JPH04261702A - Tool made of silicon nitride sintered body - Google Patents

Tool made of silicon nitride sintered body

Info

Publication number
JPH04261702A
JPH04261702A JP3022370A JP2237091A JPH04261702A JP H04261702 A JPH04261702 A JP H04261702A JP 3022370 A JP3022370 A JP 3022370A JP 2237091 A JP2237091 A JP 2237091A JP H04261702 A JPH04261702 A JP H04261702A
Authority
JP
Japan
Prior art keywords
silicon nitride
sintered body
nitride sintered
tool
sialon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3022370A
Other languages
Japanese (ja)
Inventor
Hideki Moriguchi
秀樹 森口
Toshiaki Nakamata
中俣 俊明
Akinori Kobayashi
小林 晄徳
Toshio Nomura
俊雄 野村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Sumitomo Electric Igetaroy Co Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Sumitomo Electric Igetaroy Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd, Sumitomo Electric Igetaroy Co Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP3022370A priority Critical patent/JPH04261702A/en
Priority to DE69207613T priority patent/DE69207613T2/en
Priority to ES92101647T priority patent/ES2084850T3/en
Priority to EP92101647A priority patent/EP0499861B1/en
Priority to KR1019920002004A priority patent/KR950004662B1/en
Publication of JPH04261702A publication Critical patent/JPH04261702A/en
Priority to US08/000,810 priority patent/US5296008A/en
Pending legal-status Critical Current

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  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Ceramic Products (AREA)

Abstract

PURPOSE:To provide a tool made of a silicon nitride sintered body excellent in wear resistance and toughness and capable of being manufactured at low cost. CONSTITUTION:It is a tool made of a silicon nitride sintered body, containing a silicon nitride and sintering assistant, is composed of the silicon nitride sintered body sintered with no pressure, and removed with beta-Si3N4(beta'-sialon included) freely developed on the surface, from the sintered skin.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は、少なくとも工具として
の稼働部が、耐摩耗性および靭性に優れた窒化珪素焼結
体からなる、窒化珪素焼結体製工具に関するものである
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a tool made of a silicon nitride sintered body, in which at least the working part of the tool is made of a silicon nitride sintered body having excellent wear resistance and toughness.

【0002】0002

【従来の技術】従来、切削工具や研磨工具の分野では、
高速,高能率加工の観点からセラミック工具を高速度工
や超硬工具,コーティング工具に代えて用いようとする
試みがなされ、まず最初にAl2 O3 系工具が19
50年代に登場した。しかしながら、当初はその靭性が
小さいために実用化はされず、その後、TiCの添加、
ZrO2 の添加(特公昭59−6279号公報)、S
iCウイスカーの添加(特開昭61−274803号公
報)などによる靭性向上を目的とした改良がなされ、鋳
鉄の仕上切削を中心に実用化されるようになった。とこ
ろが、その靭性は未だ十分ではなく、信頼性が低いため
に、粗切削用途および断続切削に用いることは不可能で
あった。これに対し、窒化珪素焼結体はAl2 O3 
系焼結体に比較し靭性が高く、熱膨張係数も小さいこと
から熱衝撃抵抗が高く、鋳鉄の粗/仕上切削,湿式切削
などに幅広く使用でき、また信頼性も高いことから急速
に浸透してきている。
[Prior Art] Conventionally, in the field of cutting tools and polishing tools,
Attempts were made to use ceramic tools in place of high-speed machining, carbide tools, and coated tools from the viewpoint of high-speed, high-efficiency machining, and first, Al2 O3-based tools were used.
It appeared in the 1950s. However, it was not put into practical use at first due to its low toughness, and after that, the addition of TiC,
Addition of ZrO2 (Japanese Patent Publication No. 59-6279), S
Improvements were made with the aim of improving toughness, such as by adding iC whiskers (Japanese Patent Application Laid-Open No. 61-274803), and it came into practical use mainly for finishing cutting of cast iron. However, its toughness is still insufficient and its reliability is low, making it impossible to use it for rough cutting or interrupted cutting. On the other hand, silicon nitride sintered body is Al2O3
Compared to sintered bodies, it has high toughness and a small coefficient of thermal expansion, so it has high thermal shock resistance, and can be widely used for rough/finish cutting of cast iron, wet cutting, etc., and is highly reliable, so it has rapidly become popular. ing.

