JPH04310580A - Bonding of formed silicon carbide - Google Patents
Bonding of formed silicon carbideInfo
- Publication number
- JPH04310580A JPH04310580A JP7140891A JP7140891A JPH04310580A JP H04310580 A JPH04310580 A JP H04310580A JP 7140891 A JP7140891 A JP 7140891A JP 7140891 A JP7140891 A JP 7140891A JP H04310580 A JPH04310580 A JP H04310580A
- Authority
- JP
- Japan
- Prior art keywords
- adhesive
- sic
- bonding
- bonded
- molded body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims description 60
- 229910010271 silicon carbide Inorganic materials 0.000 title claims description 59
- 239000000853 adhesive Substances 0.000 claims abstract description 91
- 230000001070 adhesive effect Effects 0.000 claims abstract description 91
- 238000000034 method Methods 0.000 claims abstract description 20
- 239000011230 binding agent Substances 0.000 claims abstract description 17
- 238000005245 sintering Methods 0.000 claims abstract description 11
- 239000000203 mixture Substances 0.000 claims abstract description 10
- 239000002904 solvent Substances 0.000 claims abstract description 10
- 238000010438 heat treatment Methods 0.000 claims description 18
- 238000004898 kneading Methods 0.000 claims description 13
- 238000007872 degassing Methods 0.000 claims description 6
- 239000000843 powder Substances 0.000 abstract description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 9
- 238000001035 drying Methods 0.000 abstract description 6
- 239000000463 material Substances 0.000 abstract description 4
- 230000000694 effects Effects 0.000 abstract description 3
- 229920000609 methyl cellulose Polymers 0.000 abstract description 2
- 239000001923 methylcellulose Substances 0.000 abstract description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 239000001866 hydroxypropyl methyl cellulose Substances 0.000 description 5
- 229920003088 hydroxypropyl methyl cellulose Polymers 0.000 description 5
- 235000010979 hydroxypropyl methyl cellulose Nutrition 0.000 description 5
- UFVKGYZPFZQRLF-UHFFFAOYSA-N hydroxypropyl methyl cellulose Chemical compound OC1C(O)C(OC)OC(CO)C1OC1C(O)C(O)C(OC2C(C(O)C(OC3C(C(O)C(O)C(CO)O3)O)C(CO)O2)O)C(CO)O1 UFVKGYZPFZQRLF-UHFFFAOYSA-N 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 238000010304 firing Methods 0.000 description 4
- 239000012790 adhesive layer Substances 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 239000003232 water-soluble binding agent Substances 0.000 description 3
- FERIUCNNQQJTOY-UHFFFAOYSA-M Butyrate Chemical compound CCCC([O-])=O FERIUCNNQQJTOY-UHFFFAOYSA-M 0.000 description 2
- FERIUCNNQQJTOY-UHFFFAOYSA-N Butyric acid Natural products CCCC(O)=O FERIUCNNQQJTOY-UHFFFAOYSA-N 0.000 description 2
- 229920002134 Carboxymethyl cellulose Polymers 0.000 description 2
- 239000001856 Ethyl cellulose Substances 0.000 description 2
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 2
- 229920000663 Hydroxyethyl cellulose Polymers 0.000 description 2
- 239000004354 Hydroxyethyl cellulose Substances 0.000 description 2
- 239000002202 Polyethylene glycol Substances 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- SMEGJBVQLJJKKX-HOTMZDKISA-N [(2R,3S,4S,5R,6R)-5-acetyloxy-3,4,6-trihydroxyoxan-2-yl]methyl acetate Chemical compound CC(=O)OC[C@@H]1[C@H]([C@@H]([C@H]([C@@H](O1)O)OC(=O)C)O)O SMEGJBVQLJJKKX-HOTMZDKISA-N 0.000 description 2
- 229940081735 acetylcellulose Drugs 0.000 description 2
- 238000007718 adhesive strength test Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 239000001768 carboxy methyl cellulose Substances 0.000 description 2
- 235000010948 carboxy methyl cellulose Nutrition 0.000 description 2
- 239000008112 carboxymethyl-cellulose Substances 0.000 description 2
- 229920002301 cellulose acetate Polymers 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 229920001249 ethyl cellulose Polymers 0.000 description 2
- 235000019325 ethyl cellulose Nutrition 0.000 description 2
- 235000019447 hydroxyethyl cellulose Nutrition 0.000 description 2
- -1 liquid paraffin Chemical compound 0.000 description 2
- 229940057995 liquid paraffin Drugs 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 239000005011 phenolic resin Substances 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 229920002689 polyvinyl acetate Polymers 0.000 description 2
- 239000011118 polyvinyl acetate Substances 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 235000019422 polyvinyl alcohol Nutrition 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 229920002554 vinyl polymer Polymers 0.000 description 2
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 239000007767 bonding agent Substances 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229920006332 epoxy adhesive Polymers 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 235000010981 methylcellulose Nutrition 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 238000013001 point bending Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000005204 segregation Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000003826 uniaxial pressing Methods 0.000 description 1
Landscapes
- Ceramic Products (AREA)
- Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)
Abstract
Description
【0001】0001
【産業上の利用分野】この発明は、炭化珪素質成形体の
接着方法に関し、さらに詳しく言えば、接着強度が大き
いと共にその接着強度が高温下においても低下しない炭
化珪素質成形体の接着方法に関する。[Field of Industrial Application] This invention relates to a method for adhering silicon carbide molded bodies, and more specifically, to a method for bonding silicon carbide molded bodies that have high adhesive strength and do not decrease in adhesive strength even at high temperatures. .
