JPH0430738U - - Google Patents

Description

[Brief explanation of the drawing]

Fig. 1 is a partial perspective view of a transport facility in a semiconductor production factory which is an embodiment of the present invention, Fig. 2 is a perspective view of a cassette common to the conventional and the present invention, and Fig. 3 is a conventional transport equipment in a semiconductor production factory. FIG. In the figure, 2 is a cassette that stores a plurality of wafers, 3a and 3b are carriers A and B that transport a plurality of cassettes, 4 is a carrier travel path on which the carrier travels, and 5a to 5c are carriers that store cassettes. Transfer station A for loading/unloading or unloading
C and 6a to 6c indicate transport vehicle transfer locations A to C where the transport vehicle loads or unloads cassettes to or from the transfer station. In addition, in the figures, the same reference numerals indicate the same or corresponding parts.

Claims (1)

[Scope of utility model registration request] A semiconductor wafer transport system consisting of a semiconductor wafer, a semiconductor wafer cassette that stores a plurality of semiconductor wafers, a transport vehicle that transports a plurality of semiconductor wafer cassettes, and a transfer station from which the transport vehicle loads and unloads the semiconductor wafer cassettes. In the equipment, when the transport vehicle loads or unloads or takes out the semiconductor cassettes at the transfer station, the transport vehicle transfer area is provided in such a way that the movement of transport vehicles other than the transport vehicle is not obstructed. Characteristic conveyance equipment.