JPH0429575A - Rod-shaped ultrasonic motor - Google Patents

Rod-shaped ultrasonic motor

Info

Publication number
JPH0429575A
JPH0429575A JP2134317A JP13431790A JPH0429575A JP H0429575 A JPH0429575 A JP H0429575A JP 2134317 A JP2134317 A JP 2134317A JP 13431790 A JP13431790 A JP 13431790A JP H0429575 A JPH0429575 A JP H0429575A
Authority
JP
Japan
Prior art keywords
vibrating body
rod
ultrasonic motor
presser
shaped ultrasonic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2134317A
Other languages
Japanese (ja)
Other versions
JP3137194B2 (en
Inventor
Takashi Maeno
隆司 前野
Takayuki Tsukimoto
貴之 月本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP02134317A priority Critical patent/JP3137194B2/en
Priority to DE69125525T priority patent/DE69125525T2/en
Priority to EP91304684A priority patent/EP0458638B1/en
Publication of JPH0429575A publication Critical patent/JPH0429575A/en
Priority to US08/296,976 priority patent/US5508580A/en
Application granted granted Critical
Publication of JP3137194B2 publication Critical patent/JP3137194B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、棒状弾性体に設けられた電気−機械エネルギ
ー変換素子に電気エネルギーを供給することにより、棒
状振動子を振動させ、振動子の質点に円又は楕円運動さ
せることで、振動子に押圧した移動体を摩擦駆動させる
超音波モータに関するものである。
Detailed Description of the Invention [Field of Industrial Application] The present invention vibrates a rod-shaped vibrator by supplying electrical energy to an electro-mechanical energy conversion element provided in a rod-shaped elastic body. This invention relates to an ultrasonic motor that frictionally drives a moving body pressed against a vibrator by causing a mass point to move in a circular or elliptical manner.

〔従来の技術〕[Conventional technology]

従来、超音波モータとしては、円環に曲げ振動を起こし
、摩擦力により移動体を駆動させる型式のものが、カメ
ラ用AF機構などで、実用化されている。しかし、リン
グ形状であるため、加圧機構を含めたユニットとしては
、意外とコスト高であり、中空を要求されぬモータ用途
としてはコスト上不利である。そこで、中実型で、加圧
系などの構成が容易なタイプのモータとして、第8図及
び第9図に示す棒状超音波モータが提案されている。
BACKGROUND ART Conventionally, as an ultrasonic motor, a type that generates bending vibration in a ring and drives a moving body by frictional force has been put into practical use in AF mechanisms for cameras and the like. However, since it is ring-shaped, it is surprisingly expensive as a unit including a pressurizing mechanism, and is disadvantageous in terms of cost for motor applications that do not require a hollow space. Therefore, a rod-shaped ultrasonic motor shown in FIGS. 8 and 9 has been proposed as a solid type motor with an easy configuration such as a pressurizing system.

第8図及び第9図において、1は先端部の小径軸部1a
と後端部の大径軸部1bとの間にホーン形状のホーン部
ICを形成した金属丸棒からなる中空の振動体で、軸孔
にねし部1dが形成されている。2は振動体1の大径軸
部1bと同径の外径に形成された金属丸棒からなる押え
体で、軸心にボルト通し孔2aが形成されている。3.
4は大径軸部1bと同径の外径に形成された円環形状の
圧電素子板で、不図示の電極板を介装して振動体1と押
え体2との間に配置される。6は固定ボルトで、押え体
2のボルト通し孔2aを通して振動体1のねじ部1dに
螺着し、圧電素子板3.4を押え体2と振動体1との間
に挟持固定する。圧電素子板3.4は、例えば−面が共
通電極、他面が直径方向の中心軸線に対して対称の極性
の異なる電極に形成され、一方の圧電素子板3と他方の
圧電素子板4とを90”の角度ずらすようにして同じ向
きに配置されている。
In FIGS. 8 and 9, 1 is a small diameter shaft portion 1a at the tip.
It is a hollow vibrating body made of a metal round rod with a horn-shaped horn part IC formed between the large-diameter shaft part 1b at the rear end, and a threaded part 1d formed in the shaft hole. Reference numeral 2 denotes a presser body made of a metal round bar formed to have the same outer diameter as the large-diameter shaft portion 1b of the vibrating body 1, and a bolt through hole 2a is formed in the shaft center. 3.
Reference numeral 4 denotes a ring-shaped piezoelectric element plate formed to have the same outer diameter as the large-diameter shaft portion 1b, and is arranged between the vibrating body 1 and the presser body 2 with an electrode plate (not shown) interposed therebetween. . Reference numeral 6 denotes a fixing bolt, which is screwed into the threaded portion 1d of the vibrating body 1 through the bolt through hole 2a of the presser body 2, so that the piezoelectric element plate 3.4 is clamped and fixed between the presser body 2 and the vibrating body 1. The piezoelectric element plates 3.4 have, for example, a common electrode on the negative side and electrodes of different polarities symmetrical with respect to the central axis in the diametrical direction on the other side, so that one piezoelectric element plate 3 and the other piezoelectric element plate 4 are arranged in the same direction, shifted by an angle of 90''.

