JPH0431386U - - Google Patents
Info
- Publication number
- JPH0431386U JPH0431386U JP7371090U JP7371090U JPH0431386U JP H0431386 U JPH0431386 U JP H0431386U JP 7371090 U JP7371090 U JP 7371090U JP 7371090 U JP7371090 U JP 7371090U JP H0431386 U JPH0431386 U JP H0431386U
- Authority
- JP
- Japan
- Prior art keywords
- ring
- flanges
- clamp
- center ring
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
Landscapes
- Joints With Pressure Members (AREA)
- Flanged Joints, Insulating Joints, And Other Joints (AREA)
Description
第１図は本考案クランプ継手の一実施例の構成
を示す断面図、第２図ａ，ｂはそれぞれ本考案に
おけるセンターリングの正面図及びその断面図、
第３図は本考案クランプを用いた半導体製造装置
の真空排気部の構成例を示す説明図、第４図は従
来クランプ継手の一例の構成を示す断面図、第５
図は従来クランプ継手を用いた半導体製造装置の
真空排気部の構成例を示す説明図である。
１……フランジ、２……管部、３……Ｏリング
、４……センターリング、４ａ……Ｏリング、５
……クランプ、６……（金）網、７ａ……本考案
クランプ継手、８……管。
FIG. 1 is a cross-sectional view showing the structure of an embodiment of the clamp joint of the present invention, and FIGS. 2 a and b are a front view and a cross-sectional view of the center ring of the present invention, respectively.
FIG. 3 is an explanatory diagram showing an example of the configuration of a vacuum evacuation section of a semiconductor manufacturing apparatus using the clamp of the present invention, FIG. 4 is a sectional view showing the configuration of an example of a conventional clamp joint, and FIG.
The figure is an explanatory diagram showing an example of the configuration of a vacuum evacuation section of a semiconductor manufacturing apparatus using a conventional clamp joint. 1...Flange, 2...Pipe section, 3...O ring, 4...Center ring, 4a...O ring, 5
... Clamp, 6 ... (gold) mesh, 7a ... Clamp joint of the present invention, 8 ... Pipe.
Claims (1)
、両フランジ１，１間に挿設したＯリング３と、
このＯリング３を保持するセンターリング４と、
両フランジ１，１の外周を締付けるクランプ５と
よりなるクランプ継手において、前記センターリ
ング４に網６を取付けてなるクランプ継手。 Pipe parts 2, 2 having opposing flanges 1, 1, and an O-ring 3 inserted between both flanges 1, 1,
A center ring 4 that holds this O-ring 3;
This clamp joint consists of a clamp 5 that tightens the outer periphery of both flanges 1, 1, and a net 6 is attached to the center ring 4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7371090U JPH0431386U (en) | 1990-07-10 | 1990-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7371090U JPH0431386U (en) | 1990-07-10 | 1990-07-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0431386U true JPH0431386U (en) | 1992-03-13 |
Family
ID=31612766
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7371090U Pending JPH0431386U (en) | 1990-07-10 | 1990-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0431386U (en) |
-
1990
- 1990-07-10 JP JP7371090U patent/JPH0431386U/ja active Pending