JPH043494B2 - - Google Patents
Info
- Publication number
- JPH043494B2 JPH043494B2 JP5755783A JP5755783A JPH043494B2 JP H043494 B2 JPH043494 B2 JP H043494B2 JP 5755783 A JP5755783 A JP 5755783A JP 5755783 A JP5755783 A JP 5755783A JP H043494 B2 JPH043494 B2 JP H043494B2
- Authority
- JP
- Japan
- Prior art keywords
- measurement
- measured
- laser
- casing
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005259 measurement Methods 0.000 claims description 50
- 230000003287 optical effect Effects 0.000 claims description 25
- 230000007246 mechanism Effects 0.000 claims description 8
- 239000000498 cooling water Substances 0.000 description 10
- 238000010521 absorption reaction Methods 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 239000006096 absorbing agent Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/171—Systems in which incident light is modified in accordance with the properties of the material investigated with calorimetric detection, e.g. with thermal lens detection
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、レーザー用光学製品の分野におい
て、その光学製品の微弱吸収量の測定を行う光学
測定装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to an optical measuring device for measuring the weak absorption amount of optical products in the field of optical products for lasers.
従来例の構成とその問題点
従来この種の測定法は、比較的容易に低い吸収
量が測定可能な方法として利用されている。Configuration of conventional example and its problems Conventionally, this type of measurement method has been used as a method that allows relatively easy measurement of low absorption amounts.
第１図は、従来法による測定装置の概略図であ
る。赤外レーザ（CO2）１からのレーザ光２にビ
ームスプリツター３により、透過光４と反射光
４′に分離される。ビームスプリツター３により
反射されたレーザ光４′は、パワーメーター５で
受けられ、レーザ出力の常時監視が行なわれる。
一方、透過されたレーザー光４は、シヤツター６
及び透明窓７を通つてカロリメータ容器８内に設
置されている被測定物９に照射される。測定試料
９とレーザー光４のアライメントを容易にするた
め、He−Neレーザー１０からの可視光ビーム１
１をビームスプリツター３で反射させて、測定用
のレーザー光４に重畳させている。測定試料９
は、周囲の温度安定性を良くするため前記のカロ
リーメータ容器８で外部と空気流通を防いであ
る。更に測定試料９は、入射する測定用レーザー
光４の通過で発生した熱のロスを最少限とするよ
う、接触面積を小さくするために、２本の糸１２
により支持され、全体が上下できるベンチ１３上
に載せられている。試料９を透過した測定用レー
ザー光４は、後方にある透過窓１４を通り、パワ
ーメーター１５により受けられ、アンプ１６で増
幅した後、レコーダ１７で記録される。カロリー
メーター容器８内の試料９内で、測定用レーザー
光４の通過に伴なつて発生した熱は、試料９の表
面に接着剤等により付けられた熱電対１８により
測定され、増幅器１９で増幅後、レコーダー１７
で記録されるように構成されている。このような
従来装置では、一般に、測定試料が棒状（例えば
10×１×１cm程度）が適しており、透明光学材料
の物理的特性解明の手段として活用されるもので
あり、一般に使用されているレーザー光学製品
は、全反射鏡、透明窓等の完成品の評価には、不
適当である。その理由は、測定試料の反射率が広
範囲にわたつており、特に反射鏡の場合には、反
射光の処理が困難となる事、他の理由は、測定試
料の形状に種々のものがあり、特に外径では、直
系で25mmから、150mmのものまで分布しているた
め、それら試料の支持法が問題である事、又、光
学製品の実用上の試料厚が一般的なものでは、３
mm程度と薄く、測定時の発生熱が少なく、測定精
度を高めるためには、出力の大きい（例えば
200W以上）測定光が必要となる。しかし、従来
法の場合、ビームスプリツターに透明材料
（ZnSe等）を用いる必要がある。このビームスプ
リツターが、大きい出力のレーザー光に対して発
熱し、反射光、透過光の分割の不安定さの増大
と、ビームの位置ずれを発生し、精度の高い測定
が困難である等の問題が生じている。 FIG. 1 is a schematic diagram of a conventional measuring device. Laser light 2 from an infrared laser (CO 2 ) 1 is separated by a beam splitter 3 into transmitted light 4 and reflected light 4'. The laser beam 4' reflected by the beam splitter 3 is received by a power meter 5, and the laser output is constantly monitored.