【0003】従来、この窒化珪素焼結体に関しては、強
度向上を目的として、焼結助剤についての研究開発が盛
んに行われてきた。これは、窒化珪素が共有結合性の強
い化合物であり、イオン結晶や金属結晶に比較して粒界
エネルギーと表面エネルギーの比が大きく、自己拡散が
非常に遅く、高温では分解と蒸発を生じて焼結しにくい
物質であるためである。すなわち、MgO,Y2 O3
 ,Al2 O3 ,ZrO2 ,AlN,CaO,C
eO2 ,SiO2 などの焼結助剤により、低融点の
ガラス相を形成させ、液相焼結により緻密な焼結体を得
る技術が開発されてきた。このような助剤の開発の歴史
の中で、Y2 O3 などの焼結助剤は、単に焼結体を
緻密化させるだけではなく、窒化珪素結晶粒子を柱状に
発達させ、繊維強化の理論によって窒化珪素焼結体を高
強度化させたという点で非常に重要な技術開発であった
(特公昭48−7486号公報参照)。この焼結メカニ
ズムは、α−Si3 N4 が高温で生成した溶融ガラ
ス相中に溶解し、溶解再析出現象によりβ−Si3 N
4 (またはβ´−サイアロン)となって析出し、Y2
 O3存在下で六方晶のC軸方向に成長して、柱状の窒
化珪素粒子が生成するというものである。この技術開発
により窒化珪素の高強度化が可能となり、鋳鉄の粗切削
,断続切削,粗フライス切削の可能なセラミック工具と
して実用化が進んでいる。
[0003] Conventionally, with regard to this silicon nitride sintered body, research and development on sintering aids have been actively conducted for the purpose of improving the strength. This is because silicon nitride is a compound with strong covalent bonds, has a large ratio of grain boundary energy to surface energy compared to ionic crystals and metal crystals, self-diffusion is extremely slow, and decomposes and evaporates at high temperatures. This is because it is a substance that is difficult to sinter. That is, MgO, Y2 O3
, Al2 O3 , ZrO2 , AlN, CaO, C
A technique has been developed in which a sintering aid such as eO2 or SiO2 is used to form a glass phase with a low melting point and a dense sintered body is obtained by liquid phase sintering. In the history of the development of such auxiliaries, sintering auxiliaries such as Y2O3 not only densify the sintered body, but also develop silicon nitride crystal grains into columnar shapes, and according to the theory of fiber reinforcement, sintering auxiliaries such as Y2O3 This was a very important technological development in that it increased the strength of silicon nitride sintered bodies (see Japanese Patent Publication No. 48-7486). This sintering mechanism is that α-Si3N4 dissolves in the molten glass phase generated at high temperature, and β-Si3N
4 (or β'-sialon) and precipitates as Y2
Columnar silicon nitride particles are produced by growing in the C-axis direction of hexagonal crystals in the presence of O3. This technological development has made it possible to increase the strength of silicon nitride, and it is now being put into practical use as a ceramic tool capable of rough cutting, interrupted cutting, and rough milling of cast iron.

【0004】また、このような焼結助剤の開発および窒
素ガス圧焼結の採用により、従来ホットプレス法によっ
てしか製造できなかった窒化珪素の蒸発焼結が可能とな
り、複雑形状のものをニアネットシェイプ、すなわち最
終製品の形状にほぼ近い形で容易に製造できるようにな
った。
Furthermore, the development of such a sintering aid and the adoption of nitrogen gas pressure sintering have made it possible to perform evaporative sintering of silicon nitride, which could previously only be produced by hot pressing, making it possible to produce products with complex shapes in a near-field manner. It is now possible to easily manufacture net-shape products that closely approximate the shape of the final product.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、上記技
術開発によりニアネットシェイプ化が進んだと言っても
、窒化珪素系工具においては、超硬、サーメット工具の
ように焼結肌をそのまま利用して工具とする製品開発は
遅れており、研削加工により、希望の形状に仕上げられ
ているのが現状である。そのため、研削加工時に発生し
た加工傷が原因となるクラックにより焼結体強度が低下
し、また窒化珪素が非常に難加工性であることにより製
造コストの増大を招いている。
[Problems to be Solved by the Invention] However, even though near-net shaping has progressed through the above-mentioned technological developments, silicon nitride-based tools do not utilize the sintered skin as is, as in carbide and cermet tools. The development of products that can be used as tools has been slow, and currently the desired shape is achieved through grinding. Therefore, the strength of the sintered body decreases due to cracks caused by machining scratches generated during grinding, and silicon nitride is extremely difficult to process, leading to an increase in manufacturing costs.

