JPH042908A - Straightness and surface roughness measuring apparatus - Google Patents

Abstract

PURPOSE:To simultaneously measure straightness and surface roughness of a work by providing a column for holding a stylus to be disposed vertically movably, a leveling table for holding the work, and a horizontally movable slider. CONSTITUTION:A column 1 is vertically movably held at an elevation guide 4, an air slider 8 is provided under the column 1 above a base 3 to be adjustable at its level. A leveling table 13 is placed on a slider table 10 to hold a work 14. The work 14 to be measured is secured to the table 13, and the stylus 6 is moved to the measurement starting point of the work 14 by moving the table 10 of the slider 8. Then, the column 1 is moved down, and stopped at a position where the stylus 6 is brought into contact with the work 14. Thereafter, when the table 10 is moved, the stylus 6 is slid while being brought into contact with the work 14, thereby measuring surface roughness and straightness.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention improves the straightness and surface roughness of a rod-shaped workpiece (object to be measured) by touching and sliding the surface of the workpiece with a stylus (contactor). It also relates to a measuring device that can measure manually or automatically.

[Conventional technology]

Conventionally, the surface roughness of a workpiece has been measured using the following method.

That is, as shown in FIG. 5, the upper and lower blade directions (arrow a) 4
The tip 51 of the stylus 50, which is supported so as to be swingable, is moved in the axial direction (arrow b) while making contact with the surface of the workpiece 52.
be moved by At this time, the stylus 50 makes minute vertical movements (arrow a) according to the surface properties of the workpiece. The dirt is converted into an analog electrical signal to obtain an output 53, which is processed by a data processing device 54 as a constant value of θ. It was also possible to measure the straightness of the workpiece 52 based on the obtained measured values over a certain distance.

Note that here, 55 is a stylus holder 55 that holds the stylus 50, and the holder 55 is held by a holder 56 so as to be movable in the direction of the arrow. and,
The holder 56 is movable in the direction of arrow C while holding the stylus holder 55 and is held by a column 57. The column 57 can be raised and lowered by manual or automatic means C arrow d)
Can be placed freely. Further, 58 is a leveling table placed on the base 59, which holds the workpiece 52 and adjusts the leveling (tilting) so that the workpiece 52 is horizontal.
It has a function to adjust.

[Problem to be solved by the invention]

However, in the above-mentioned method using such a configuration and measuring by moving the stylus in the longitudinal direction of the workpiece, the accuracy of the stylus movement straightness is maintained at a high level (0 per 100 mm movement).
．． 2 μm), there was a limit to the measurement distance. Specifically, in the conventional method, when starting measurement of the workpiece 52, the stylus holder 55 is moved to the holder 56.
The measurement position of the workpiece 52 is set by moving the workpiece 52 in the horizontal direction (arrow b). Thereafter, the holder 56 was moved in the horizontal direction (arrow C) relative to the column 57, and the tip 51 of the stylus 50 was moved in contact with the surface of the workpiece 52 to measure the surface. . In such a mechanism,
There are two moving parts (squillous holder 55 and holder 56).
(relative movement between the holder 56 and the column 57)
Therefore, it is difficult to maintain the straightness of motion at a high level.

In addition, as a device for measuring the straightness of the surface of a workpiece 52 of 300 mm or more, there is a measurement method using an electric micro, but this method has the disadvantage that it cannot pick up surface roughness components because the tip diameter is large. there were.

[Purpose] Therefore, the present invention solves the drawbacks and inconveniences mentioned above, and can measure the surface roughness at the same time as the straightness of a long workpiece of 150 mm or more, and can be set in advance. The object of the present invention is to provide a straightness and surface roughness measuring device that can automatically measure according to the specified measurement conditions (teaching file).

[Means for Solving the Problems] The present invention provides a measuring device that measures the roughness of a workpiece surface by touching and sliding the workpiece surface and converting the displacement caused by the downward movement of a stylus into an electrical signal. , is characterized by the following configuration.

