JPH0432802A - Production of color filter - Google Patents
Production of color filterInfo
- Publication number
- JPH0432802A JPH0432802A JP2139141A JP13914190A JPH0432802A JP H0432802 A JPH0432802 A JP H0432802A JP 2139141 A JP2139141 A JP 2139141A JP 13914190 A JP13914190 A JP 13914190A JP H0432802 A JPH0432802 A JP H0432802A
- Authority
- JP
- Japan
- Prior art keywords
- color
- resist
- picture elements
- substrate
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 19
- 239000000758 substrate Substances 0.000 claims abstract description 33
- 238000000034 method Methods 0.000 claims abstract description 25
- 238000004043 dyeing Methods 0.000 claims abstract description 13
- 230000003595 spectral effect Effects 0.000 claims abstract description 8
- 239000003086 colorant Substances 0.000 claims abstract description 6
- GGCZERPQGJTIQP-UHFFFAOYSA-N sodium;9,10-dioxoanthracene-2-sulfonic acid Chemical compound [Na+].C1=CC=C2C(=O)C3=CC(S(=O)(=O)O)=CC=C3C(=O)C2=C1 GGCZERPQGJTIQP-UHFFFAOYSA-N 0.000 claims abstract description 5
- 238000007740 vapor deposition Methods 0.000 claims abstract description 4
- 238000011161 development Methods 0.000 claims description 4
- 238000000206 photolithography Methods 0.000 claims description 2
- 230000000903 blocking effect Effects 0.000 claims 1
- 238000006722 reduction reaction Methods 0.000 abstract description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 9
- 239000007864 aqueous solution Substances 0.000 description 8
- 150000001875 compounds Chemical class 0.000 description 8
- 125000000217 alkyl group Chemical group 0.000 description 7
- 239000000975 dye Substances 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 229920000642 polymer Polymers 0.000 description 7
- -1 gelatin Chemical class 0.000 description 6
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 6
- 238000000059 patterning Methods 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 239000000178 monomer Substances 0.000 description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 4
- 108010010803 Gelatin Proteins 0.000 description 4
- 125000002947 alkylene group Chemical group 0.000 description 4
- 125000000732 arylene group Chemical group 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 229920000159 gelatin Polymers 0.000 description 4
- 239000008273 gelatin Substances 0.000 description 4
- 235000019322 gelatine Nutrition 0.000 description 4
- 235000011852 gelatine desserts Nutrition 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 229920002451 polyvinyl alcohol Polymers 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 239000004332 silver Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 239000004372 Polyvinyl alcohol Substances 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 3
- 150000001450 anions Chemical class 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 229920005615 natural polymer Polymers 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- SJEYSFABYSGQBG-UHFFFAOYSA-M Patent blue Chemical compound [Na+].C1=CC(N(CC)CC)=CC=C1C(C=1C(=CC(=CC=1)S([O-])(=O)=O)S([O-])(=O)=O)=C1C=CC(=[N+](CC)CC)C=C1 SJEYSFABYSGQBG-UHFFFAOYSA-M 0.000 description 2
- 239000000980 acid dye Substances 0.000 description 2
- WLDHEUZGFKACJH-UHFFFAOYSA-K amaranth Chemical compound [Na+].[Na+].[Na+].C12=CC=C(S([O-])(=O)=O)C=C2C=C(S([O-])(=O)=O)C(O)=C1N=NC1=CC=C(S([O-])(=O)=O)C2=CC=CC=C12 WLDHEUZGFKACJH-UHFFFAOYSA-K 0.000 description 2
- 239000001045 blue dye Substances 0.000 description 2
- 239000005388 borosilicate glass Substances 0.000 description 2
- 125000002837 carbocyclic group Chemical group 0.000 description 2
- 229910052799 carbon Chemical group 0.000 description 2
- 239000000839 emulsion Substances 0.000 description 2
- 239000001046 green dye Substances 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 239000000049 pigment Substances 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 239000000985 reactive dye Substances 0.000 description 2
- 239000001044 red dye Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 229920001059 synthetic polymer Polymers 0.000 description 2
- TUSDEZXZIZRFGC-UHFFFAOYSA-N 1-O-galloyl-3,6-(R)-HHDP-beta-D-glucose Natural products OC1C(O2)COC(=O)C3=CC(O)=C(O)C(O)=C3C3=C(O)C(O)=C(O)C=C3C(=O)OC1C(O)C2OC(=O)C1=CC(O)=C(O)C(O)=C1 TUSDEZXZIZRFGC-UHFFFAOYSA-N 0.000 description 1
- PZNPLUBHRSSFHT-RRHRGVEJSA-N 1-hexadecanoyl-2-octadecanoyl-sn-glycero-3-phosphocholine Chemical compound CCCCCCCCCCCCCCCCCC(=O)O[C@@H](COP([O-])(=O)OCC[N+](C)(C)C)COC(=O)CCCCCCCCCCCCCCC PZNPLUBHRSSFHT-RRHRGVEJSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- BIAWAXVRXKIUQB-MDZDMXLPSA-N 2-[(e)-2-phenylethenyl]pyridine Chemical compound C=1C=CC=CC=1/C=C/C1=CC=CC=N1 BIAWAXVRXKIUQB-MDZDMXLPSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- IMROMDMJAWUWLK-UHFFFAOYSA-N Ethenol Chemical compound OC=C IMROMDMJAWUWLK-UHFFFAOYSA-N 0.000 description 1
- 239000001263 FEMA 3042 Substances 0.000 description 1
