JPH04301714A - Work visual inspection device - Google Patents

Abstract

PURPOSE:To improve efficiency of the work visual inspection. CONSTITUTION:A turntable 1 provided with a workpiece holding part 2 which holds a plurality of works (A) in their plane in a removable manner around a rotary shaft is arranged in a rotatable and stop-controllable manner. There are provided around the turntable 1 at least a work receiving stage (I), a visual inspection stage (II), and a taking-out stage (V). The visual inspection is carried out on the visual inspection stage II in the process where the works (A) held by the work holding part 2 on the work receiving stage I are carried toward the work taking-out stage (V) through the respective stages by the intermittent rotation of the turntable 1.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a workpiece appearance inspection apparatus for inspecting the presence or absence of surface defects on a workpiece, such as an aluminum (including alloy thereof) magnetic disk substrate.

0002

[Prior Art] Works such as aluminum magnetic disk substrates are required to have a high level of surface precision, such as a mirror surface or a near-mirror surface, and must be free from localized surface defects such as scratches, pinholes, and bulges. required. For this reason,
In the manufacturing process of aluminum magnetic disk substrates, which are generally produced through various processes such as precision cutting, polishing, washing and drying, etc., a visual inspection is carried out to check for surface defects after a certain process or after all processes are completed. It is being done.

[0003] Conventionally, such an appearance inspection process has been carried out according to the following procedure. That is, after chucking the workpiece, which has been placed in a case and sent from the previous process, into the holder of the visual inspection machine, the workpiece is rotated to perform a visual inspection on one side, and then the workpiece is turned over and the visual inspection is performed on the other side. When the inspection is completed, the workpiece is removed and the next workpiece is mounted on the holding part and inspected, and thereafter this operation is repeated one by one.

0004

[Problems to be Solved by the Invention] However, with the above method, it takes time to attach and detach the workpiece, and the appearance inspection of the next workpiece cannot be performed until the inspection process of the first workpiece is completed. Therefore, the number of workpieces inspected per unit time is small, resulting in poor inspection efficiency.

The object of the present invention is to eliminate such drawbacks and improve the efficiency of visual inspection of workpieces.

[0006]

[Means for Solving the Problems] In order to achieve the above object, the present invention provides a work holding part (2 ) around the rotating shaft.
1) is arranged so as to be able to rotate and stop freely, and at least each stage of a work receiving stage (I), an appearance inspection stage (II), and a take-out stage (V) are set around the rotation of the turntable (1). The workpiece (A) held in the workpiece holding part (2) on the workpiece receiving stage (I) is moved around each stage by intermittent rotational feeding of the turntable (1) and transferred to the workpiece takeout stage (V ), the appearance of the workpiece is inspected in the appearance inspection stage (II) during the process of transporting the workpiece to the workpiece.

[0007]

[Operation] In FIG. 2, the workpiece (A) transported from the previous process to the workpiece receiving stage (I) by the transporting device (3) is transferred to the holding section (2) on the turntable (1) and chucked. (2a). Next, the turntable (1) rotates 1/5 counterclockwise and stops. As a result, the workpiece (A) in the receiving stage (I) is transferred to the visual inspection stage (II). Visual inspection stage (
In II), a single-sided surface inspection is performed on the transferred workpiece (A). During this time, in the receiving stage (I),
The next workpiece is transported from the previous process by the transport device (3), and the next workpiece is transported to the next stage holding section (2) waiting on the receiving stage (I).
). After the visual inspection is completed, the turntable (1) further rotates 1/5, and the next workpiece (A) on the receiving stage (I) is transferred to the visual inspection stage (II).
A visual inspection will be conducted. In this way, the turntable (1)
By intermittent rotational feeding, the works are successively transferred to the visual inspection stage (II) and subjected to visual inspection. The visually inspected workpiece (A) is sent to the workpiece take-out stage (V), taken out by a waiting transfer device (7), and sent to the next process.

[0008]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be explained below based on an embodiment in which the present invention is applied to an apparatus for visually inspecting an aluminum magnetic disk substrate (A) as a workpiece as shown in FIG.

FIG. 1 shows a vertical visual inspection device. In this visual inspection apparatus, (1) is a disc-shaped vertical turntable whose rotation axis is oriented in the front-rear horizontal direction. The front surface of this turntable (1) has 5 points in the circumferential direction.
Five work holding parts (2) are provided at equally divided positions. Each workpiece holding part (2) has a forwardly protruding chuck part (2a) that can freely expand and contract in diameter, and when the chuck part (2a) is passed through the shaft hole of the substrate (A), the diameter is expanded. By doing so, while the substrate (A) is chucked from the inner periphery, the chuck of the substrate (A) can be released by reducing the diameter of the chuck portion. Each chuck part (2a) is capable of rotating around its own axis, and the chucked substrate (A) is rotated as required by this rotational drive.