【0002】0002
【従来の技術】炭化珪素(以下、SiCという)の成形
体は、形状が複雑な場合や嵩が大きい場合には、一体物
として製作するには高コストとなることが多く、形状や
大きさによっては成形・加工が不可能であることもある
。そこで、従来より、成形体を接着剤によって互いに接
着する技術が開発され、実用されている。[Prior Art] Molded bodies of silicon carbide (hereinafter referred to as SiC) are often expensive to manufacture as a single piece when the shape is complex or bulky. In some cases, molding and processing may not be possible. Therefore, techniques for bonding molded bodies to each other using an adhesive have been developed and put into practice.
【0003】SiCの成形体同士を接着する接着剤とし
ては、エポキシ系等の有機系接着剤およびシリカやアル
ミナを主成分とする無機系接着剤が知られている。これ
らの接着剤を用いてSiC成形体同士を接着するときに
は、両成形体の接着面に接着剤を塗布してから両接合面
を互いに加圧・密着し、その後、接着剤を硬化させて接
着する。[0003] As adhesives for bonding SiC molded bodies together, organic adhesives such as epoxy adhesives and inorganic adhesives containing silica or alumina as main components are known. When bonding SiC molded bodies together using these adhesives, the adhesive is applied to the bonding surfaces of both molded bodies, and then both bonding surfaces are pressed and brought into close contact with each other.Then, the adhesive is cured and bonded. do.
【0004】0004
【発明が解決しようとする課題】上記従来の接着剤でS
iC成形体同士を接着した場合、十分に高い接着剤密度
が得られないため、乾燥・焼成等の熱処理時にクラック
が生ずる問題があり、また、バルクのSiC成形体の強
度に比べて低い接着強度しか得られず、しかも高温下で
その接着強度が低下するという問題がある。[Problem to be solved by the invention] With the above conventional adhesive, S
When iC molded bodies are bonded together, a sufficiently high adhesive density cannot be obtained, so there is a problem that cracks occur during heat treatment such as drying and firing, and the adhesive strength is lower than that of bulk SiC molded bodies. Moreover, there is a problem that the adhesive strength decreases at high temperatures.
【0005】そこで、この発明の目的は、接着時にクラ
ックが生じないと共にバルクのSiC成形体の強度に近
い接着強度が得られ、しかもその接着強度が高温下にお
いてもほとんど低下しないSiC質成形体の接着方法を
提供することである。[0005] Therefore, an object of the present invention is to create a SiC molded product that does not cause cracks during adhesion, has an adhesive strength close to that of a bulk SiC molded product, and has almost no decrease in adhesive strength even at high temperatures. An object of the present invention is to provide an adhesive method.
【0006】[0006]
【課題を解決するための手段】この発明のSiC質成形
体の接着方法は、焼結助剤を含むSiC粉末に有機バイ
ンダーと溶媒を加えて混練および脱気処理をし、粘度を
103〜105 Poiseに調整してなる接着剤を用
いるSiC質成形体の接着方法であって、接着しようと
する複数のSiC質成形体の各接着面間に上記接着剤を
介在させ、その接着剤を加圧した後あるいは加圧しなが
ら加熱処理を施すことを特徴とする。[Means for Solving the Problems] The method for adhering SiC molded bodies of the present invention involves adding an organic binder and a solvent to SiC powder containing a sintering aid, kneading and degassing the mixture, and reducing the viscosity to 103 to 105. A method for adhering SiC molded bodies using an adhesive adjusted to poise, the adhesive being interposed between each bonding surface of a plurality of SiC molded bodies to be bonded, and the adhesive being pressurized. The feature is that heat treatment is performed after or while applying pressure.