一方の圧電素子板3の2分割電極面を例えば振動体1の
後端面に接触させ、不図示の電極板を介して他方の圧電
素子板4が接し、該他方の圧電素子板4の共通電極を押
え体2の前端面に接触させている。前記電極板と振動体
1との間に交流電圧V1を、該電極板と押え体2との間
に交流電圧■2を印加することにより、圧電素子板3の
厚み方向における伸縮変位による振動と、圧電素子板4
の厚み方向における伸縮変位による振動との合成により
、振動体1と押え体2からなる棒状の振動子Aを振動さ
せる。
The two-part electrode surface of one piezoelectric element plate 3 is brought into contact with, for example, the rear end surface of the vibrating body 1, and the other piezoelectric element plate 4 is brought into contact with the other piezoelectric element plate 4 through an electrode plate (not shown), and the common electrode of the other piezoelectric element plate 4 is brought into contact with the front end surface of the presser foot 2. By applying an AC voltage V1 between the electrode plate and the vibrating body 1 and an AC voltage 2 between the electrode plate and the presser body 2, vibrations due to expansion and contraction displacement in the thickness direction of the piezoelectric element plate 3 can be suppressed. , piezoelectric element plate 4
The rod-shaped vibrator A consisting of the vibrating body 1 and the presser body 2 is vibrated by combining with the vibration caused by the expansion/contraction displacement in the thickness direction.

交流電圧V1と■2は、振幅及び周波数が共に同して、
時間的に位相が90°のずれを有している。
AC voltages V1 and ■2 have the same amplitude and frequency,
The phase has a temporal shift of 90°.

したがって、振動子Aは軸心を中心として縄飛びの縄の
ような円運動を行うことになる。また、電圧V1とV2
どの位相を逆転すると、円運動の正逆回転が逆となる。
Therefore, the vibrator A performs a circular motion like a skipping rope around the axis. Also, the voltages V1 and V2
If any phase is reversed, the forward and backward rotation of the circular motion will be reversed.

なお、この円運動が生じる原理については特開昭62−
141980号等により公知であるので、説明は省略す
る。
The principle behind this circular motion is described in Japanese Patent Application Laid-open No. 1986-
141980, etc., so the explanation will be omitted.

振動子Aに励起する振動は、ホーン部ICに振動の山が
位置するように振動モードが設定されていて、振動体1
の先端部に嵌合するロータRの嵌合先端部と、ホーン部
1cに形成される振動の腹の部分との摩擦接触により、
ロータRを回転駆動する。5はロータRを振動体1に加
圧接触させるためのスプリングで、固定ボルト6の先端
部と掛止めどン7の先端部との間に掛止められている。
The vibration mode of the vibration excited in the vibrator A is set so that the peak of vibration is located at the horn IC, and the vibrator 1
Due to the frictional contact between the fitting tip of the rotor R that fits into the tip of the horn section 1c and the antinode of vibration formed in the horn section 1c,
The rotor R is driven to rotate. Reference numeral 5 denotes a spring for bringing the rotor R into pressure contact with the vibrating body 1, and is latched between the tip of the fixing bolt 6 and the tip of the latching dowel 7.

掛止めどン7は、ロータRの一端部に取り付けられたス
ラストベアリング8のインナーレース部に装着され、ロ
ータRに対してスプリング5のバネ力を付与する。
The latch dowel 7 is attached to an inner race portion of a thrust bearing 8 attached to one end of the rotor R, and applies the spring force of the spring 5 to the rotor R.