- 241000909536 Gobiesocidae Species 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- LRBQNJMCXXYXIU-PPKXGCFTSA-N Penta-digallate-beta-D-glucose Natural products OC1=C(O)C(O)=CC(C(=O)OC=2C(=C(O)C=C(C=2)C(=O)OC[C@@H]2[C@H]([C@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)[C@@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)[C@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)O2)OC(=O)C=2C=C(OC(=O)C=3C=C(O)C(O)=C(O)C=3)C(O)=C(O)C=2)O)=C1 LRBQNJMCXXYXIU-PPKXGCFTSA-N 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 240000004808 Saccharomyces cerevisiae Species 0.000 description 1
- UFUQRRYHIHJMPB-DUCFOALUSA-L Sirius red 4B Chemical compound [Na+].[Na+].OS(=O)(=O)c1cc2cc(NC(=O)c3ccccc3)ccc2c([O-])c1\N=N\c1ccc(cc1)\N=N\c1ccc(cc1)S([O-])(=O)=O UFUQRRYHIHJMPB-DUCFOALUSA-L 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 235000010724 Wisteria floribunda Nutrition 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- JOSWYUNQBRPBDN-UHFFFAOYSA-P ammonium dichromate Chemical compound [NH4+].[NH4+].[O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O JOSWYUNQBRPBDN-UHFFFAOYSA-P 0.000 description 1
- 125000003710 aryl alkyl group Chemical group 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 239000005018 casein Substances 0.000 description 1
- BECPQYXYKAMYBN-UHFFFAOYSA-N casein, tech. Chemical compound NCCCCC(C(O)=O)N=C(O)C(CC(O)=O)N=C(O)C(CCC(O)=N)N=C(O)C(CC(C)C)N=C(O)C(CCC(O)=O)N=C(O)C(CC(O)=O)N=C(O)C(CCC(O)=O)N=C(O)C(C(C)O)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=O)N=C(O)C(CCC(O)=O)N=C(O)C(COP(O)(O)=O)N=C(O)C(CCC(O)=N)N=C(O)C(N)CC1=CC=CC=C1 BECPQYXYKAMYBN-UHFFFAOYSA-N 0.000 description 1
- 235000021240 caseins Nutrition 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 229920002301 cellulose acetate Polymers 0.000 description 1
- UFUQRRYHIHJMPB-UHFFFAOYSA-L chembl3182005 Chemical compound [Na+].[Na+].[O-]S(=O)(=O)C1=CC2=CC(NC(=O)C=3C=CC=CC=3)=CC=C2C(O)=C1N=NC(C=C1)=CC=C1N=NC1=CC=C(S([O-])(=O)=O)C=C1 UFUQRRYHIHJMPB-UHFFFAOYSA-L 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 125000001316 cycloalkyl alkyl group Chemical group 0.000 description 1
- 125000000753 cycloalkyl group Chemical group 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 239000000982 direct dye Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 150000002334 glycols Chemical class 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 125000000623 heterocyclic group Chemical group 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 239000012038 nucleophile Substances 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 125000004437 phosphorous atom Chemical group 0.000 description 1
- 229910052698 phosphorus Chemical group 0.000 description 1
- 229920001707 polybutylene terephthalate Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 235000018102 proteins Nutrition 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 102000004169 proteins and genes Human genes 0.000 description 1
- KXXXUIKPSVVSAW-UHFFFAOYSA-K pyranine Chemical compound [Na+].[Na+].[Na+].C1=C2C(O)=CC(S([O-])(=O)=O)=C(C=C3)C2=C2C3=C(S([O-])(=O)=O)C=C(S([O-])(=O)=O)C2=C1 KXXXUIKPSVVSAW-UHFFFAOYSA-K 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000009416 shuttering Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- ADZWSOLPGZMUMY-UHFFFAOYSA-M silver bromide Chemical compound [Ag]Br ADZWSOLPGZMUMY-UHFFFAOYSA-M 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 230000002522 swelling effect Effects 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 229920002258 tannic acid Polymers 0.000 description 1
- LRBQNJMCXXYXIU-NRMVVENXSA-N tannic acid Chemical compound OC1=C(O)C(O)=CC(C(=O)OC=2C(=C(O)C=C(C=2)C(=O)OC[C@@H]2[C@H]([C@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)[C@@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)[C@@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)O2)OC(=O)C=2C=C(OC(=O)C=3C=C(O)C(O)=C(O)C=3)C(O)=C(O)C=2)O)=C1 LRBQNJMCXXYXIU-NRMVVENXSA-N 0.000 description 1
- 229940033123 tannic acid Drugs 0.000 description 1
- 235000015523 tannic acid Nutrition 0.000 description 1
- ANRHNWWPFJCPAZ-UHFFFAOYSA-M thionine Chemical compound [Cl-].C1=CC(N)=CC2=[S+]C3=CC(N)=CC=C3N=C21 ANRHNWWPFJCPAZ-UHFFFAOYSA-M 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
Landscapes
- Optical Filters (AREA)
- Liquid Crystal (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はカラーフィルターの製造方法に関し、詳しくは
、カラー液晶デイスプレーへの使用に適したカラーフィ
ルターの製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of manufacturing a color filter, and more particularly to a method of manufacturing a color filter suitable for use in a color liquid crystal display.
カラーフィルターの製造方法として、特公昭61−51
286号等に記載のように基板上にゼラチン、グリユー
なとの天然高分子化合物、ポリビニルアルコールなとの
合成高分子化合物から成る媒染層を設け、該媒染層を露
光、処理等によりパターニング後、そのレリーフ像を色
素で染色して着色層を形成する染色フィルター製造法か
知られている。As a method for manufacturing color filters,
As described in No. 286, etc., a mordant layer consisting of a natural polymer compound such as gelatin, gryu, or a synthetic polymer compound such as polyvinyl alcohol is provided on a substrate, and after patterning the mordant layer by exposure, treatment, etc. A dyed filter manufacturing method is known in which the relief image is dyed with a dye to form a colored layer.