【0007】SiC粉末の粒径は、任意に設定できるが
、接着しようとするSiC質成形体のそれと同じにする
のが好ましい。[0007] The particle size of the SiC powder can be set arbitrarily, but it is preferably the same as that of the SiC molded body to be bonded.
【0008】焼結助剤としては、硼素(B)、炭素(C
)、アルミナ(AlO2)を使用することができ、好ま
しくは接着しようとするSiC質成形体の焼結助剤と同
じものにする。焼結助剤の配合量は、SiC粉末の粒径
等に応じて適宜調整するが、接着しようとするSiC質
成形体のそれと同じにするのが好ましい。[0008] As the sintering aid, boron (B), carbon (C
), alumina (AlO2) can be used, preferably the same as the sintering aid of the SiC compact to be bonded. The blending amount of the sintering aid is appropriately adjusted depending on the particle size of the SiC powder, etc., but it is preferably the same as that of the SiC molded body to be bonded.
【0009】有機バインダーとしては、水溶性および有
機溶媒溶解性のいずれも使用可能である。水溶性のバイ
ンダーには、例えば、ヒドロキシエチルセルロース、ヒ
ドロキシプロピルメチルセルロース、カルボキシメチル
セルロース、ポリビニルアルコール、ポリビニルブチラ
ート、ポリエチレングリコール、グリコースがある。有
機溶媒溶解性のバインダーには、例えば、エチルセルロ
ース、アセチルセルロース、ポリビニルアセテート、エ
チルシリケート、流動パラフィン、フェノール樹脂があ
る。As the organic binder, both water-soluble and organic solvent-soluble binders can be used. Water-soluble binders include, for example, hydroxyethylcellulose, hydroxypropylmethylcellulose, carboxymethylcellulose, polyvinyl alcohol, polyvinyl butyrate, polyethylene glycol, and glycose. Examples of binders soluble in organic solvents include ethyl cellulose, acetyl cellulose, polyvinyl acetate, ethyl silicate, liquid paraffin, and phenolic resin.
【0010】水溶性のバインダーの方が、揮発性の高い
有機溶媒に比べて接着剤の粘度調整が容易であるため、
好ましい。また、水溶性のバインダーの中では、コスト
の関係からメチルセルロースが好ましい。[0010] Water-soluble binders are easier to adjust the viscosity of adhesives than highly volatile organic solvents;
preferable. Furthermore, among water-soluble binders, methylcellulose is preferred from the viewpoint of cost.
【0011】バインダーの配合量は、SiC粉末100
重量%に対して5〜15重量%が好ましく、10重量%
が特に好ましい。5重量%未満であると、バインダー量
が充分でなく混練後のSiC粒子表面のバインダーコー
トが不均一となり、熱処理後に充分な強度が得られない
。15重量%を超えると、バインダー量が過剰となり、
偏析が生じて熱処理後の密度が却って小さくなる。[0011] The blending amount of the binder is SiC powder 100
Preferably 5 to 15% by weight, 10% by weight
is particularly preferred. If the amount is less than 5% by weight, the amount of binder is insufficient and the binder coating on the surface of the SiC particles after kneading becomes non-uniform, making it impossible to obtain sufficient strength after heat treatment. If it exceeds 15% by weight, the amount of binder becomes excessive,
Segregation occurs and the density after heat treatment becomes smaller.
【0012】溶媒としては、使用するバインダーに応じ
て公知のものを任意に使用できるが、水またはアルコー
ルが好ましい。溶媒の配合量は、混練および脱気処理後
に接着剤の粘度が103〜105Poiseになるよう
に適宜調整する。As the solvent, any known solvent can be used depending on the binder used, but water or alcohol is preferred. The blending amount of the solvent is appropriately adjusted so that the viscosity of the adhesive becomes 10 3 to 10 5 poise after kneading and degassing.
【0013】焼結助剤を含むSiC粉末と有機バインダ
ーと溶媒との混練および脱気処理は、例えば真空中で公
知の混練機により行なうことができる。真空中で混練す
ることにより、これらの混合物に含まれている空気は脱
気される。混練時の容器内の気圧は、脱気状況や粘度等
を考慮して適宜設定するが、1〜20Torrであるの
が好ましい。また、容器内の温度は10゜C以下とする
のが好ましい。処理時間等については適宜設定する。The kneading and degassing of the SiC powder containing the sintering aid, the organic binder, and the solvent can be carried out, for example, in a vacuum using a known kneader. By kneading in vacuum, the air contained in these mixtures is removed. The pressure inside the container during kneading is appropriately set in consideration of the deaeration situation, viscosity, etc., and is preferably 1 to 20 Torr. Further, the temperature inside the container is preferably 10°C or less. The processing time etc. are set appropriately.
