JPH04277441A - Manufacture of cathode ray tube - Google Patents

Manufacture of cathode ray tube

Info

Publication number
JPH04277441A
JPH04277441A JP3839291A JP3839291A JPH04277441A JP H04277441 A JPH04277441 A JP H04277441A JP 3839291 A JP3839291 A JP 3839291A JP 3839291 A JP3839291 A JP 3839291A JP H04277441 A JPH04277441 A JP H04277441A
Authority
JP
Japan
Prior art keywords
getter
cathode ray
amount
film thickness
ray tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3839291A
Other languages
Japanese (ja)
Inventor
Shigemi Hirasawa
重實 平澤
Teruo Matsuo
松尾 照夫
Toshiaki Maruyama
敏明 丸山
Hideo Suzuki
秀夫 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3839291A priority Critical patent/JPH04277441A/en
Publication of JPH04277441A publication Critical patent/JPH04277441A/en
Pending legal-status Critical Current

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  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)

Abstract

PURPOSE:To certainly supply getter in an amount enough to hold within a cathode ray tube at a high degree of vacuum for a long period of time, by sensing that amount of getter material which has been evaporated fast while the getter material is left to evaporative attachment process. CONSTITUTION:The input at starting of high frequency heating shall be set so that no excessive amount of getter material 4b will be attached evaporatively. When high frequency heating is commenced and the temp. of a getter vessel 4a has become approx. 800 deg.C, the heat emitting reaction begins in the getter material 4b, whose temp. will immediately rise to around 1300 deg.C. At the same time, the material 4b evaporates and attaches to the getter film thickness measuring part 6a where no interior electroconductive film 6 exists. The getter film thickness is measured by a film thickness sensor element 11, and on the basis of the result from measurement, the output of a high frequency power supply shall be controlled. Thereby the spouting of the getter material 4b can be performed so that excess or shortage in spouting the material 4b will be compensated. That is, the getter can be spouted in a proper amount for maintaining inside of the tube at a high degree of vacuum when the cathode ray tube is 10 practical service.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は、真空外囲器であるガラ
スバルブ内に十分な量のフラッシュゲッタを装着して内
部に適切な所定膜厚のゲッタ膜を蒸着させ、陰極線管の
管体を排気装置から切り離した後に管内各部からバルブ
内へ放出されて来る気体を前記ゲッタ膜に吸着させ、管
内残留気体の圧力を長期間にわたって常に低い値に保持
できるようにした陰極線管の製造方法に関する。
[Industrial Application Field] The present invention provides a method for installing a sufficient amount of flash getter in a glass bulb, which is a vacuum envelope, and depositing a getter film of an appropriate predetermined thickness inside the tube body of a cathode ray tube. A method of manufacturing a cathode ray tube, in which the gas released into the valve from various parts of the tube after the tube is separated from the exhaust device is adsorbed by the getter film, and the pressure of residual gas in the tube can be maintained at a low value for a long period of time. .

【0002】0002

【従来の技術】一般に、陰極線管、特にカラー陰極線管
は、そのバルブ内に、高い電圧が印加される面積の広い
螢光面やシャドウマスクが存在し、使用中は、それらが
常に高速高電流密度の電子ビームの衝撃にさらされるの
で、製造工程中の排気作業で一旦バルブ内の真空度を高
くしても、排気装置から切り離されたのちの長い実使用
期間中には、上記螢光面やシャドウマスクなどを始めバ
ルブ内の各部から漸次、吸蔵、吸着されていた気体が放
出されて来るので、良好な電子放出特性の維持などのた
めにゲッタの使用は必要不可欠である。
[Prior Art] In general, cathode ray tubes, and color cathode ray tubes in particular, have a large fluorescent surface or shadow mask within the bulb to which a high voltage is applied. Because it is exposed to the impact of a high-density electron beam, even if the degree of vacuum inside the bulb is increased during the evacuation work during the manufacturing process, the phosphor surface Since the occluded and adsorbed gas is gradually released from various parts within the valve, including the electron beam and the shadow mask, the use of a getter is essential to maintain good electron emission characteristics.