【0006】そのため、成形時に希望の形状とし、研削
加工を施すことなく、あるいは研削加工以外のコストの
安い方法で後処理し、製品として仕上げようとする試み
もあるが、このようにしてできた製品では、焼結体表面
に生じた異常相の存在による強度劣化および耐摩耗性の
低下が生じるといった問題点を有している。また、焼結
体表面の異常相には、Si3 N4 の昇華分解,粒界
ガラス相の飛散などが考えられる。このような問題点に
対し、窒化珪素焼結体表面を酸化し、二酸化珪素を主体
とする膜を形成して焼結体表面の異常相を覆い、窒化珪
素焼結体そのものが持つ特性を引出そうとする試みも提
案されている(特開平2−164773号公報)。しか
しながら、このような処理を行なった焼結体により工具
を製造し、実用に供しようとしても、焼結体表面に生成
した低融点のシリケートガラス相により、被削材との溶
着が発生しやすく、耐摩耗性の低下といった現象を招く
結果となってしまう。また、窒化珪素のプレス体を窒化
珪素基粉末を下敷きにして挿入した特定材料の容器は、
黒煙坩堝内に窒化珪素基粉末に埋没して焼結することに
より、焼結のままの状態で実用に供し得る焼結材料を得
る方法が提案されている(特公昭62−30152号公
報)。しかしながら、この方法で製造した焼結体表面に
も、通常の蒸発焼結法と同じく、図1(a),(b)に
見られるような自由成長した柱状の窒化珪素結晶粒が生
成する。この柱状の窒化珪素結晶粒はβ−Si3 N4
 (またはβ´−サイアロン)であって、前述したよう
に、この結晶粒が焼結体内部で絡まり合った結果、繊維
強化の機構によって窒化珪素焼結体は高強度化されてお
り、セラミック工具でありながら鋳鉄の粗フライス,断
絶旋削等の切削加工が可能となっている。この現象は高
強度化された窒化珪素焼結体に特有のものであり、サー
メット工具や超硬工具の焼結肌には見られない現象であ
る。
[0006]Therefore, there have been attempts to form the desired shape during molding and finish it as a product without grinding or by post-processing using a low-cost method other than grinding. The product has problems such as deterioration in strength and reduction in wear resistance due to the presence of abnormal phases on the surface of the sintered body. Further, the abnormal phase on the surface of the sintered body may be caused by sublimation and decomposition of Si3N4, scattering of grain boundary glass phase, etc. To solve these problems, we oxidized the surface of the silicon nitride sintered body to form a film mainly composed of silicon dioxide to cover the abnormal phase on the sintered body surface and bring out the characteristics of the silicon nitride sintered body itself. An attempt to do so has also been proposed (Japanese Unexamined Patent Publication No. 2-164773). However, even if a tool is manufactured using a sintered body treated in this way and put into practical use, the low melting point silicate glass phase formed on the surface of the sintered body tends to cause welding with the workpiece. This results in a phenomenon such as a decrease in wear resistance. In addition, a container made of a specific material in which a pressed silicon nitride body is inserted with silicon nitride-based powder underneath,
A method has been proposed in which a sintered material that can be used for practical use in the sintered state is obtained by embedding it in silicon nitride-based powder in a black smoke crucible and sintering it (Japanese Patent Publication No. 30152/1982). . However, on the surface of the sintered body manufactured by this method, freely grown columnar silicon nitride crystal grains as seen in FIGS. 1(a) and 1(b) are generated, as in the case of the normal evaporative sintering method. These columnar silicon nitride crystal grains are β-Si3 N4
(or β'-Sialon), and as mentioned above, as a result of these crystal grains intertwining inside the sintered body, the silicon nitride sintered body has a high strength due to the fiber reinforcement mechanism, and is used for ceramic tools. However, it is possible to carry out cutting operations such as rough milling and cut-off turning of cast iron. This phenomenon is unique to highly strengthened silicon nitride sintered bodies, and is not observed in the sintered skin of cermet tools or cemented carbide tools.