【0014】混練・脱気処理の間に、接着剤の粘度を1
03〜105Poise、好ましくは103〜104P
oiseの範囲に調整する。粘度を103〜105Po
iseに限定するのは、105より大きくあるいは10
3より小さいと、バルクのSiC成形体と同程度あるい
はそれに近い接着強度が得られなかったり、乾燥時ある
いは焼成時にSiC成形体にクラックが生じたりするか
らである。During the kneading and degassing process, the viscosity of the adhesive was reduced to 1
03-105 Poise, preferably 103-104P
Adjust to the oise range. Viscosity 103~105Po
ise is greater than 105 or 10
If it is smaller than 3, adhesive strength comparable to or close to that of the bulk SiC molded body may not be obtained, or cracks may occur in the SiC molded body during drying or firing.
【0015】混練・脱気処理により、この発明に使用す
る接着剤が生成される。生成された接着剤は、塑性を持
つ固体であり、液状の接着剤に比べて取り扱いが容易で
ある。しかし、接着作業をいっそう容易にするため、真
空中でその固形接着剤を接着作業に適した形状(例えば
シート状)に形成するのが好ましい。The kneading and degassing process produces the adhesive used in the present invention. The produced adhesive is a solid with plasticity and is easier to handle than liquid adhesive. However, in order to further facilitate the bonding operation, it is preferable to form the solid adhesive in a vacuum into a shape suitable for the bonding operation (for example, a sheet).
【0016】例えばシート状に形成した接着剤を用いて
SiC成形体を接着する場合、その接着剤の表面に接着
剤生成に使用したのと同じ溶媒(異なる溶媒でもよい)
を塗布してから、接着しようとするSiC成形体の各接
着面に密着させる。その後、SiC成形体に一軸方向の
押圧力を加えてその接着剤を加圧する。なお、加圧は、
CIP(Cold Isostatical Pres
s)によって加圧してもよい。一軸加圧の場合は、Si
C成形体の各接着面毎に接着剤を貼り付けるのが好まし
い。CIP加圧の場合は、接着剤は1つの接着箇所に対
して1個で足りる。For example, when bonding a SiC molded body using an adhesive formed into a sheet, the surface of the adhesive is coated with the same solvent (a different solvent may be used) as used to form the adhesive.
After coating, it is brought into close contact with each bonding surface of the SiC molded body to be bonded. Thereafter, a uniaxial pressing force is applied to the SiC molded body to pressurize the adhesive. In addition, pressurization is
CIP (Cold Isostatic Pres)
Pressure may be applied by s). In the case of uniaxial pressure, Si
It is preferable to apply an adhesive to each adhesive surface of the C molded body. In the case of CIP pressurization, one adhesive is sufficient for one adhesive location.
【0017】接着剤の加熱処理は、上記のようにして加
圧した後に行なってもよいし、加圧しながら行なっても
よい。加熱処理により、接着剤の乾燥、硬化および焼成
が行なわれる。[0017] The adhesive may be heat-treated after being pressurized as described above, or may be performed while being pressurized. The heat treatment dries, hardens, and bakes the adhesive.
【0018】接着剤の乾燥工程で、接着剤に含まれてい
る溶媒が除去される。加熱温度および加熱時間は、接着
剤の量等を考慮して設定する。加熱温度は、容媒の種類
に応じて適宜設定するが、容媒として水を用いた場合に
は約100゜C、加熱時間は4時間程度とするのがよい
。[0018] In the process of drying the adhesive, the solvent contained in the adhesive is removed. The heating temperature and heating time are set in consideration of the amount of adhesive and the like. The heating temperature is appropriately set depending on the type of medium, but when water is used as the medium, it is preferably about 100° C. and the heating time is about 4 hours.
【0019】接着剤の硬化工程では、乾燥工程よりも少
し高い温度でそれらのSiC成形体を加熱する。この工
程で、接着剤が硬化し、SiC成形体同士の接着が行な
われる。加熱温度および加熱時間は、接着剤の量等を考
慮して適宜設定するが、加熱温度は100゜〜200゜
C、加熱時間は4時間程度とするのがよい。In the adhesive curing process, the SiC molded bodies are heated at a slightly higher temperature than in the drying process. In this step, the adhesive hardens and the SiC molded bodies are bonded together. The heating temperature and heating time are appropriately set in consideration of the amount of adhesive, etc., but it is preferable that the heating temperature is 100° to 200°C and the heating time is about 4 hours.