[0010] At five equal positions around the rotation of the turntable (1), in order from the upper left in a counterclockwise direction, there are a workpiece receiving stage (I), a first visual inspection stage (II), a reversing stage (III), and a workpiece receiving stage (II). 2 Visual inspection stage (IV)
, a workpiece take-out stage (V), and five stages are set. The turntable (1) can be controlled to freely stop rotating in a vertical plane by a drive device (not shown), and repeats rotational feeding and stopping every 1/5 rotation in a counterclockwise direction. (2) The substrate (A) mounted on the stage is transferred around each stage.

Each of the above stages will be explained as follows. That is, the work receiving stage (I)
This is a stage for mounting the magnetic disk substrate (A), which has been transported from the previous process by the transport device (3), onto the holder (2). Note that mounting of the disk substrate (A) from the transport device (3) to the holding portion (2) is performed via a chucker of an outer circumferential chuck type provided in the transport device.

The first visual inspection stage (II) inspects one side of the magnetic disk substrate (A) for the presence or absence of surface defects such as surface scratches and pinholes. 4) is installed. Although the configuration of the visual inspection device (4) is not particularly limited, in this embodiment, as shown in FIG. 3, it includes a light source (41) that intermittently irradiates light toward the surface of the magnetic disk substrate;
An imaging device (42) such as a CCD camera that receives reflected light from the magnetic disk substrate in synchronization with the irradiation light, and a surface that electrically detects the presence or absence of surface defects from the density of the image taken by the imaging device. A device equipped with a defect detection device (43) is used. Then, by rotating the magnetic disk substrate by rotationally driving the chuck part (2a) and, if necessary, moving the light source and the imaging device in the radial direction, the appearance of the entire surface of one side of the magnetic disk substrate (A) is inspected. ing.

The reversing stage (III) is for reversing the magnetic disk substrate (A) from front to back and remounting it on the workpiece holder (2), and is provided with a reversing device (5) for this purpose. This reversing device (5) has an arm portion that chucks the outer periphery of the substrate (A), and uses this arm portion to chuck the outer periphery of the substrate (A) transferred to the reversing stage (III) and lateralizes the substrate (A). By moving to the substrate (A
) is once removed from the chuck part (2a), and then the arm part is rotated 180 degrees to turn the substrate (A) over and attach it to the chuck part (2a) of the workpiece holding part (2) again. be.

[0014] The second visual inspection stage (IV) performs a visual inspection on the other side of the magnetic disk substrate (A) that has been reversed by the reversing stage (III), and the first visual inspection stage (II) Appearance inspection equipment similar to (6
) is installed.

The workpiece take-out stage (V) takes out the magnetic disk substrate (A), which has been transferred to the stage after the visual inspection, from the workpiece holder (2), and also transfers the taken-out magnetic disk substrate to the transport device ( 7), it is transported to the next process. Such a magnetic disk substrate (A
) is also removed via a chucker (not shown) provided on the transport device (7).

Next, the operation of the visual inspection apparatus shown in FIG. 1 will be explained together with its control system based on FIG. 2.

[0017] In the previous process, for example, from the washing and drying process to the conveying device (
The magnetic disk substrate (A) transferred to the work receiving stage (I) by 3) is transferred from the chucker of the transport device (3) to the work holding section (2) on the turntable (1).
and is attached to the chuck part (2a).

Next, the transport device (3) moves to the front process side to transport the next magnetic disk substrate, while the turntable (1) rotates 1/5 counterclockwise and stops. Due to this rotational feeding of the turntable (1), each workpiece holder (2) located on the previous stage moves to the next stage. That is, the holding part (2) on which the magnetic disk substrate (A) was mounted on the receiving stage (I) moves to the first appearance inspection stage (II), and the holding part (2), which was located on the ejecting stage (V), moves to the first appearance inspection stage (II). ) moves to the receiving stage (I) and stops there.

At the first appearance inspection stage (II), the surface of one side of the transferred magnetic disk substrate (A) is inspected to determine the presence or absence and number of surface defects such as scratches and pinholes. During this time, on the receiving stage (I), the next magnetic disk substrate is transported from the previous process by the transporting device (3), and is mounted on the next stage holding section (2) waiting on the receiving stage (I).

After the above-mentioned appearance inspection is completed, the turntable (1) is further rotated by 1/5. As a result, the magnetic disk substrate (A) on the first visual inspection stage (II) is transferred to the reversing stage (III), and the magnetic disk substrate (A) on the receiving stage (I) is transferred to the first visual inspection stage (II). , the workpiece holder (2) located at the take-out stage (V) moves to the receiving stage (I). The magnetic disk substrate transferred to the reversing stage (III) is once removed from the chuck part (2a) by the reversing device (5) and turned over, and then remounted to the work holding part (2). During this time, the appearance of the second magnetic disk substrate is inspected on the first appearance inspection stage (II), and the third magnetic disk substrate is mounted on the receiving stage (I).