(発明が解決しようとする課題) しかし、従来の棒状超音波モータは、圧電素子板3.4
をボルト6により振動体1と押え体2との間に挟持固定
した状態において、第10図に示すように、圧電素子の
軸方向歪み量に差が生じた。
(Problem to be Solved by the Invention) However, the conventional rod-shaped ultrasonic motor has a piezoelectric element plate of 3.4
When the piezoelectric element was clamped and fixed between the vibrating body 1 and the presser body 2 by bolts 6, as shown in FIG. 10, a difference occurred in the amount of strain in the axial direction of the piezoelectric element.

これは、圧電素子板を挟持する際、振動体1と押え体1
とが弾性変形し、ボルト6のネジ部に近い内周側、特に
振動体1の内周側に応力が集中することに起因する。
When holding the piezoelectric element plate, the vibrating body 1 and the presser body 1
This is caused by elastic deformation of the bolt 6 and stress concentration on the inner circumferential side of the bolt 6 near the threaded portion, particularly on the inner circumferential side of the vibrating body 1.

このため、ボルト6を締め付けて圧電素子板3.4を挟
持する際、圧電セラミックスからなる圧電素子板3.4
が割れ易く、また圧電素子板3.4と振動体1、押え体
2とが均一に接触しないことから振動特性にバラツキが
生じ易く、モータの効率低下を招くという問題があった
Therefore, when tightening the bolts 6 to clamp the piezoelectric element plate 3.4, the piezoelectric element plate 3.4 made of piezoelectric ceramics
Moreover, since the piezoelectric element plate 3.4 does not come into uniform contact with the vibrating body 1 and the presser body 2, variations in vibration characteristics tend to occur, resulting in a decrease in motor efficiency.

本発明の目的は、このような従来の問題を解決し、圧電
素子板を歪量に差を生じさせることなく挟持することか
できて、圧電素子板に割れを発生させず、しかも振動特
性を低下させることのない棒状超音波モータを提供する
ことにある。
The purpose of the present invention is to solve such conventional problems, to be able to clamp a piezoelectric element plate without causing a difference in the amount of strain, to prevent cracking of the piezoelectric element plate, and to improve vibration characteristics. The object of the present invention is to provide a rod-shaped ultrasonic motor that does not deteriorate.

〔課題を解決すやための手段〕[Means for resolving issues]

本発明の目的を実現する棒状超音波モータは、棒状の振
動体と押え体との間に電気−機械工ネルギ変換素子を配
置し、該振動体と押え体とを軸方向に延びる結合手段に
より結合固定して該電気−機械エネルギ変換素子を挟持
固定する振動子と、該振動体に押圧される移動部材とを
有し、該電気−機械エネルギー変換素子への交流電圧の
印加により、該振動子に同形の屈曲モードの振動を異な
る複数の平面内に時間的位相差を有して励起させ、以っ
て振動体の表面粒子に円又は楕円運動を行なわしめ、該
移動部材を摩擦駆動する棒状超音波モータにおいて、該
電気−機械エネルギ変換素子と当接する該弾性体及び該
押え体の当接面と、該結合手段によりこれら振動体と押
え体とに作用する結合力の作用位置とを離間させたこと
を特徴とするものである。
A rod-shaped ultrasonic motor that achieves the object of the present invention includes an electric-mechanical energy conversion element disposed between a rod-shaped vibrating body and a presser body, and a coupling means extending in the axial direction that connects the vibrating body and the presser body. It has a vibrator that clamps and fixes the electro-mechanical energy converting element by coupling and fixing it, and a moving member that is pressed by the vibrating body, and when an AC voltage is applied to the electro-mechanical energy converting element, the vibration is The vibration of the same bending mode is excited in a plurality of different planes with a temporal phase difference, thereby causing the surface particles of the vibrating body to perform circular or elliptical motion, thereby frictionally driving the moving member. In the rod-shaped ultrasonic motor, contact surfaces of the elastic body and the presser body that come into contact with the electro-mechanical energy conversion element, and a position where the coupling force acts on the vibrating body and the presser body by the coupling means are defined. It is characterized by being spaced apart.