【0020】接着剤の焼成工程では、硬化工程よりもず
っと高い温度でそれらのSiC成形体を加熱する。加熱
温度および加熱時間は、接着剤の量等を考慮して適宜設
定するが、加熱温度は1850゜〜2300゜C、加熱
時間は5時間程度とするのがよい。[0020] In the adhesive firing step, these SiC compacts are heated at a much higher temperature than in the curing step. The heating temperature and heating time are appropriately set in consideration of the amount of adhesive, etc., but it is preferable that the heating temperature is 1850° to 2300°C and the heating time is about 5 hours.
【0021】なお、接着剤の焼成後の密度が、接着した
SiC質成形体の密度と同じになるようにするのが好ま
しい。これは、焼結後の接着剤の組織が、接着しようと
するSiC質成形体の組織に似ているほど接着強度が向
上するからである。焼結後の接着剤の組織が、接着した
SiC質成形体の組織に一致するのが最良である。[0021] It is preferable that the density of the adhesive after firing is the same as the density of the bonded SiC molded body. This is because the adhesive strength improves as the structure of the adhesive after sintering resembles the structure of the SiC molded body to be bonded. It is best that the structure of the adhesive after sintering matches the structure of the bonded SiC molded body.
【0022】[0022]
【作用】この発明のSiC質成形体の接着方法では、接
着剤の生成時に脱気処理を施しているため、接着時の接
着剤中に気孔が生じ難くなる。また、接着剤の主成分が
SiCであるため、接着剤の材質が成形体の材質と同じ
である。そこで、この方法で接着すると、バルクのSi
C成形体に近い接着強度が得られ、またその接着強度が
高温下において低下する恐れがほとんどなくなる。[Operation] In the method for adhering SiC molded bodies of the present invention, deaeration treatment is performed during the production of the adhesive, so that pores are less likely to be formed in the adhesive during adhesion. Furthermore, since the main component of the adhesive is SiC, the material of the adhesive is the same as the material of the molded body. Therefore, when bonding with this method, the bulk Si
Adhesive strength close to that of the C molded product can be obtained, and there is almost no possibility that the adhesive strength will decrease at high temperatures.
【0023】[0023]
【実施例】以下、この発明の実施例を示すが、この発明
はこれらに限定されるものではない。EXAMPLES Examples of the present invention will be shown below, but the present invention is not limited thereto.
【0024】(実施例1)図1(a)は接着剤生成工程
を示すフローチャート、図1(b)はその接着剤を用い
る接着工程を示すフローチャートである。(Example 1) FIG. 1(a) is a flowchart showing an adhesive production process, and FIG. 1(b) is a flowchart showing a bonding process using the adhesive.
【0025】まず、SiC粉末(粒径0.5mm)10
0重量%に、焼結助剤として0.8重量%の硼素粉末お
よび3.5重量%の炭素粉末を添加し、混合した。他方
、有機バインダーとして10重量%のヒドロキシプロピ
ルメチルセルロースを水に溶解させ、水分が27.5重
量%となるように調整した。First, SiC powder (particle size 0.5 mm) 10
0.8% by weight of boron powder and 3.5% by weight of carbon powder were added as sintering aids to 0% by weight and mixed. On the other hand, 10% by weight of hydroxypropyl methylcellulose as an organic binder was dissolved in water, and the water content was adjusted to 27.5% by weight.
【0026】次に、硼素粉末および炭素粉末を添加した
上記SiC粉末に上記ヒドロキシプロピルメチルセルロ
ースの水溶液を加え、常温で真空中で混練して混合物の
粘度を105Poiseに調整した。混練時間は15分
、混練時の気圧は約10Torrとした。Next, the aqueous solution of hydroxypropyl methylcellulose was added to the SiC powder to which boron powder and carbon powder had been added, and the mixture was kneaded in vacuum at room temperature to adjust the viscosity of the mixture to 105 Poise. The kneading time was 15 minutes, and the pressure during kneading was about 10 Torr.
【0027】次に、得られた混合物を同じ真空下で厚さ
約0.2mmのシート状に形成し、接着剤シートを得た
。Next, the obtained mixture was formed into a sheet with a thickness of about 0.2 mm under the same vacuum to obtain an adhesive sheet.
