JPH0429808U - - Google Patents
Info
- Publication number
- JPH0429808U JPH0429808U JP7047690U JP7047690U JPH0429808U JP H0429808 U JPH0429808 U JP H0429808U JP 7047690 U JP7047690 U JP 7047690U JP 7047690 U JP7047690 U JP 7047690U JP H0429808 U JPH0429808 U JP H0429808U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- compound layer
- inspection device
- shaft
- ray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims description 9
- 150000001875 compounds Chemical class 0.000 claims description 7
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000002441 X-ray diffraction Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 1
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
Description
第１図は本考案が適用されるラインの工程図、
第２図はその制御系を示すブロツク図、第３図は
Ｘ線回折検査装置を備えた検査ステーシヨンを示
す図、第４図はＸ線回折検査装置の説明図、第５
図はＸ線回折検査装置による計測結果を示すグラ
フ、第６図は顕微鏡による膜厚の計測結果とＸ線
回折検査装置による計測結果を比較したグラフ、
第７図はＸ線回折検査のフローチヤート、第８図
はワークにおける化合物層の状態を示す模式図で
ある。
５，９……Ｘ線回折検査装置、２７……センタ
リングピン（ワーク支持手段）、３０……センタ
リングチヤツク（ワーク支持手段）、３４……パ
ルスモータ（ワーク駆動手段）、３６……Ｘ線照
射部、３７……Ｘ線受光部、Ｗ……クランクシヤ
フト（ワーク）、Ｗｂ……化合物層。
Figure 1 is a process diagram of the line to which the present invention is applied.
FIG. 2 is a block diagram showing the control system, FIG. 3 is a diagram showing an inspection station equipped with an X-ray diffraction inspection device, FIG. 4 is an explanatory diagram of the X-ray diffraction inspection device, and FIG.
The figure is a graph showing the measurement results by the X-ray diffraction inspection device, and Figure 6 is a graph comparing the measurement results of the film thickness by the microscope and the measurement results by the X-ray diffraction inspection device.
FIG. 7 is a flow chart of the X-ray diffraction test, and FIG. 8 is a schematic diagram showing the state of the compound layer in the workpiece. 5, 9...X-ray diffraction inspection device, 27...Centering pin (workpiece support means), 30...Centering chuck (workpiece support means), 34...Pulse motor (workpiece drive means), 36...X-ray Irradiation part, 37...X-ray receiving part, W...crankshaft (work), Wb...compound layer.
Claims (1)
にＸ線を照射することにより前記化合物層Ｗｂの
膜厚を計測する軸物ワークの化合物層検査装置に
おいて、 前記ワークＷをその中心軸回りに回転自在に位
置決めするワーク支持手段２７，３０と、前記ワ
ークＷを所定ピツチで回転駆動するワーク駆動手
段３４と、Ｘ線照射部３６とＸ線受光部３７とを
備え、前記位置決めされたワークＷの被計測部に
対向すべく配設されるＸ線回折検査装置５，９と
を備えて成る、軸物ワークの化合物層検査装置。[Claims for Utility Model Registration] Compound layer Wb formed on the surface of shaft workpiece W
A compound layer inspection device for a shaft workpiece that measures the film thickness of the compound layer Wb by irradiating the compound layer Wb with X-rays, comprising: workpiece support means 27, 30 for rotatably positioning the workpiece W about its central axis; It includes a workpiece driving means 34 that rotates the workpiece W at a predetermined pitch, an X-ray irradiation section 36, and an X-ray reception section 37, and is arranged to face the measured part of the positioned workpiece W. A compound layer inspection device for a shaft workpiece, comprising diffraction inspection devices 5 and 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7047690U JPH0429808U (en) | 1990-07-02 | 1990-07-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7047690U JPH0429808U (en) | 1990-07-02 | 1990-07-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0429808U true JPH0429808U (en) | 1992-03-10 |
Family
ID=31606666
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7047690U Pending JPH0429808U (en) | 1990-07-02 | 1990-07-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0429808U (en) |
-
1990
- 1990-07-02 JP JP7047690U patent/JPH0429808U/ja active Pending
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