JPH04273A - Access mechanism - Google Patents

Access mechanism

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Publication number
JPH04273A
JPH04273A JP2096488A JP9648890A JPH04273A JP H04273 A JPH04273 A JP H04273A JP 2096488 A JP2096488 A JP 2096488A JP 9648890 A JP9648890 A JP 9648890A JP H04273 A JPH04273 A JP H04273A
Authority
JP
Japan
Prior art keywords
wire
piezoelectric element
mounting
axial direction
access mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2096488A
Other languages
Japanese (ja)
Inventor
Ryuichi Matsuda
隆一 松田
Reizo Kaneko
金子 礼三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP2096488A priority Critical patent/JPH04273A/en
Publication of JPH04273A publication Critical patent/JPH04273A/en
Pending legal-status Critical Current

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は磁気記録、光記録等の記憶装置、すなわち回
転体とアクセス機構とを基本機構要素として備える装置
のアクセス機構に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an access mechanism for a storage device such as a magnetic recording or an optical recording device, that is, a device including a rotating body and an access mechanism as basic mechanical elements.

〔従来の技術〕[Conventional technology]

従来、磁気ディスク、光ディスク等の記憶装置において
は、記録円盤に対する長いアクセスストローク駆動と、
高記録密度のための微細位置決めの両機能を満たすため
に、粗アクセス機構と微細アクセス機構とを組合せてお
り、通常は粗アクセス機構の上に微細アクセス機構を載
せる構成を採用している0例えば光記憶装置においては
、粗アクセス機構は、ボールヘアリングのリニアガイド
で支持されステッピングモータあるいは、ボイスコイル
モータ等により数10μmの精度で位置決めされ、記録
トラックには、粗アクセス機構に搭載されたサブミクロ
ンオーダーの分解能を有する光学ヘッドで追随するシス
テムを採用している。
Conventionally, in storage devices such as magnetic disks and optical disks, long access stroke drives to recording disks,
In order to satisfy both functions of fine positioning for high recording density, a coarse access mechanism and a fine access mechanism are combined, and a configuration in which the fine access mechanism is usually placed on top of the coarse access mechanism is usually adopted. In optical storage devices, the coarse access mechanism is supported by a ball hair ring linear guide and positioned with an accuracy of several tens of micrometers by a stepping motor or voice coil motor. The system uses an optical head with a resolution on the order of microns.

〔発明が解決しようとする課題] しかしながら、前記のような記憶装置については、小形
で記録密度の高い装置の開発が要望されているが、それ
を実現するには、従来のアクセス機構は大きすぎるとと
もに、該機構を構成する部品点数が多いという欠点があ
る。例えばボールベアリンクで支持されたリニアガイド
では、ボールベアリングの機素そのものが小さいもので
も数層の大きさがあり、ストロークが数−のアクセス機
構への採用には不都合であるというような問題点があっ
た。
[Problems to be Solved by the Invention] However, with regard to the above-mentioned storage devices, there is a demand for the development of compact devices with high recording density, but conventional access mechanisms are too large to realize this. In addition, there is a drawback that the number of parts constituting the mechanism is large. For example, in a linear guide supported by a ball bearing link, even if the ball bearing element itself is small, it is several layers in size, making it inconvenient to use in an access mechanism with a stroke of several times. was there.

本発明は、小形で構造が簡単であり、かつ、微細な分解
能を有するアクセス機構を提供することを目的とする。
SUMMARY OF THE INVENTION An object of the present invention is to provide an access mechanism that is small in size, simple in structure, and has fine resolution.