【0028】そこで、得られた接着剤シートを用いて、
以下のようにしてSiC成形体の接着を行なった。まず
、接着剤シートを2枚用意し、それらシートの両面を水
で濡らした後、接着しようとする2個のSiC成形体の
接着面にそれぞれ密着させた。そして、2枚の接着剤シ
ートのSiC成形体に密着されていない側の面を互いに
密着させた後、接着剤シートに直交する方向にSiC成
形体に押圧力を加えることにより、接着剤シートを加圧
した。押圧力の大きさは、5kg/cm2とした。[0028] Therefore, using the obtained adhesive sheet,
Bonding of the SiC molded bodies was carried out as follows. First, two adhesive sheets were prepared, both sides of which were wetted with water, and then the sheets were brought into close contact with the adhesive surfaces of two SiC molded bodies to be bonded. After the sides of the two adhesive sheets that are not in close contact with the SiC molded body are brought into close contact with each other, pressing force is applied to the SiC molded body in a direction perpendicular to the adhesive sheet, thereby removing the adhesive sheet Pressurized. The magnitude of the pressing force was 5 kg/cm2.
【0029】次に、接着剤シートを間に介在させたSi
C成形体を、上記加圧状態を維持しながら100゜Cで
4時間加熱し、接着剤シートに残っている水分を除去し
た。次に、同SiC成形体を200゜Cでさらに4時間
加熱し、水分を除去した接着剤シートを硬化させた。最
後に、同SiC成形体を常圧で1850〜2300゜C
の温度で5時間加熱し、接着剤シートを焼成した。こう
して、SiC成形体の接着を完了した。Next, Si with an adhesive sheet interposed between
The molded product C was heated at 100° C. for 4 hours while maintaining the above-mentioned pressurized state to remove moisture remaining in the adhesive sheet. Next, the same SiC molded body was further heated at 200° C. for 4 hours to cure the adhesive sheet from which water had been removed. Finally, the same SiC molded body was heated at 1850 to 2300°C at normal pressure.
The adhesive sheet was baked at a temperature of 5 hours. In this way, adhesion of the SiC molded body was completed.
【0030】以上のようにして接着したSiC成形体の
接着強度を測定するため、試験を行なった。その試験は
、JIS R 1601の常温曲げ試験方法の3点
曲げ法で行なった。試験片としては、5×5×50mm
の直方体状の2個のSiC成形体の端面を上記接着方法
で接着したものを用い、接着剤層の厚さは0.2〜0.
6mmとした。また、2個の支点間のスパンは30mm
とし、荷重点は試験片の接着剤層の上に設定した。A test was conducted to measure the adhesive strength of the SiC molded bodies bonded as described above. The test was conducted using the three-point bending method of JIS R 1601 room temperature bending test method. The test piece is 5 x 5 x 50 mm.
The end surfaces of two rectangular parallelepiped shaped SiC molded bodies were bonded together using the above bonding method, and the thickness of the adhesive layer was 0.2 to 0.2 mm.
It was set to 6 mm. Also, the span between the two fulcrums is 30mm
The load point was set on the adhesive layer of the test piece.
【0031】その結果、接着強度は420MPaであっ
た。バルク(接着部が存在しないもの)のSiC成形体
の常温曲げ強度は、通常400〜450MPaであるか
ら、この接着強度はバルクのSiC成形体のそれに匹敵
することが判明した。また、1200゜Cにおいて空気
中で同様の接着強度試験を行なったところ、その接着強
度は430MPaであった。[0031] As a result, the adhesive strength was 420 MPa. Since the room-temperature bending strength of a bulk (no bonded part) SiC molded body is usually 400 to 450 MPa, it has been found that this adhesive strength is comparable to that of a bulk SiC molded body. Further, when a similar adhesive strength test was conducted in air at 1200°C, the adhesive strength was 430 MPa.
【0032】なお、得られた接着剤層を光学顕微鏡で観
察すると、接着したSiC成形体の組織とほぼ同じ組織
であり、密度もほぼ同じであった。バインダーを、ヒド
ロキシエチルセルロース、カルボキシメチルセルロース
、ポリビニルアルコール、ポリビニルブチラート、ポリ
エチレングリコール、グリコース、エチルセルロース、
アセチルセルロース、ポリビニルアセテート、エチルシ
リケート、流動パラフィン、フェノール樹脂に変えて同
様に接着を行なったが、ほぼ同様の結果が得られた。[0032] When the obtained adhesive layer was observed with an optical microscope, it was found that it had almost the same structure and density as that of the bonded SiC molded body. The binder is hydroxyethyl cellulose, carboxymethyl cellulose, polyvinyl alcohol, polyvinyl butyrate, polyethylene glycol, glycose, ethyl cellulose,
Adhesion was performed in the same manner using acetyl cellulose, polyvinyl acetate, ethyl silicate, liquid paraffin, and phenol resin, but almost the same results were obtained.