After the reversing process on the reversing stage (III) is completed, the turntable (1) rotates another 1/5, and each magnetic disk substrate (A) is transferred to the next stage, and the take-out stage ( The work holding section (2) located at stage V) moves to the receiving stage (I). From the inversion stage (III) to the second visual inspection stage (
The other side of the magnetic disk substrate (A) transferred to the magnetic disk substrate (A) is then visually inspected by the visual inspection device (4) to determine the presence or absence and number of surface defects. During this time, the inversion stage (III), the first visual inspection stage (II)
) and receiving stage (I), a reversing operation of the magnetic disk substrate, a one-sided visual inspection, and a receiving operation are performed, respectively.

After the visual inspection at the second visual inspection stage (IV) is completed, the turntable (1) rotates another 1/5 rotation, and each magnetic disk substrate is transferred to the next stage. The magnetic disk substrate transferred to the extraction stage (V) is
The work holding part (2) is moved by the chucker of the transport device (7)
). During this time, the second visual inspection stage (
IV), the reversing stage (III), the first visual inspection stage (II), and the receiving stage (I) perform the other side visual inspection, reversing operation, single side visual inspection, and receiving operation of the magnetic disk substrate, respectively.

After the removal stage (V) finishes taking out the magnetic disk substrates (A), the turntable (1) rotates another 1/5, and each magnetic disk substrate is transferred to the next stage. The workpiece holder (2) in the unoccupied state of the take-out stage (V) moves to the receiving stage (I), and the same operation is repeated thereafter.

In this way, 1/1 of the turntable (1)
Since the magnetic disk substrates are transferred while sequentially moving around each stage by feeding and stopping in five rotations, a large number of magnetic disk substrates can be continuously and automatically subjected to visual inspection one after another. In addition, the extraction stage (V)
The magnetic disk substrate (A) taken out by the transport device (3
), the first and second
Based on the appearance inspection results at the appearance inspection stages (II) and (IV), the products are sorted into non-defective products, defective products, and reworked products.

[0025] The appearance inspection device according to the illustrated embodiment has the following features:
Although this is shown as a vertical type in which the turntable (1) is arranged vertically and rotates in a vertical plane, it is also configured as a horizontal type in which the turntable (1) is arranged horizontally and rotates in a horizontal plane. Alternatively, the turntable may be tilted at an arbitrary angle. Therefore, when configured as a vertical device, it is difficult for dust and dirt to adhere to the surface of the magnetic disk substrate (A) on the turntable (1), and even if it does, it is easy to fall off. , it has the advantage of being able to obtain highly accurate test results. Furthermore, there is an advantage that the floor area required for installing the device can be reduced, and the installation space can be used effectively. On the other hand, when configured as a horizontal device, the magnetic disk substrate (A) can easily obtain a horizontal surface due to its self-weight stabilizing effect when mounted and held on the workpiece holder (2). It is possible to prevent blurring during rotation, and in turn, the distance between the light source (41) or imaging device (42) in the visual inspection device (4) (6) and the substrate (A) can be kept constant at all times, improving accuracy. It has the advantage of providing high visual inspection results.

[0026]

Effects of the Invention In accordance with the above, the present invention includes a turntable having a workpiece holder around a rotating shaft which holds a plurality of workpieces detachably within a plane, and which is arranged so as to be rotatable and stopable. At least a workpiece receiving stage, a visual inspection stage, and a take-out stage are set around the rotation of the turntable, and the workpiece held in the workpiece holding section on the workpiece receiving stage is
In the process of going through each stage and reaching the workpiece take-out stage by intermittent rotational feeding of the turntable,
It is characterized in that the appearance is inspected at the appearance inspection stage. Therefore, without having to wait for the end of the visual inspection process for one workpiece, it is possible to visually inspect a large number of workpieces one after the other. Compared to the case where visual inspection is performed, the number of workpieces that can be visually inspected per unit time can be greatly increased, and the efficiency of visual inspection can be significantly improved.

[Brief explanation of drawings]

FIG. 1 is a front view of a visual inspection device according to an embodiment of the present invention.

FIG. 2 is a front view of a state in which a visual inspection of a workpiece is actually performed.

FIG. 3 is a schematic configuration diagram of an appearance inspection device.

FIG. 4 is a perspective view showing an aluminum magnetic disk substrate as a workpiece used in an example.

[Explanation of symbols]

A... Aluminum magnetic disk substrate (work) 1... Turntable, 2... Work holding section I... Work receiving stage II, IV... Visual inspection stage V... Work taking out stage

Claims (1)

[Claims] Claim 1: A turntable (1) having a work holding part (2) for holding a plurality of workpieces (A) in a plane in a detachable manner around a rotating shaft is arranged so as to be rotatable and stopable, and At least a work receiving stage (I), a visual inspection stage (II), and a take-out stage (V) are set around the rotation of the turntable (1), and the work receiving stage (I) holds the work holding section. In the process in which the workpiece (A) held at the stage (2) is transferred to the workpiece take-out stage (V) through each stage by intermittent rotational feeding of the turntable (1), the workpiece (A) held at the visual inspection stage ( A workpiece appearance inspection apparatus characterized in that the workpiece appearance is inspected in step II).