【0007】この焼結体表面に自由成長したβ−Si3
 N4 (またはβ´−サイアロン)は、自由成長して
いるがゆえに、不安定で、柱状結晶粒端部で焼結助剤成
分を中心としたガラス相により、固定化されているにす
ぎない。そのため、外部応力が加わったとき、脱落現象
を生じやすく、また面粗さも、柱状粒子同志の間に空隙
が存在するため、粗くなっている。
[0007] β-Si3 freely grew on the surface of this sintered body.
N4 (or β'-Sialon) is unstable because it grows freely, and is only fixed by a glass phase mainly composed of sintering aid components at the ends of columnar crystal grains. Therefore, when external stress is applied, it is easy to cause a falling-off phenomenon, and the surface roughness is also rough due to the presence of voids between the columnar particles.

【0008】その結果、このような表面相を持つ焼結体
を工具として用いた場合、柱状結晶粒の脱落による耐摩
耗性の低下および強度劣化が生じるという問題がある。
As a result, when a sintered body having such a surface phase is used as a tool, there is a problem in that wear resistance and strength deteriorate due to shedding of columnar crystal grains.

【0009】本発明は上記観点に鑑みて成されたもので
、窒化珪素焼結体表面を改良することによって、耐摩耗
性,靭性に優れ、しかも低価格で製造可能な窒化珪素焼
結体製工具を提供することを目的とする。
The present invention has been made in view of the above points, and by improving the surface of the silicon nitride sintered body, a silicon nitride sintered body that has excellent wear resistance and toughness and can be manufactured at a low cost. The purpose is to provide tools.

【0010】0010

【課題を解決するための手段およびその作用】上記課題
を解決するため本発明は、β−Si3 N4 (または
β´−サイアロン)により高強度化された窒化珪素焼結
体において、焼結体表面に自由成長した柱状のβ−Si
3 N4 (またはβ´−サイアロン)を除去した窒化
珪素焼結体を工具として供することにより、窒化珪素焼
結体本来が持つ特性を発揮できることを見出だしたもの
である。
[Means for Solving the Problems and Their Effects] In order to solve the above problems, the present invention provides a silicon nitride sintered body highly strengthened by β-Si3N4 (or β'-Sialon). Columnar β-Si grown freely on
It has been discovered that by using a silicon nitride sintered body from which 3N4 (or β'-Sialon) has been removed as a tool, the inherent characteristics of the silicon nitride sintered body can be exhibited.

【0011】また本発明においては、自由成長した柱状
のβ−Si3 N4 (またはβ´−サイアロン)を除
去する手段として、ブラスト処理,バレル処理あるいは
超音波振動法による処理を用い、研削加工を用いないこ
とにより、低コストの処理を可能にしている。
[0011] Furthermore, in the present invention, as a means for removing freely grown columnar β-Si3N4 (or β'-Sialon), blasting, barrel processing, or ultrasonic vibration processing is used, and grinding is used. This enables low-cost processing.

【0012】本発明において用いられる窒化珪素焼結体
は、周知の方法で製造されるもので、たとえば窒化珪素
粉末に焼結助剤を加えた混合物を、1ton/cm2 
の圧力で金型プレスし、1700〜1900℃の温度で
窒素雰囲気中にて常圧焼結もしくは常圧焼結後熱間静水
圧プレスを行なうことによって製造される。本発明にお
いて用いられる窒化珪素粉末としては、α率すなわちα
−Si3 N4 のwt%が90%以上のものが望まし
い。これは、柱状のβ−Si3 N4 (またはβ´−
サイアロン)が絡まり合った強度の優れた窒化珪素焼結
体を得るためには、α率が90%以上の窒化珪素原料粉
末を用いることが好適なためである。また、窒化珪素の
原料粉末としては、イミド分解法によるものを用いるこ
とが望ましい。これは、イミド分解法による窒化珪素原
料粉末は、微量かつ高純度で焼結助剤による液相中に溶
解しやすく、溶解再析出現象による微粒でアスペクト比
の大きなβ−Si3 N4 (またはβ´−サイアロン
)の絡まり合った窒化珪素焼結体を製造しやすいためで
ある。
The silicon nitride sintered body used in the present invention is produced by a well-known method, for example, a mixture of silicon nitride powder and a sintering aid is mixed at 1 ton/cm2.
It is manufactured by mold pressing at a pressure of 1,700 to 1,900° C. in a nitrogen atmosphere under normal pressure sintering or hot isostatic pressing after normal pressure sintering. The silicon nitride powder used in the present invention has an α rate, that is, α
-It is desirable that the wt% of Si3N4 is 90% or more. This is a columnar β-Si3 N4 (or β'-
This is because, in order to obtain a silicon nitride sintered body with excellent strength in which SiAlON) are entangled, it is preferable to use a silicon nitride raw material powder with an α rate of 90% or more. Further, it is desirable to use a raw material powder of silicon nitride made by an imide decomposition method. This is because the silicon nitride raw material powder produced by the imide decomposition method has a small amount and high purity and is easily dissolved in the liquid phase by the sintering aid. This is because it is easy to manufacture a silicon nitride sintered body in which the particles (sialon) are intertwined.