,]) a column that holds the squill and is set to be freely ascendable; b) a leveling table that holds the workpiece and adjusts the leveling (inclination); and C) the leveling table is arranged in one part. It consists of a slider that can be moved horizontally.

Furthermore, each component is controlled by a micro combinator and automatically measured according to preset measurement conditions, and is characterized by the following configuration.

a) a column that holds the stylus and is set to be movable up and down; b) a leveling table that holds the workpiece and adjusts the leveling (inclination); and C) the leveling table is arranged in the L section and can be moved horizontally. d) column position control means for controlling the vertical movement of the column; e) leveling control means for adjusting the leveling of the leveling table; and f) slider control means for controlling horizontal movement of the slider. and g) Processing the measurement conditions set by the key input means or the measurement conditions set and stored in advance in the external storage means, and controlling the column position control means, the leveling control means, and the slider control means. measurement processing control means; h) converting data (measured values) from the analog electrical signal output from the stylus into digital signals and processing them according to the measurement conditions;
and data processing means for outputting data to a cathode ray tube (RT) display.

〔Example〕

Next, one example of a specific embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is an overall configuration diagram for clearly showing the configuration of the present invention. Fig. 2 is a diagram showing the mechanism of the measuring instrument excluding the control section, Fig. 2 (A) shows its front view, and Fig. 2 (B)
shows a right side view.

1 is a column in which a drive motor 2 is disposed. The column 1 is held by an elevating guide 4 vertically arranged and fixed on a base 3 so as to be movable up and down. Column 1
As the elevating means, various mechanisms using conventional technology can be considered, but in this embodiment, a shaft is disposed perpendicularly to the base 3 in the elevating guide 4 and has a spiral groove on its surface. 5 and a gear (not shown) attached to the drive motor 2.

Further, a stylus holder 7 for keeping the stylus 6 horizontally is arranged and fixed at the bottom of the column 1. The stylus holder 7 has built-in means for converting minute vertical movements of the stylus 6 into analog electrical signals. Conventionally, the means to convert this mechanical vibration into an electrical signal is
Since there are various methods, details will be omitted.

Next, below the column 1, an air slider 8 is arranged on the base 3'' so that its level can be adjusted. The air slider 8 consists of a horizontal guide 9 arranged horizontally and a slide table 10 that moves on the guide 9.

A pulse motor 11 is attached to the end of the air slider 8, and the pulse motor 11 is used as the power to drive the timing heald 1, which is mounted on the slide table 10.
2, the air slider 8 is operated. The air slider 8 may have a conventionally known structure, but in this embodiment, it is made of ceramic in order to maintain a high level of motion straightness accuracy.

13 is a leveling table placed on the slide table 10 to hold the work 14. The leveling table 13 is used when necessary, but when adjusting the levels of various works 14 individually, and
It is used when performing automatic leveling control, which will be described later.

With the above configuration, this mechanism operates as follows.

First, hold and place the column 1 above the lifting guide 4,
Leherifugu table 1 placed on slider table 10
A workpiece 14, which is an object to be measured, is fixed on top of the workpiece 3. Next, the stylus 6 moves the slide table 10 of the air slider 8 to the measurement starting point of the workpiece 14. The column 1 is then lowered manually or by automatic means, and stopped at the location where the stylus 6 contacts the surface of the workpiece 14.

After setting in this way, when the slide table 10 is moved, the stylus 6 slides while contacting the surface of the workpiece 14, and the surface roughness and straightness can be measured.

Note that the level ring (adjustment around 1) of the workpiece 14 is several millimeters from the measurement starting point (in this example, approximately 5 mm).
0mm) Judging by moving and sampling tops,
This is done by operating the leveling table 13 based on this.

From the data obtained by this method, straightness and surface roughness are determined by the following method.

This will be explained with reference to FIG.