【0003】通常、陰極線管に対しては、バルブの外部
から高周波誘導加熱法で加熱、蒸発させるフラッシュゲ
ッタが使用される。ゲッタ剤には、バリウム、アルミニ
ウム、ニッケルを主成分とし、外部加熱によりゲッタ剤
の成分が発熱反応を起こすいわゆる自己発熱型のゲッタ
が用いられる。ゲッタ自体でゲッタ蒸発量の安定化を工
夫してあるものもあるが、普通、ゲッタ蒸着量の制御は
、ゲッタを加熱し始めてからゲッタが飛び始めるまでの
時間(スタートタイムSTと呼ぶ)と外部加熱を停止す
るまでの時間(トータルタイムTTと呼ぶ)の二つのパ
ラメータにより行なっている。その他、陰極線管におけ
るフラッシュゲッタの使用法に関して、種々の提案がな
されており、例えば特公平2−7139号公報には、管
体の内部導電膜に接続される電子銃の支持片で支持され
、ゲッタ剤が充填されたゲッタ容器と、ゲッタ容器の開
口側に管体内に向って拡開したらっぱ状のゲッタシール
ドとを有する対称構造のゲッタ装置を備え、外部の加熱
コイルに200〜350kHzの高周波電流を通電して
上記ゲッタ容器を加熱してゲッタ剤をゲッタ容器から蒸
発させ、この蒸発したゲッタ剤を上記ゲッタシールドに
よって内部導電膜上に反射させてゲッタ膜を形成させる
ゲッタフラッシュ法が記載されている。
[0003] Usually, a flash getter is used for cathode ray tubes, which heats and evaporates the light from outside the bulb using a high-frequency induction heating method. A so-called self-heating getter is used as the getter agent, which has barium, aluminum, and nickel as its main components, and the components of the getter agent undergo an exothermic reaction by external heating. Some getters are designed to stabilize the amount of getter evaporation within the getter itself, but the amount of getter evaporated is usually controlled by adjusting the time from when the getter begins to heat until the getter begins to fly (called the start time ST) and from an external device. This is done using two parameters: the time until heating is stopped (referred to as total time TT). In addition, various proposals have been made regarding the use of a flash getter in a cathode ray tube. For example, in Japanese Patent Publication No. 2-7139, a flash getter is supported by a support piece of an electron gun connected to an internal conductive film of a tube body, The getter device is equipped with a symmetrical getter device having a getter container filled with a getter agent and a flap-like getter shield that expands toward the inside of the tube on the open side of the getter container, and a high frequency of 200 to 350 kHz is applied to an external heating coil. A getter flash method is described in which the getter agent is evaporated from the getter container by heating the getter container by applying current, and the evaporated getter agent is reflected onto the internal conductive film by the getter shield to form a getter film. ing.

【0004】0004

【発明が解決しようとする課題】上記技術は、螢光面へ
ゲッタ剤が付着したり、ゲッタの金属蒸気が電子銃側に
飛散するのを阻止して電子銃各電極間の短絡事故やバル
ブ内沿面放電を防止してバルブが破損するのを防止する
ことを目的としており、ゲッタ蒸着量を適正にすること
については特に意図してはいない。
[Problems to be Solved by the Invention] The above technology prevents the getter agent from adhering to the fluorescent surface and the metal vapor of the getter from scattering toward the electron gun, thereby preventing short-circuit accidents between the electrodes of the electron gun and valve damage. The purpose is to prevent internal creeping discharge and damage to the bulb, and there is no particular intention to optimize the amount of getter deposition.