【0013】次に、焼結助剤としては、MgO,Y2 
O3 ,Al2 O3 ,ZrO2 ,AlN,CaO
,CeO2 ,SiO2 より少なくとも1種以上、1
wt%以上20wt%以下含有させることが望ましい。 これはこれらの焼結助剤を用いることにより、焼結性が
向上し、蒸発焼結でも緻密な焼結体を得ることができる
ようになるためである。1wt%以下の添加では蒸発焼
結が難しく、20wt%より多く添加すると耐摩耗性が
低下するため好ましくない。特に、Y2 O3 ,Ce
O2 の添加は窒化珪素結晶粒の柱状晶化が顕著になり
、高強度化の観点から望ましい。また、Tiの炭化物,
窒化物,硼化物および炭窒化物の少なくとも1種以上を
1〜30wt%を添加すると、焼結体の硬度が向上し、
耐摩耗性が改善される。ただし、1wt%以下ではその
効果は小さく、30wt%より多くなると焼結性が低下
するので好ましくない。
Next, as a sintering aid, MgO, Y2
O3, Al2 O3, ZrO2, AlN, CaO
, CeO2, SiO2, 1
It is desirable to contain it in a range of wt% or more and 20wt% or less. This is because by using these sintering aids, sinterability is improved and a dense sintered body can be obtained even by evaporation sintering. Addition of less than 1 wt% makes evaporation sintering difficult, and addition of more than 20 wt% reduces wear resistance, which is not preferred. In particular, Y2O3, Ce
Addition of O2 causes significant columnar crystallization of silicon nitride crystal grains, which is desirable from the viewpoint of increasing strength. In addition, Ti carbide,
When 1 to 30 wt% of at least one of nitrides, borides, and carbonitrides is added, the hardness of the sintered body is improved,
Wear resistance is improved. However, if it is less than 1 wt%, the effect is small, and if it is more than 30 wt%, the sinterability deteriorates, which is not preferable.

【0014】このようにして得られた窒化珪素焼結体表
面に自由成長したβ−Si3 N4 (またはβ´−サ
イアロン)を除去する手段としては、研削加工以外の処
理コストの安価な方法であれば、いかなる方法であって
もよいが、たとえばブラスト処理,バレル処理,超音波
振動法による処理が考えられる。ブラスト処理の方法と
しては、たとえば4kg/cm2 の圧力で#120の
Al2 O3 を投射して行なう。バレル処理の方法と
しては、たとえば#120のSiCに水を加え、200
0rpmで回転させて処理する。超音波振動法による処
理方法としては、たとえば600Wの超音波振動子を用
い、ダイヤモンド砥粒を含んだ水中で3時間程度処理を
行なう。ブラスト処理,バレル処理に用いられる投射剤
やメディアとしては、SiC,Ai2 O3 などのセ
ラミックのほか、SiO2 などのガラス系のものを用
いても良好に処理することができる。
[0014] As a means for removing β-Si3N4 (or β'-Sialon) which has grown freely on the surface of the silicon nitride sintered body obtained in this way, any method with low processing cost other than grinding may be used. For example, any method may be used, including blasting, barrel treatment, and ultrasonic vibration. As a method of blasting, for example, #120 Al2 O3 is projected at a pressure of 4 kg/cm2. As a barrel treatment method, for example, water is added to #120 SiC and 200
Process by rotating at 0 rpm. As a processing method using the ultrasonic vibration method, for example, a 600 W ultrasonic vibrator is used and the processing is performed in water containing diamond abrasive grains for about 3 hours. As the propellant or media used for blasting and barrel processing, in addition to ceramics such as SiC and Ai2O3, glass-based materials such as SiO2 can also be used to perform the process favorably.

