JPH04256828A - Sampling device - Google Patents

Abstract

PURPOSE:To facilitate measuring operation by passing refrigerant in a double- structured container comprising glass, quartz or ceramics, and providing a gas introducing pipe which can be removed in the container. CONSTITUTION:A gas introducing pipe 1 is bonded to a double-structured container 2 through a fitting bonding part 8. As the material for the introducing pipe 1 and the container 2, glass, quartz or ceramics is used. Quartz glass is most suitable. Refrigerant is supplied between refrigerant feeding ports 3 and 4 of the container 2. The outer tip of the introducing pipe 1 is set in an atmosphere to be measured. The gas is sucked through a sucking port 6 at a suitable flow speed with a sucking pump. The introduced gas is cooled with an inner wall surface 5 of the container 2. Metal vapor and high-boiling-point compound are condensed and captured. When the sampling is finished, solution of oxygen or the like is injected through the introducing pipe 1. The component in the solution is measured by an atomic absorption method. The concentration of the object component in the gas is obtained.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sampling device for collecting vapors of metals and compounds generated in a high-temperature atmosphere and analyzing their components.

0002

2. Description of the Related Art As shown in FIG. 3, a container 10 having a ventilation structure called an impinger is filled with an absorption liquid 14 in which a target component in the gas is dissolved or absorbed by a chemical reaction, and the liquid is sucked through a suction port 11 to form a gas. The mainstream has been a device that collects target analytical components in an absorption liquid by bubbling them through an inlet 12 and a nozzle 13.

0003

[Problems to be Solved by the Invention] Such a conventional collection method using an impinger has no problem in collecting components in gas at around room temperature, but is difficult to apply to high temperature gas. That is, when high-temperature gas comes into direct contact with the absorption liquid, the temperature of the absorption liquid rises, causing problems such as evaporation, decomposition, and reduction in absorption efficiency of the absorption liquid. Furthermore, if the method is applied to gas in a furnace at a high temperature, for example, 800° C. or higher, the gas cannot be directly introduced into the impinger because of the risk of bumping.

The present invention has been made to solve the above-mentioned problems, and it is an object of the present invention to provide a sampling device that efficiently collects metal vapors and high-boiling point compound vapors present in high-temperature gases.

[0005]

[Means for Solving the Problems] In order to achieve the above object, the present invention provides a container in which a refrigerant can flow between an outer container and an inner container having a double structure made of glass, quartz, or ceramics, and this container. It is equipped with a removable gas introduction tube that can introduce gas into the tank.

[0006]

[Function] With the above-described structure, the present invention allows the gas flowing in from the inlet pipe to be cooled in the container, and the metal vapor or the vapor of a high boiling point compound to condense on the wall surface of the container and to be efficiently collected.

[0007]

Embodiment An embodiment of the present invention will be described below with reference to FIGS. 1 and 2.

As shown in FIG. 1, a gas introduction pipe 1 is connected to a double-structured container 2 through a sliding joint 8. As shown in FIG. The tip 7 of the introduction tube 1 inside the container reaches close to the bottom 9 of the container. The introduction tube 1 and the container 2 may be made of any material as long as it is heat resistant and does not affect the analysis value of the target collected component, but quartz glass is most suitable.

[0009] In use of the apparatus, container 2 passes refrigerant between refrigerant supply ports 3 and 4. The outer tip of the introduction tube 1 is set in the atmosphere to be measured, and suction is applied from the suction port 6 at an appropriate flow rate using a suction pump. The introduced gas is cooled on the inner wall surface 5 of the container, and metal vapor and high boiling point compounds are condensed and captured. When sampling is completed, an appropriate solution such as acid or water is poured through the introduction tube 1. In particular, metals with low vapor pressure and high boiling point compounds may aggregate in the air-cooled portion of the introduction tube, so the solution is poured so as to cover the entire inner surface of the introduction tube. The introduction tube 1 is removed, and the components adhering to the inner wall surface 5 of the container 2 shown in FIG. 2 are dissolved. If necessary, hot water is injected from the refrigerant supply port 3 and heated to dissolve the refrigerant.

[0010] The components in this solution were analyzed by atomic absorption spectrometry, ICP
The concentration of the target component in the gas can be determined by measurement using an appropriate method such as emission spectrometry.

[0011]

[Effects of the Invention] The present invention is suitable for controlling atmospheric gas in processing steps for electronic parts and high-purity materials, and for collecting vapor components in gas for the purpose of investigating impurity contamination sources. Since the gas introduction tube and the collection container are constructed to be removable, the container 2 after sampling can be used as a pretreatment container as is, allowing for easy measurement operations and convenient sampling.

[Brief explanation of the drawing]

FIG. 1 is a side view of a sampling device according to an embodiment of the present invention.

[Figure 2] Side view of the container with the introduction tube removed

[Figure 3] Conventional sampling device for collecting components in gas; side view of impinger

[Explanation of symbols]

1 Introductory pipe 2 Container 3 Refrigerant supply port 4 Refrigerant outlet 5　Container inner wall surface 6 Suction port 7 Tip of introduction tube 8　Grinded joint part 9 Bottom of container 10 Impinger container 11 Suction port 12　Introduction port 13 Nozzle 14 Absorption liquid

Claims (1)

[Claims] Claim 1: A sampling device comprising a double-structured container made of glass, quartz, or ceramics, capable of passing a refrigerant between the outer and inner containers, and a removable gas introduction pipe into the container.