【0005】ゲッタをフラッシュさせるために先ずゲッ
タ容器を加熱するが、容器全体を均一に再現性良く加熱
することは存外難しく、部分的に過熱してしまうことが
少なくない。部分的過熱が生ずると、ゲッタ容器の一部
溶融、又はゲッタ容器内のゲッタ剤が容器から浮き上が
り、程度が悪いものの中にはゲッタが落下してしまうも
のもあり、このような高温の金属がバルブガラスに接触
するとバルブがクラックしてしまう場合がある。更に自
己発熱型のゲッタでは特に、ゲッタ剤金属が蒸発され過
ぎて、電子銃電極に付着してストレーエミッションの発
生源となったり、ファンネルの一部を高抵抗化してスパ
ーク発生時にスパーク電流抑制効果を持たせようとして
いたのを短絡して無効にする場合がある。以上のような
過熱に対しては外部加熱入力を小さくすれば良さそうで
あるが、ゲッタ容器の一部が特に過熱されるような熱源
とゲッタの配置になっていると、過熱部分に近い位置の
ゲッタ剤が飛び始めるので、所謂STの値の割にはゲッ
タ剤の飛散量が少ない陰極線管が出来上がってしまう。
[0005] In order to flash the getter, first the getter container is heated, but it is surprisingly difficult to heat the entire container uniformly and with good reproducibility, and parts of the container often end up being overheated. If partial overheating occurs, part of the getter container may melt, or the getter agent in the getter container may float out of the container, and in some cases, the getter may fall out. Contact with the bulb glass may cause the bulb to crack. Furthermore, especially with self-heating getters, the getter metal may evaporate too much and adhere to the electron gun electrode, becoming a source of stray emissions, or a part of the funnel may be made to have a high resistance, reducing the spark current suppression effect when sparks occur. In some cases, an attempt to have this function may be short-circuited and invalidated. It would seem to be a good idea to reduce the external heating input to prevent overheating as described above, but if the heat source and getter are arranged in such a way that a part of the getter container is particularly overheated, the The getter agent begins to fly off, resulting in a cathode ray tube with a small amount of getter agent flying off compared to the so-called ST value.

【0006】本発明は上記従来の問題の原因となってい
るゲッタ剤の飛ばし過ぎ、不足、又は過熱を防止するた
めになされたもので、陰極線管内を長期間にわたって高
真空に保持するのに充分なゲッタ量を確実に供給できる
ゲッタフラッシュ法を提供することを目的とする。
The present invention was made in order to prevent the gettering agent from being overblown, insufficient, or overheated, which are the causes of the above-mentioned conventional problems, and is sufficient to maintain a high vacuum inside the cathode ray tube for a long period of time. The purpose of the present invention is to provide a getter flash method that can reliably supply a large amount of getter.

【0007】[0007]

【課題を解決するための手段】上記目的を達成するため
に本発明においては、ゲッタ蒸着作業中に、既に蒸着さ
せたゲッタの蒸着量(蒸着されたゲッタ剤の膜厚)を測
定しながら、その測定結果に応じて外部からゲッタを加
熱するために加熱コイルに供給する入力電力量を電力値
的または時間的に制御して、ゲッタ膜厚が不足にも過剰
にもならないように、即ちゲッタの蒸着量が一定になる
ようにした。
[Means for Solving the Problems] In order to achieve the above object, in the present invention, during the getter deposition operation, while measuring the amount of getter that has already been deposited (film thickness of the deposited getter agent), Depending on the measurement results, the amount of input power supplied to the heating coil to heat the getter from the outside is controlled in terms of power value or time to prevent the getter film thickness from becoming insufficient or excessive. The amount of vapor deposited was kept constant.

【0008】[0008]

【作用】上記のような手段を採れば、ゲッタフラッシュ
の途中で、蒸着されたゲッタ膜厚を常にモニタしている
ので、過熱によるゲッタ容器の溶けが発生する程に急速
にゲッタが蒸着されて行くときには加熱電力量を減少さ
せて過熱を防止できるし、逆に入力が小さ過ぎてゲッタ
膜が所望のように蒸着されて行かない時には入力を上げ
ることによって対策できる。
[Operation] If the above method is adopted, the thickness of the deposited getter film is constantly monitored during the getter flash, so the getter is deposited so rapidly that the getter container melts due to overheating. Overheating can be prevented by reducing the amount of heating power during the process, and conversely, if the input is too small and the getter film is not being deposited as desired, countermeasures can be taken by increasing the input.