On the other hand, the transmitted laser beam 4 is transmitted to the shutter 6
The light is then irradiated through the transparent window 7 to the object to be measured 9 placed inside the calorimeter container 8 . In order to facilitate the alignment of the measurement sample 9 and the laser beam 4, a visible light beam 1 from a He-Ne laser 10 is provided.
1 is reflected by a beam splitter 3 and superimposed on a laser beam 4 for measurement. Measurement sample 9
In order to improve the stability of the surrounding temperature, the calorimeter container 8 is used to prevent air from flowing to the outside. Furthermore, the measurement sample 9 is made of two threads 12 in order to minimize the heat loss caused by the passage of the incident measurement laser beam 4 and to reduce the contact area.
The whole body is placed on a bench 13 that can be moved up and down. The measuring laser beam 4 that has passed through the sample 9 passes through a transmission window 14 at the rear, is received by a power meter 15, is amplified by an amplifier 16, and then recorded by a recorder 17. Heat generated as the measurement laser beam 4 passes through the sample 9 in the calorimeter container 8 is measured by a thermocouple 18 attached to the surface of the sample 9 with adhesive or the like, and amplified by an amplifier 19. After, recorder 17
is configured to be recorded. In such conventional devices, the measurement sample is generally rod-shaped (e.g.
(approximately 10 x 1 x 1 cm) is suitable, and is used as a means of elucidating the physical properties of transparent optical materials. Laser optical products that are generally used include finished products such as total reflection mirrors and transparent windows. It is inappropriate for evaluation. The reason for this is that the reflectance of the measurement sample varies over a wide range, making it difficult to process the reflected light, especially in the case of a reflecting mirror.Another reason is that the measurement sample has a variety of shapes. In particular, the outer diameter ranges from 25 mm to 150 mm in diameter, so the method of supporting the sample is a problem, and the practical sample thickness for optical products is generally 3.
It is thin, about mm, generates little heat during measurement, and in order to improve measurement accuracy, it is necessary to have a large output (e.g.
200W or more) measurement light is required. However, in the case of the conventional method, it is necessary to use a transparent material (such as ZnSe) for the beam splitter. This beam splitter generates heat in response to high-output laser light, which increases the instability of splitting reflected light and transmitted light and causes beam position deviation, making highly accurate measurements difficult. There's a problem.
発明の目的
本発明は、このような従来技術の欠点を改善
し、実用のレーザー用光学製品について、高い精
度で安定してその製品の光学評価を行なえるよう
にした光学測定装置を提供するものである。Purpose of the Invention The present invention aims to improve the shortcomings of the prior art and provide an optical measuring device that can perform optical evaluations of practical laser optical products with high accuracy and stability. It is.
発明の構成
本発明においては、種々の実用レーザー光学製
品の微弱吸収量を安定して高精度に測定するため
出力の大きい（500W程度）光源に対しても使用
可能な可視光重畳用穴付反射鏡の採用と、種々の
形状の光学製品の支持を容易にするための３点支
持機構を有し、更に、反射鏡においても使用可能
なように支持具を２軸角度調節が出来る機能を有
するようにしたもので、必要に応じ測定精度を高
め、外部の温度変化の影響を極力少なくする目的
でカロリーメーター容器を２重構造として、温度
制御された冷却水を通水出来るようにした事を特
徴とした光学測定装置である。Structure of the Invention In the present invention, in order to stably and accurately measure the weak absorption amount of various practical laser optical products, a reflector with a hole for visible light superimposition that can be used even for a high output (approximately 500 W) light source is proposed. It has a three-point support mechanism that makes it easy to use mirrors and support optical products of various shapes, and it also has the ability to adjust the angle of the support on two axes so that it can also be used with reflective mirrors. In order to increase measurement accuracy as necessary and minimize the influence of external temperature changes, the calorimeter container has a double structure to allow temperature-controlled cooling water to flow through it. This is a unique optical measuring device.
