JPH04308698A - Device for preventing sor device from being opened to air - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed description of the invention]

0001

[Industrial Application Field] This invention provides an SOR optical device that, when an accident occurs in which the light extraction line is exposed to the atmosphere,
This prevents air from entering the storage ring.

0002

[Prior Art] In recent years, synchrotron devices, as SOR light (synchrotron radiation) devices, are expected to be applied to various fields such as the creation of ultra-super LSI circuits, diagnosis in the medical field, molecular analysis, and structural analysis. There is.

FIG. 2 shows an outline of an SOR optical device. SOR
In the optical device 1, an electron beam generated by an electron generator (electron gun, etc.) 10 is accelerated to near the speed of light by a linear accelerator (linac) 12, and is accelerated to near the speed of light by a bending electromagnet 16 of a beam transport section 14.
The beam is deflected by the inflector 18 and enters the storage ring 22 of the synchrotron. The electron beam incident on the storage ring 22 is energized by the high frequency acceleration cavity 21, focused by the focusing electromagnets 23 and 25, deflected by the deflection electromagnet 24, and continues to circulate within the storage ring 22. SOR that occurs when deflected by the deflection electromagnet 24
The light 29 is guided to the light extraction line 26, emitted through the beryllium window 31, etc., and sent to, for example, an exposure device 28, where it is used as a light source for producing ultra-super LSI circuits.

A shock wave delay tube is installed in the middle of the light extraction line 26 in order to prevent air from flowing in from there and opening the inside of the storage ring 22 to the atmosphere if the beryllium window 31 at the end is broken. (ADL: Acoustic
Delay Line ) 30 is provided. Then, when there is air inflow, the inflow is delayed and a fast closing valve (FCV) is installed on the upstream side.
By closing the storage ring 2
This prevents the influx into 2.

[0005]

Problem to be Solved by the Invention The high-speed shutoff valve 32 is very expensive, and there is a problem in that the cost of the entire atmospheric release prevention device is very high. The present invention aims to solve the problems in the conventional techniques and provide an atmospheric release prevention device that can be realized at low cost.

[0006]

[Means for Solving the Problems] The present invention includes a tank connected to a storage ring of an SOR optical device via a normally closed valve and containing an inert gas inside, and an end of a light extraction line of the SOR optical device. a pressure detection means disposed near the light extraction line for detecting the pressure within the light extraction line; and when the pressure detection means detects an increase in the internal pressure of the light extraction line;
The device includes a control means for controlling the opening of the normally closed valve, and a non-high-speed cutoff valve disposed in the light extraction line.

[0007]

According to the present invention, when the light extraction line is opened to the atmosphere due to breakage of the beryllium window at its end, the pressure detection means detects a pressure increase, and the control means opens the normally closed valve. Inert gas is ejected from the tank and instantly fills the storage ring, preventing atmospheric air from entering the storage ring. After that, for example, close the non-high-speed shutoff valve and the normally closed valve, repair the damaged part of the light extraction line, etc., vacuum and bake the storage ring and the light extraction line, and then fill the tank with inert gas. Recovery can be accomplished by refilling the tank and opening the non-fast shutoff valve. In this case, since the storage ring is filled with inert gas, the time required for evacuation and baking can be reduced compared to when the storage ring is filled with air. According to this, there is no need for the extremely expensive high-speed shutoff valve that has been used in the past, so it can be realized at low cost.

[0008]

[Embodiment] An embodiment of the present invention is shown in FIG. In the SOR optical device 1, an electron beam generated by an electron generator (electron gun, etc.) 10 is accelerated to near the speed of light by a linear accelerator (linac) 12, is deflected by a deflection electromagnet 16 of a beam transport section 14, and is deflected by an inflector 18. into the storage ring 22 of the synchrotron. The electron beam incident on the storage ring 22 is given energy by the high-frequency acceleration cavity 21, focused by the focusing electromagnets 23 and 25, deflected by the deflection electromagnet 24, and continues to circulate within the vacuum duct 22. The SOR light 29 generated when being deflected by the deflection electromagnet 24 is guided to the light extraction line 26 and passes through the beryllium window 3.
The light is emitted through the 1st class, and is sent to, for example, an exposure device 28, where it is used as a light source for creating ultra-super LSI circuits.

