JPH0433251U

JPH0433251U -

Info

Publication number: JPH0433251U
Application number: JP7542190U
Authority: JP
Priority date: 1990-07-16
Filing date: 1990-07-16
Publication date: 1992-03-18

Description

[Brief explanation of drawings]

第１図ａはこの考案にかかる真空シールの平面
図、同図ｂはａのＡ−Ａ矢視断面図、第２図はこ
の考案にかかる真空シールを用いてイオン源容器
を真空機器へ取付けた場合の縦断面図、第３図ａ
，ｂはこの考案にかかる真空シールの変形実施例
図、第４図はこの考案にかかる真空シールの更に
他の実施例の斜視図、第５図と第６図は従来の真
空機器への軸体のシールを示す断面図である。１……真空シール、１１……環状部、１２……
管路、１３……中空部、１４……空洞部（アキユ
ムレータ）、２……イオン源容器、３……超真空
室、４……取付具、４１……環状溝、１ａ……取
付具、１ｂ……弾性環状シール。 Fig. 1a is a plan view of the vacuum seal according to this invention, Fig. 1b is a sectional view taken along the line A-A in Fig. 2, and Fig. 2 shows how the ion source container is attached to a vacuum device using the vacuum seal according to this invention. Fig. 3a
, b are diagrams of a modified embodiment of the vacuum seal according to this invention, FIG. 4 is a perspective view of still another embodiment of the vacuum seal according to this invention, and FIGS. 5 and 6 are diagrams of shafts for conventional vacuum equipment. FIG. 3 is a cross-sectional view showing a body seal. 1... Vacuum seal, 11... Annular part, 12...
Pipeline, 13...Hollow part, 14...Cavity part (accumulator), 2...Ion source container, 3...Ultra vacuum chamber, 4...Fixing tool, 41...Annular groove, 1a...Fixing tool, 1b...Elastic annular seal.

補正平２．９．２７図面の簡単な説明を次のように補正する。明細書の８ページ、下から１行目より次のペー
ジの上から３行目にかけての、「第４図はこの考
案にかかる真空シールの更に他の実施例の斜視図
、第５図と第６図は従来の真空機器への軸体のシ
ールを示す断面図である。」までを削除し、代わ
りに「第４図は第３図の変形実施例で管路部を環
状部の上に接続した場合の実施例図、第５図はこ
の考案にかかる真空シールの更に他の実施例の斜
視図、第６図と第７図は従来の真空機器への軸体
のシールを示す断面図である。」とする。Amendment September 27, 1992 The brief description of the drawing is amended as follows. On page 8 of the specification, from the first line from the bottom to the third line from the top of the next page, ``Figure 4 is a perspective view of still another embodiment of the vacuum seal according to this invention, Figure 5 and 6 is a sectional view showing a conventional seal of a shaft body in a vacuum device.'' and replaced it with ``Figure 4 is a modified embodiment of Figure 3, with the conduit section placed above the annular section. FIG. 5 is a perspective view of still another embodiment of the vacuum seal according to this invention, and FIGS. 6 and 7 are cross-sectional views showing the seal of a shaft body for conventional vacuum equipment. ”.

Claims

[Claims for Utility Model Registration] (1) An annular part having a hollow inside and partially or entirely made of an elastic material, and an annular part connected to the annular part to allow pressure fluid to flow into and discharge from the hollow. A vacuum seal characterized by consisting of a conduit. (2) The vacuum seal according to claim 1, characterized in that a hollow portion having a smaller spring constant than the annular portion is formed in the middle of the pipe.