[課題を解決するための手段] 本発明は前記の課題を解決するために、アクセス機構を
収容する筺体と、該筺体の対向する面に張架された線材
と、該線材の軸方向で、該線材が貫通される貫通孔を側
面のほぼ中央に有すると共に、該貫通孔に貫通された前
記線材上を自由に移動し、かつ、下部に該線材の軸方向
に平行な滑動面を有し、両側を開口した箱形の可動部材
と、該可動部材を粗駆動する粗駆動手段と、前記可動部
材の下方に設け、該可動部材を搭載し、該可動部材が前
記滑動面を介して滑動する搭載部材と、該搭載部材の側
方に1端が装着され、他端が前記筺体の内面に形成され
た装着部に装着され、前記搭載部材を駆動する1個の圧
電素子または、上下に所定の間隔をおいて2個の圧電素
子を前記線材の軸方向に平行に設けるとともに、前記装
着部に装着され、前記線材の軸方向と直角に該線材に接
触する圧電素子を設け、 前記可動部材と搭載部材とを前記滑動面を介して吸引止
着させる手段とにより構成したものである。
[Means for Solving the Problems] In order to solve the above-mentioned problems, the present invention includes a housing that accommodates an access mechanism, a wire stretched between opposing surfaces of the housing, and an axial direction of the wire, It has a through-hole through which the wire is passed through at approximately the center of the side surface, can move freely on the wire passed through the through-hole, and has a sliding surface parallel to the axial direction of the wire at the lower part. , a box-shaped movable member with openings on both sides, a coarse drive means for roughly driving the movable member, provided below the movable member, on which the movable member is mounted, and the movable member slides via the sliding surface. a mounting member, one end of which is attached to the side of the mounting member, the other end of which is attached to a mounting portion formed on the inner surface of the housing, and one piezoelectric element that drives the mounting member; Two piezoelectric elements are provided parallel to the axial direction of the wire at a predetermined interval, and a piezoelectric element is provided that is mounted on the mounting portion and contacts the wire at right angles to the axial direction of the wire, and the movable It is constructed by means for suctioning and fixing the member and the mounting member via the sliding surface.

〔作 用〕[For production]

本発明は前記のように構成し、前記可動部材をその中心
部を貫いて通る線材と、該可動部材を載せている前記搭
載部材の平面とで線材の軸方向にのみ滑動可能なように
拘束し、該可動部材をボイスコイルモータ等の粗駆動部
で、非接触駆動および粗位置決めし、かつ、前記搭載部
材には、積層形の圧電素子を取り付けておき、電磁力あ
るいは静電力によって、該可動部材を搭載部材に吸引固
着させ、圧電素子によって微細位置決めを行わせ、さら
に他の圧電素子を線材の軸方向と直角に密接させて線材
を振動させるとともに、粗アクセス時に、前記搭載部材
に取り付けた圧電素子を振動させ、可動部材と線材およ
び搭載部材との摩擦を低減させることによって位置決め
および追従性能を向上させることができるのである。
The present invention is configured as described above, and the movable member is restrained so as to be slidable only in the axial direction of the wire by a wire passing through its center and a plane of the mounting member on which the movable member is placed. The movable member is non-contact driven and roughly positioned by a rough drive unit such as a voice coil motor, and a laminated piezoelectric element is attached to the mounting member, and the movable member is moved by electromagnetic force or electrostatic force. The movable member is suctioned and fixed to the mounting member, fine positioning is performed by a piezoelectric element, and another piezoelectric element is brought close at right angles to the axial direction of the wire to vibrate the wire, and at the time of rough access, it is attached to the mounting member. By vibrating the piezoelectric element and reducing the friction between the movable member, the wire rod, and the mounting member, positioning and tracking performance can be improved.

〔実施例〕〔Example〕

第1図は本発明の一実施例の一部破砕料視図、第2図は
第1図の実施例の要部斜視図である。
FIG. 1 is a partial perspective view of a crushing material according to an embodiment of the present invention, and FIG. 2 is a perspective view of a main part of the embodiment of FIG.

第1図、第2図において、■は線材、2は可動部、3は
圧電素子A、4はコイル、5は永久磁石、6はヨーク、
7は搭載部である。コイル4、永久磁石5、ヨーク6は
リニアモータの粗駆動部を構成する。
In Figures 1 and 2, ■ is a wire, 2 is a movable part, 3 is a piezoelectric element A, 4 is a coil, 5 is a permanent magnet, 6 is a yoke,
7 is a mounting section. The coil 4, permanent magnet 5, and yoke 6 constitute a rough drive section of the linear motor.