【0015】ブラスト処理により自由成長した柱状窒化
珪素粒子を除去した窒化珪素焼結体の表面組織の結晶構
造を示すSEM写真を、図2(a),(b)に、バレル
処理により自由成長した柱状窒化珪素粒子を除去した窒
化珪素焼結体の表面の結晶構造を示すSEM写真を、図
3(a),(b)に示す。このように、自由成長した柱
状窒化珪素粒子を除去した焼結肌では、粒界ガラス相と
柱状窒化珪素粒子が混在した状態となっており、表面S
EM写真により処理の有無を判断できる。また表面に自
由成長した柱状窒化珪素粒子の除去の有無は、X線回折
により、β−Si3 N4 (またはβ´−サイアロン
)の回折ピークの半価幅、すなわち回折ピークの高さが
半分になったときの回折角の幅の測定により判定するこ
とができる。
FIGS. 2(a) and 2(b) show SEM photographs showing the crystal structure of the surface structure of a silicon nitride sintered body from which columnar silicon nitride particles that had grown freely by blasting were removed. SEM photographs showing the crystal structure of the surface of the silicon nitride sintered body from which the columnar silicon nitride particles have been removed are shown in FIGS. 3(a) and 3(b). In this way, in the sintered skin from which the freely grown columnar silicon nitride particles have been removed, the grain boundary glass phase and the columnar silicon nitride particles are mixed, and the surface S
The presence or absence of treatment can be determined using EM photographs. Furthermore, whether or not the columnar silicon nitride particles that have grown freely on the surface are removed can be determined by X-ray diffraction, which shows that the half width of the diffraction peak of β-Si3N4 (or β'-Sialon), that is, the height of the diffraction peak, is halved. This can be determined by measuring the width of the diffraction angle when

【0016】本発明に適用する窒化珪素焼結体は、表面
の10点平均面粗さRzを3μm以下(検出距離は2.
5mmとする)とすることが望ましい。それは、Rzが
3μmよりも大きいと、焼結体表面に自由成長した柱状
のβ−Si3N4 (またはβ´−サイアロン)の除去
が不十分であることになり、これでは工具として用いた
場合の耐摩耗性の改善の効果が小さいためである。
The silicon nitride sintered body applied to the present invention has a 10-point average surface roughness Rz of 3 μm or less (detection distance is 2.0 μm or less).
5 mm). If Rz is larger than 3 μm, columnar β-Si3N4 (or β'-Sialon) that has grown freely on the surface of the sintered body will not be removed sufficiently, and this will reduce the durability when used as a tool. This is because the effect of improving abrasion properties is small.

【0017】[0017]

【実施例】以下に、本発明の一実施例を述べる。[Embodiment] An embodiment of the present invention will be described below.

【0018】平均粒径0.4μm,α結晶化率96%,
酸素量1.5wt%の窒化珪素原料および平均粒径0.
8μmのY2 O3 粉末5wt%,0.4μmのAl
2 OI3 粉末3wt%を、エタノール中、100時
間、ナイロン製ボールミルで湿式混合した後、乾燥して
得られた混合粉末を、工具形状SNMN120408の
金型を用い、1ton/CM2 でプレス成形した。こ
の成形体を加圧焼結炉において窒素ガス5気圧中180
0℃で2時間焼結し、すくい面のみを研削加工し、工具
形状SNMN120408の窒化珪素焼結体Xを得た。
[0018] Average particle size 0.4 μm, α crystallinity rate 96%,
A silicon nitride raw material with an oxygen content of 1.5 wt% and an average particle size of 0.
8μm Y2O3 powder 5wt%, 0.4μm Al
2 OI3 powder (3 wt%) was wet-mixed in ethanol for 100 hours in a nylon ball mill, and the resulting mixed powder was then dried and press-molded at 1 ton/CM2 using a mold with tool shape SNMN120408. This compact was placed in a pressure sintering furnace at 180° C. in a nitrogen gas atmosphere of 5 atm.
Sintering was carried out at 0° C. for 2 hours, and only the rake face was ground to obtain a silicon nitride sintered body X having a tool shape of SNMN120408.

【0019】[0019]

【表1】[Table 1]

【0020】このようにして得た窒化珪素焼結体製工具
により、下記の2通りの条件で切削試験を行なった。
Cutting tests were conducted using the silicon nitride sintered tool thus obtained under the following two conditions.