このような方法では、使用可能な染料か多く、フィルタ
ーとして要求される色特性への対応か比較的容易である
が、各色毎に媒染層のレリーフ形成の都度、露光、処理
を要する上、場合によっては防染用の中間層を設けると
いった複雑な工程を要するため、歩留り、平滑性に問題
があると共にコスト高になる。With this method, there are many dyes that can be used, and it is relatively easy to meet the color characteristics required for filters, but it requires exposure and processing each time the relief of the mordant layer is formed for each color, and in some cases In some cases, a complicated process such as providing an intermediate layer for resist dyeing is required, which causes problems in yield and smoothness and increases costs.
又、同じ染色カラーフィルターでも特公昭52−173
76号等に記載のように、媒染層のレリーフ形成を行わ
ず、媒染層上に各色画素を形成する毎に、パターニング
されたレジストを利用して染色してカラーフィルターを
作成するという方法もあるが、この方法にしても、各色
毎にレジストの塗布、露光、処理、剥離の工程があり、
容易な方法とは言い難い。Also, with the same dyed color filter,
As described in No. 76, there is also a method of creating a color filter by dyeing using a patterned resist each time a pixel of each color is formed on the mordant layer without forming a relief of the mordant layer. However, even with this method, there are resist coating, exposure, processing, and peeling steps for each color.
It's hard to say it's an easy method.
本発明の目的は、製造プロセスが容易で、異画素間の色
濁りがなく良好な色再現性を与えるカラーフィルターの
製造方法を提供することにある。An object of the present invention is to provide a method for manufacturing a color filter that is easy to manufacture and provides good color reproducibility without color turbidity between different pixels.
〔発明の構成〕
本発明の上記目的は、光透過性基板上に、遮光枠と分光
特性の異なる少なくとも2色の画素を有するカラーフィ
ルターの製造方法において、a)光透過性基板にフォト
リソ法又は蒸着又は銀塩の還元により遮光枠を設ける工
程
b)前記遮光枠を設けた基板に被染色層を設ける工程
C)前記被染色層を設けた基板にポジ型レジストを塗布
する工程
d)前記ポジ型レジストを設けた基板を像様露光後、現
像し該レジストの露光部を除去した後、染色により第1
の色画素を作成し、固着処理する工程
e)前記画素とは異なる個所に像様露光後、前記と同様
に現像した後、染色により第2の色画素を作成し、固着
処理する工程
f)必要に応じて、前記2色の画素とは異なる分光特性
を有する画素を、前記と同様にして必要な色数だけ作成
する工程
を含むカラーフィルターの製造方法によって達成される
。[Structure of the Invention] The above-mentioned object of the present invention is to provide a method for manufacturing a color filter having a light-shielding frame and pixels of at least two colors having different spectral characteristics on a light-transmitting substrate. Step of providing a light shielding frame by vapor deposition or reduction of silver salt b) Step of providing a layer to be dyed on the substrate provided with the light shielding frame C) Step of applying a positive resist to the substrate provided with the layer to be dyed d) Step of applying a positive resist to the substrate provided with the layer to be dyed After imagewise exposure of the substrate provided with the mold resist, the exposed part of the resist is removed by development, and then the first resist is dyed.
e) Step of creating a second color pixel by dyeing and fixing it; e) After imagewise exposure to a location different from the pixel, developing in the same manner as above, creating a second color pixel by dyeing, and fixing it; f) This is achieved by a method for manufacturing a color filter, which includes the step of creating, as necessary, pixels having spectral characteristics different from those of the two colors in the same manner as described above for the required number of colors.
以下、本発明をより詳細に説明する。The present invention will be explained in more detail below.
本発明において、遮光枠(BMと略す)はフォトリソ法
又は蒸着又は銀塩の還元により作成する。In the present invention, the light shielding frame (abbreviated as BM) is created by photolithography, vapor deposition, or reduction of silver salt.
例えば、黒色顔料を分散しであるレジスト又は黒色染料
を含むレジストを光透過性基板に塗布した後、マスク等
を利用して露光、現像してBMを作成する。For example, a resist in which a black pigment is dispersed or a resist containing a black dye is applied to a light-transmitting substrate, and then exposed and developed using a mask or the like to create a BM.
又、感光性被染色層を光透過性基板に塗布した後、同様
に露光、現像して被染色層のパターニングをする。その
後、黒色染料により被染色層を染色してBMを形成する
。Further, after applying the photosensitive layer to be dyed on a light-transmitting substrate, the layer to be dyed is patterned by exposure and development in the same manner. Thereafter, the layer to be dyed is dyed with a black dye to form a BM.
又、ニッケル、アルミニウム、クロム、チタン、銅、鉄
、銀、金等から選択される金属、又は、これらの窒化物
、酸化物、炭化物等を真空蒸着法、スハッタリング法又
はイオンブレーティング法によりBMを形成することも
できる。In addition, metals selected from nickel, aluminum, chromium, titanium, copper, iron, silver, gold, etc., or their nitrides, oxides, carbides, etc., are deposited in BM by a vacuum evaporation method, a shuttering method, or an ion blating method. can also be formed.
銀塩の還元によりBMを形成する方法としては、例えば
光透過性基板にハロゲン化銀乳剤(例えば臭化銀乳剤)
を塗布した後、マスク等の利用により後にBMになる部
分に露光する。そして、現像、定着することによりBM
部に還元銀を残す方法がある。又、銀錯塩拡散転写法等
を利用する方法もある。As a method for forming BM by reduction of silver salt, for example, a silver halide emulsion (for example, a silver bromide emulsion) is deposited on a light-transmitting substrate.
After coating, the portion that will later become BM is exposed using a mask or the like. Then, by developing and fixing, BM
There is a way to leave reduced silver in the area. There is also a method using a silver complex diffusion transfer method.