線材1は可動部2に設けられた穴を貫通しており、該可
動部2は線材2にガイドされ円滑に相対移動できるよう
に組み合わされている。可動部2と搭載部7とは面接触
しており、かつ線材1の軸方向と、可動部2、搭載部7
の接触面とは平行に構成されているから、可動部2は線
材lの軸方向にのみ移動可能なように拘束されている。
The wire rod 1 passes through a hole provided in a movable part 2, and the movable part 2 is guided by the wire rod 2 and assembled so as to be able to smoothly move relative to each other. The movable part 2 and the mounting part 7 are in surface contact, and the axial direction of the wire 1 and the movable part 2 and the mounting part 7 are in surface contact.
Since the movable part 2 is configured parallel to the contact surface of the wire l, the movable part 2 is restrained so as to be movable only in the axial direction of the wire l.

可動部2は、該可動部2に取り付けられたコイル4と、
固定側の永久磁石5、ヨーク6から成るリニアモータに
よって駆動され、粗位置決めされる(位置決め用のリニ
アスケール等のセンサは図示していない。)この粗位置
決め後、搭載部7に内蔵した磁石の吸引力、あるいは電
極の静電吸引力を作用させ、可動部2を搭載部7に固着
する。搭載部7には圧電素子A3が取り付けてあり、微
細位置決め用の信号によって可動部2を位置決めする。
The movable part 2 includes a coil 4 attached to the movable part 2,
Driven by a linear motor consisting of a permanent magnet 5 and a yoke 6 on the fixed side, rough positioning is performed (sensors such as a linear scale for positioning are not shown). The movable part 2 is fixed to the mounting part 7 by applying attraction force or electrostatic attraction force of the electrode. A piezoelectric element A3 is attached to the mounting portion 7, and the movable portion 2 is positioned based on a signal for fine positioning.

例えば記録円盤上のトラック信号から生成したサーボ信
号により圧電素子A3を駆動して、可動部2に取り付け
た信号記録再生用のヘッド(図示していない)をトラッ
クに追従させる。積層形の圧電素子A3は長さ10Ic
1程度のもので10nmオーダーの分解能を有し、第1
図のボイスコイルモータによる粗アクセス機構と組み合
わせることにより、104のオーダーのトラック数をカ
バーする可能性もある。
For example, the piezoelectric element A3 is driven by a servo signal generated from a track signal on the recording disk, and a signal recording/reproducing head (not shown) attached to the movable part 2 is caused to follow the track. The laminated piezoelectric element A3 has a length of 10Ic.
1 and has a resolution on the order of 10 nm.
In combination with the voice coil motor coarse access mechanism shown, it is possible to cover track numbers on the order of 104.

可動部2と搭載部7の固着に磁石の吸引力を利用する場
合は、永久磁石を搭載部7に内蔵させておいて、粗アク
セス時にはコイルに通電して磁石力を断ち、微細アクセ
ス時に永久磁石の磁力で熱発生なく可動部2と搭載部7
とを固着できる。
When using the attractive force of a magnet to fix the movable part 2 and the mounting part 7, a permanent magnet is built into the mounting part 7, and the coil is energized to cut off the magnetic force during rough access, and the permanent magnet is removed during fine access. The movable part 2 and the mounting part 7 can be moved without generating heat due to the magnetic force of the magnet.
and can be fixed.

本アクセス機構は記録再生の方式にかかわらず適用可能
である。記録媒体に垂直な方向の位置決めあるいは位置
追従の機構は必要に応じて設けることができる。例えば
媒体面上の微小な凹凸を走査形トンネル顕微鏡S T 
M (Scanning TunnelingMicr
oscoρe)の原理によってトンネル電流で検出する
場合には、記録媒体に垂直方向に駆動される積層形ある
いは円筒形の圧電素子を可動部2に搭載する。
This access mechanism is applicable regardless of the recording/reproducing method. A positioning or position tracking mechanism in a direction perpendicular to the recording medium can be provided as necessary. For example, a scanning tunneling microscope S T
M (Scanning Tunneling Micro
When detecting by tunnel current according to the principle of oscoρe), a laminated or cylindrical piezoelectric element that is driven in a direction perpendicular to the recording medium is mounted on the movable part 2.