(作   用) 上記した構成の棒状超音波モータは、圧電素子板等の電
気−機械工ネルギ変換素子に対し、圧電素子板を挟持固
定するための結合力作用位置、例えば押え体を振動体に
固定するボルトの該振動体における螺合位置を軸方向に
おいて離間させると共に、径方向においても隙間を設け
ることにより、圧電素子板に加わる挟持圧力を均一に近
づけることが可能となる。
(Function) The rod-shaped ultrasonic motor having the above-mentioned configuration is applied to an electric-mechanical energy converting element such as a piezoelectric element plate at a position where a bonding force is applied to clamp and fix the piezoelectric element plate, for example, between the presser body and the vibrating body. By separating the screwing positions of the bolts to be fixed on the vibrating body in the axial direction and also providing a gap in the radial direction, it is possible to make the clamping pressure applied to the piezoelectric element plate uniform.

〔実 施 例〕〔Example〕

実施例1 第1図は本発明による棒状超音波モータの実施例1を示
す振動子の縦断面図である。
Embodiment 1 FIG. 1 is a longitudinal sectional view of a vibrator showing Embodiment 1 of a rod-shaped ultrasonic motor according to the present invention.

10は振動体で、圧電素子板3と接する端面10aの内
側に凹部10bを形成し、この凹部10bよりも振動体
10の先端側にボルト6のねじ部が螺合する内ねじ部1
0cが形成されている。第8図及び第9図に示す従来例
では、圧電素子板3が接する振動体1の端面と、ねじ6
の螺合する振動体1の内ねじ部のねじ端面とが同一平面
上で一致するのに対し、本実施例では、内ねじ部10c
の端面を凹部10bの深さ分の距離だけ圧電素子板3と
当接する端面から隔離させ、該凹部10bの内壁面とね
じ6の外周面との間に、ねじ6と非螺合の隙間10eを
形成している。
Reference numeral 10 denotes a vibrating body, which has a recess 10b formed inside the end surface 10a in contact with the piezoelectric element plate 3, and an inner threaded portion 1 into which the threaded portion of the bolt 6 is screwed on the tip side of the vibrating body 10 from the recess 10b.
0c is formed. In the conventional example shown in FIGS. 8 and 9, the end face of the vibrating body 1 in contact with the piezoelectric element plate 3 and the screw 6
The screw end surfaces of the internal threaded portion of the vibrating body 1 that are screwed together coincide on the same plane, whereas in this embodiment, the internal threaded portion 10c
is separated from the end surface contacting the piezoelectric element plate 3 by a distance equivalent to the depth of the recess 10b, and a gap 10e is created between the inner wall surface of the recess 10b and the outer peripheral surface of the screw 6, which is not engaged with the screw 6. is formed.

圧電素子板3.4は従来例と同様に、押え体2との端面
と振動体10の端面との間に配設され、ボルト6により
挟持固定される。
The piezoelectric element plate 3.4 is disposed between the end face of the presser body 2 and the end face of the vibrating body 10, and is clamped and fixed by bolts 6, as in the conventional example.

すなわち、ボルト6の締付けによって生じる振動体10
の最も応力集中の起りゃすい箇所は、凹部10bの底部
における角部10fであるが、この角部10fは圧電素
子板3と当接する振動体1の端面1aと離れているため
、圧電素子板3.4に加わる挟持圧力を均一に近づける
ことができる。
That is, the vibrating body 10 generated by tightening the bolt 6
The corner 10f at the bottom of the recess 10b is where stress concentration is most likely to occur; 3.4 The clamping pressure applied can be made nearly uniform.

これにより、第2図に示すように、圧電素子板3.4の
内外周圧縮変形量は均一化され、また接触圧力も均一化
されるため、圧電素子板3.4の割れは減少し、振動特
性のよい振動子が得られる。
As a result, as shown in FIG. 2, the amount of compressive deformation on the inner and outer circumferences of the piezoelectric element plate 3.4 is made uniform, and the contact pressure is also made uniform, so that cracks in the piezoelectric element plate 3.4 are reduced. A vibrator with good vibration characteristics can be obtained.

