JPH0426016U - - Google Patents
Info
- Publication number
- JPH0426016U JPH0426016U JP6828390U JP6828390U JPH0426016U JP H0426016 U JPH0426016 U JP H0426016U JP 6828390 U JP6828390 U JP 6828390U JP 6828390 U JP6828390 U JP 6828390U JP H0426016 U JPH0426016 U JP H0426016U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- refrigerant
- immersed
- thermal conductivity
- good thermal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Filtering Materials (AREA)
- Drying Of Gases (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Description
第１図は本考案の実施例の構成図、第２図ない
し第４図は異なる除湿器の断面図、第５図は真空
チヤンバの圧力低下と時間の関係を示す線図であ
る。
１……真空チヤンバ、３……供給管路、１１，
３１，５１……冷却除湿器、１２，３２，５２…
…冷材、１３，３３，５３……冷材容器、１４，
３４，５４……密閉容器、１９ａ〜１９ｃ，３９
ａ〜３９ｃ，５９ａ〜５９ｃ……焼結金属フイル
タ。
FIG. 1 is a block diagram of an embodiment of the present invention, FIGS. 2 to 4 are cross-sectional views of different dehumidifiers, and FIG. 5 is a diagram showing the relationship between pressure drop in a vacuum chamber and time. 1... Vacuum chamber, 3... Supply pipe line, 11,
31, 51... Cooling dehumidifier, 12, 32, 52...
...cold material, 13,33,53...cold material container, 14,
34, 54... Sealed container, 19a to 19c, 39
a-39c, 59a-59c...Sintered metal filter.
Claims (1)
する供給管路とを備えた真空チヤンバのガス供給
装置において、 上記供給管路に、冷材を充填する断熱性の冷材
容器と、該冷材容器内の冷材に浸漬される熱伝導
性の良好な素材よりなる密閉容器と、該密閉容器
に直接的に固定され密閉容器内を流れるガスから
冷却による吸着及び液化により水分を除去するた
めの複数段の焼結金属製のフイルタとを有する冷
却湿器を設けた、 ことを特徴とする真空チヤンバのガス供給装置。[Scope of Claim for Utility Model Registration] In a vacuum chamber gas supply device comprising a vacuum chamber and a supply pipe for supplying gas to the vacuum chamber, the supply pipe is filled with an adiabatic cooling material. a closed container made of a material with good thermal conductivity that is immersed in the coolant in the refrigerant container; and a closed container made of a material with good thermal conductivity that is immersed in the refrigerant in the refrigerant container; A gas supply device for a vacuum chamber, comprising: a cooling humidifier having a plurality of stages of sintered metal filters for removing moisture.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990068283U JPH0733862Y2 (en) | 1990-06-27 | 1990-06-27 | Gas supply device for vacuum chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990068283U JPH0733862Y2 (en) | 1990-06-27 | 1990-06-27 | Gas supply device for vacuum chamber |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0426016U true JPH0426016U (en) | 1992-03-02 |
| JPH0733862Y2 JPH0733862Y2 (en) | 1995-08-02 |
Family
ID=31602586
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990068283U Expired - Lifetime JPH0733862Y2 (en) | 1990-06-27 | 1990-06-27 | Gas supply device for vacuum chamber |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0733862Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002066250A (en) * | 2000-08-31 | 2002-03-05 | Ulvac Kuraio Kk | Dry air manufacturing device |
| JP2010012373A (en) * | 2008-07-01 | 2010-01-21 | Mitsubishi Heavy Ind Ltd | Drain separator and cooling-dehumidification unit |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4735941U (en) * | 1971-05-17 | 1972-12-21 | ||
| JPS5666685U (en) * | 1979-10-23 | 1981-06-03 | ||
| JPS56108501A (en) * | 1980-01-31 | 1981-08-28 | Ckd Corp | Refrigerator for compressed air |
| JPS58170501A (en) * | 1982-03-30 | 1983-10-07 | Mitsubishi Electric Corp | Apparatus for removing steam |
| JPS6042330U (en) * | 1983-09-02 | 1985-03-25 | エスエムシ−株式会社 | air dehumidifier |
-
1990
- 1990-06-27 JP JP1990068283U patent/JPH0733862Y2/en not_active Expired - Lifetime
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4735941U (en) * | 1971-05-17 | 1972-12-21 | ||
| JPS5666685U (en) * | 1979-10-23 | 1981-06-03 | ||
| JPS56108501A (en) * | 1980-01-31 | 1981-08-28 | Ckd Corp | Refrigerator for compressed air |
| JPS58170501A (en) * | 1982-03-30 | 1983-10-07 | Mitsubishi Electric Corp | Apparatus for removing steam |
| JPS6042330U (en) * | 1983-09-02 | 1985-03-25 | エスエムシ−株式会社 | air dehumidifier |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002066250A (en) * | 2000-08-31 | 2002-03-05 | Ulvac Kuraio Kk | Dry air manufacturing device |
| JP2010012373A (en) * | 2008-07-01 | 2010-01-21 | Mitsubishi Heavy Ind Ltd | Drain separator and cooling-dehumidification unit |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0733862Y2 (en) | 1995-08-02 |
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