第3図は第1図の線材1を徐動させる圧電素子を設けた
実施例の要部側面図である。
FIG. 3 is a side view of a main part of an embodiment in which a piezoelectric element for slowly moving the wire 1 of FIG. 1 is provided.

第3図において8は線材振動用の圧電素子Bであり、l
、2,3.7は第1図と同一である。
In FIG. 3, 8 is a piezoelectric element B for wire vibration, and l
, 2, 3.7 are the same as in FIG.

第3図においては、線材1の固定部付近において、振動
用の圧電素子B8を線材lの軸方向に直角に当接させて
あり、圧電素子B8を駆動して線材1を振動させ、また
粗アクセス時には圧電素子A3をも伸縮振動させること
によって、可動部2と搭載部7を相対振動させ、可動部
2と線材l、および、可動部2と搭載部7との摩擦を低
減させ、位置決め時の誤差やスティックスリップの不安
定さを除くことができる。このような振動による摩擦低
減の効果は知られており、詳しい研究も行われている〔
文献:精密機械32巻、6号、 (1966)。
In FIG. 3, a piezoelectric element B8 for vibration is brought into contact with the axial direction of the wire l at right angles near the fixed part of the wire l, and the piezoelectric element B8 is driven to vibrate the wire l and rough At the time of access, the piezoelectric element A3 is also caused to expand and contract, causing the movable part 2 and the mounting part 7 to vibrate relative to each other, thereby reducing the friction between the movable part 2 and the wire 1, and between the movable part 2 and the mounting part 7, and when positioning. Errors and stick-slip instability can be eliminated. The effect of such vibrations on reducing friction is known, and detailed research is being conducted [
Literature: Precision Machinery Vol. 32, No. 6, (1966).

P2O3−408)。P2O3-408).

第4図は第1図の圧電素子3の代りに2個の圧電素子を
設けた実施例の要部側面図である。
FIG. 4 is a side view of a main part of an embodiment in which two piezoelectric elements are provided in place of the piezoelectric element 3 of FIG. 1.

第4図は圧電素子A3の代わりに2個の圧電素子C9お
よび、圧電素子DIOを用いた実施例であって、これら
は、その伸縮する方向に平行にかつ、所定の間隔をおい
て上下に配してあり、粗位置決め時には、互いに逆位相
で電圧を印加する。
FIG. 4 shows an embodiment in which two piezoelectric elements C9 and DIO are used instead of piezoelectric element A3, and these are arranged vertically parallel to the direction of expansion and contraction and at a predetermined interval. During rough positioning, voltages are applied in opposite phases to each other.

そうすると、圧電素子の一方が伸び、他方が縮むため、
これに取り付けである搭載部7は結果的に圧電素子の伸
縮方向と垂直、すなわち可動部2と搭載部7の対向面に
垂直な方向に振動する。この場合には上述の振動による
摩擦低減効果に加えてつぎのような現象を利用できる。
Then, one side of the piezoelectric element expands and the other contracts, so
As a result, the mounting section 7 attached thereto vibrates in a direction perpendicular to the direction of expansion and contraction of the piezoelectric element, that is, a direction perpendicular to the facing surfaces of the movable section 2 and the mounting section 7. In this case, in addition to the friction reduction effect due to the vibration described above, the following phenomenon can be utilized.

第5図に示す気体膜のスクイーズ効果の説明図のように
、搭載部7を高周波振動させると、可動部2と搭載部7
の対向面が平滑に仕上げられていると、両者の間の微小
なすきまの気体膜11の周辺部では、気体が粘性を有す
るため、その出入りは拘束され、かつ可動部2は慣性の
ため追従できずほとんど振動せず、あたかも密閉した圧
縮性流体に高周波の体積変化を起こさせたのと同様にな
る。この場合には変位に対する圧力発生が非線形となり
、時間平均的に周囲圧力よりも高い圧力の気体膜11が
形成される。第5図において可動部2は非接触に搭載部
7上に支えられる。この現象は圧縮性スクィーズ膜の効
果として知られている〔文献:潤滑、18巻、10号、
(1973) 、P773−779〕。
As shown in the explanatory diagram of the squeezing effect of the gas film shown in FIG. 5, when the mounting part 7 is subjected to high frequency vibration, the movable part 2
If the facing surfaces of the two are finished smoothly, the gas has viscosity in the periphery of the gas film 11 with a small gap between the two, so its movement in and out is restricted, and the movable part 2 follows due to inertia. The result is almost no vibration, as if a high-frequency volume change were caused in a sealed compressible fluid. In this case, pressure generation with respect to displacement becomes non-linear, and a gas film 11 having a pressure higher than the ambient pressure on a time average basis is formed. In FIG. 5, the movable part 2 is supported on the mounting part 7 in a non-contact manner. This phenomenon is known as the effect of compressible squeeze film [Reference: Lubrication, Vol. 18, No. 10,
(1973), P773-779].

