JPH0433992B2 - - Google Patents
Info
- Publication number
- JPH0433992B2 JPH0433992B2 JP58077780A JP7778083A JPH0433992B2 JP H0433992 B2 JPH0433992 B2 JP H0433992B2 JP 58077780 A JP58077780 A JP 58077780A JP 7778083 A JP7778083 A JP 7778083A JP H0433992 B2 JPH0433992 B2 JP H0433992B2
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- explosion
- exhaust
- opening
- vacuum pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 description 5
- 238000004880 explosion Methods 0.000 description 4
- 230000003068 static effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 231100001261 hazardous Toxicity 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
- F04B37/16—Means for nullifying unswept space
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58077780A JPS59203886A (ja) | 1983-05-02 | 1983-05-02 | 真空ポンプ用防爆装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58077780A JPS59203886A (ja) | 1983-05-02 | 1983-05-02 | 真空ポンプ用防爆装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59203886A JPS59203886A (ja) | 1984-11-19 |
| JPH0433992B2 true JPH0433992B2 (fr) | 1992-06-04 |
Family
ID=13643479
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58077780A Granted JPS59203886A (ja) | 1983-05-02 | 1983-05-02 | 真空ポンプ用防爆装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59203886A (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08193573A (ja) * | 1995-01-17 | 1996-07-30 | Tel Varian Ltd | クライオポンプの安全弁装置 |
-
1983
- 1983-05-02 JP JP58077780A patent/JPS59203886A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59203886A (ja) | 1984-11-19 |
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