JPH04285377A - Flow rate control valve - Google Patents

Abstract

PURPOSE:To provide a small-size flow rate control valve for conducting flow rate control and the inflow/outflow and shut-off of fluid in a device for handling air, various gases and other fluids by reducing the friction of a seal and miniaturizing a driving part. CONSTITUTION:A valve body 4 having an air inflow port 1 and an air outflow port 2, a moving element 3 for opening/closing an air inflow/outflow port 3a to conduct the inflow/outflow or interruption of a fluid, a driving piezoelectric actuator 6 for controlling the opening/closing operation of the air inflow/outflow port 3a by driving the moving element 3, and a sealing electrostatic actuator 5 for sealing the air inflow/outflow port 3 by the moving element 3 are provided.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flow rate control valve for controlling the flow rate and controlling the inflow and outflow and shutoff of fluid in devices that handle air, various gases, and other fluids.

0002

[Prior Art] Poppet valves (mushroom-shaped valves as seen in commercially available electromagnetic valves) have traditionally been used to control the flow rate of devices that utilize fluids, especially air, or to control inflow, outflow, and shutoff of fluids. ) is driven in a direction perpendicular to the valve seat surface using a plunger and spring), or a spool valve (a valve that is driven inside a cylindrical cylinder, as seen in commercially available solenoid valves and proportional control valves). Valves have been widely used in which a spool is slid over the cylinder, and the spool's collar opens and closes a port provided in the cylinder.

An example of the above-mentioned conventional flow control valve will be explained below with reference to the drawings.

FIGS. 12 to 14 show an example of a conventional flow control valve. Figures 12(a) and 12(b) are direct-acting solenoid valves, and Figures 13(a) and 13(b) are diagrams of pilot type solenoid valves. Both are poppet valves, and the poppet is operated using a plunger and a spring. It has a structure in which it is driven in a direction perpendicular to the seat surface. In a poppet type solenoid valve, when no voltage is applied, the poppet is pressed against the valve seat surface by a spring to block the inflow and outflow ports, and when voltage is applied, the poppet is pulled up from the valve seat surface by a plunger to prevent fluid inflow and outflow. conduct. Fig. 14 is a configuration diagram of a spool-type direct-acting solenoid valve, in which a spool slides inside a cylindrical cylinder, and the brim of the spool opens and closes a port provided in the cylinder. It has a structure like this. A spool-type solenoid valve uses a spring to press the spool to close the port and shut off fluid when no voltage is applied, and when voltage is applied, the spool is moved by a plunger to close the port. Open the door to allow fluid to flow in and out.

Next, another example of the conventional flow rate control valve will be explained. FIG. 15 shows another example of a conventional flow control valve, and is a configuration diagram of a proportional solenoid type flow control valve. It has a structure in which a spool is slid within a cylindrical cylinder by a proportional solenoid, and the opening area of a port provided in the cylinder is controlled by the collar of the spool. Proportional solenoid flow control valves have a spout when no voltage is applied.
If you press the spool with a spring to close the port and cut off the fluid, and then apply voltage to the proportional solenoid, the spool will move in proportion to the voltage value, open the port by an arbitrary amount, and open the port by an arbitrary amount. Performs flow inflow and outflow.

Further, another example of the conventional flow rate control valve will be explained. FIG. 16 shows another example of a conventional flow control valve, and is a block diagram of a PCM proportional flow control valve constructed from a spool type electromagnetic valve. The structure is such that each port of the electromagnetic valve is provided with a minute flow nozzle whose opening area is a geometric progression of 2. By controlling the number of on/off valves that are opened, inflow and outflow of arbitrary flow rates can be achieved.

[0007]

[Problems to be Solved by the Invention] However, the above-described flow control valve has the following problems.

[0008] First, in the first conventional example, both solenoid valves, which are poppet valves or spool valves, have a large inertial mass when driving the poppet or spool in the axial direction of the valve. Since the friction is large, the driving part becomes large and there are problems in that a satisfactory response speed cannot be obtained.

Next, in the second conventional example, the proportional control valve, which is a proportional solenoid type spool valve, has a large drive part and slow response speed, as well as a solenoid valve, and has a different flow rate characteristic. It has a hysteresis characteristic as shown in No. 17, and has a problem in that it is difficult to control the flow rate accurately.

Furthermore, in the third conventional example, a PCM proportional control valve using a spool type solenoid valve solves the problems of the response and flow characteristics of the conventional proportional solenoid type proportional control valve, and achieves high precision without hysteresis. Although a flow rate control valve is possible, it is an assembly of many electromagnetic valves and requires a minute flow rate nozzle, so it has the problem of being large.

SUMMARY OF THE INVENTION In view of the above-mentioned problems, the present invention provides a small-sized flow control valve that has low seal friction and a small driving portion, and has a high response speed.

0012

[Means for Solving the Problems] In order to solve the above-mentioned problems, the flow control valve of the present invention includes a fluid inflow/outflow port, and a valve for opening/closing the fluid inflow/outflow port and for inflowing, outflowing, or blocking fluid. The actuator section includes a mover and an actuator section that controls and drives the mover to perform inflow and outflow and shutoff of fluid, and the actuator section opens and closes the fluid inflow and outflow ports by driving the mover. The apparatus includes a driving actuator section that controls and drives the operation, and a sealing actuator section that seals the fluid inflow and outflow ports using the mover.

[0013]

[Function] With the above-described structure, the present invention makes it possible to reduce the friction of the seal, miniaturize the drive section, and realize a compact flow control valve.

[0014]

DESCRIPTION OF THE PREFERRED EMBODIMENTS A flow control valve according to an embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is an overall view showing the configuration of a flow control valve in an embodiment of the present invention. In FIGS. 1A and 1B, 1 is an air inlet, 2 is an air outlet, 3 is a mover having an air inlet and outlet 3a and an electrode 5a of a sealing electrostatic actuator, and 4 is a Electrode 5 of electrostatic actuator for sealing
5 is a valve body having a movable element and electrodes 5a, 5 of the valve body.
6 is an electrostatic actuator for sealing, and 6 is a laminated piezoelectric actuator for driving.

The operation of the flow rate control valve constructed as described above will be explained below with reference to FIGS. 1 and 2.