本発明に使用される媒染層として利用できる可染性高分
子化合物としては、通常、染色工程において、水あるい
は親水性溶媒(例えばメタノール、エタノールのような
アルコール、メチルセロソルブ、エチルセロソルブのよ
うなセロソロブ、エチレングリコール、プロピレングリ
コールのようなグリコール、以下同様)などが用いられ
ることを考慮して、これらに膨潤性を有する樹脂が好ま
しい。The dyeable polymer compound that can be used as the mordant layer used in the present invention is usually used in the dyeing process with water or a hydrophilic solvent (e.g. alcohol such as methanol or ethanol, cellosolub such as methyl cellosolve or ethyl cellosolve). In consideration of the fact that glycols such as ethylene glycol, propylene glycol, etc. (hereinafter the same) are used, resins having swelling properties are preferred.
このような可染性高分子化合物の中、天然高分子化合物
としては、ゼラチン、カゼイン及びグリユー等の天然高
分子蛋白質が挙げられる。又、ポリビニルアルコール、
可染性官能基を含有するアクリル系合成樹脂、水溶性ナ
イロン・ポバール・スチルバゾール樹脂等の合成高分子
化合物も好ましく使用される。Among such dyeable polymer compounds, examples of natural polymer compounds include natural polymer proteins such as gelatin, casein, and gris. Also, polyvinyl alcohol,
Synthetic polymer compounds such as acrylic synthetic resins and water-soluble nylon/poval/stilbazole resins containing dyeable functional groups are also preferably used.
本発明においては、被染色層中に媒染剤を含むことが好
ましく、媒染剤は前記可染性高分子化合物に対し、重量
比で1/10〜lOの範囲を含むことが更に好ましい。In the present invention, it is preferable that the layer to be dyed contains a mordant, and it is more preferable that the mordant contains a weight ratio of 1/10 to 10 to the dyeable polymer compound.
好ましい媒染剤の種類としては、下記一般式(I)〜(
mに示すものが挙げられるが、これらに限定されるもの
ではない。Preferred types of mordants include the following general formulas (I) to (
Examples include, but are not limited to, those shown in m.
一般式(1)
式中、Aは少なくとも2個のエチレン状不飽和基を含有
るすモノマー単位、Bはα、β−エチレン状不飽和モノ
マー単位、Rは水素原子、メチル基又はエチル基を表す
。x、y、zはモル比を示すもので、Xは0〜5モル%
、yは0〜90モル%、2は10〜100モル%である
。General formula (1) In the formula, A is a monomer unit containing at least two ethylenically unsaturated groups, B is an α,β-ethylenically unsaturated monomer unit, and R is a hydrogen atom, a methyl group or an ethyl group. represent. x, y, z indicate molar ratio, X is 0 to 5 mol%
, y is 0 to 90 mol%, and 2 is 10 to 100 mol%.
一般式(II)
式中、A及びBは一般式(1)におけるA及びBとそれ
ぞれ同義であり、R1は水素原子又はメチル基、R1及
びR3は各々、低級アルキル基、R1はアルキル基、ア
ラルキル基、シクロアルキル基又はシクロアルキルアル
キル基、xeはアニオンを表し、Xは0.5〜B、0、
yはO〜79.5.2は20〜99.5である。General formula (II) In the formula, A and B have the same meanings as A and B in general formula (1), R1 is a hydrogen atom or a methyl group, R1 and R3 are each a lower alkyl group, R1 is an alkyl group, Aralkyl group, cycloalkyl group or cycloalkylalkyl group, xe represents an anion, X is 0.5-B, 0,
y is O~79.5.2 is 20~99.5.
一般式(I[I)
÷A +X +B−+y +CHt −CH−+Z式中
、A及びBは一般式(1)におけるA及びBとそれぞれ
同義であり、Qは窒素原子又は燐原子を表し、RI 、
R!及びR1は各々、炭素環基及びアルキル基からな
る群から選ばれた基を表す。General formula (I [I) ÷ A + RI,
R! and R1 each represent a group selected from the group consisting of a carbocyclic group and an alkyl group.
Moはアニオンを表し、Xは約0.25〜約5モル%、
yは約0〜約90モル%、2は約0〜約99モル%で一
般式 (IV)
!
式中、単位Aは1個以上のα、β−エチレン系不飽和モ
ノマーから誘導され、Rは水素原子又は炭素原子数1〜
6の置換もしくは非置換アルキル基、Qは置換又は非置
換アルキレン基、アリーレン基、アリーレンアルキレン
基又は−〇〇〇R″−もしくは−CONHR″−基(式
中、R1は置換又は非置換アルキレン基、アリーレン基
又はアリーレンアルキレン基)を表す。R1は水素原子
、置換もしくは非置換アルキル基又はアリール基である
か、あるいはQと一緒になって
を形成し、各Xは求核剤により離脱可能な離脱基、各Y
は水素原子、不活性(非離脱)基又は−(NH) p−
Q−に結合される結合手、E及びFは各々、単結合又は
−緒になって5〜7員へテロ環を完成するのに必要な原
子群を表し、nは0.1又は2、mは1.2又は3、n
+mの合計は3以下であり、pはO又は1である。Xは
重合体の0〜90重量%、yは重合体の10〜100重
量%である。Mo represents an anion, X is about 0.25 to about 5 mol%,
y is about 0 to about 90 mol%, 2 is about 0 to about 99 mol%, and is represented by the general formula (IV)! where the unit A is derived from one or more α,β-ethylenically unsaturated monomers, and R is a hydrogen atom or a carbon atom
6, a substituted or unsubstituted alkyl group, Q is a substituted or unsubstituted alkylene group, an arylene group, an arylene alkylene group, or a -〇〇R''- or -CONHR''- group (wherein R1 is a substituted or unsubstituted alkylene group) , arylene group or arylene alkylene group). R1 is a hydrogen atom, a substituted or unsubstituted alkyl group or an aryl group, or together with Q, each X is a leaving group capable of being removed by a nucleophile, each Y
is a hydrogen atom, an inert (non-leaving) group or -(NH) p-
The bonds bonded to Q-, E and F, each represent a single bond or an atomic group necessary to combine to complete a 5- to 7-membered heterocycle, n is 0.1 or 2, m is 1.2 or 3, n
The sum of +m is 3 or less, and p is O or 1. X is 0 to 90% by weight of the polymer, and y is 10 to 100% by weight of the polymer.