【0009】[0009]

【実施例】図1は本発明一実施例陰極線管の概略断面図
である。管体1のネック部1a内に設置された電子銃2
に支持片3(通称アンテナ)の一端が取付けられ、この
支持片3の他端に、ファンネル部1bに塗布された内装
導電膜6にスペーサ5を介して接するように、ゲッタ装
置4が固定支持されている。内装導電膜6には、ゲッタ
装置4が固定されている部分の反対側にゲッタ膜厚測定
部6a(窓)として実際には内装導電膜6が存在しない
部分を持つ。
DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a schematic sectional view of a cathode ray tube according to an embodiment of the present invention. Electron gun 2 installed inside the neck portion 1a of the tube body 1
One end of a support piece 3 (commonly known as an antenna) is attached to the other end of the support piece 3, and a getter device 4 is fixedly supported on the other end of the support piece 3 so as to be in contact with the interior conductive film 6 coated on the funnel portion 1b via a spacer 5. has been done. The interior conductive film 6 has a portion on the opposite side of the portion to which the getter device 4 is fixed, as a getter film thickness measurement portion 6a (window), where no interior conductive film 6 actually exists.

【0010】図2は本発明一実施例における、バルブの
ネック部1aとファンネルコーン部1bの接続箇所の近
傍と、高周波加熱コイル7及びゲッタ膜厚の検出子11
の配設位置関係の拡大断面図である。
FIG. 2 shows the vicinity of the connection point between the bulb neck portion 1a and the funnel cone portion 1b, the high frequency heating coil 7, and the getter film thickness detector 11 in one embodiment of the present invention.
FIG. 3 is an enlarged cross-sectional view of the arrangement positional relationship.

【0011】ゲッタフラッシュは図3に示したフローチ
ャートに従って行なう。フローチャートの高周波加熱開
始のときの入力は従来のSTを参考にして、ゲッタ剤が
過剰に蒸着されないように設定しておく。高周波加熱を
開始して、ゲッタ容器4aが約800℃程度になると、
ゲッタ剤4b内で発熱反応が始まり、ただちにゲッタ剤
4bの温度が1300℃程度にまで上昇し、同時にゲッ
タ剤が蒸発して、内装導電膜6が存在していないゲッタ
膜厚測定部6aにゲッタ剤が蒸着される。ついでゲッタ
膜厚の測定を膜厚検出子により行ない、その測定結果に
より高周波電源の出力を制御することにより、それまで
のゲッタ剤の飛散量の過不足分をちょうど補償するよう
に、それ以後、ゲッタ剤を飛ばすことができる。
Getter flash is performed according to the flowchart shown in FIG. The input at the time of starting high frequency heating in the flowchart is set with reference to the conventional ST so that the getter agent is not deposited excessively. When the getter container 4a reaches about 800°C after starting high-frequency heating,
An exothermic reaction begins within the getter agent 4b, and the temperature of the getter agent 4b immediately rises to about 1300° C. At the same time, the getter agent evaporates, and the getter agent is deposited on the getter film thickness measurement portion 6a where the internal conductive film 6 is not present. agent is deposited. Next, the getter film thickness is measured using a film thickness detector, and the output of the high frequency power source is controlled based on the measurement result, so that the excess or deficiency in the amount of getter agent scattered up to that point is just compensated for. Getter agent can be blown away.