In FIG. 1(a), first, with no voltage applied to the laminated piezoelectric actuator 6, the mover of the electrostatic actuator 5 and the electrode of the valve body are connected as shown in FIG. 2(a). When voltages of opposite signs are applied to the valve body 4, the contact pressure between the mover 3 and the valve body 4 increases due to the electrostatic attraction force, the attraction force increases, and the seal becomes reliable. This state is the closed state of the flow control valve.

Next, as shown in FIG. 2(b), voltages of the same sign are applied to both the electrodes of the mover of the sealing electrostatic actuator 5 and the valve body, and the mover 3 is moved by the electrostatic repulsion force. The contact pressure between the valve body 4 and the valve body 4 is weakened, and the frictional force is reduced. In this state, a voltage is applied to the laminated piezoelectric element actuator 6 to drive the mover 3, and after the movement, the mover of the electrostatic actuator 5 and the electrode of the valve body are connected again as shown in FIG. 2(a). By applying voltages of opposite signs to the valve body 4, the contact pressure between the mover 3 and the valve body 4 is strengthened by the electrostatic attraction force, the attraction force is increased, and sealing is performed. This state is the open state of the flow control valve.

[0019] Thereafter, by repeating this operation, the low
The flow control valve can be driven to open and close by lever friction and low driving force, and the drive actuator can be made smaller.

As described above, according to this embodiment, the flow control valve is constituted by the mover 3 having an inflow and outflow port, the electrostatic actuator 5 for sealing, and the laminated piezoelectric element actuator 6 for driving. There are two actuators, one for sealing and one for driving.
By controlling and driving the actuator, the sealing friction and driving force are low, and the drive actuator can be downsized, so a small flow rate control valve can be realized.

A second embodiment of the present invention will be described below with reference to the drawings. FIG. 3 is an overall view showing the configuration of a flow control valve in a second embodiment of the present invention.

In FIG. 3, 1 is an air inlet, 2 is an air outlet, 3 is a mover having an air inlet/outlet 3a and an electrode 5a of an electrostatic actuator for sealing, and 4 is a sealing element. A valve body having an electrode 5b of an electrostatic actuator, 5 an electrostatic actuator for sealing consisting of a mover and electrodes 5a and 5b of the valve body, and 6 a laminated piezoelectric element actuator for driving. The above structure is the same as that shown in FIGS. 1(a) and 1(b).

The difference from FIGS. 1(a) and 1(b) is that the air outlet 2 is provided with many slits 2b, which are air outlets, and the mover 3 is provided with many slits 3b, which are air inflow and outflow ports.
The point is that an electrostatic actuator for sealing is arranged between each slit.

The operation of the flow rate control valve constructed as described above will be explained below with reference to FIGS. 2 to 4.

In FIG. 3(a), first, with no voltage applied to the laminated piezoelectric actuator 6, the mover of the electrostatic actuator 5 and the electrode of the valve body are connected as shown in FIG. 2(a). When voltages of opposite signs are applied to the valve body 4 and the slit 2 as shown in FIG.
The contact pressure between b and 3b is increased so as to block air from each other, and the adsorption is increased, resulting in a strong seal. This state is the closed state of the flow control valve.

Next, voltages of the same sign are applied to both the electrodes of the mover of the electrostatic actuator 5 and the valve body, as shown in FIG. The frictional force between the main bodies 4 is reduced. In this state, a voltage is applied to the laminated piezoelectric element actuator 6 to drive the mover so that the slits 2b and 3b allow air to flow in and out of each other as shown in FIG. 4(b), and after the move, the electrostatic Actuator 5
Voltages of opposite signs are applied to the electrodes of the mover and the valve body as shown in FIG. 2(a), and the mover 3 is attracted to the valve body 4 by electrostatic attraction force, thereby performing sealing. This state is the open state of the flow control valve.

[0027] Thereafter, by repeating this operation, the low
In addition to realizing opening/closing drive of the flow rate control valve by lever friction and low driving force, even if the actuator makes only a minute displacement, opening/closing of a large opening area can be realized without using a displacement magnification mechanism. With the sealing actuator disposed in the slits, sufficient sealing can be achieved between each slit.

As described above, according to this embodiment, the flow rate control valve is composed of the mover 3 having the slit and the air outlet 2,
It is composed of an electrostatic actuator 5 for sealing and a laminated piezoelectric element actuator 6 for driving, and by controlling and driving the two actuators for sealing and driving, it achieves low sealing friction. , the driving force is low, and the drive actuator can be downsized, making it possible to realize a compact flow control valve.In addition, it is possible to realize a small flow control valve using a slit, and the electrostatic actuator can expand the minute displacement to a large flow rate by using a slit. Although it is small as an actuator for actuators, it is capable of providing sufficient sealing for each slit grid, so it has a small flow rate that allows opening and closing of large opening areas while maintaining sufficient sealing effect. A control valve can be realized.

A flow control valve according to a third embodiment of the present invention will be described below with reference to the drawings.

FIGS. 5(a) and 5(b) are overall views showing the structure of a flow control valve in a third embodiment of the present invention.

In FIG. 5(a), 1 is an air inlet; 2 is an air inlet;
3 is a mover having an air inflow and outflow port 3a, 4 is a valve body, and 6 is a laminated piezoelectric element actuator for driving.
The above configuration is the same as that of FIG. 1(a).

The difference from FIGS. 1(a) and 1(b) is that an electrostatic actuator for sealing is not used, and rollers 7a, 7b, 7c, and 7d whose surfaces are made of elastic material are provided, and the sealing This is what we did.

The operation of the flow rate control valve constructed as described above will be explained below with reference to FIGS. 2 and 5.

In FIG. 5(a), first, when no voltage is applied to the laminated piezoelectric element actuator 6, the mover 3 is positioned as shown in FIG. 5(a), and air is blocked. The sealing is performed by bringing the slider 3, the valve body 4, and the rollers 7a to 7d, each of which has an elastic surface, into contact with each other. This state is the closed state of the flow control valve.

Next, a voltage is applied to the laminated piezoelectric element actuator 6 to drive the mover to a position as shown in FIG. 5(b), thereby causing air to flow in and out. This state is the open state of the flow control valve. Sealing is performed by line contact between the rollers 7a to 7d and the moving element 3, and only rolling friction occurs when the moving element is driven, so that the sealing friction is small and the driving force is also small.

