JPH04285809A - Apparatus and method for measuring roughness - Google Patents

Abstract

PURPOSE:To enable accurate measurement of the shape of a substance to be measured, by making an air supply source communicate with bearings provided for X, Y and Z carriages respectively, through a selector valve. CONSTITUTION:Air is supplied from an air supply source 22 to a vibration removing stage 18 and air bearings 26, 28 and 32 by operating solenoid operated valves 20 and 36. By moving X, Y and Z carriages 24, 30 and 34, a stylus 44 of a roughness measuring element 14 is disposed at a position whereat the stylus 44 comes into contact with a substance 50 to be measured. By operating the solenoid operated valve 36, the supply of air from the air supply source 22 to the air bearings 26, 28 and 32 is stopped. After the supply of air is stopped, the stylus 44 is moved along the substance 50 so as to measure the shape of the substance 50, by operating a moving means 42 of the roughness measuring element 14. Since the supply of air to each air bearing is stopped at the time of measurement, occurrence of minute vibration of the X, Y and Z carriages can be prevented.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a roughness measuring device and method thereof, and more particularly to a roughness measuring device that measures the surface roughness of a workpiece by the displacement of a stylus that moves along the surface of the workpiece. The present invention relates to a roughness measuring machine equipped with means movable in three axial directions and a method thereof.

0002

2. Description of the Related Art When measuring the shape of a large object to be measured such as a cylinder block, a roughness measuring machine equipped with three-dimensional positioning means is used. The measurement method of this roughness measuring machine is to first supply air to the air bearings of the X carriage, Y carriage, and Z carriage that can move in the X-axis direction, Y-axis direction, and Z-axis direction. The Z-carriage is moved and the stylus of the roughness measuring section provided at the lower end of the Z-carriage is brought into contact with the object to be measured. Next, the drive section of the roughness measuring machine is activated to move the stylus along the object to be measured, thereby measuring the shape of the object.

0003

[Problem to be Solved by the Invention] However, air bearings have a function as a bearing by blowing air onto the sliding surface and bringing the sliding surface and air bearing surface into contact with each other. Minute vibrations are generated by the speech bubbles. Therefore, X, Y, Z
Even when the carriage is stopped, minute vibrations from the air bearing are transmitted to the X, Y, and Z carriages. Therefore, when the X, Y, and Z carriages are stopped after the stylus is placed in a predetermined position and the stylus is used to measure the surface shape of the object to be measured, the minute vibrations of the X, Y, and Z carriages are transmitted to the stylus, causing the There is a problem that it is not possible to measure the shape accurately.

The present invention was made in view of the above circumstances, and an object of the present invention is to provide a roughness measuring machine and method capable of accurately measuring the shape of an object to be measured.

[0005]

[Means for Solving the Problems] In order to achieve the above object, the present invention includes a table, a gate-shaped Y carriage slidably supported on the table in the Y-axis direction via an air bearing, An X-carriage that is slidably supported on the Y-carriage via an air bearing in the X-axis direction, a Z-carriage that is slidably supported on the X-carriage via an air bearing in the Z-axis direction, and the tip of the Z-carriage. and a roughness measuring section provided in the roughness measuring device, wherein each of the air bearings is connected to an air supply source through a switching valve that can be switched between "ON" and "OFF". It is characterized by

[0006]

[Operation] According to the present invention, since the air supply source is communicated with each air bearing provided in the X, Y, and Z carriages through the switching valve, each air bearing is connected to the air bearing by operating the switching valve. It is possible to select whether to supply air or not. Therefore, if air is not supplied to each air bearing when measuring the object to be measured, minute vibrations will not occur in each air bearing, so
It is possible to prevent minute vibrations from being transmitted to the stylus via the Z carriage.

[0007]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the roughness measuring device and method according to the present invention will be described below with reference to the accompanying drawings. As shown in FIG. 1, the roughness measuring machine 10 has a three-dimensional positioning section 12.
and a roughness measuring section 14, and a three-dimensional positioning section 1.
The second table 16 is placed on a pedestal 20 via vibration isolating tables 18, 18, 18. As shown in FIG. 2, two vibration isolation tables 18, 18, 18 are provided at both ends of the front side of the table 16 (that is, the side where the operator is located), and one is provided at the center of the rear side of the table 16. . This vibration isolation table 18 is composed of a piston and a cylinder, and an air supply source 22 is communicated with the space formed by the piston and cylinder via an electromagnetic valve 20 shown in FIG.