【0012】金属用の膜厚計(例えば所定の高周波磁界
により生ずる渦電流の流れ易さで計る)は、通常、測定
部近傍にある金属のすべてに反応するので、ゲッタ膜厚
の測定箇所は、カラー陰極線管の場合には、シャドウマ
スク、インナシールド等の鉄製部材、又は螢光面を被覆
しているアルミニウム膜、更には電子銃の電極を構成し
ている金属、およびゲッタ容器等から離して設ける必要
がある。また、ゲッタ剤の蒸着膜が連続膜になっていな
い場合には、金属膜の特性である導電性が著しく低下し
正確な蒸着量を測定できないので、上記ゲッタ膜厚測定
部6aにはポーラスな内装導電膜6は形成されておらず
、滑らかなバルブガラス内壁面が露出されるようになっ
ている。
[0012] Film thickness meters for metals (for example, measure by the ease with which eddy currents flow due to a predetermined high-frequency magnetic field) usually respond to all metals in the vicinity of the measuring part, so the getter film thickness can be measured at In the case of a color cathode ray tube, keep it away from iron parts such as the shadow mask and inner shield, or the aluminum film covering the fluorescent surface, metal constituting the electrodes of the electron gun, and the getter container. It is necessary to provide In addition, if the vapor deposited film of the getter agent is not a continuous film, the conductivity, which is a characteristic of the metal film, will be significantly reduced, making it impossible to accurately measure the amount of vapor deposited. The interior conductive film 6 is not formed, and the smooth inner wall surface of the bulb glass is exposed.

【0013】ゲッタ剤を蒸発させるために通常は、高周
波による誘導加熱で約800℃にゲッタ容器を加熱し、
この時にゲッタ剤中で起きる発熱反応による反応熱と前
記高周波加熱とが合計してゲッタ剤の蒸発熱に相当する
ので、ゲッタ容器の一部が過熱されるような条件になっ
ているとSTの割にはゲッタ剤の蒸発量が少なくなるが
、高周波出力電力値を上げるとゲッタ容器が溶断し易く
なる。このような条件下では、高周波出力の印加時間を
長くする(TTを長くする)ように制御すると良い。 即ち、STは通常レベルと同等であるが、ゲッタ剤膜厚
が不足する場合が上記に相当する。
[0013] In order to evaporate the getter agent, the getter container is usually heated to about 800°C by induction heating using high frequency.
At this time, the reaction heat due to the exothermic reaction occurring in the getter agent and the high-frequency heating together correspond to the heat of evaporation of the getter agent, so if the conditions are such that a part of the getter container is overheated, the ST Although the amount of evaporation of the getter agent is comparatively small, increasing the high-frequency output power value makes the getter container more likely to melt. Under such conditions, it is preferable to control to lengthen the application time of the high frequency output (lengthen TT). That is, the above case corresponds to the case where ST is equivalent to the normal level but the gettering agent film thickness is insufficient.

【0014】[0014]

【発明の効果】以上説明したように本発明によれば、ゲ
ッタ剤を蒸着させながら、ゲッタ剤の既に蒸着した量を
検出して行くので、ゲッタの飛ばし損ないがなくなり、
陰極線管の実使用時に管内を高真空に維持するのに必要
かつ十分なゲッタを飛ばすことができる。また、同時に
、ゲッタの飛ばし過ぎを作らなくなるので、バリウムの
ようなゲッタ剤金属の付着によるストレーエミッション
などのように耐電圧を劣化させることがなくなる。更に
、ゲッタ容器に入っているゲッタ剤を効率良く飛ばすこ
とができるので、余分な容量のゲッタを使用しなくても
良くなる。つまり、小さい容量のゲッタから蒸着できる
最大限のゲッタ剤を蒸発させ得るので、残余のゲッタ容
器およびゲッタ剤が軽くなり、振動等により内装導電膜
の黒鉛を削り落したりする恐れを減らすことが出来る。 それと同時に容量の小さいゲッタを使用できるので材料
原価も下がるという効果が得られる。
As explained above, according to the present invention, while the getter agent is being vapor-deposited, the amount of the getter agent that has already been vapor-deposited is detected, so that no getter is missed.
It is possible to blow off the getter necessary and sufficient to maintain a high vacuum inside the tube during actual use of the cathode ray tube. Furthermore, at the same time, excessive getter scattering is prevented, so that deterioration of withstand voltage, such as stray emission caused by adhesion of getter metal such as barium, is avoided. Furthermore, since the getter agent contained in the getter container can be efficiently blown away, there is no need to use an extra capacity getter. In other words, the maximum amount of getter agent that can be deposited can be evaporated from a small-capacity getter, so the remaining getter container and getter agent become lighter, and the risk of scraping off the graphite on the internal conductive film due to vibration etc. can be reduced. . At the same time, since a getter with a small capacitance can be used, the cost of materials can be reduced.