よって圧電素子C9,同DIOを上述のように振動させ
ると、線材lを振動させることと相まって、可動部2は
摩擦が小さい状態で支持され、リニアモータによる粗位
置決めの際に、誤差やスティックスリップの不安定を除
くことができる。この実施例では可動部2と搭載部7と
接触しておらず、可動部2の摩耗は極めては小さくなる
Therefore, when the piezoelectric elements C9 and DIO are vibrated as described above, together with the vibration of the wire l, the movable part 2 is supported with low friction, and errors and stick-slips are prevented during rough positioning by the linear motor. The instability of can be eliminated. In this embodiment, the movable part 2 and the mounting part 7 are not in contact with each other, so that the wear of the movable part 2 is extremely small.

可動部2の微細位置決めは、前述のように、吸引力を作
用させ可動部2を搭載部7に固定させて、圧電素子C9
、同DIOを同位相の電圧で駆動し、第2、第3図の圧
電素子A3の使い方と同じにするとよい。
As described above, the fine positioning of the movable part 2 is performed by applying suction force to fix the movable part 2 to the mounting part 7, and then moving the piezoelectric element C9.
, it is preferable to drive the same DIO with voltages of the same phase and use the same method as the piezoelectric element A3 in FIGS. 2 and 3.

〔発明の効果〕〔Effect of the invention〕

以上詳細に説明したように、本発明になるアクセス機構
は小形にして構造が簡単であり、微小な位置決めが可能
であるので高分解能が得られるという効果がありこのよ
うな性能が要求される記憶装置等に適用して顕著な効果
が期待できる。
As explained in detail above, the access mechanism according to the present invention is small in size and has a simple structure, and is capable of minute positioning, so it has the effect of obtaining high resolution, and is useful for memories that require such performance. Significant effects can be expected when applied to equipment, etc.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例の一部破砕斜視図、第2図は
第1図の実施例の要部斜視図、第3図は第1図の線材1
を振動させる圧電素子を設けた実施例の要部側面図、第
4図は第1図の圧電素子3の代りに2個の圧電素子を設
けた実施例の要部側面図、第5図は気体膜のスクイーズ
効果の説明図である。 1・・・線材、2・・・可動部、3・・・圧電素子A、
4・・・コイル、5・・・永久磁石、6・・・ヨーク、
7・・・搭載部、8・・・圧電素子B、9・・・圧電素
子C110・・・圧電素子D、11・・・気体膜。 特許出願人  日本電信電話株式会社
FIG. 1 is a partially exploded perspective view of an embodiment of the present invention, FIG. 2 is a perspective view of a main part of the embodiment of FIG. 1, and FIG. 3 is a wire rod 1 shown in FIG. 1.
FIG. 4 is a side view of a main part of an embodiment in which a piezoelectric element is provided to vibrate, FIG. It is an explanatory view of the squeeze effect of a gas film. DESCRIPTION OF SYMBOLS 1... Wire rod, 2... Movable part, 3... Piezoelectric element A,
4... Coil, 5... Permanent magnet, 6... Yoke,
7... Mounting part, 8... Piezoelectric element B, 9... Piezoelectric element C110... Piezoelectric element D, 11... Gas film. Patent applicant Nippon Telegraph and Telephone Corporation

Claims (3)