以上述べた如く本実施例は、圧電素子板の接合端面と、
ボルト6に対する振動体1の内ねじ端とを隙間10eに
より軸方向において離隔させ、ねじ6による最も応力集
中の生じ易い個所と圧電素子板とを離すことで圧電素子
板3,4の加わる挟持圧力を均一化するようにしている
As described above, in this embodiment, the bonding end surface of the piezoelectric element plate,
By separating the internal threaded end of the vibrating body 1 from the bolt 6 in the axial direction by a gap 10e, and separating the piezoelectric element plate from the part where stress concentration is most likely to occur due to the screw 6, the clamping pressure applied by the piezoelectric element plates 3 and 4 is reduced. We are trying to equalize the

締付けるねしによって生じる最も応力集中の生じ易い個
所と、圧電素子板とを軸方向において離す構造としては
、第1図に示す実施例以外に、第3図、第4図、第5図
、第6図、第7図に示すものがある。
In addition to the embodiment shown in Fig. 1, the structure shown in Figs. There are those shown in Figures 6 and 7.

第3図に示す実施例は、第9図に示す従来例におけるボ
ルト6に代え、ボルト6゛を用し)て振動体1と押え体
2との間に圧電素子板3.4を挟持固定している。
In the embodiment shown in FIG. 3, a piezoelectric element plate 3.4 is clamped and fixed between the vibrating body 1 and the presser body 2 by using bolts 6' instead of the bolts 6 in the conventional example shown in FIG. are doing.

ボルト6゛は先端部のみにねじ部6’aを設け、ねじ部
6’aと頭部6°bとの間における軸部6’cの周囲に
隙間を形成している。
The bolt 6' is provided with a threaded part 6'a only at the tip, and a gap is formed around the shaft part 6'c between the threaded part 6'a and the head 6'b.

ねし部6’aは、締付位置において振動体1の端面より
も内側となるように設定し、ねじの螺合端と振動体1の
端面との間を軸方向にお))て離すようにしている。
The threaded portion 6'a is set to be inside the end surface of the vibrating body 1 in the tightening position, and the threaded end of the screw and the end surface of the vibrating body 1 are separated by)) in the axial direction. That's what I do.

第4図に示す実施例は、第9図に示す従来例において、
振動体1と圧電素子板3との間にリング状のデイスタン
スプレート40を介装し、振動体1の端面と圧電素子板
3との間を軸方向において離すようにしている。
The embodiment shown in FIG. 4 differs from the conventional example shown in FIG.
A ring-shaped distance plate 40 is interposed between the vibrating body 1 and the piezoelectric element plate 3, so that the end face of the vibrating body 1 and the piezoelectric element plate 3 are spaced apart in the axial direction.

第5図に示す実施例は、振動体51に押え体52に螺合
するねじ部53を一体に設けると共に、ねじ部53の付
根部の周囲に周溝54を形成して振動体51の端面とね
じ部53の基端との間を軸方向において離すようにして
し\る。また、押え体52の端面と、ねじ部53が螺合
するねし孔55の端面とを離すため、押え体52に凹部
56を形成している。
In the embodiment shown in FIG. 5, the vibrating body 51 is integrally provided with a threaded part 53 that is screwed into the presser body 52, and a circumferential groove 54 is formed around the base of the threaded part 53, so that the end surface of the vibrating body 51 is and the base end of the threaded portion 53 are spaced apart in the axial direction. Further, a recess 56 is formed in the presser body 52 in order to separate the end face of the presser body 52 from the end face of the threaded hole 55 into which the threaded portion 53 is screwed.

第6図に示す実施例は、第5図に示す実施例とは逆に、
押え体62に振動体61に螺合するねじ部63を一体に
設けている。
The embodiment shown in FIG. 6 is opposite to the embodiment shown in FIG.
The presser body 62 is integrally provided with a threaded portion 63 that is screwed into the vibrating body 61.

本実施例の場合も、第5図に示す実施例と同様に、ねし
部63の基端を押え体62の端面から軸方向内側へ位置
させるために周溝64を設けている。また振動体61に
凹部65を設け、振動体61の端面とねじ部63が螺合
するねし孔66のねし端との間を軸方向において離すよ
うにしている。
In the case of this embodiment as well, a circumferential groove 64 is provided in order to position the base end of the threaded portion 63 inward in the axial direction from the end surface of the presser body 62, as in the embodiment shown in FIG. Further, a recess 65 is provided in the vibrating body 61 so that the end face of the vibrating body 61 and the screw end of the screw hole 66 into which the threaded portion 63 is screwed are separated in the axial direction.