Thereafter, by repeating this operation, the low
The flow control valve can be driven to open and close by lever friction and low driving force, and the drive actuator can be made smaller.

As described above, according to this embodiment, the flow rate control valve is connected to the mover 3 having the inflow and outflow ports and the sealing rollers 7a to 7a.
7d and a driving laminated piezoelectric element actuator 6, and by controlling and driving the driving actuator, low sealing friction and low driving force are achieved, and the driving actuator can be miniaturized. Therefore, a compact flow control valve can be realized.

A flow control valve according to a fourth embodiment of the present invention will be described below with reference to the drawings.

FIGS. 6(a) and 6(b) are overall views showing the structure of a flow control valve in a fourth embodiment of the present invention.

In FIG. 6(a), 1 is an air inlet; 2 is an air inlet;
3 is a mover having an air inflow and outflow port 3a, 4 is a valve body, and 6 is a driving laminated piezoelectric element actuator.
The above configuration is the same as that of FIG. 1(a).

The difference from FIG. 1A is that the air inlet 1 has a large number of air inlets 1b, the air outlet 2 has a large number of air outlet slits 2b, and the mover 3 has a large number of air inlets. A slit 3b serving as an inflow/outflow port is provided, and a seal is performed by providing rollers 7a to 7n with elastic surfaces between each slit without using an electrostatic actuator for sealing. It is.

The operation of the flow rate control valve constructed as described above will be explained below with reference to FIGS. 4 and 6.

In FIG. 6(a), first, when no voltage is applied to the laminated piezoelectric element actuator 6, the mover 3 is positioned as shown in FIG. 4(a), and air is blocked. Sealing is performed by bringing the slider 3, the valve body 4, and the rollers 7a to 7n, each of which has an elastic surface, into contact with each other. This state is the closed state of the flow control valve.

Next, a voltage is applied to the laminated piezoelectric element actuator 6 to drive the mover to a position as shown in FIG. 4(b), thereby causing air to flow in and out. This state is the open state of the flow control valve. Since the seals are in line contact with the rollers 7a to 7n and the mover 3, and only rolling friction occurs when the mover is driven, the seal friction is small and the driving force is also small.

[0045] Thereafter, by repeating this operation, the low
The opening and closing drive of the flow control valve is realized by lever friction and low driving force, and even when the actuator makes only a minute displacement, it is possible to open and close a large opening area without using a displacement magnification mechanism. Sufficient sealing between the slits can be achieved.

As described above, according to this embodiment, the flow control valve is composed of the mover 3 having the slit and the air outlet 2,
It is composed of sealing rollers 7a to 7n and a driving laminated piezoelectric element actuator 6, and by controlling and driving the driving actuator, low sealing friction and low driving force are achieved. - It is possible to reduce the size of the flow rate control valve, and it is possible to realize a small flow rate control valve, and also to increase the flow rate from minute displacement due to the slits to a large flow rate, and to provide sufficient sealing for each grid of each slit by the rollers provided between each slit. Since the flow rate control valve is capable of opening and closing a large opening area while maintaining a sufficient sealing effect, it is possible to realize a small flow control valve that can open and close a large opening area.

A fifth embodiment of the present invention will be described below with reference to the drawings. FIGS. 7(a) and 7(b) are overall views showing the configuration of a flow control valve in a fifth embodiment of the present invention.

In FIG. 7(a), 1 is an air inlet; 2 is an air inlet;
b-1 to 2b-11 are air outflow ports which are geometric progression slits with an opening area of 2, and 3-1 to 3-11 are for sealing and communication with air inflow and outflow ports 3b-1 to 3b-11. A mover having electrodes 5a-1 to 5a-11 of an electrostatic actuator for use, 3b-1 to 3b-11 are air inflow and outflow ports, 3c-1 to 3c, which are slits in a geometric progression with an opening area of 2. -11 is an elastic body; 4 is a valve body having sealing and transmission electrostatic actuator electrodes 5b-1 to 5b-11; 5-1 to 5-
Reference numeral 11 indicates electrodes 5a-1 to 5a-11 and 5 of the mover and the valve body.
An electrostatic actuator for sealing and transmission consisting of b-1 to 5b-11, 6 a laminated piezoelectric actuator for driving, 8a an opening area control section, and 8b a moving element driving force transmission 8c is a control drive section.

The operation of the flow rate control valve constructed as above will be explained below with reference to FIGS. 2, 4, 7, and 8.

In FIG. 7(a), when the flow rate control valve is closed, the opening area control section 8a
It is decided to shut off all the air inflow and outflow ports 3b-1 to 3b-11, and in response to a command signal from the mover driving force transmission section 8b, the control drive section 8c causes the laminated piezoelectric element actuator 6 to Mover driving force transmission section 8 without applying voltage
2B, voltages of opposite signs are applied to the movers of the electrostatic actuators 5-1 to 5-11 and the electrodes of the valve body, as shown in FIG. 2A. Then, by electrostatic attraction force, the mover 3-1~
3-11 is the valve body 4 and the slit 2b as shown in Fig. 4(a).
-1 to 2b-11 and 3b-1 to 3b-11 are adsorbed to each other so as to block air from each other to form a seal. This state is the closed state of the flow control valve.

Next, when the flow rate control valve is opened to allow a desired flow rate to flow, the air inflow and outflow ports that open from among the 11 air inflow and outflow ports 3b-1 to 3b-11 in the opening area control section 8a. is determined, and the electrodes of both the mover and the valve body constituting the electrostatic actuators 5-1 to 5-11 of the air inflow and outflow ports determined to be opened by the mover driving force transmission unit 8b are connected to the electrodes shown in FIG. As shown in (b), voltages of the same sign are applied to reduce the frictional force between the valve body 4 and the open moving element among the moving elements 3-1 to 3-11 due to electrostatic repulsion. In this state, a voltage is applied to the laminated piezoelectric element actuator 6 by the control drive unit 8c in response to a command signal from the mover driving force transmission unit 8b, and the slits 2b-1 to 2b- are formed as shown in FIG. 4(b). The movers 3-1 to 3-11 are driven so that the slits determined to be open in 11 and 3b-1 to 3b-11 mutually allow air to flow in and out. 8b to the movers of the electrostatic actuators 5-1 to 5-11 and the electrodes of the valve body, as shown in FIG.
As shown in (a), voltages of opposite signs are applied, and the movers 3-1 to 3-11 are attracted to the valve body 4 by electrostatic attraction force, thereby performing sealing.