A and B are measurement starting points set at both ends of the workpiece 14,
This is the measurement end point. When the stylus 6 is moved from point A to point B, data I5 is obtained from the minute vertical movement. 16 is a level line. Point A and 8 for tangent level line 16
The line connecting the measured values with the points is defined as the reference line 17, and this reference line 1
7 and the level line 16 to determine the straightness. The surface roughness is determined by the difference between the reference line 17 and the data 15.Next, although the leek configuration is manually measured, by controlling each component with a microcomputer, it is possible to Automatic measurement can be performed according to programmed measurement conditions (teaching file). This will be explained below.

A microcomputer consists of a CPU (Central Processing Unit) and a device consisting of a RAM (Random Access Memory) and a ROM (Read Only Memory).

In FIG. 1, measurement condition control means, column position control means, slider position control means, leveling control means, and data processing means are each set within a microcomputer.

The measurement condition control means is means for controlling each component according to the teaching guide. This teaching tool is a file of measurement conditions set in advance by a key input means such as a keyboard, and is stored in an external storage means such as a hard disk or a floppy desk.

The column position control means is connected to the drive motor 2 in the column 1 by the CPU and controls the raising and lowering of the column I, and mainly constitutes an interface.

The slider position control means is connected to the pulse motor 11 that drives the air slider 8, is for controlling the position of the slider table 1o by the cPU, and mainly constitutes an interface.

The leveling control means is connected to the leveling table 13, and sets the level (1ψ) of the workpiece 14 based on sampling data from a certain distance (approximately 50 mm in this example) before starting the measurement. This is for adjusting the level of the workpiece 14, and mainly constitutes an interface.

The data processing means is a means for processing measurement data obtained by converting an analog electrical signal from the stylus 6 into a digital electrical signal using an A/D converter (analog-to-digital converter). Such processing includes displaying a graph of straightness on a CRT, enlarging any part of the display, printing out an inspection report with a ronoto name when measurement data is collected, or These are stored in an external storage device.

Next, a flowchart for executing the control mentioned above is shown in FIG. 4, and its procedure will be explained. In addition, ■～[phase] in the figure is
Each steno knob of Flowchart-1- is shown.

Start up the system and start automatic measurement. Air slider c and below will be abbreviated as r A S-+.

) 8 and move the slider table 10 to the setting position of the workpiece 14 (stenop ■). In step (2), it is determined whether there is an error in the device, and if the condition is YES, an error is displayed and the system is terminated (step (2)). NO
In the case of the condition, the measurement conditions are read and input from the key input means, external memory, etc. (step ■). To input this condition, select a pre-registered teaching file, input the Rondo name, input the number of workpieces to be measured per 1 to 10,
It is possible to appropriately set the specification of whether or not tolerance judgment is to be performed, the specification of graph output, the specification of auto-tracking, and the like.

In step ■, determine whether to terminate the system. If the condition is YES, the process ends, and if the condition is NO, the work 14 is set (step ■). Next, a decision is made to cancel, and if YES, proceed to step C; if NO, it is determined whether auto-training is specified (steps ■, ■).

If auto-leveling is specified, move the workpiece to the center of the AS and start auto-leveling (step ■, [phase]). As described above, this method samples a certain distance of the workpiece to determine its straightness and determines its inclination with respect to the level line. After the determination, the column 1 is raised -1 and the level of the workpiece 14 is corrected by operating the leveling table 13 (steps 1 and 2).

After level correction is completed, or if automatic tracking is not specified, operate AS to move the slide table 10 so that the stylus 6 is at the measurement start point of the workpiece 14 (step ■). Lower 1,
The stylus 6 is brought into contact with the measurement start point of the workpiece 14 to start interrupt processing (Step 2). moreover,
The movement of the workpiece 14 is started by moving the slide table 10 at an appropriate speed (step (2)), and the stylus 6 comes into contact with the surface of the workpiece. Wait for the measurement to finish (step @), and then move to column 1.
(step ■), and workpiece 1 is raised by operating the AS.
Move 4 to the workpiece set position (step [phase])
.