一般式 (V)
■
X R’
式中、Qは窒素又は燐原子を表し、Rl 、 R2及び
Rsは各々、炭素環状基又はアルキル基を表し、R′は
水素又はアルキル基を表す。X@はアニオン、■は少な
くとも二つの重合性エチレン系不飽和残基を含むモノマ
ーの残基、Mは重合性エチレン系不飽和残基を含むモノ
マーの残基を表し、X。General Formula (V) ■X R' In the formula, Q represents a nitrogen or phosphorus atom, R1, R2 and Rs each represent a carbocyclic group or an alkyl group, and R' represents hydrogen or an alkyl group. X@ represents an anion; ■ represents a residue of a monomer containing at least two polymerizable ethylenically unsaturated residues; M represents a residue of a monomer containing a polymerizable ethylenically unsaturated residue;
y及び2はポリマー中の個々のフモノマーの各比率を特
性付ける数字、Xは10〜99モル%、yは0〜90モ
ル%、2は0〜5モル%を表す。y and 2 are numbers characterizing the respective proportions of individual fumonomers in the polymer; X represents 10-99 mol%, y 0-90 mol%, 2 0-5 mol%.
又、本発明に使用される水溶性染料としては、水あるい
は親水性溶媒あるいは両者の混合溶媒に溶解しつる酸性
染料、直接染料、反応性染料、カチオン染料が用いられ
、市販の染料をそのまま、あるいは好ましくは精製した
上で使用される。これらのうち酸性染料の使用が殊に好
ましい。In addition, the water-soluble dyes used in the present invention include acid dyes, direct dyes, reactive dyes, and cationic dyes that are soluble in water, hydrophilic solvents, or a mixture of both. Alternatively, it is preferably used after being purified. Among these, acid dyes are particularly preferred.
具体的には、酸性染料としてスミノール・ファーストレ
ッドG(C,1,Ac1d Redl18、住友化学工
業社製)、カヤノール・ミーリング・レッドR3(CI
、八〇id Redl14、日本代用社製)、ダイアジ
ッド・ファースト・レッド3BL (C,1,Ac1d
Red15B、三菱化成工業社製)、カヤノール・イ
エローNGS (C。Specifically, Suminol Fast Red G (C, 1, Ac1d Redl18, manufactured by Sumitomo Chemical Co., Ltd.) and Kayanol Milling Red R3 (CI
, 80id Redl14, manufactured by Nippon Daiyosha), Diazid Fast Red 3BL (C, 1, Ac1d
Red15B, manufactured by Mitsubishi Chemical Industries, Ltd.), Kayanol Yellow NGS (C.
1、 Ac1d YellowllO1日本化薬社製)
、ス日本化用社製ァーストイエo −G(C,1,Ac
1d Yellow61、住友化学工業社製)、アルザ
リングリーン(C,1,Ac 1dGreen9、東京
化成工業社製)、ブリリアント・インド・ブルー5C(
C,1,Ac1d Blue103、ヘトスト社製)、
カヤノール・サイアニン6B(CAcid BIue8
3、日本代用社製)、アンット・ノア= 77BFH(
C,i、Ac1d BluelOO1保土ケ谷化学工業
社製)、レット136P、レッド137P、ブルー5P
、ブルー43P1 グリーンCFG−111、PCシア
ン2PSPCンアン16(以上、日本代用社製)ブラッ
ク008P、ブラック1BIPなど、又、反応性染料と
しては、プロシ ン ・ ブ リ リ ア
ン ト イ エ ロ − H−5G(
C,1,Reactive Yellow2、日本代用
社製)、ダイア ミ ラ ・ ブ
リ リ ア ン ト ・ し
ッ ド GD(C,1,Reac口ve
Red63、三菱化成工業社製)、ミカシオングリーン
2BS (仁1.Reactive Green7、日
本代用社製)、スミフィックスネービーブルーR(C,
1,ReacLive Blue20、住友化学工業社
製)など、直接染料としてはダイレクト・ファースト・
イエロー GN (C,1,Direct Yello
w85、日本代用社製)、スミライト・レッド4B (
C,1,Direct Red81、住友化学工業社製
)、カヤラス・スプラ・ブルーBWL(C,1,Dir
ectBlue237 、日本代用社製)、アイゼン・
グリーンGX (C,1,DirecL Green8
、住友化学工業社製)などの1種又は2種以上か適用で
きる。1, Ac1d YellowllO1 manufactured by Nippon Kayaku Co., Ltd.)