At the same time, the electrodes of both the mover and the valve body constituting the electrostatic actuators 5-1 to 5-11 of the air inflow and outflow ports determined not to open by the mover driving force transmission section 8b are , as shown in FIG. 2(a), voltages of opposite signs are applied, and by electrostatic attraction force, the mover that does not open among the movers 3-1 to 3-11 is attracted to the valve body 4, and a seal is performed. . The driving force by the laminated piezoelectric element actuator 6 is
This is also applied when closing the air inflow and outflow ports, but due to the adsorption force and frictional force by the electrostatic actuators 5-1 to 5-11, and the elastic bodies provided in the movers 3-1 to 3-11,
The mover does not move. This state is a state in which the flow rate control valve is opened and an arbitrary flow rate flows.

Thereafter, by repeating this operation, the low
Opening/closing of the flow control valve is realized by low drive force and friction, and a displacement amplification mechanism is used by minute displacement drive of one drive actuator and 11 seal and transmission actuators. Since the opening areas of the 11 air outlets and the air inlet/outlet are a geometric progression of 2, a proportional flow rate control valve can be constructed digitally as shown in Figure 8. can do.

As described above, according to this embodiment, the flow control valve has a slit opening area of 1 which is a geometric progression of 2.
One mover 3-1 to 3-11 and air outlet 2-1
2-11, 11 sealing and transmission electrostatic actuators 5-1 to 5-11, one driving laminated piezoelectric element actuator 6, and opening area control section 8a. It is composed of a child driving force transmission section 8b and a control drive section 8c, and the slit and 11 movers allow for minute displacement to be expanded to a large flow rate, and the electrostatic actuator is small as a sealing actuator. Since sufficient sealing is possible for each grid of slits, it is possible to realize a small flow control valve that can open and close a large opening area while having a sufficient sealing effect. In addition, the opening area control section 8a selects the air outlet to be opened and closed, and the control drive section 8c controls and drives 11 actuators for transmission and 1 actuator for driving, and by using an elastic body, 1 Since the opening/closing operations of 11 valves can be controlled by a single driving actuator, it is possible to realize a small proportional flow rate control valve with no hysteresis, low seal friction, and low driving force. Furthermore, an electrostatic actuator is used both as a seal actuator and as a transmission actuator in the mover drive force transmission section, so that it functions as both a seal and a part of the transmission section. This also makes it possible to realize a compact proportional flow control valve.

A sixth embodiment of the present invention will be described below with reference to the drawings. Figure 9(a),(b),(c)
FIG. 7 is an overall diagram showing the configuration of a flow control valve in a sixth embodiment of the present invention.

In FIG. 9(a), 1 is an air inlet; 2 is an air inlet;
3 is an air outflow port, 3 is a mover having an air inflow/outflow port 3a and an electrode 5a of an electrostatic actuator for sealing, 4 is a valve body having an electrode 5b of an electrostatic actuator for sealing, and 5 An electrostatic actuator for sealing is composed of a mover and electrodes 5a and 5b of the valve body, and the above structure is the same as that shown in FIG.

The difference from FIGS. 1(a) and 1(b) is that the driving laminated piezoelectric actuator is composed of two driving laminated piezoelectric actuators 6-1 and 6-2. The air outlet 2 is provided with two slits 2b-1 and 2b-2, the mover 3 is provided with a slit 3b, and an electrostatic actuator for sealing is arranged between each slit.

The operation of the flow rate control valve constructed as described above will be explained below with reference to FIGS. 2, 9, and 10.

In FIG. 9(a), first, with no voltage applied to the laminated piezoelectric element actuators 6-1 and 6-2, the movable element of the electrostatic actuator 5 and the electrode of the valve body are
When voltages of opposite signs are applied as shown in Fig. 2(a), the electrostatic attraction force causes the mover 3 to move between the valve body 4 and the slits 2b-1, 2b-2, and 3b as shown in Fig. 10(a). Adsorb and seal to block air. This state is the closed state of the flow control valve.

Next, voltages of the same sign are applied to both the electrodes of the mover of the electrostatic actuator 5 and the valve body, as shown in FIG. The frictional force between the main bodies 4 is reduced. In this state, a voltage is applied to the laminated piezoelectric element actuator 6-1, and as shown in FIG.
), the mover is driven so that air flows in and out of the slits 2b-1 and 3b, and after the movement, the mover of the electrostatic actuator 5 and the electrode of the valve body are connected again to each other, as shown in FIG. 2(a). By applying voltages of opposite signs as shown in FIG. 2, the mover 3 is attracted to the valve body 4 by electrostatic attraction force, and sealing is performed. This state is a state in which the flow control valve is open in one direction.

Furthermore, voltages of the same sign are applied to both the electrodes of the mover of the electrostatic actuator 5 and the valve body as shown in FIG. 2(b), and the electrostatic repulsion causes the mover 3 and the valve body to 4 to reduce the frictional force between them. In this state, a voltage is applied to the laminated piezoelectric element actuators 6-1 and 6-2, and the mover is moved so that the slits 2b-2 and 3b allow air to flow in and out of each other as shown in FIG. 10(c). After the movement, the movable element of the electrostatic actuator 5 and the electrode of the valve body are connected again as shown in FIG.
As shown in (a), voltages of opposite signs are applied, and the mover 3 is attracted to the valve body 4 by electrostatic attraction force, thereby performing sealing. In this state, the flow control valve is opened in the other direction, and becomes a 3-port 3-position switching valve.

[0062] Thereafter, by repeating this operation, the low
In addition to realizing opening/closing drive of the flow rate control valve by lever friction and low driving force, even if the actuator makes only a minute displacement, opening/closing of a large opening area can be realized without using a displacement magnification mechanism. With the sealing actuator disposed in the slits, it is possible to realize sufficient sealing between each slit, and furthermore, it is possible to realize switching of the flow direction.

