JPH0426016U - - Google Patents

Info

Publication number
JPH0426016U
JPH0426016U JP6828390U JP6828390U JPH0426016U JP H0426016 U JPH0426016 U JP H0426016U JP 6828390 U JP6828390 U JP 6828390U JP 6828390 U JP6828390 U JP 6828390U JP H0426016 U JPH0426016 U JP H0426016U
Authority
JP
Japan
Prior art keywords
vacuum chamber
refrigerant
immersed
thermal conductivity
good thermal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6828390U
Other languages
English (en)
Other versions
JPH0733862Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990068283U priority Critical patent/JPH0733862Y2/ja
Publication of JPH0426016U publication Critical patent/JPH0426016U/ja
Application granted granted Critical
Publication of JPH0733862Y2 publication Critical patent/JPH0733862Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Filtering Materials (AREA)
  • Drying Of Gases (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)

Description

【図面の簡単な説明】
第１図は本考案の実施例の構成図、第２図ない
し第４図は異なる除湿器の断面図、第５図は真空
チヤンバの圧力低下と時間の関係を示す線図であ
る。 １……真空チヤンバ、３……供給管路、１１，
３１，５１……冷却除湿器、１２，３２，５２…
…冷材、１３，３３，５３……冷材容器、１４，
３４，５４……密閉容器、１９ａ〜１９ｃ，３９
ａ〜３９ｃ，５９ａ〜５９ｃ……焼結金属フイル
タ。

Claims (1)

  1. 【実用新案登録請求の範囲】 真空チヤンバと、該真空チヤンバにガスを供給
    する供給管路とを備えた真空チヤンバのガス供給
    装置において、 上記供給管路に、冷材を充填する断熱性の冷材
    容器と、該冷材容器内の冷材に浸漬される熱伝導
    性の良好な素材よりなる密閉容器と、該密閉容器
    に直接的に固定され密閉容器内を流れるガスから
    冷却による吸着及び液化により水分を除去するた
    めの複数段の焼結金属製のフイルタとを有する冷
    却湿器を設けた、 ことを特徴とする真空チヤンバのガス供給装置。
JP1990068283U 1990-06-27 1990-06-27 真空チャンバのガス供給装置 Expired - Lifetime JPH0733862Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990068283U JPH0733862Y2 (ja) 1990-06-27 1990-06-27 真空チャンバのガス供給装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990068283U JPH0733862Y2 (ja) 1990-06-27 1990-06-27 真空チャンバのガス供給装置

Publications (2)

Publication Number Publication Date
JPH0426016U true JPH0426016U (ja) 1992-03-02
JPH0733862Y2 JPH0733862Y2 (ja) 1995-08-02

Family

ID=31602586

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990068283U Expired - Lifetime JPH0733862Y2 (ja) 1990-06-27 1990-06-27 真空チャンバのガス供給装置

Country Status (1)

Country Link
JP (1) JPH0733862Y2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002066250A (ja) * 2000-08-31 2002-03-05 Ulvac Kuraio Kk ドライエアー製造装置
JP2010012373A (ja) * 2008-07-01 2010-01-21 Mitsubishi Heavy Ind Ltd ドレインセパレータ及び冷却・除湿ユニット

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4735941U (ja) * 1971-05-17 1972-12-21
JPS5666685U (ja) * 1979-10-23 1981-06-03
JPS56108501A (en) * 1980-01-31 1981-08-28 Ckd Corp Refrigerator for compressed air
JPS58170501A (ja) * 1982-03-30 1983-10-07 Mitsubishi Electric Corp 蒸気除去装置
JPS6042330U (ja) * 1983-09-02 1985-03-25 エスエムシ−株式会社 空気除湿機

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4735941U (ja) * 1971-05-17 1972-12-21
JPS5666685U (ja) * 1979-10-23 1981-06-03
JPS56108501A (en) * 1980-01-31 1981-08-28 Ckd Corp Refrigerator for compressed air
JPS58170501A (ja) * 1982-03-30 1983-10-07 Mitsubishi Electric Corp 蒸気除去装置
JPS6042330U (ja) * 1983-09-02 1985-03-25 エスエムシ−株式会社 空気除湿機

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002066250A (ja) * 2000-08-31 2002-03-05 Ulvac Kuraio Kk ドライエアー製造装置
JP2010012373A (ja) * 2008-07-01 2010-01-21 Mitsubishi Heavy Ind Ltd ドレインセパレータ及び冷却・除湿ユニット

Also Published As

Publication number Publication date
JPH0733862Y2 (ja) 1995-08-02

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