JPH0432005U - - Google Patents
Info
- Publication number
- JPH0432005U JPH0432005U JP7458690U JP7458690U JPH0432005U JP H0432005 U JPH0432005 U JP H0432005U JP 7458690 U JP7458690 U JP 7458690U JP 7458690 U JP7458690 U JP 7458690U JP H0432005 U JPH0432005 U JP H0432005U
- Authority
- JP
- Japan
- Prior art keywords
- positioning
- interferometer
- section
- optical element
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 8
- 238000010586 diagram Methods 0.000 description 5
- 239000005357 flat glass Substances 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Description
第１図は本考案に係る干渉計の概念図、第２図
ａおよびｂは同第１実施例を示し、第２図ａは概
略構成図、第２図ｂは第２図ａの矢視図、第３図
ａおよびｂは同第２実施例を示し、第３図ａは概
略構成図、第３図ｂは第３図ａの矢視図、第４図
ａおよびｂは同第３実施例を示し、第４図ａは概
略構成図、第４図ｂは第４図ａの矢視図、第５図
〜第７図は従来例を示す概略構成図である。
１……干渉計、２……干渉計本体、３，２３，
３７，４７……アダプター、４……光学定盤、５
……筺体、６……レーザ光源、７……レーザ光、
８……ビームエキスパンダー、９……ビームスプ
リツター、１１……観察部、１２，１３……位置
決め部、１４……角度調整機構、１５……基台、
１６……角度基準、１７……光学素子、１８……
被検光学素子、１９，３２……保持部、２０……
参照面、２１……参照レンズ、２２……位置決め
リング、２４……位置決めボス、２５，２６……
角度調整ネジ、２７……バネ、２８，３９……角
度基準面、２９……平面ガラス、３０……光軸方
向移動ステージ、３１……被検ミラー、３３……
フイゾー干渉計、３４……嵌合部、３５……トワ
イマン・グリーン干渉計、３６……位置決めピン
、３８……フランジ、４０……プリズムビームス
プリツター、４１……支持部、４２……参照曲面
、４３……対物レンズ、４４……Ｖブロツク、４
５……リング、４６……ミラービームスプリツタ
ー、４８……ミラー、４９……参照面。
FIG. 1 is a conceptual diagram of an interferometer according to the present invention, FIGS. 2 a and b show the first embodiment, FIG. 2 a is a schematic configuration diagram, and FIG. 3A and 3B show the second embodiment, FIG. 3A is a schematic configuration diagram, FIG. 4A is a schematic configuration diagram, FIG. 4B is a view taken along the arrow in FIG. 4A, and FIGS. 5 to 7 are schematic configuration diagrams showing a conventional example. 1... Interferometer, 2... Interferometer body, 3, 23,
37, 47...adapter, 4...optical surface plate, 5
...Housing, 6...Laser light source, 7...Laser light,
8... Beam expander, 9... Beam splitter, 11... Observation section, 12, 13... Positioning section, 14... Angle adjustment mechanism, 15... Base,
16... Angle reference, 17... Optical element, 18...
Optical element to be tested, 19, 32...Holding section, 20...
Reference surface, 21...Reference lens, 22...Positioning ring, 24...Positioning boss, 25, 26...
Angle adjustment screw, 27... Spring, 28, 39... Angle reference plane, 29... Flat glass, 30... Optical axis direction movement stage, 31... Mirror to be inspected, 33...
Fizeau interferometer, 34... Fitting part, 35... Twyman-Green interferometer, 36... Positioning pin, 38... Flange, 40... Prism beam splitter, 41... Support part, 42... Reference curved surface , 43...Objective lens, 44...V block, 4
5...Ring, 46...Mirror beam splitter, 48...Mirror, 49...Reference surface.
Claims (1)
エキスパンダーおよびビームスプリツターと、反
射光の干渉縞を観察する観察部とを内設した筺体
のレーザ出射部に位置決め部を設けた干渉計本体
と、光軸と直交する角度基準を備えた光学素子と
被検光学素子の保持部とを保持するとともに、前
記位置決め部と対をなす位置決め部および角度調
整機構を備えたアダプターとを、前記各位置決め
部を介し接続して成る干渉計。 an interferometer main body having a positioning section in a laser emitting section of a housing that includes a laser light source, a beam expander and a beam splitter disposed on a laser optical path, and an observation section for observing interference fringes of reflected light; Each of the positioning parts holds an optical element having an angle reference perpendicular to the optical axis and a holding part for the optical element to be tested, and also holds an adapter having a positioning part and an angle adjustment mechanism that are paired with the positioning part. Interferometer consisting of connected via.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7458690U JPH0432005U (en) | 1990-07-13 | 1990-07-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7458690U JPH0432005U (en) | 1990-07-13 | 1990-07-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0432005U true JPH0432005U (en) | 1992-03-16 |
Family
ID=31614406
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7458690U Pending JPH0432005U (en) | 1990-07-13 | 1990-07-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0432005U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010216894A (en) * | 2009-03-13 | 2010-09-30 | Olympus Corp | Interferometer |
| JP2015075452A (en) * | 2013-10-11 | 2015-04-20 | 大塚電子株式会社 | Shape measurement device and shape measurement method |
-
1990
- 1990-07-13 JP JP7458690U patent/JPH0432005U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010216894A (en) * | 2009-03-13 | 2010-09-30 | Olympus Corp | Interferometer |
| JP2015075452A (en) * | 2013-10-11 | 2015-04-20 | 大塚電子株式会社 | Shape measurement device and shape measurement method |
| KR20150042713A (en) * | 2013-10-11 | 2015-04-21 | 오츠카 일렉트로닉스 가부시키가이샤 | Shape measuring apparatus and shape measuring method |
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