, Nippon Kayo Co., Ltd.'s First Eye o-G (C, 1, Ac
1d Yellow61, manufactured by Sumitomo Chemical Co., Ltd.), Alzarine Green (C,1, Ac 1dGreen9, manufactured by Tokyo Chemical Industry Co., Ltd.), Brilliant India Blue 5C (
C, 1, Ac1d Blue103, manufactured by Hetost),
Kayanor Cyanine 6B (CAcid BIue8
3. Made by Nippon Daiyosha), Ant Noah = 77BFH (
C, i, Ac1d BlueOO1 manufactured by Hodogaya Chemical Industry Co., Ltd.), Red 136P, Red 137P, Blue 5P
, Blue 43P1, Green CFG-111, PC Cyan 2, PSPC N'an 16 (all manufactured by Nippon Daiyo Co., Ltd.), Black 008P, Black 1BIP, etc. Also, as reactive dyes, Prosyn Brilliant Yellow-H -5G(
C, 1, Reactive Yellow 2, manufactured by Nippon Daiyosha), Dia Mira Bu
Reliant
GD (C, 1, Reac mouth ve
Red63, manufactured by Mitsubishi Chemical Industries, Ltd.), Mikasion Green 2BS (Jin 1.Reactive Green7, manufactured by Nippon Daiyo Co., Ltd.), Sumifix Navy Blue R (C,
1, ReacLive Blue20, produced by Sumitomo Chemical Co., Ltd.);
Yellow GN (C, 1, Direct Yellow
w85, manufactured by Nippon Daiyosha), Sumilight Red 4B (
C,1,Direct Red81, manufactured by Sumitomo Chemical Co., Ltd.), Kayaras Supra Blue BWL (C,1,Dir
ectBlue237, made by Nippon Daiyosha), crampons
Green GX (C, 1, DirecL Green8
, manufactured by Sumitomo Chemical Industries, Ltd.) or two or more thereof can be applied.
染色方法としては、前記の染料を水に対して001〜5
%、好ましくは0.05〜2%の濃度となるように溶解
した染浴に、被染色層及びレジストパターンの設けられ
た基材を40〜90℃で1〜30分間浸漬すればよい。As a dyeing method, the above-mentioned dye is mixed with water in a ratio of 001 to 5.
%, preferably 0.05 to 2%, the substrate on which the layer to be dyed and the resist pattern are provided may be immersed for 1 to 30 minutes at 40 to 90°C.
本発明に係るポジ型レジストとしては、FBM120
FBM−110、FPM (以上、ダイキン製)、0
EBR−1013、CF2 (以上、東京応化源)、E
BR−1、EBR−9(以上、東し製)、FMRE10
2 C富士薬品製)、MCP−1400、lll5−1
9 (以上、ノプレー・ファー・イースト類)等が挙げ
られる。As a positive resist according to the present invention, FBM120
FBM-110, FPM (all manufactured by Daikin), 0
EBR-1013, CF2 (Tokyo Ohka Gen), E
BR-1, EBR-9 (all manufactured by Toshi), FMRE10
2C Fuji Pharmaceutical), MCP-1400, ll5-1
9 (hereinafter referred to as Nopley far yeast), etc.
本発明に使用される光透過性基板は、光透過性を有して
いれば、透明であってもよいし、半透明であってもよい
。更に、透明電極の蒸着工程なとにおいてカラーフィル
ターか高温に曝されることかあるので、基板の素材とし
ては、良好な耐粘性ををするものD・好ましい。The light-transmitting substrate used in the present invention may be transparent or semi-transparent as long as it has light-transmitting properties. Furthermore, since the color filter may be exposed to high temperatures during the vapor deposition process of the transparent electrode, it is preferable to use a material with good viscosity resistance as the material for the substrate.
このような光透過性基板を構成する素材の例としては、
ポリエチレンテレフタレート、ポリブチレンテレフタレ
ート、ポリスチレン、ポリカーボ不−1・、ポリエーテ
ルスルホン、ポリビニルアルコール及び酢酸セルロース
などの高分子化合物、ソーダガラス、硼珪酸ガラスなど
のガラス、石英及びサファイアなどの無機物質などを挙
げることができる。Examples of materials that make up such a light-transmissive substrate include:
Examples include polymer compounds such as polyethylene terephthalate, polybutylene terephthalate, polystyrene, polycarbonate, polyether sulfone, polyvinyl alcohol, and cellulose acetate, glasses such as soda glass and borosilicate glass, and inorganic substances such as quartz and sapphire. be able to.
光透過性基板は、上記の素材を用いて、板状、シート状
あるいはフィルム状などの形態で使用することかできる
。The light-transmitting substrate can be used in the form of a plate, sheet, or film using the above-mentioned materials.
光透過性基板の厚みは、用途及び材質に合わせて適宜に
設定することかできるが、通常は、0.5μm〜1.O
mmの範囲内にある。特に、液晶カラーデイスプレー用
の光透過性基板として例えばガラスを用いる場合には、
厚みか03〜2mmの範囲内にあることか好ましい。The thickness of the light-transmitting substrate can be set appropriately depending on the purpose and material, but it is usually 0.5 μm to 1.5 μm. O
It is within the range of mm. In particular, when glass is used as a light-transmissive substrate for a liquid crystal color display,
It is preferable that the thickness is within the range of 0.3 to 2 mm.
(実施例)
次に実施例を示し、本発明について更に具体的に説明す
る。尚、実施例における%表示は、特に断わりない限り
重量%を表す。(Example) Next, an example will be shown to further specifically explain the present invention. Note that % in the examples represents weight % unless otherwise specified.