A shock wave delay tube 30 is inserted in the middle of the light extraction line 26. Further, on the upstream side thereof, a non-high-speed shutoff valve 34 is arranged, which is a manually operated valve or a normal non-high-speed electrically operated valve. Further, a pressure detection port 36 is provided near the end of the light extraction line 26, and a pressure detector 38 is disposed therein to constantly monitor the pressure within the light extraction line 26.

On the other hand, the storage ring 22 is provided with an inert gas supply port 40, to which a tank 44 is connected via a normally closed valve 42. The tank 44 is filled with a high-purity inert gas such as N2 gas or He gas under high pressure. For example, the amount of inert gas is determined by the storage ring 22.
The amount should be enough to fill the inside. The normally-closed valve 42 may be a type such as a punching barrier, which is always closed and which is ruptured and instantaneously opened by applying an electric shock or the like in an emergency.

The control device 46 applies driving force to the normally closed valve 42 to open it when a pressure increase is detected by the pressure detector 38. Note that the storage ring 22 and the light extraction line 26 are equipped with a pump 48 for evacuation,
50 and a heater (not shown) for baking.

The operation of the apparatus shown in FIG. 1 will be explained. Normally, the storage ring 22 and the light extraction line 26 are in an ultra-high vacuum. Also, the non-high speed shutoff valve 34 is open, and the normally closed valve 42 is open.
is closed, and SO emitted from the storage ring 22
The R light 29 is emitted from the beryllium window 31 via the light extraction line 26 and is used for exposure within the exposure device 28.

If the beryllium window 31 is damaged and the atmosphere enters from there, the atmosphere will leak into the light extraction line 26.
However, since there is a shock wave delay tube 30 on the way, it takes some time for the air to reach the storage ring 22. During this time, the pressure detector 38 detects a pressure increase, and based on this, the control device 46 applies a driving force to the normally closed valve 42 to instantly open it. As a result, the high-purity inert gas filled in the tank 44 enters the storage ring 22 through the port 40 and instantly fills the storage ring 22 before the atmosphere reaches the storage ring 22. However, the inside of the storage ring 22 is prevented from being exposed to the atmosphere. Thereafter, by closing the non-high speed shutoff valve 34, atmospheric ingress into the storage ring 22 is completely prevented.

When restoring, first the beryllium window 31
Repair or replace damaged parts such as
Replace item 2 or close it if it can be reused. Then, the valve 52 is opened, high-purity inert gas is supplied from the gas supply port 54 to fill the tank 44, and the valve 52 is closed. Thereafter, the storage ring 22 and the light extraction line 26 are individually evacuated by driving the pumps 48 and 50, and then individually baked using a heater or the like to create an ultra-high vacuum. Since the storage ring 22 is filled with an inert gas rather than the atmosphere, evacuation and baking can be performed in a short time. And the non-high speed shutoff valve 34
By opening it, the original state can be restored and operation can be resumed.

[0015]

As described above, according to the present invention, the high-speed shutoff valve that has been used in the past is not required, so that an atmospheric release prevention device can be realized at low cost.

[Brief explanation of drawings]

FIG. 1 is a diagram showing an embodiment of the present invention, and is a plan view and a control block diagram showing an outline of an SOR optical device.

FIG. 2 is a plan view showing an overview of the SOR optical device.

[Explanation of symbols]

1 SOR optical device 22 Storage ring 26 Light extraction line 34 Non-high speed shutoff valve 38 Pressure detector (pressure detection means) 42 Normally closed valve 44 Tank 46 Control device (control means)

Claims (1)

[Claims] Claim 1: A tank connected to a storage ring of an SOR optical device via a normally closed valve and containing an inert gas therein;
a pressure detection means disposed near the end of the light extraction line of the SOR optical device to detect the pressure within the light extraction line; and when the pressure detection means detects an increase in the internal pressure of the light extraction line; A device for preventing release to the atmosphere of an SOR optical device, comprising a control means for controlling the opening of the normally closed valve, and a non-high-speed cutoff valve disposed in the light extraction line.