodiment. 4...Substrate, 5...Reflection section, 6...Transmission section.
Claims (1)
ザ光を反射する物質を形成し、前記基板を回転さ
せることでレーザ光を透過または反射によつて２
方向に分割するチヨツパーミラー。1. A substance that reflects the laser beam is formed on a part of the surface of the substrate that transmits the laser beam, and by rotating the substrate, the laser beam is transmitted or reflected.
Chiyotuper mirror that splits into directions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59127930A JPS616619A (en) | 1984-06-21 | 1984-06-21 | Chopper mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59127930A JPS616619A (en) | 1984-06-21 | 1984-06-21 | Chopper mirror |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS616619A JPS616619A (en) | 1986-01-13 |
| JPH04255B2 true JPH04255B2 (en) | 1992-01-06 |
Family
ID=14972150
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59127930A Granted JPS616619A (en) | 1984-06-21 | 1984-06-21 | Chopper mirror |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS616619A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08327810A (en) * | 1995-05-30 | 1996-12-13 | Jiyuu Denshi Laser Kenkyusho:Kk | Optical mirror and laser beam splitting device using the same |
| KR101025015B1 (en) * | 2008-12-02 | 2011-03-25 | 주식회사 엘티에스 | Laser On / Off Shutter Unit |
| CN113547225A (en) * | 2020-04-22 | 2021-10-26 | 鸿鎷科技有限公司 | Precision ceramic table with quartz base |
-
1984
- 1984-06-21 JP JP59127930A patent/JPS616619A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS616619A (en) | 1986-01-13 |
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