第7図に示す実施例は、第1図に示す実施例における隙
間10eに剛性の低い部材70、例えばフェルト、ゴム
、樹脂、フレキシブル基板などを設けたもので、電気・
機械エネルギ変換素子の位置決め、フレキによる配線、
などを行う。
In the embodiment shown in FIG. 7, a member 70 with low rigidity, such as felt, rubber, resin, or a flexible board, is provided in the gap 10e of the embodiment shown in FIG.
Positioning of mechanical energy conversion elements, wiring using flexible cables,
etc.

部材70は剛性が低いため、ボルト6を締付けた際に歪
が生じても応力はあまり大きくならず、実施例1と同様
な効果が得られる。
Since the member 70 has low rigidity, even if distortion occurs when the bolt 6 is tightened, the stress does not increase so much, and the same effect as in the first embodiment can be obtained.

第11図は、本発明によるモータを使用して、光学レン
ズの鏡筒を駆動する場合の構成例である。
FIG. 11 shows a configuration example in which a motor according to the present invention is used to drive a lens barrel of an optical lens.

12は移動体8と同軸的に接合された歯車で、回転出力
を歯車13に伝達し、歯車13と噛み合う歯車をもった
鏡筒14を回転させる。
A gear 12 is coaxially connected to the moving body 8 and transmits rotational output to the gear 13 to rotate a lens barrel 14 having a gear that meshes with the gear 13.

移動体8および鏡筒14の回転位置、回転速度を検出す
るために、光学式エンコーダスリット板15が歯車13
と同軸に配置され、フォトカプラ16で位置速度を検出
する。
In order to detect the rotational position and rotational speed of the moving body 8 and the lens barrel 14, an optical encoder slit plate 15 is connected to the gear 13.
The photocoupler 16 detects the position speed.

なお、9はバネポスト、10はベアリング、11ははね
である。
Note that 9 is a spring post, 10 is a bearing, and 11 is a spring.

(発明の効果) 以上説明してきたように、本発明によれば、押え体と振
動体との間に挟持する圧電素子板等の電気−機械工ネル
ギ変換素子は、略−様な挟持圧力を受けるため、振動子
を良好に振動させることかてきてモータ効率の低下を防
ぐことかでき、また圧電素子板の割れを防止することが
できる。
(Effects of the Invention) As explained above, according to the present invention, the electric-mechanical energy conversion element such as a piezoelectric element plate held between the presser body and the vibrating body can apply a clamping pressure of approximately -. Therefore, it is possible to properly vibrate the vibrator, thereby preventing a decrease in motor efficiency, and also preventing cracking of the piezoelectric element plate.

また、このようなモータを駆動源とすることにより、コ
ンパクトで高精度な駆動が可能となる。
Further, by using such a motor as a drive source, compact and highly accurate drive becomes possible.

【図面の簡単な説明】[Brief explanation of drawings]

第1図、第3図、第4図、第5図、第6図、第7図は、
本発明による棒状超音波モータの実施例を夫々示す振動
子の断面図、第2図は第1図に示す実施例における圧電
素子板の軸方向の歪量を示す図である。第8図は従来の
棒状超音波モータの斜視図、第9図はその断面図、第1
0図はその圧電素子板の軸方向歪量を示す図、第11図
は光学レンズの鏡筒駆動機構を示す断面図である。 1.10,51.61・・・振動体 2.5.2.62・・・押え体 3.4・・・圧電素子板  6.6°・・・ボルト70
・・・剛性の低い部材 第1図 第2図 第3図 第4図 第5図 第6図 第7図
Figures 1, 3, 4, 5, 6, and 7 are
FIG. 2 is a sectional view of a vibrator showing each embodiment of the rod-shaped ultrasonic motor according to the present invention, and FIG. 2 is a diagram showing the amount of strain in the axial direction of the piezoelectric element plate in the embodiment shown in FIG. Fig. 8 is a perspective view of a conventional rod-shaped ultrasonic motor, Fig. 9 is a sectional view thereof, and Fig. 1
FIG. 0 is a diagram showing the amount of axial strain of the piezoelectric element plate, and FIG. 11 is a sectional view showing the barrel drive mechanism of the optical lens. 1.10, 51.61... Vibrating body 2.5.2.62... Presser body 3.4... Piezoelectric element plate 6.6°... Bolt 70
...low rigidity members Fig. 1 Fig. 2 Fig. 3 Fig. 4 Fig. 5 Fig. 6 Fig. 7