【0033】(実施例2〜6)実施例1と同様に、Si
C粉末(粒径0.5mm)100重量%に、焼結助剤と
して0.8重量%の硼素粉末および3.5重量%の炭素
粉末を添加し、混合した。他方、有機バインダーとして
ヒドロキシプロピルメチルセルロースを表1に示す量だ
け水に溶解させ、水分が表1に示す量となるように調整
した。(Examples 2 to 6) Similar to Example 1, Si
To 100% by weight of C powder (particle size: 0.5 mm), 0.8% by weight of boron powder and 3.5% by weight of carbon powder as sintering aids were added and mixed. On the other hand, hydroxypropyl methyl cellulose as an organic binder was dissolved in water in the amount shown in Table 1, and the water content was adjusted to the amount shown in Table 1.
【0034】次に、硼素粉末および炭素粉末を添加した
上記SiC粉末に上記ヒドロキシプロピルメチルセルロ
ースの水溶液を加え、常温で真空中で混練して混合物の
粘度を表1に示す値に調整した。混練時間および混練時
の気圧は、実施例1と同じとした。Next, the aqueous solution of hydroxypropyl methylcellulose was added to the SiC powder to which boron powder and carbon powder had been added, and the mixture was kneaded in vacuum at room temperature to adjust the viscosity of the mixture to the values shown in Table 1. The kneading time and the atmospheric pressure during kneading were the same as in Example 1.
【0035】次に、この混合物を用いて実施例1と同様
の接着剤シートを生成し、実施例1と同様にしてSiC
成形体を接着した。接着強度試験の結果、実施例2〜6
の常温での接着強度および高温(1200゜C)での接
着強度は表1に示す通りであり、実施例1とほぼ同等の
結果が得られた。Next, an adhesive sheet similar to that in Example 1 was produced using this mixture, and SiC was bonded in the same manner as in Example 1.
The molded bodies were glued together. Adhesive strength test results, Examples 2 to 6
The adhesive strength at normal temperature and the adhesive strength at high temperature (1200° C.) are shown in Table 1, and results almost the same as in Example 1 were obtained.
【0036】(比較例1〜2)実施例1と同じバインダ
ーを用いてバインダー量、水分量および粘性を表2のよ
うに調整し、他は実施例1と同様にして接着剤シートを
生成した。そして、その接着剤シートを用いて実施例1
と同様にしてSiC成形体を接着した。比較例1では、
乾燥時に接着剤シートにクラックが生じた。比較例2で
は、常温での接着強度は表2に示す通りであり、実施例
1〜6に比べてかなり低いものであった。(Comparative Examples 1-2) Using the same binder as in Example 1, the binder amount, moisture content and viscosity were adjusted as shown in Table 2, and the other conditions were the same as in Example 1 to produce an adhesive sheet. . Then, using the adhesive sheet, Example 1
The SiC molded body was bonded in the same manner as above. In comparative example 1,
Cracks appeared in the adhesive sheet when drying. In Comparative Example 2, the adhesive strength at room temperature was as shown in Table 2, which was considerably lower than in Examples 1 to 6.
【0037】[0037]
【表1】[Table 1]
【0038】[0038]
【表2】[Table 2]
【0039】[0039]
【発明の効果】この発明のSiC質成形体の接着方法は
、接着時にクラックが生じないと共にバルクのSiC成
形体の強度に近い接着強度が得られ、しかもその接着強
度が高温下においてもほとんど低下しないという効果を
有する。[Effects of the Invention] The method for adhering SiC molded bodies of the present invention does not cause cracks during adhesion and can provide adhesive strength close to that of bulk SiC molded bodies, and the adhesive strength hardly decreases even at high temperatures. It has the effect of not doing so.
【図1】この発明のSiC成形体の接着方法の一実施例
を示すもので、(a)はその方法に用いる接着剤の生成
工程を示すフローチャート、(b)は(a)で得た接着
剤を用いて行なうSiC成形体の接着工程を示すフロー
チャートである。FIG. 1 shows an example of the bonding method for SiC molded bodies of the present invention, in which (a) is a flowchart showing the process of producing an adhesive used in the method, and (b) is the bond obtained in (a). 2 is a flowchart showing a step of adhering SiC molded bodies using a bonding agent.