【0021】(切削試験1) 被削材:FC25 切削速度:600m/min 送り:0.4mm/rev 切込み:1.5mm 切削湯:DRY 切削時間:10min (切削試験2) 被削材:FC25 切削速度:200m/min 送り:0.2mm/刃 切込み:2.5mm 切削湯:DRY 切削時間:10min 上記各切削試験の結果を、表2に示す。表2の結果から
、本発明品である工具試料A〜Dは、本発明を外れるE
,Fに比べて優れた耐摩耗性,耐欠損性を示すことが分
る。ただし、試料工具Aにおいては、自由成長したβ−
Si3 N4 (またはβ´−サイアロン)の除去が十
分ではないため、工具試料B〜Dに比べると焼結体表面
が粗くなり、切削試験結果も比較的フランク摩耗が大き
くなっている。また、焼結体表面に酸化処理を加えた工
具試料Eの場合、表面粗さはRzが1.5μmと最も小
さな値となったが、切削試験結果においては、フランク
摩耗は極めて大きくなっている。これは、酸化処理では
焼結体表面が平坦にはなるが、表面に生成した酸化膜(
シリケートガラス)の融点が低いために、耐摩耗性が劣
化したためであると考えられる。
(Cutting test 1) Work material: FC25 Cutting speed: 600 m/min Feed: 0.4 mm/rev Depth of cut: 1.5 mm Cutting water: DRY Cutting time: 10 min (Cutting test 2) Work material: FC25 Cutting Speed: 200 m/min Feed: 0.2 mm/blade depth of cut: 2.5 mm Cutting fluid: DRY Cutting time: 10 min Table 2 shows the results of each of the above cutting tests. From the results in Table 2, tool samples A to D, which are products of the present invention, are different from E, which is outside the invention.
, F shows superior wear resistance and chipping resistance. However, in sample tool A, freely grown β-
Since the removal of Si3N4 (or β'-sialon) was not sufficient, the surface of the sintered body was rougher than in tool samples B to D, and the cutting test results also showed relatively large flank wear. In addition, in the case of tool sample E, in which the sintered body surface was subjected to oxidation treatment, the surface roughness Rz was the smallest value of 1.5 μm, but the cutting test results showed that flank wear was extremely large. . This is due to the fact that although the surface of the sintered body becomes flat with the oxidation treatment, an oxide film (
This is thought to be because the abrasion resistance deteriorated due to the low melting point of silicate glass.

【0022】[0022]

【表2】[Table 2]

【0023】[0023]

【発明の効果】以上説明したように本発明によれば、焼
結体表面に自由成長したβ−Si3 N4 (またはβ
´−サイアロン)を除去することにより、耐摩耗性、,
靭性に優れた窒化珪素焼結体製工具を安価な製造コスト
で製造することができ、工業上与える効果は大きい。
Effects of the Invention As explained above, according to the present invention, β-Si3 N4 (or β
By removing ´-Sialon), wear resistance,
A tool made of silicon nitride sintered body with excellent toughness can be manufactured at low manufacturing cost, which has a great industrial effect.

【図面の簡単な説明】[Brief explanation of the drawing]

【図1】(a)は窒化珪素焼結体の表面の焼結肌の結晶
構造を示す、4800倍の走査型電子顕微鏡による写真
、(b)は同じく窒化珪素焼結体表面の焼結肌の結晶構
造を示す、1200倍の走査型電子顕微鏡による写真で
ある。
[Figure 1] (a) is a 4800x scanning electron microscope photograph showing the crystal structure of the sintered skin on the surface of the silicon nitride sintered body, and (b) is the same sintered skin on the surface of the silicon nitride sintered body. This is a photograph taken by a scanning electron microscope at a magnification of 1200 times, showing the crystal structure of .

【図2】(a)は、窒化珪素焼結体表面にブラスト処理
を施した場合の、焼結体表面の結晶構造を示す、480
0倍の走査型電子顕微鏡による写真、(b)は、(a)
と同じ表面の結晶構造を示す、1200倍の走査型電子
顕微鏡による写真である。
FIG. 2(a) shows the crystal structure of the sintered body surface when the surface of the silicon nitride sintered body is subjected to blasting treatment, 480
Photographs taken with a scanning electron microscope at 0x magnification, (b) and (a)
This is a 1200x scanning electron microscope photograph showing the same crystal structure on the surface.