Claims (1)

【特許請求の範囲】 1 棒状の振動体と押え体との間に電気−機械エネルギ
変換素子を配置し、該振動体と押え体とを軸方向に延び
る結合手段により結合固定して該電気−機械エネルギ変
換素子を挟持固定する振動子と、該振動体に押圧される
移動部材とを有し、該電気−機械エネルギー変換素子へ
の交流電圧の印加により、該振動子に同形の屈曲モード
の振動を異なる複数の平面内に時間的位相差を有して励
起させ、以って振動体の表面粒子に円又は楕円運動を行
なわしめ、該移動部材を摩擦駆動する棒状超音波モータ
において、 該電気−機械エネルギ変換素子と当接する該弾性体及び
該押え体の当接面と、該結合手段によりこれら振動体と
押え体とに作用する結合力の作用位置とを離間させたこ
とを特徴とする棒状超音波モータ。 2 結合手段は振動体と押え体の軸心部に設けているこ
とを特徴とする棒状超音波モータ。 3 結合手段の振動体と押え体における結合力作用位置
間に、該結合手段を取り囲む隙間を形成したことを特徴
とする請求項2に記載の棒状超音波モータ。 4 結合手段の振動体と押え体における結合力作用位置
間に、該振動体及び押え体よりも剛性の十分小さい部材
を設けたことを特徴とする棒状超音波モータ。 5 請求項1ないし4のいずれかに記載の棒状超音波モ
ータを含む装置であって、棒状超音波モータの摩擦駆動
される移動部材により駆動される出力部材を有する装置
[Scope of Claims] 1. An electro-mechanical energy converting element is disposed between a rod-shaped vibrating body and a presser body, and the vibrating body and the presser body are coupled and fixed by a coupling means extending in the axial direction. It has a vibrator that clamps and fixes a mechanical energy converting element, and a moving member that is pressed against the vibrating body, and by applying an alternating voltage to the electro-mechanical energy converting element, a bending mode of the same shape is generated in the vibrator. A rod-shaped ultrasonic motor that excites vibrations in a plurality of different planes with a temporal phase difference, thereby causing particles on the surface of the vibrating body to perform circular or elliptical motion, and frictionally driving the moving member. The contact surfaces of the elastic body and the presser body that come into contact with the electro-mechanical energy conversion element are separated from the position where the coupling force acting on the vibrating body and the presser body is applied by the coupling means. rod-shaped ultrasonic motor. 2. A rod-shaped ultrasonic motor characterized in that the coupling means is provided at the axial center of the vibrating body and the presser body. 3. The rod-shaped ultrasonic motor according to claim 2, wherein a gap surrounding the coupling means is formed between the vibrating body of the coupling means and the position where the coupling force is applied on the presser body. 4. A rod-shaped ultrasonic motor characterized in that a member having sufficiently smaller rigidity than the vibrating body and the presser body is provided between the vibrating body of the coupling means and the position where the coupling force is applied on the presser body. 5. An apparatus comprising the rod-shaped ultrasonic motor according to any one of claims 1 to 4, the apparatus having an output member driven by a friction-driven moving member of the rod-shaped ultrasonic motor.
JP02134317A 1990-05-24 1990-05-24 Vibration wave drive Expired - Lifetime JP3137194B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP02134317A JP3137194B2 (en) 1990-05-24 1990-05-24 Vibration wave drive
DE69125525T DE69125525T2 (en) 1990-05-24 1991-05-23 Vibration wave motor
EP91304684A EP0458638B1 (en) 1990-05-24 1991-05-23 Vibration wave driven motor
US08/296,976 US5508580A (en) 1990-05-24 1994-08-26 Vibration wave driven motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP02134317A JP3137194B2 (en) 1990-05-24 1990-05-24 Vibration wave drive

Publications (2)

Publication Number Publication Date
JPH0429575A true JPH0429575A (en) 1992-01-31
JP3137194B2 JP3137194B2 (en) 2001-02-19

Family

ID=15125479

Family Applications (1)

Application Number Title Priority Date Filing Date
JP02134317A Expired - Lifetime JP3137194B2 (en) 1990-05-24 1990-05-24 Vibration wave drive

Country Status (1)

Country Link
JP (1) JP3137194B2 (en)

Also Published As

Publication number Publication date
JP3137194B2 (en) 2001-02-19

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