Claims (1)
インダーと溶媒を加えて混練および脱気処理をし、粘度
を103〜105 Poiseに調整してなる接着剤を
用いる炭化珪素質成形体の接着方法であって、接着しよ
うとする複数の炭化珪素質成形体の各接着面間に上記接
着剤を介在させ、その接着剤を加圧した後あるいは加圧
しながら加熱処理を施すことを特徴とする炭化珪素質成
形体の接着方法。Claim 1: A silicon carbide molded body using an adhesive obtained by adding an organic binder and a solvent to silicon carbide powder containing a sintering aid, kneading and degassing the mixture, and adjusting the viscosity to 103 to 105 Poise. A bonding method characterized in that the adhesive is interposed between each bonding surface of a plurality of silicon carbide molded bodies to be bonded, and heat treatment is performed after or while pressurizing the adhesive. A method for adhering a silicon carbide molded body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7140891A JP3085589B2 (en) | 1991-04-04 | 1991-04-04 | Method for bonding silicon carbide molded body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7140891A JP3085589B2 (en) | 1991-04-04 | 1991-04-04 | Method for bonding silicon carbide molded body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04310580A true JPH04310580A (en) | 1992-11-02 |
| JP3085589B2 JP3085589B2 (en) | 2000-09-11 |
Family
ID=13459660
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7140891A Expired - Fee Related JP3085589B2 (en) | 1991-04-04 | 1991-04-04 | Method for bonding silicon carbide molded body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3085589B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10182235A (en) * | 1996-12-19 | 1998-07-07 | Tokuyama Corp | Aluminum nitride members |
| JP2003104782A (en) * | 1995-07-19 | 2003-04-09 | Tokuyama Corp | Manufacturing method of aluminum nitride bonded structure |
| JP2008274101A (en) * | 2007-04-27 | 2008-11-13 | Tokai Univ | Adhesive composition for silicon carbide ceramics and method for bonding silicon carbide ceramics |
| JP2013056814A (en) * | 2011-09-09 | 2013-03-28 | Taiheiyo Cement Corp | Method for manufacturing silicon carbide sintered compact and silicon carbide sintered compact |
-
1991
- 1991-04-04 JP JP7140891A patent/JP3085589B2/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003104782A (en) * | 1995-07-19 | 2003-04-09 | Tokuyama Corp | Manufacturing method of aluminum nitride bonded structure |
| JPH10182235A (en) * | 1996-12-19 | 1998-07-07 | Tokuyama Corp | Aluminum nitride members |
| JP2008274101A (en) * | 2007-04-27 | 2008-11-13 | Tokai Univ | Adhesive composition for silicon carbide ceramics and method for bonding silicon carbide ceramics |
| JP2013056814A (en) * | 2011-09-09 | 2013-03-28 | Taiheiyo Cement Corp | Method for manufacturing silicon carbide sintered compact and silicon carbide sintered compact |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3085589B2 (en) | 2000-09-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107200599B (en) | Porous alumina ceramic and its preparation method and application | |
| CN110734287A (en) | Preparation method of silicon/silicon carbide composite ceramics | |
| CN107673764B (en) | It is a kind of for binding agent of carborundum joining in green state and preparation method thereof | |
| JPH04310580A (en) | Bonding of formed silicon carbide | |
| US4921554A (en) | Joining of porous silicon carbide bodies | |
| JPH07108348A (en) | Breathable durable manufacturing method | |
| CN104557100B (en) | For cast sheet to be sticked to the method on ceramic substrate and prepared component | |
| CN108358642A (en) | A kind of connection method of biscuit of ceramics | |
| CN116120098B (en) | Diamond/silicon carbide-silicon carbide coating, composite material and preparation method thereof | |
| CN111238891A (en) | Preparation method of internal defects of reaction sintered silicon carbide ceramic | |
| CN104496512B (en) | Binding agent of the online reaction forming of a kind of silicon carbide ceramics and preparation method thereof | |
| JP2002176096A (en) | Method for manufacturing ceramic member for semiconductor processing equipment | |
| JPS5879880A (en) | Joining method | |
| JP2968939B2 (en) | Freezing molding method of ceramics using polyvinyl alcohol solution | |
| JP2508157B2 (en) | Method for joining silicon carbide ceramics | |
| JPS63221010A (en) | Molding die, molding method of article by using said die and pressure casting molding method | |
| JPH11268961A (en) | Forming of ceramic sheet | |
| JPH08119751A (en) | Method for manufacturing ceramics sintered body | |
| JP5674602B2 (en) | Method for manufacturing silicon carbide sintered body and silicon carbide sintered body | |
| JP4416920B2 (en) | Method for producing silicon carbide molded body | |
| JPS59184773A (en) | Manufacture of silicon carbide sintered body | |
| JPH07252509A (en) | Method for manufacturing gradient composition of nitride ceramics and metal, gradient composition for substrate, and gradient composition for structural material | |
| JPS59198105A (en) | Manufacture of ceramic product | |
| CN121494520A (en) | A manganese ferrite ceramic, its preparation method and application | |
| JPH05318426A (en) | Molding method for ceramic molded body |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |