JPH0425628Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Field of Application] The present invention relates to a hermetic sealing test jig used to place a subject during an airtight sealing test of electronic parts, electronic equipment, etc.

[Conventional technology]

Generally, in semiconductor devices, a semiconductor chip is sealed in a case made of ceramics, resin, or the like, but if the case is not airtight, the surface of the chip will deteriorate and the wiring pattern will be defective. For this reason, semiconductor devices have been conventionally subjected to hermetic sealing testing equipment.

FIG. 3 is a perspective view of an example of this conventional device.
As shown, the top can be opened and the front has two glass windows.
In the liquid tank 1, an inert and low surface tension test liquid 3 such as fluorocarbon is stored at a high temperature of about 125°C. Semiconductor elements (e.g.
A test object 4 such as LCC) is immersed in this test liquid 3, and air bubbles are generated from the test object 4 to test for airtight sealing failure. Therefore, a jig 5 for immersing the subject 4 in the test liquid 3 is used. The conventional jig 5 includes an arm 5a that is hooked to the upper end of the liquid tank 1, and a support plate 5 that is attached to the lower end of the arm 5a and on which the subject 4 is placed.
It consists of b.

[Problem that the invention attempts to solve]

By the way, when inspecting airtight sealing, it is necessary to check not only the leakage of bubbles but also the position of the leakage. However, when conventional jigs are used, it is possible to confirm the position of bubbles generated from the top and side surfaces of the object 4, but if bubbles are generated from the bottom, the position cannot be confirmed. There is. For this reason, in the past, it was necessary to immerse the subject 4 in the high-temperature test liquid 3 each time the subject 4 was turned over or the angle was changed. As a result, there are problems in that the test time becomes longer and thermal shocks are accumulated as the test liquid is put in and taken out.

Therefore, an object of the present invention is to provide an inspection jig that can immediately confirm the location of air bubbles leaking from the bottom surface of a subject.

[Means for solving problems]

The hermetic sealing test jig according to the present invention is a jig for immersing the test object in a test liquid with the test object placed thereon, and the surface on which the test object is placed is approximately the same as the test liquid. It is characterized by being formed of a net having a refractive index.

[Effect]

Air bubbles generated from the bottom of the object pass through the mesh,
The mesh body has a refractive index substantially equal to that of the test liquid. Therefore, the location of the leak can be seen from the outside and the location can be confirmed.

〔Example〕

Hereinafter, one embodiment of the present invention will be described in detail with reference to FIGS. 1 and 2. In addition, in the description of the drawings, the same elements are given the same reference numerals, and redundant description will be omitted.

FIG. 1 is a perspective view of an embodiment of the present invention, and FIG. 2 is a perspective view of the device in use. As shown in the figure, this jig 10 is formed by an arm 11 and a frame 13 attached to the lower end of the arm 11. As will be described later, the arm 11 is hooked to the upper end of the liquid tank 1, and has a hook portion 11a bent rearward at the upper end.
The frame body 13 is attached to extend horizontally from the lower end of the arm 11, and the net body 12 is stretched inside the frame body 13.

Here, the net body 12 is formed by knitting wire rods having a refractive index substantially the same as that of the test liquid 3 used for the bubble leakage test, and more preferably by knitting transparent or translucent wire rods. It is composed of This net 12 serves as a mounting surface on which the subject 4 is placed, so that even if air bubbles leak from the bottom of the subject 4, they can pass through the net and reach the bottom of the net 12. It's getting old.

Such a jig 10 is used with the subject 4 placed on the net 12, as shown in FIG. That is, the arm 11 is hooked to the liquid tank 1 so that the subject 4 is immersed in the test liquid 3 in the liquid tank 1, and air bubbles from the subject 4 are checked. Here, the front surface of the liquid tank 1 is a glass window 2, and a reflective surface 6 such as a heat-resistant mirror is formed in the shape of a strip on the inner surface, and the subject 4 is positioned on an extension line of the reflective surface 6. immersed in.

When air bubbles are generated from the bottom of the subject 4 in this state, the air bubbles pass through the net 12 without any hindrance and exit into the test liquid 3. Here, since the mesh body 12 has substantially the same curvature as the test liquid, it is not distorted, and the leakage position can be accurately confirmed through the glass window 2 or the reflective surface 6. Therefore,
Since the location of air bubble leakage can be confirmed immediately and reliably, the inspection time is shortened, and the immersion time in the test liquid is shortened, as well as the number of immersions, thereby reducing thermal stress on the sample. can be reduced.

The present invention is not limited to the above embodiments, and various modifications are possible.

For example, the length of the arm 11 may be adjustable. In addition, the net body 12 may be arranged in a multi-stage manner or the arm 1
It may be provided on both sides of 1 to simultaneously test a large number of subjects.

[Effect of idea]

As explained in detail above, in this invention, the surface on which the specimen is placed is made of a net with a refractive index that is approximately the same as that of the test liquid, making it possible to accurately and reliably confirm the position of air bubbles leaking from the bottom of the specimen. There is an effect that can be done.

[Brief explanation of the drawing]

FIG. 1 is a perspective view of an embodiment of the present invention, FIG. 2 is a perspective view of the device in use, and FIG. 3 is a perspective view of a conventional example in use. 3... Test liquid, 4... Test object, 10... Hermetically sealed test jig, 12... Net body.

Claims (1)

[Scope of Claim for Utility Model Registration] A hermetically sealed test jig in which the test object is immersed in a test liquid with the test object placed thereon, wherein the mounting surface of the test object has a refraction that is approximately the same as that of the test liquid. A jig for an airtight sealing test, characterized in that it is formed of a mesh body having a