As described above, according to this embodiment, the flow control valve is composed of the mover 3 having the slit and the air outlet 2,
It is composed of an electrostatic actuator 5 for sealing and laminated piezoelectric element actuators 6-1 and 6-2 for driving, and by controlling and driving the two actuators for sealing and driving. , low seal friction, low driving force, and the ability to downsize the drive actuator, making it possible to realize a compact flow control valve, as well as allowing for minute displacement due to the slit.
Although the electrostatic actuator is small enough to be used as a sealing actuator, it is possible to achieve a sufficient sealing effect in each slit grid. It is possible to realize a small-sized flow control valve that can open and close a large opening area while holding the slit, and can switch the direction of flow depending on the number of slits and their arrangement.

A seventh embodiment of the present invention will be described below with reference to the drawings. Figures 11(a), (b), (c
) is an overall view showing the configuration of a flow control valve in a seventh embodiment of the present invention.

In FIG. 11(a), 1 is an air inlet;
2b-1-1 to 2b-11-1 and 2b-1-2 to 2b-
11-2 is an air outlet having a slit whose opening area is a geometric progression of 2, and 3-1 to 3-11 are air inflow and outflow ports 3.
b-1 to 3b-11 and a mover having electrodes 5a-1 to 5a-11 of electrostatic actuators for sealing and transmission, 3;
b-1 to 3b-11 are air inflow and outflow ports which are geometric progression slits with an opening area of 2, 3c-1 to 3c-11 are elastic bodies, and 4 is an electrostatic actuator for sealing and transmission. Valve body having electrodes 5b-1 to 5b-11, 5-1 to 5-1
1 is the electrode 5a-1 to 5a-11 and 5b of the mover and the valve body.
-1 to 5b-11 are electrostatic actuators for sealing and transmission, 6-1 and 6-2 are laminated piezoelectric actuators for driving, 8a is an opening area control unit, and 8b is a The moving element driving force transmission section 8c is a control driving section.

The operation of the flow rate control valve constructed as described above will be explained below with reference to FIGS. 2, 8, 10, and 11.

In FIG. 11(a), first, when the flow rate control valve is closed, the opening area control section 8a
It is decided to shut off all the air inflow and outflow ports 3b-1 to 3b-11, and in response to a command signal from the mover driving force transmission section 8b, the control drive section 8c causes the stacked piezoelectric element actuator 6- to be shut off. No voltage is applied to 1 and 6-2, and the electrostatic actuators 5-1 to 5-2 are moved by the movable element driving force transmission section 8b.
Voltages of opposite signs are applied to the electrodes of the mover 5-11 and the valve body, as shown in FIG. 2(a). Then, due to the electrostatic attraction force, the movers 3-1 to 3-11 move between the valve body 4 and the slits 2b-1 to 2b-11 and 3b-1 to 3b- as shown in FIG. 10(a).
11 are adsorbed and sealed to each other so as to block air from each other. This state is the closed state of the flow control valve.

Next, when opening the first mode slit on one side of the flow rate control valve to allow a desired flow rate to flow, the opening area control section 8a opens the 11 air inflow and outflow ports 3b-
1 to 3b-11, and the electrostatic actuators 5-1 to 5-5- of the air inflow and outflow ports determined to be opened by the mover driving force transmission section 8b.
2 (
As shown in b), voltages of the same sign are applied to reduce the frictional force between the valve body 4 and the opening of the movers 3-1 to 3-11 due to electrostatic repulsion. In this state, a voltage is applied to the laminated piezoelectric element actuator 6-1 by the control drive unit 8c in response to a command signal from the mover driving force transmission unit 8b, and the slit 2b-1 is opened as shown in FIG. 10(b).
The movers 3-1 to 3-11 are driven so that the slits determined to be open in -1 to 2b-11-1 and 3b-1 to 3b-11 mutually allow air to flow in and out. The electrostatic actuator 5 is again moved by the movable element driving force transmission section 8b.
-1 to 5-11 to the electrodes of the mover and the valve body, as shown in Figure 2(a).
By applying voltages of opposite signs as shown in FIG. 2, the movable elements 3-1 to 3-11 are attracted to the valve body 4 by electrostatic attraction force, and sealing is performed.

At the same time, the electrodes of both the mover and the valve body constituting the electrostatic actuators 5-1 to 5-11 of the air inflow and outflow ports determined not to open by the mover driving force transmission section 8b are , as shown in FIG. 2(a), voltages of opposite signs are applied, and by electrostatic attraction force, the mover that does not open among the movers 3-1 to 3-11 is attracted to the valve body 4, and a seal is performed. . The driving force by the laminated piezoelectric element actuator 6-1 is applied when closing the air inflow and outflow ports, but the driving force by the electrostatic actuators 5-1 to 5-11 is also applied by the adsorption force, frictional force,
And, due to the elastic bodies provided in the movers 3-1 to 3-11, the movers do not move. In this state, the flow rate control valve is opened and a desired flow rate flows from one of the slits in the first mode. Furthermore, when opening the other second mode slit of the flow rate control valve to allow a desired flow rate to flow, the 11 air inflow and outflow ports 3b are opened in the opening area control section 8a.
The electrostatic actuators 5-1 to 5-5 determine the air inflow and outflow ports to be opened from among -1 to 3b-11, and the air inflow and outflow ports determined to be opened by the mover driving force transmission section 8b.
-11 on both the electrodes of the mover and valve body,
As shown in (b), voltages of the same sign are applied to reduce the frictional force between the valve body 4 and the open moving element among the moving elements 3-1 to 3-11 due to electrostatic repulsion. In this state, in response to a command signal from the mover driving force transmission section 8b, the control drive section 8c drives the stacked piezoelectric element actuator 6-1.
By applying voltage to and 6-2, the slits 2b-1-2 to 2b-11-2 and 3b-1 to 3b-1 are formed as shown in FIG. 10(c).
The movers 3-1 to 3-11 are driven so that the slits in 1 that are determined to be open allow air to flow in and out of each other,
After the movement, the movable element driving force transmission section 8b again connects the movable elements of the electrostatic actuators 5-1 to 5-11 to the electrodes of the valve body.
As shown in FIG. 2(a), voltages of opposite signs are applied, and the movers 3-1 to 3-11 are attracted to the valve body 4 by electrostatic attraction force, thereby performing sealing.