Next, the measured data is processed according to the conditions, a graph of straightness and surface roughness is created, and a graph is printed on the printer and CRT.
Output is displayed on (step [phase], ■, @).

When you finish measuring one workpiece, it is the mouth.

Check whether step 1 is finished or not. If not, return to B, insert a new work, and repeat steps 2 and 3 until the end of step 1.

If the error determination after the loft end check (step 0) is YES, the error will be displayed after the teaching file is saved (step @).

Also, between step ■ and step [phase], and step @
An error check 18 is provided between each step between and A, and an error display 19 is provided in case of an error, so that the error occurring at each step can be checked.

〔Effect of the invention〕

Since the present invention is configured as described above, it produces the effects described below.

(1) During measurement, the stylus is fixed and the workpiece is moved, so the measurement distance can be set longer than before, and the accuracy of motion straightness can be set to the same level or higher. be able to. The motion straightness of the conventional stylus had an accuracy of 0.2 μm per 100 mm travel distance, but in the present invention, it is limited only by the motion straightness of the air slider, and the air slider is made of ceramic. Therefore, 0.05μm/1
A highly accurate motion straightness of 0.00 mm can be obtained.

(2) Since the timing heald is used as the means for moving the air slider, vibration of the slide table and vibration of the workpiece due to warping can be prevented, and measurement accuracy can be improved.

(3) Since the stylus is fixed and the slide table is moved during measurement, the measurement speed can be improved.

(4) By controlling each component with a microcomputer, automatic measurement using a teaching file is now possible.

(5) Furthermore, it can function as a straightness meter and a surface roughness meter at the same time, and can also be used as a straightness meter and a surface roughness meter if necessary.

[Brief explanation of the drawing]

FIG. 1 is an overall configuration diagram for clearly showing the configuration of the present invention;
Figure 2 is a diagram showing the mechanism of the measuring instrument excluding the control section;
Figure 3 is a diagram showing the measurement start and end points of the workpiece and the obtained measurement output; Figure 4 is a flowchart diagram showing automatic measurement control; Figure 5 is a schematic diagram showing the conventional method. be. 1... Column 4... Lifting guide 6...
・Stylus 8...Air slider 10・
...Slider table 12... Timing held 13... Leveling table 14. ... Work patent applicant: Asaka Riken Kogyo Co., Ltd. Agent
Person: Patent attorney Hiroshi Mizuno Kaihei Bunfu

Claims (2)

[Claims] (1) In a measuring device that measures the roughness of a workpiece surface by contacting and sliding the surface of the workpiece and converting the displacement caused by the vertical movement of the stylus into an electrical signal, including: a) holding the stylus and being able to move up and down freely; b) a leveling table that holds the workpiece and adjusts the leveling (inclination); and c) a slider that is provided with the leveling table on the top and is capable of horizontal movement. Characteristic straightness and surface roughness measuring device. (2) In a measuring device that measures the roughness of the workpiece surface by contacting and sliding the workpiece surface and converting the displacement caused by the vertical movement of the stylus into an electrical signal, including: a) holding the stylus and moving it up and down; b) a leveling table that holds the workpiece and adjusts the leveling (inclination); c) a slider that is provided with the leveling table on the top and is capable of horizontal movement; and d) of the column. Column position control means for controlling elevation; e) Leveling control means for adjusting leveling of the leveling table; f) Slider control means for controlling horizontal movement of the slider; g) Measurement set by key input means. measurement condition control means for processing the measurement conditions or measurement conditions preset and stored in an external storage means and controlling the column position control means, the leveling control means, and the slider control means; h) an analog signal from the stylus; After converting the data (measured value) from the electrical signal output into a digital signal, it is processed according to the measurement conditions and stored in an external storage means, a printer, and a C.
A straightness and surface roughness measuring device comprising: a data processing means for outputting to an RT (cathode ray tube) display.