Further, as shown in FIG. 1, the legs 24A, 24A of a Y carriage 24 are erected on the table 16 via air bearings 26, 26, 26, 26, and the legs 24A, 24A are erected in the Y-axis direction (in FIG. 1). It is provided so as to be slidable in the direction perpendicular to the plane of the paper. The Y carriage 24 is formed into a substantially gate shape, and the X carriage 30 is attached to the beam portion 24B (that is, the X direction guide portion) via air bearings 28, 28, 28, as shown in FIG. In other words, it is provided so as to be slidable along the X-axis direction. Further, a Z carriage 34 is connected to the Y carriage 24 and the X carriage 30 via air bearings 32, 32, 32, 32.
is provided slidably in the Z-axis direction. The air supply source 22 is communicated with these air bearings 26, 28, and 32 via a solenoid valve 36 shown in FIG. Since the electromagnetic valve 36 can be switched between "ON" and "OFF", the air bearings 26 and 28 can be switched by operating the electromagnetic valve 36.
, 32 can be selectively supplied with air or not.

As shown in FIG. 4, a roughness measuring section 14 is provided at the lower end of the Z carriage 34. Roughness measurement part 1
4 mainly consists of a detecting means 40 and a driving means 42, and the detecting means 40 converts the displacement of the stylus 44 into an electrical signal using a detector. The stylus 44 was then converted into an electrical signal.
The displacement is sent to a calculation unit (not shown), which calculates the surface roughness of the object to be measured. The driving means 42 also moves the stylus 44 in the Y-Y direction.

The operation of the roughness measuring machine constructed as described above will be explained. First, the electromagnetic valve 20 and the electromagnetic valve 36
to supply air from the air supply source 22 to the vibration isolation table 18 and the air bearings 26, 28, and 32. Then X,
The Y and Z carriages 24, 30, and 34 are moved to place the stylus 44 of the roughness measuring section 14 at a predetermined position (that is, the position where the stylus 44 contacts the object to be measured 50). Next, the electromagnetic valve 36 is operated to stop the air supply from the air supply source 22 to the air bearings 26, 28, and 32. After the air supply is stopped, the drive means 42 of the roughness measuring section 14 is activated to move the stylus 44 along the object to be measured 50 to measure the shape of the object to be measured 50.

In the above embodiment, the table 16 is replaced by a vibration isolation table 18.
Although the table 16 is placed on the pedestal 20 via the vibration isolating table 18, the present invention is not limited to this, and the table 16 may be placed directly on the pedestal 20 without using the vibration isolating table 18.

0012

[Effects of the Invention] As explained above, according to the roughness measuring machine and its method according to the present invention, it is possible to select between supplying air to each air bearing and not supplying air by operating the switching valve. Therefore, by not supplying air to each air bearing during measurement, it is possible to prevent minute vibrations from occurring in the X, Y, and Z carriages. Therefore, since it is possible to prevent minute vibrations from being transmitted to the stylus, the shape of the object to be measured can be accurately measured.

[Brief explanation of the drawing]

FIG. 1 is a front view showing a roughness measuring device according to the present invention.

FIG. 2 is a sectional view taken along line BB in FIG. 1;

FIG. 3 is a block diagram of a roughness measuring machine according to the present invention.

FIG. 4 is a sectional view taken along line AA in FIG. 1;

[Explanation of symbols]

10...Roughness measuring machine 14...Roughness measuring section 16...table 18...Vibration isolation table 22...Air supply source 24...Y carriage 24A…legs 24B...beam part 26, 28, 32...Air bearing 30...X carriage 34...Z carriage 36...Solenoid valve 44...Stylus 50...Object to be measured

Claims (4)

[Claims] Claim 1: A table, and a gate-shaped Y that is slidably supported on the table in the Y-axis direction via an air bearing.
an X-carriage that is slidably supported by the Y-carriage via an air bearing in the X-axis direction; a Z-carriage that is slidably supported by the X-carriage via an air bearing in the Z-axis direction; In a roughness measuring machine comprising a roughness measuring section provided at the tip of a carriage, each of the air bearings is set to "ON" or "OFF".
A roughness measuring machine characterized in that an air supply source is communicated through a switchable switching valve. 2. The roughness measuring device according to claim 1, wherein the table is placed on a vibration isolation table. 3. A table, and a gate-shaped Y that is slidably supported on the table in the Y-axis direction via an air bearing.
an X-carriage that is slidably supported by the Y-carriage via an air bearing in the X-axis direction; a Z-carriage that is slidably supported by the X-carriage via an air bearing in the Z-axis direction; A roughness measuring unit provided at the tip of the carriage, air is supplied to each air bearing of the roughness measuring machine, and the X, Y, and Z carriages are moved in the X, Y, and Z axis directions, respectively. The stylus of the roughness measuring section is brought into contact with the measuring point of the object to be measured, the air supply to each of the air bearings is stopped, and the driving means of the roughness measuring section brings the stylus into contact with the measuring point of the object. A roughness measuring method characterized by measuring the surface shape of an object to be measured by moving along the object. 4. The roughness measuring method according to claim 1, wherein the table is placed on a vibration isolation table.