実施例1
厚さ1.1mmの透明な硼珪ガラス基板(I Oc m
X10cm)に黒色顔料の入ったレジスト材(以下、黒
色レジストと略す、富士ハントエレクトロニクステクノ
ロジー社製カラーモザイクK)をスピンナーで約1μ輸
の厚さになるように塗布し、ホットプレートで乾燥させ
た。その後、露光部が第1図のBM部になるようにカラ
ーフィルター用のクロムマスクを配置し、水銀灯で露光
した。次に、1%炭酸ナトリウム水溶液で現像、純水で
洗浄した後、オーブンで加熱硬化し、基板上にBM部を
得た。Example 1 A transparent borosilicate glass substrate (I Oc m
A resist material containing black pigment (hereinafter abbreviated as black resist, Color Mosaic K manufactured by Fuji Hunt Electronics Technology Co., Ltd.) was applied to a resist material (hereinafter referred to as "black resist", Color Mosaic K, manufactured by Fuji Hunt Electronics Technology Co., Ltd.) to a thickness of approximately 1 μm on a 10 cm x 10 cm film, and dried on a hot plate. . Thereafter, a chromium mask for a color filter was placed so that the exposed area was the BM area shown in FIG. 1, and exposure was performed using a mercury lamp. Next, the film was developed with a 1% aqueous sodium carbonate solution, washed with pure water, and then heated and cured in an oven to obtain a BM portion on the substrate.
BM部を形成した試料に、重クロム酸アンモニウムを1
%含むゼラチン水溶液(低分子量ゼラチン7%を含有)
を乾燥膜厚が約1μmこなるように塗布した。60℃、
1時間のベーキングの後、ガラス基板裏面より水銀灯に
より露光、現像し、前記BMの間隙に被染色層を設けた
。Add 1 portion of ammonium dichromate to the sample on which the BM part has been formed.
% gelatin aqueous solution (contains 7% low molecular weight gelatin)
was applied so that the dry film thickness was approximately 1 μm. 60℃,
After baking for 1 hour, the glass substrate was exposed to light from the back side using a mercury lamp and developed to provide a layer to be dyed in the gaps between the BMs.
被染色層形成後の試料全面に、ポジ型レジストMCP−
1400(@シプレー・ファー・イースト製)を厚さが
約1.5μmになるように、スピンナーにて塗布してポ
ジ型レジスト層を形成した。その後、第1図において、
露光部がB部になるようにカラーフィルター用クロムマ
スクを配置して水銀灯で露光した。After forming the layer to be dyed, apply a positive resist MCP- to the entire surface of the sample.
1400 (manufactured by Shipley Far East) using a spinner to a thickness of approximately 1.5 μm to form a positive resist layer. Then, in Figure 1,
A chrome mask for a color filter was arranged so that the exposed area was part B, and exposure was performed using a mercury lamp.
露光された基板(Aと称す)をレジスト現像してレジス
トをバターニングした後、0.25%の青色染料Blu
e 5P (日本代用社製)を含み、56%の酢酸水溶
液によりpHを5にした40℃の青色染料水溶液に8分
間浸漬した後、タンニン酸、吐酒石の各1%水溶液に5
0℃、1分間浸漬して固着処理を行い、青色光透過画素
を作成した。After resist development and patterning of the exposed substrate (referred to as A), 0.25% blue dye Blu
e 5P (manufactured by Nippon Daiyo Co., Ltd.), and was immersed for 8 minutes in a blue dye aqueous solution at 40°C whose pH was adjusted to 5 with a 56% acetic acid aqueous solution, and then immersed in a 1% aqueous solution each of tannic acid and tartarite for 5 minutes.
A fixation process was performed by dipping at 0° C. for 1 minute to create a blue light transmitting pixel.
次に、上記処理後の基板A上に、露光部が第1図におけ
るG部分となるように、別のカラーフィルター用クロム
マスクを配置して同様に露光し、レジスト現像した後、
0.5%の緑色染料CFG−111(日本代用社製)を
含み56%の酢酸水溶液によりpHを5にした40℃の
緑色染料水溶液に4分間浸漬した後、同様にして固着処
理を行い、緑色光透過画素を作成した。Next, another chromium mask for color filter is placed on the substrate A after the above processing so that the exposed part becomes part G in FIG.
After 4 minutes of immersion in a 40°C green dye aqueous solution containing 0.5% green dye CFG-111 (manufactured by Nippon Daiyo Co., Ltd.) and adjusted to pH 5 with a 56% acetic acid aqueous solution, fixation treatment was performed in the same manner. A green light transmitting pixel was created.
次に、上記処理後の基板A上に全面露光し7、レジスト
現象した後、0.3%の赤色染料Red137P(日本
代用社製)を含み、56%の酢酸水溶液により+1)1
第1図
手続補正書(方式)
1、事件の表示
平成 2年特許願第139141号
2 発明の名称
カラーフィルターの製造方法
3 補正をする者
事件との関係 特許出願人
住所 東京都新宿区西新宿1丁目26番2号連絡先
〒191 東京都日野市さくら町1番地コニカ株式会
社 (電話0425−83−1521 )特 許
部
4 補正命令の日付
5、補正の対象
明細書の「発明の詳細な説明」の欄及び「図面の簡単な
説明」の欄。Next, the entire surface of the substrate A after the above treatment was exposed to light 7, and after a resist phenomenon, a 56% acetic acid aqueous solution containing 0.3% red dye Red137P (manufactured by Nippon Daiyo Co., Ltd.) was added to +1)1.
Figure 1 Procedural amendment (method) 1. Indication of the case 1990 Patent Application No. 139141 2 Name of the invention Method for manufacturing color filters 3 Person making the amendment Relationship to the case Patent applicant address Nishi-Shinjuku, Shinjuku-ku, Tokyo 1-26-2 Contact information 1-1 Sakura-cho, Hino-shi, Tokyo 191 Konica Co., Ltd. (Telephone: 0425-83-1521) Patent
Part 4: Date of the amendment order 5, the "Detailed Description of the Invention" column and the "Brief Description of Drawings" column of the specification to be amended.
補正の内容 明細書の第17頁と18頁を追加して補正する。Contents of correction The amendment is made by adding pages 17 and 18 of the specification.
を5にした60℃の赤色染料水溶液に20分間浸漬する
ことにより赤色光透過画素を作成した。このようにして
作成したカラーフィルターを試料CF−1とした。A red light transmitting pixel was created by immersing it in a 60° C. red dye aqueous solution with a temperature of 5 for 20 minutes. The color filter thus produced was designated as sample CF-1.