At the same time, the electrodes of both the mover and the valve body constituting the electrostatic actuators 5-1 to 5-11 of the air inflow and outflow ports determined not to open by the mover driving force transmission section 8b are , as shown in FIG. 2(a), voltages of opposite signs are applied, and by electrostatic attraction force, the mover that does not open among the movers 3-1 to 3-11 is attracted to the valve body 4, and a seal is performed. . The driving force by the laminated piezoelectric actuators 6-1 and 6-2 is applied when closing the air inflow and outflow ports, but the adsorption force by the electrostatic actuators 5-1 to 5-11,
The movable elements do not move due to the frictional force and the elastic bodies provided in the movable elements 3-1 to 3-11. In this state, the flow rate control valve is opened and a desired flow rate flows from the other slit in the second mode.

[0071] Thereafter, by repeating this operation, the low
In addition to realizing the opening/closing drive of the flow rate control valve using low friction and low driving force, the minute displacement drive of the two drive actuators and the seal and transmission actuators allow for arbitrary flow rate control without the need for a displacement amplification mechanism. Since the opening areas of the 11 inflow and outflow ports are a geometric progression of 2, a proportional flow rate control valve can be constructed digitally as shown in FIG. Furthermore, the resolution of the controlled flow rate and the total flow rate can be changed by using the two modes of slits.

As described above, according to this embodiment, the flow rate control valve is connected to the 11 movers 3-1 to 3-11 having slits whose opening area is a geometric progression of 2, and the air outlet 2.
b-1-1 to 2b-11-1, 2b-1-2 to 2b-1
1-2, 11 sealing and transmission electrostatic actuators 5-1 to 5-11, one driving laminated piezoelectric element actuator 6, opening area control section 8a, and mover. It is composed of a driving force transmission section 8b and a control drive section 8c, and the slit and 11 movers allow for minute displacement to be expanded to a large flow rate, and the electrostatic actuator is small as a sealing actuator. Since sufficient sealing is possible for each grid of slits, it is possible to realize a small flow control valve that can open and close a large opening area while having a sufficient sealing effect. Further, the air outlet to be opened and closed is selected by the opening area control unit 8a, and the air outlet to be opened and closed is selected by the control drive unit 8c.
By controlling and driving 1 transmission actuator and 1 drive actuator and using an elastic body, it is possible to control the opening and closing operations of 11 valves with 1 drive actuator. No hysteresis, low seal friction,
A small proportional flow control valve with low driving force can be realized. Furthermore, an electrostatic actuator is used both as a seal actuator and as a transmission actuator in the mover drive force transmission section, so that it functions as both a seal and a part of the transmission section. This makes it possible to realize a small proportional flow control valve, and by making the resolution of the control flow variable variable using the two mode slits, it is possible to widen the control flow range. can be realized.

In this example, a laminated piezoelectric element actuator was used as the driving actuator, and an electrostatic actuator was used as the sealing actuator. For example, but not limited to,
Similar effects can be obtained by using an electromagnetic plunger, a bimorph type piezoelectric element actuator, a giant magnetostrictive actuator, or a shape memory alloy.

Further, in this embodiment, the flow rate control valve uses a mover and an air outlet to control the inflow and outflow of air, but the same effect can be obtained by using a mover and an air inlet. It will be done.

In this embodiment, the flow control valve controls the inflow and outflow of air by sliding the mover, but the inflow and outflow of air is controlled by moving the poppet up and down or by using self-deformation of the drive actuator. A similar effect can be obtained by controlling.

Furthermore, in the first, second, third, fourth, and fifth embodiments, the flow control valve is a two-port, two-position valve, but the number of ports and the number of positions are limited to these. Not a thing, but a 3 port
A similar effect can be obtained by using a two-position valve.

Further, in the second, fourth, and fifth embodiments, the flow control valves have 2, 3, and 4 slits, but the number of slits is not limited to these.

Furthermore, in the third and fourth embodiments, the flow control valve has rollers or movers, and a valve body having a fluid inflow and outflow port, the surface or the entirety of which is made of an elastic material. However, the material is not limited to this, as long as it has a sealing effect similar to an elastic material.

Further, in the sixth and seventh embodiments, the flow control valve has two operating modes for the drive actuator, but the number of modes is not limited to this.

Further, in the sixth and seventh embodiments, the flow control valve has two slits at the air inflow and outflow ports, and four slits at the air outflow port, but the number of slits is not limited to these. .

Further, in the seventh embodiment, the number of slits in each slit group is the same and the opening area of each slit group is different, but the number of slits in each slit group is different and the opening area of each slit group is different. A similar effect can be obtained.

Further, in the sixth embodiment, the flow control valve is a 3-port 3-position valve, but the number of ports and the number of positions are not limited to this, and may be a 4-port 4-position valve, etc. A similar effect can be obtained.

Furthermore, in the seventh embodiment, the flow rate control valve is a 2-port, 3-position valve with two types of flow rate resolution, but the number of ports, number of positions, and number of flow rate resolutions are limited to these. Instead, the same effect can be obtained by using a 3-port, 7-position valve, three types of flow rate resolution, etc.

Furthermore, in the fifth and seventh embodiments, the flow rate control valve is composed of 11 air inflow/outflow ports and air outflow ports, but the number of air inflow/outflow ports and air outflow ports is It is not limited to this.

In addition, in the fifth and seventh embodiments, the flow control valve is configured in a geometric progression with the opening areas of 11 air inflow and outflow ports and air outflow ports being 2, but the opening area does not have to be a geometric progression of 2.

Furthermore, in the fifth and seventh embodiments, the opening areas of the air inflow and outflow ports and the air outflow ports of the 11 movers in the flow rate control valves are made the same, but they do not have to be the same.

Further, in the fifth and seventh embodiments, the moving element driving force transmission section is composed of a transmission actuator and an elastic body, but the structure is not limited to this, and a clutch mechanism, etc. A similar effect can be obtained by using

Further, in the fifth and seventh embodiments, an electrostatic actuator is used as the transmission actuator of the moving element driving force transmission section, but the actuator is not necessarily limited to this type of actuator. Similar effects can be obtained by using an electromagnetic plunger, a bimorph piezoelectric actuator, a giant magnetostrictive actuator, a shape memory alloy, or the like.

[0089]

As described above, the present invention provides a fluid inflow and outflow port, a mover for opening and closing the fluid inflow and outflow port, and a mover for inflowing, outflowing, or blocking the fluid, and controlling and driving the mover, an actuator section that performs inflow/outflow and shutoff of fluid; the actuator section includes a drive actuator section that controls and drives the opening/closing operation of the fluid inflow/outflow port by driving the mover; By providing a sealing actuator section that seals the fluid inflow and outflow ports using the mover, the friction of the seal can be reduced, the drive section can be made smaller, and the proportional flow rate control valve can be made smaller. can be realized.

