JPH0430033U - - Google Patents
Info
- Publication number
- JPH0430033U JPH0430033U JP7155390U JP7155390U JPH0430033U JP H0430033 U JPH0430033 U JP H0430033U JP 7155390 U JP7155390 U JP 7155390U JP 7155390 U JP7155390 U JP 7155390U JP H0430033 U JPH0430033 U JP H0430033U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum container
- vacuum
- processing apparatus
- changing
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Description
第１図は、本考案の一実施例の真空処理装置の
スローリーク装置部の縦断面図である。
１……オリフイス、２……ケース、３……ベロ
ーフランジ、４……バネ、５……バルブ、６……
真空容器、７……フイルター、８……スリツト。
FIG. 1 is a longitudinal sectional view of a slow leak device section of a vacuum processing apparatus according to an embodiment of the present invention. 1... Orifice, 2... Case, 3... Bellows flange, 4... Spring, 5... Valve, 6...
Vacuum container, 7...filter, 8...slit.
Claims (1)
のリーク気体導入部の開口面積を変化させる手段
を備えた真空処理装置。 A vacuum processing apparatus comprising: means for changing an opening area of a leak gas introducing portion to the vacuum container according to a pressure difference between inside and outside the vacuum container.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7155390U JPH0430033U (en) | 1990-07-06 | 1990-07-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7155390U JPH0430033U (en) | 1990-07-06 | 1990-07-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0430033U true JPH0430033U (en) | 1992-03-11 |
Family
ID=31608690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7155390U Pending JPH0430033U (en) | 1990-07-06 | 1990-07-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0430033U (en) |
-
1990
- 1990-07-06 JP JP7155390U patent/JPH0430033U/ja active Pending