比較例1
特公昭52−17376号の実施例を参考に、先ずレジ
ストの波布、パターニングを行う方法でBMを染色によ
り形成した後、各色画素についても、染色する毎に同様
にレジストのパターニングを行う方法を行いカラーフィ
ルターを作成し、試料CF−2とした。Comparative Example 1 Referring to the example of Japanese Patent Publication No. 52-17376, first, a BM is formed by dyeing using a method of patterning the resist, and then the resist is patterned in the same way for each color pixel each time it is dyed. A color filter was prepared using the method and designated as sample CF-2.
このようにして得られたカラーフィルター試料CF−1
及び2の各色画素について、■ト・ノブコーン製SR−
1を用いて、分光透過率を測定し、最高透過率を各々求
めたところ、CF−1はCF−2に対し、各色画素とも
最高透過率の値が3〜8%高く、良好な分光特性を示し
た。Color filter sample CF-1 thus obtained
For each color pixel of 2 and 2, SR-
When the spectral transmittance was measured using CF-1 and the maximum transmittance was determined for each, the maximum transmittance value of CF-1 was 3 to 8% higher for each color pixel than CF-2, indicating good spectral characteristics. showed that.
本発明の製造方法に基づくカラーフィルターは色特性か
良好である。又、前記CF−2のカラーフィルターの製
造方法に較べ、レジストの塗布、パターニングの工程が
少なく、特公昭61−51286号に開示の被染色層の
パターニングを各色画素毎に行い染色する方法に較べ、
被染色層の塗布、パターニングの工程が少ないので、製
造コストも低下する。The color filter based on the manufacturing method of the present invention has good color properties. In addition, compared to the manufacturing method of the CF-2 color filter, there are fewer steps of resist coating and patterning, and compared to the dyeing method in which patterning of the layer to be dyed is performed for each color pixel disclosed in Japanese Patent Publication No. 61-51286. ,
Since there are fewer steps for coating and patterning the layer to be dyed, manufacturing costs are also reduced.
第1図は本発明の製造方法により得られるカラーフィル
ターの一例を示す断面図であり、第2図は本発明の製造
方法により得られるカラーフィルターを用いた液晶カラ
ーデイスプレーの一例を示す断面説明図である。
11・・光透過性基板 12・・・有色部13・・・
遮光枠
24・カラーフィルター
25a、 25b・・偏光板 26・・液晶27a、
27b・ 電極FIG. 1 is a cross-sectional view showing an example of a color filter obtained by the manufacturing method of the present invention, and FIG. 2 is a cross-sectional view showing an example of a liquid crystal color display using the color filter obtained by the manufacturing method of the present invention. It is a diagram. 11...Light-transparent substrate 12...Colored part 13...
Light-shielding frame 24, color filters 25a, 25b, polarizing plate 26, liquid crystal 27a,
27b・ Electrode
Claims (1)
も2色の画素を有するカラーフィルターの製造方法にお
いて、 a)光透過性基板にフォトリソ法又は蒸着又は銀塩の還
元により遮光枠を設ける工程 b)前記遮光枠を設けた基板に被染色層を設ける工程 c)前記被染色層を設けた基板にポジ型レジストを塗布
する工程 d)前記ポジ型レジストを設けた基板を像様露光後、現
像し該レジストの露光部を除去した後、染色により第1
の色画素を作成し、固着処理する工程 e)前記画素とは異なる個所に像様露光後、前記と同様
に現像した後、染色により第2の色画素を作成し、固着
処理する工程 f)必要に応じて、前記2色の画素とは異なる分光特性
を有する画素を、前記と同様にして必要な色数だけ作成
する工程 を含むことを特徴とするカラーフィルターの製造方法。[Scope of Claims] A method for manufacturing a color filter having a light-transmitting substrate and a light-shielding frame and at least two color pixels having different spectral characteristics, comprising: a) photolithography, vapor deposition, or silver salt reduction on the light-transmitting substrate; b) providing a layer to be dyed on the substrate provided with the light blocking frame; c) applying a positive resist to the substrate provided with the layer to be dyed; d) substrate provided with the positive resist. After imagewise exposure, development and removal of the exposed area of the resist, the first
e) Step of creating a second color pixel by dyeing and fixing it; e) After imagewise exposure to a location different from the pixel, developing in the same manner as above, creating a second color pixel by dyeing, and fixing it; f) A method for manufacturing a color filter, comprising the step of creating pixels having spectral characteristics different from the pixels of the two colors as many as necessary in the same manner as described above, if necessary.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2139141A JPH0432802A (en) | 1990-05-29 | 1990-05-29 | Production of color filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2139141A JPH0432802A (en) | 1990-05-29 | 1990-05-29 | Production of color filter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0432802A true JPH0432802A (en) | 1992-02-04 |
Family
ID=15238511
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2139141A Pending JPH0432802A (en) | 1990-05-29 | 1990-05-29 | Production of color filter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0432802A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5626994A (en) * | 1994-12-15 | 1997-05-06 | Fuji Photo Film Co., Ltd. | Process for forming a black matrix of a color filter |
| US5667921A (en) * | 1995-04-04 | 1997-09-16 | Fuji Photo Film Co., Ltd. | Black matrix and process for forming the same |
-
1990
- 1990-05-29 JP JP2139141A patent/JPH0432802A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5626994A (en) * | 1994-12-15 | 1997-05-06 | Fuji Photo Film Co., Ltd. | Process for forming a black matrix of a color filter |
| US5667921A (en) * | 1995-04-04 | 1997-09-16 | Fuji Photo Film Co., Ltd. | Black matrix and process for forming the same |
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