[Brief explanation of the drawing]

FIG. 1 (a) is an overall view showing the closing of a flow control valve in a first embodiment of the present invention. (b) It is an overall view showing the opening of the flow control valve in the first embodiment of the present invention.

FIG. 2(a) is a diagram of the suction state of the sealing electrostatic actuator in the first embodiment of the present invention. (b) It is a repulsion state diagram of the electrostatic actuator for seals in the first embodiment of the present invention.

FIG. 3 (a) is an overall view showing the closing of the flow control valve in the second embodiment of the present invention. (b) It is an overall view showing the opening of the flow control valve in the second embodiment of the present invention.

FIG. 4(a) is a principle diagram showing the small displacement-flow rate enlargement conversion by the slit in the second embodiment of the present invention, and is a valve closed state diagram. (b) It is a principle diagram showing the minute displacement-flow rate expansion conversion by the slit in the second embodiment of the present invention, and is a valve open state diagram.

FIG. 5 (a) is an overall view showing the closing of the flow control valve in the third embodiment of the present invention. (b) It is an overall view showing the opening of the flow control valve in the third embodiment of the present invention.

FIG. 6(a) is an overall view showing the closing of the flow control valve in the fourth embodiment of the present invention. (b) It is an overall view showing the opening of the flow control valve in the fourth embodiment of the present invention.

FIG. 7(a) is an overall view showing the closing of the flow control valve in the fifth embodiment of the present invention. (b) It is an overall view showing the opening of the flow control valve in the fifth embodiment of the present invention.

FIG. 8 is a flow characteristic diagram of a flow control valve in a fifth embodiment of the present invention.

FIG. 9(a) is an overall view showing the opening of a flow control valve in a sixth embodiment of the present invention. (b) First flow control valve in the sixth embodiment of the present invention
It is an overall view showing a step opening. (a) Second flow control valve in the sixth embodiment of the present invention
It is an overall view showing a step opening.

FIG. 10(a) is a valve closed state diagram showing flow rate direction conversion by the slit in the sixth embodiment of the present invention and controlled flow rate resolution conversion by the slit in the seventh embodiment of the present invention. (b) It is a valve open state diagram showing flow rate direction conversion by the slit in the sixth embodiment of the present invention and controlled flow rate resolution conversion by the slit in the seventh embodiment of the present invention. (c) It is a valve open state diagram showing flow rate direction conversion by the slit in the sixth embodiment of the present invention and controlled flow rate resolution conversion by the slit in the seventh embodiment of the present invention.

FIG. 11(a) is an overall view showing the configuration of a flow control valve in a seventh embodiment of the present invention. (b) It is an overall view showing the configuration of a flow control valve in a seventh embodiment of the present invention. (c) It is an overall view showing the configuration of a flow control valve in a seventh embodiment of the present invention.

FIG. 12 (a) is a diagram of a closed state of a direct-acting solenoid valve in a conventional example. (b) It is an opening state diagram of a direct-acting solenoid valve in a conventional example.

FIG. 13(a) is a diagram of a closed state of a pilot type solenoid valve in a conventional example. (a) It is an opening state diagram of a pilot type electromagnetic valve in a conventional example.

FIG. 14 is a configuration diagram of a spool-type direct-acting solenoid valve in a conventional example.

FIG. 15 is a configuration diagram of a spool type proportional flow control valve in a conventional example.

FIG. 16 is a configuration diagram of a PCM proportional flow control valve using a direct-acting solenoid valve in a conventional example.

FIG. 17 is a flow characteristic diagram of a spool-type proportional flow control valve in a conventional example.

[Explanation of symbols]

1 Air inlet 2 Air outlet 3 Mover 3a Air inflow/outflow port 4 Valve body 5 Electrostatic actuator for seals 5a Mover side electrode 5b Valve body side electrode 6 Piezoelectric actuator for driving

Claims (19)