【図3】(a)は、窒化珪素焼結体の表面にバレル処理
を施した場合の、表面の結晶構造を示す、4800倍の
走査型電子顕微鏡による写真、(b)は、(a)と同じ
表面の結晶構造を示す、1200倍の走査型電子顕微鏡
による写真である。
[Fig. 3] (a) is a photograph taken by a scanning electron microscope at a magnification of 4800 times showing the crystal structure of the surface of a silicon nitride sintered body subjected to barrel treatment; (b) is a photograph of (a) This is a 1200x scanning electron microscope photograph showing the same crystal structure on the surface.

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】  少なくとも工具としての稼働部が、窒
化珪素と焼結助剤とを含有し常圧焼結された窒化珪素焼
結体からなる窒化珪素焼結体製工具において、工具とし
て稼働部となる位置の窒化珪素焼結体の焼結肌の少なく
とも一部から、表面に自由成長したβ−Si3 N4 
(β´−サイアロンを含む)が除去されていることを特
徴とする窒化珪素焼結体製工具。
Claim 1: A tool made of a silicon nitride sintered body, in which at least the working part as a tool is made of a silicon nitride sintered body containing silicon nitride and a sintering aid and sintered under pressure; β-Si3 N4 that has grown freely on the surface from at least a part of the sintered skin of the silicon nitride sintered body at the position where
A tool made of a sintered silicon nitride body, characterized in that (including β'-SiAlON) is removed.
【請求項2】  表面に自由成長したβ−Si3 N4
 (β´−サイアロンを含む)の焼結肌からの除去が、
ブラスト処理、バレル処理あるいは超音波振動法による
処理によってなされたことを特徴とする、請求項1記載
の窒化珪素焼結体製工具。
[Claim 2] β-Si3 N4 grown freely on the surface
(including β´-sialon) from the sintered skin.
The tool made of silicon nitride sintered body according to claim 1, characterized in that the tool is processed by blasting, barrel processing, or ultrasonic vibration method.
【請求項3】  焼結肌の10点平均面粗さRzが3μ
m以下であることを特徴とする請求項1記載の窒化珪素
焼結体製工具。
[Claim 3] The 10-point average surface roughness Rz of the sintered skin is 3μ.
The tool made of silicon nitride sintered body according to claim 1, characterized in that the diameter is less than or equal to m.
【請求項4】  前記窒化珪素焼結体が、焼結助剤とし
て、Tiの炭化物,窒化物,炭窒化物および硼化物より
選ばれた少なくとも1種以上を1〜30wt%および/
またはMgO,Y2 O3 ,Al2 O3,ZrO2
 ,AlN,CaO,CeO2 およびSiO2 より
選ばれた少なくとも1種以上を1〜20wt%含む、請
求項1記載の窒化珪素焼結体製工具。
4. The silicon nitride sintered body contains 1 to 30 wt% of at least one selected from Ti carbides, nitrides, carbonitrides, and borides as a sintering aid.
Or MgO, Y2 O3, Al2 O3, ZrO2
2. The silicon nitride sintered tool according to claim 1, comprising 1 to 20 wt% of at least one selected from , AlN, CaO, CeO2 and SiO2.
JP3022370A 1991-02-15 1991-02-15 Tool made of silicon nitride sintered body Pending JPH04261702A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP3022370A JPH04261702A (en) 1991-02-15 1991-02-15 Tool made of silicon nitride sintered body
DE69207613T DE69207613T2 (en) 1991-02-15 1992-01-31 Sintered silicon nitride tool
ES92101647T ES2084850T3 (en) 1991-02-15 1992-01-31 SINTERED SILICON NITRIDE TOOL.
EP92101647A EP0499861B1 (en) 1991-02-15 1992-01-31 Tool of silicon nitride sintered body
KR1019920002004A KR950004662B1 (en) 1991-02-15 1992-02-12 Tool of silicon nitrode sintered body
US08/000,810 US5296008A (en) 1991-02-15 1993-01-05 Method for manufacturing a cutting tool insert made of a silicon nitride body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3022370A JPH04261702A (en) 1991-02-15 1991-02-15 Tool made of silicon nitride sintered body

Publications (1)

Publication Number Publication Date
JPH04261702A true JPH04261702A (en) 1992-09-17

Family

ID=12080750

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3022370A Pending JPH04261702A (en) 1991-02-15 1991-02-15 Tool made of silicon nitride sintered body

Country Status (1)

Country Link
JP (1) JPH04261702A (en)

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