【特許請求の範囲】[Claims] 1.筺体と、該筺体の対向する面に張架された線材と、
該線材の軸方向で、該線材が貫通される貫通孔を側面の
ほぼ中央に有すると共に、該貫通孔に貫通された前記線
材上を自在に移動し、かつ、下部に、該線材の軸方向に
平行な滑動面を有し、両側を開口した箱形の可動部材と
、該可動部材を粗駆動する粗駆動手段と、前記可動部材
の下方に設けられ、該可動部材を搭載するとともに、該
搭載した可動部材の前記滑動面に密接し、該可動部材が
滑動しうる滑動面を有する搭載部材と、該搭載部材の側
方に1端が装着され、他端が前記筺体の内面に形成され
た装着部に装着され、前記線材の軸方向に平行に設け、
前記搭載部材を駆動する1個の圧電素子と、 前記可動部材と搭載部材とを前記滑動面を介して吸引止
着させる手段とにより構成したアクセス機構。
1. a housing, a wire stretched across opposing surfaces of the housing;
A through hole through which the wire is passed in the axial direction of the wire is provided at approximately the center of the side surface, the wire can be freely moved on the wire passed through the through hole, and a hole is provided at the bottom in the axial direction of the wire. a box-shaped movable member having a sliding surface parallel to the surface and opening on both sides; a rough drive means for roughly driving the movable member; a mounting member having a sliding surface that is in close contact with the sliding surface of the mounted movable member and on which the movable member can slide; one end is attached to the side of the mounting member, and the other end is formed on the inner surface of the housing. mounted on the mounting part, and provided parallel to the axial direction of the wire;
An access mechanism comprising: one piezoelectric element that drives the mounting member; and means for suctioning and fixing the movable member and the mounting member via the sliding surface.
2.前記筺体の内面に形成された装着部に、前記線材の
軸方向と直角に、該線材に当接する圧電素子を装着して
構成した請求項1記載のアクセス機構。
2. 2. The access mechanism according to claim 1, wherein a piezoelectric element that abuts the wire is mounted on a mounting portion formed on the inner surface of the housing perpendicularly to the axial direction of the wire.
3.前記筺体の内面に形成された装着部と前記搭載部材
との間に、前記線材の軸方向と平行に、上下に所定の間
隔を置いて装着した2個の圧電素子を設けて構成した請
求項1、請求項2記載のアクセス機構。
3. A claim in which two piezoelectric elements are provided between a mounting portion formed on an inner surface of the housing and the mounting member, and are mounted parallel to the axial direction of the wire at a predetermined distance from above and below. 1. The access mechanism according to claim 2.
JP2096488A 1990-04-13 1990-04-13 Access mechanism Pending JPH04273A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2096488A JPH04273A (en) 1990-04-13 1990-04-13 Access mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2096488A JPH04273A (en) 1990-04-13 1990-04-13 Access mechanism

Publications (1)

Publication Number Publication Date
JPH04273A true JPH04273A (en) 1992-01-06

Family

ID=14166462

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2096488A Pending JPH04273A (en) 1990-04-13 1990-04-13 Access mechanism

Country Status (1)

Country Link
JP (1) JPH04273A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013008737A1 (en) * 2011-07-08 2013-01-17 オリンパス株式会社 Inertial drive actuator
WO2013008738A1 (en) * 2011-07-08 2013-01-17 オリンパス株式会社 Inertial drive actuator
US12548583B2 (en) 2023-09-08 2026-02-10 Kabushiki Kaisha Toshiba Acoustic control apparatus, storage medium and accoustic control method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013008737A1 (en) * 2011-07-08 2013-01-17 オリンパス株式会社 Inertial drive actuator
WO2013008738A1 (en) * 2011-07-08 2013-01-17 オリンパス株式会社 Inertial drive actuator
US9621074B2 (en) 2011-07-08 2017-04-11 Olympus Corporation Inertial drive actuator
US9634532B2 (en) 2011-07-08 2017-04-25 Olympus Corporation Inertial drive actuator
US12548583B2 (en) 2023-09-08 2026-02-10 Kabushiki Kaisha Toshiba Acoustic control apparatus, storage medium and accoustic control method

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