[Claims] 1. A fluid inflow/outflow port, a mover for opening/closing the fluid inflow/outflow port and for inflowing, outflowing, or blocking the fluid, and controlling and driving the mover to perform inflow/outflow/blocking of the fluid. an actuator section, the actuator section controlling and driving the opening/closing operation of the fluid inflow/outflow port by driving the moving element; 1. A flow control valve comprising a sealing actuator section for sealing an outlet. 2. The fluid inflow and outflow ports have m1 slits, and the mover has m2 slits for opening and closing the fluid inflow and outflow ports to inflow, outflow, or block fluid, When the moving element is driven by the driving actuator section and the sealing actuator section, the slit of the fluid inflow/outflow port and the slit of the moving element mutually allow fluid to flow in, out, or 2. The flow control valve according to claim 1, wherein each slit is arranged so as to block the flow. 3. A fluid inflow/outflow port, a mover for opening/closing the fluid inflow/outflow port and for inflowing, outflowing, or blocking the fluid, and controlling and driving the mover to perform inflow/outflow/blocking of the fluid. 1. A flow control valve comprising a driving actuator section and a roller, the roller being attached in contact between the mover and a valve body having the fluid inflow and outflow ports. 4. The fluid inflow and outflow ports have m1 slits, and the mover has m2 slits for opening and closing the fluid inflow and outflow ports to inflow, outflow, or block fluid, When the moving element is driven by the driving actuator unit in contact with the rollers, the slits of the fluid inflow and outflow ports and the slits of the moving element mutually allow fluid to flow in, outflow, or block each other. 4. The flow control valve according to claim 3, further comprising a slit. 5. The flow control valve according to claim 3, wherein the surface or the entire valve body having the roller or the slider and the fluid inflow and outflow ports is an elastic body. 6. The apparatus includes n fluid inflow/outflow ports, n movers, a drive actuator section, an opening area control section, a control drive section, and a mover driving force transmission section, the opening area control The unit determines a moving element to be driven according to the target flow rate, the control drive unit controls the drive actuator unit,
2. The flow control valve according to claim 1, wherein the mover driving force transmission section causes the driving actuator section to drive only the mover determined by the opening area control section. 7. The movable element driving force transmission section includes a transmission actuator section for adsorbing or detaching the movable element from the valve body for each movable element, and an elastic body for transmitting the driving force to each of the movable elements. The moving element driving force transmitting section controls the driving actuator section by a control driving section based on a command from the opening area controlling section, and also controls the driving actuator section between the elastic body and the transmitting actuator section. The transmitting actuator section is a sealing actuator section that seals the fluid inflow and outflow ports by the moving section, and the elastic body is A claim characterized in that the movable element is disposed between each of the movable elements and the drive actuator section in order to transmit or cut off the driving force to the movable elements according to a command from the opening area control section. Flow control valve according to item 6. [Claim 8] The fluid inflow and outflow ports are m11 to m11, respectively.
The mover has m21 to m2n slits for opening and closing the fluid inflow and outflow ports to inflow, outflow, or block the fluid, and the movable element has m21 to m2n slits, respectively, and is operated by a driving actuator section. 6. The slits are arranged so that when the mover is driven, the slits of the fluid inflow and outflow ports and the slits of the mover mutually inflow, outflow, or block fluid. The flow control valve according to claim 7. 9. The fluid inflow and outflow ports have k fluid inflow and outflow ports each having a number of slits from m11 to m1k, and the fluid inflow and outflow ports are j-th (1≦j≦k−1). At least one slit of the j+1 fluid inlet and outlet is arranged next to the slit of the The distance between the outflow port and the slit is constant, the mover has m2 slits, the drive actuator section has k operation modes, and the drive actuator section and the drive actuator section have k operation modes. When the sealing actuator section is not driven and the moving element is not driven, the m11 to m1k slits of the k fluid inflow and outflow ports and the m2 slits of the moving element are mutually connected to each other. Each of the k fluid inflow and outflow ports is arranged between the m2 slits of the mover so as to block fluid, and the driving actuator section is placed in the j-th operation mode (1≦ j≦k), and when the mover is driven by driving the seal actuator section, the number of slits is m1j at the fluid inlet and outlet and m2 of the mover. The k-1 slits of the fluid inflow and outflow ports excluding the fluid inflow and outflow ports having the m1j slits, and the m2 slits of the mover. 5. The flow rate according to claim 2 or 4, wherein each slit of the k fluid inflow and outflow ports is arranged between the m2 slits of the mover so that the k fluid inflow and outflow ports mutually cut off fluid. control valve. 10. The fluid inflow and outflow port has first to kth slit groups, each having a number of slits from m11 to m1k, and each of the slit groups has a different opening area, and has a j(1kth) slit group. ≦j≦k−1) At least one slit of the j+1 slit group is arranged next to the slit of the slit group of and the jth
arranging a constant interval between the slits of the slit group;
The mover has m2 slits, and the drive actuator
The actuator section has k operation modes, and when the drive actuator section and the seal actuator section are not driven and the mover is not driven, the first to k operation modes are set. each slit of the first to kth slit groups is arranged between the m2 slits of the mover so that the slit group and the m2 slits of the mover block fluid from each other;
Further, the drive actuator section is set to the j-th operation mode (1
≦j≦k), and when the mover is driven by driving the sealing actuator section, the number of slits at the fluid inflow and outflow ports is m1j. The m2 slits of the mover mutually inflow and outflow fluid, and the m2 slits of the mover and k-1 slit groups excluding the j-th slit group of the fluid inflow and outflow ports and the m2 slits of the mover. 5. The slits of the first to kth slit groups are arranged between the m2 slits of the mover so as to block fluid from each other. Flow control valve. 11. The n fluid inflow and outflow ports each have mi11 to mi1k slits (i=1, 2, . . .
, n), the first to kth slit groups of each of the n fluid inflow and outflow ports have different opening areas, and each of the n movers has a The drive actuator section has k operation modes, and when the drive actuator section is not driven and the n movers are not driven, the drive actuator section has k operation modes. The first to kth slit groups of each of the n fluid inflow and outflow ports and the mi2 slits of the n movers block fluid from each other. When each slit of the slit groups up to 1 is arranged between mi2 slits of the movable element, and when the driving actuator section is driven in the j-th operation mode (1≦j≦k), the movable element p (1≦p≦n) commanded to open from the driving force transmission section
) and the mi2 slits of the p movers that are commanded to move, flow fluid into and out of each other, and do not open from the mover driving force transmission section. commanded (n-p) pieces (1≦p≦n)
Each of the first to kth slit groups is arranged so that the slit group of the first to kth slit groups and the mi2 slits of the (n-p) moving elements that are instructed not to move mutually cut off fluid. 8. The flow control valve according to claim 6, wherein slits are arranged between mi2 slits of the mover. 12. The flow control valve according to claim 9, 10 or 11, wherein the k operation modes of the drive actuator section are k stages of operation position points. . 13. The driving actuator section is a piezoelectric element actuator, an electrostatic actuator, a giant magnetostrictive element actuator, an electromagnetic plunger, a shape memory alloy, or an electric motor that drives the moving element. Claim 1, Claim 2, Claim 3, Claim 4, Claim 6 characterized in that
, claim 7, claim 9, claim 11 or claim 12
Flow control valve described in . 14. The sealing actuator section includes an electrostatic actuator, a magnetic fluid, a piezoelectric element actuator,
Claim 1, Claim 2, Claim 3, Claim 4, Claim 6, Claim 7, characterized in that it is a giant magnetostrictive element actuator, an electromagnetic plunger, a shape memory alloy, or an electric motor. The flow control valve according to claim 9, claim 11, or claim 12. 15. The transmission actuator section is an electrostatic actuator, a magnetic fluid, a piezoelectric actuator, a giant magnetostrictive actuator, an electromagnetic plunger, a shape memory alloy, or an electric motor. The flow control valve according to claim 7 or 12, characterized in that: 16. The flow control valve according to claim 3, wherein the driving actuator section directly drives the moving element. 17. The flow control valve according to claim 3 or 4, wherein the driving actuator section directly drives the roller and indirectly drives the slider. 18. Claim 6, wherein the n moving elements have slits whose opening areas are a geometric progression of 2.
, the flow control valve according to claim 7 or claim 12. 19. Claims 1, 2, 3, 4, and 6, wherein the fluid is air.
, claim 7, claim 9, claim 11 or claim 12
Flow control valve as described.