【図面の簡単な説明】[Brief explanation of the drawing]

【図1】フラッシュゲッタを装着した本発明一実施例陰
極線管の概略断面図である。
FIG. 1 is a schematic cross-sectional view of a cathode ray tube according to an embodiment of the present invention equipped with a flash getter.

【図2】本発明一実施例陰極線管のバルブのネック部と
ファンネルコーン部との接続箇所の近傍と、高周波加熱
コイル及びゲッタ膜厚検出子の配設位置関係を示す拡大
断面図である。
FIG. 2 is an enlarged cross-sectional view showing the vicinity of the connection point between the bulb neck and the funnel cone of the cathode ray tube according to the embodiment of the present invention, and the arrangement positional relationship of the high-frequency heating coil and the getter film thickness detector.

【図3】本発明一実施例のフローチャートを示す図であ
る。
FIG. 3 is a diagram showing a flowchart of an embodiment of the present invention.

【符合の説明】[Explanation of sign]

1…管体、  1a…ネック部、  1b…ファンネル
部、  2…電子銃、  3…支持片、  4…ゲッタ
装置、  4a…ゲッタ容器、  4b…ゲッタ剤、 
 5…スペーサ、  6…内装導電膜、  6a…ゲッ
タ膜厚測定部、  7…コイル、  8…螢光膜、  
9…シャドウマスク、  10…ゲッタ膜、  11…
ゲッタ膜厚検出子。
DESCRIPTION OF SYMBOLS 1... Tube body, 1a... Neck part, 1b... Funnel part, 2... Electron gun, 3... Support piece, 4... Getter device, 4a... Getter container, 4b... Getter agent,
5... Spacer, 6... Internal conductive film, 6a... Getter film thickness measuring section, 7... Coil, 8... Fluorescent film,
9... Shadow mask, 10... Getter film, 11...
Getter film thickness detector.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】真空外囲器内に、其の外部から加熱して真
空外囲器内部材の表面に気体吸着機能を有する蒸着膜を
形成させるゲッタを装着した陰極線管の製造方法におい
て、ゲッタ蒸着作業中に、既に蒸着させたゲッタの蒸着
量を測定しながら、その測定結果に応じて上記外部加熱
操作を制御して、ゲッタの蒸着量を一定にするようにし
たことを特徴とする陰極線管の製造方法。
1. A method for manufacturing a cathode ray tube in which a getter is installed in a vacuum envelope and is heated from the outside to form a vapor deposited film having a gas adsorption function on the surface of the inner material of the vacuum envelope. A cathode ray characterized in that during the vapor deposition process, the amount of getter that has already been vapor-deposited is measured, and the external heating operation is controlled according to the measurement result to keep the amount of getter vapor-deposited constant. Method of manufacturing tubes.
JP3839291A 1991-03-05 1991-03-05 Manufacture of cathode ray tube Pending JPH04277441A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3839291A JPH04277441A (en) 1991-03-05 1991-03-05 Manufacture of cathode ray tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3839291A JPH04277441A (en) 1991-03-05 1991-03-05 Manufacture of cathode ray tube

Publications (1)

Publication Number Publication Date
JPH04277441A true JPH04277441A (en) 1992-10-02

Family

ID=12524015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3839291A Pending JPH04277441A (en) 1991-03-05 1991-03-05 Manufacture of cathode ray tube

Country Status (1)

Country Link
JP (1) JPH04277441A (en)

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