実施例の説明
第２図は本発明による実施例の概略構成図であ
る。赤外レーザ（CO2）１からのレーザ光２は、
シヤツター６の開閉により制御され、可視光レー
ザー重畳用、穴付ミラー３で反射レーザー光４と
一部通過光４′に分けられる。通過光４′はパワー
メータ又は吸収体５により吸収されるよう配置さ
れている。DESCRIPTION OF EMBODIMENTS FIG. 2 is a schematic diagram of an embodiment according to the present invention. Laser light 2 from infrared laser (CO 2 ) 1 is
It is controlled by opening and closing a shutter 6, and is divided into a reflected laser beam 4 and a partially transmitted beam 4' by a mirror 3 with a hole for superimposing visible light laser. The transmitted light 4' is arranged to be absorbed by a power meter or absorber 5.
穴付ミラー３で反射された測定用のレーザー光
４は、アパーチヤ６′でビーム整形の後、透明窓
７を通つて、カロリーメーター容器８内に導かれ
る。測定試料９と測定用レーザー光４のアライメ
ントを容易にするため、He−Neレーザ１０から
の可視光ビーム１１は、穴付ミラー３の開口部を
通して、測定用レーザー光４に重畳されている。 The measuring laser beam 4 reflected by the mirror 3 with a hole is guided into the calorimeter container 8 through the transparent window 7 after being beam-shaped by the aperture 6'. In order to facilitate alignment of the measurement sample 9 and the measurement laser beam 4, the visible light beam 11 from the He-Ne laser 10 passes through the opening of the holed mirror 3 and is superimposed on the measurement laser beam 4.
カロリーメーター容器８内の測定試料９は、接
触部が点状又は線状又は線状からなる３ケ所の支
持接点を有する試料支持具１３に取りつけられて
いる。試料支持具１３は、例えば、第３図で示さ
れるように構成されている。支持具筐体１３１に
上、下２個のセンターピン１３２により取り付け
られている角度調整板１３３は、左右角度調整ネ
ジ１３４により左右に角度調整される。基板支持
リング１３５は、前記センターピン１３２の回転
軸と直交する位置に設けられている煽り角センタ
ーピン１３６により、角度調整板１３３に取りつ
けられており、煽り角調節ネジ１３７により、上
下方向に角度調整出来るようになつている。測定
試料９は、基板支持リング１３５に設けられた、
３個の基板支持ピン１３８によりその外周部で支
えられるようになつている。測定試料９に入射す
る測定用レーザー光４の測定試料９での反射光
４″は、基板支持具１３に設けられた、角度調節
ネジ１３４，１３７によりその反射方向を制御
し、カロリーメーター又は、吸収体１２に反射光
４″を入射させることが出来る角度調整機構を有
している。 The measurement sample 9 in the calorimeter container 8 is attached to a sample support 13 having three support contacts each having a dotted, linear, or linear contact portion. The sample support 13 is configured as shown in FIG. 3, for example. The angle adjustment plate 133 attached to the support housing 131 by two upper and lower center pins 132 is angularly adjusted left and right by left and right angle adjustment screws 134. The board support ring 135 is attached to the angle adjustment plate 133 by a tilt angle center pin 136 provided at a position perpendicular to the rotation axis of the center pin 132, and is adjusted vertically by a tilt angle adjustment screw 137. It is now adjustable. The measurement sample 9 is provided on the substrate support ring 135.
It is supported by three substrate support pins 138 at its outer periphery. The reflected light 4″ of the measurement laser beam 4 incident on the measurement sample 9 is controlled by the angle adjustment screws 134, 137 provided on the substrate support 13, and the reflection direction is controlled by a calorimeter or It has an angle adjustment mechanism that allows reflected light 4'' to enter the absorber 12.
試料９が透明な光学部品の場合には、試料９を
通過した測定用レーザ光４は、基板支持具筐体１
３１に設けられた開口部１３９を通り抜け後方に
ある透過窓１４を経て、パワーメーター１５によ
り受けられ、アンプ１６で増幅した後、レコーダ
ー１７で記録される。パワーメーター１５を、透
過窓１４の位置に設けるか、あるいは、カロリー
メーター容器８内の測定試料９の後方に設置する
場合には、透過窓１４は、必ずしも必要でない。 When the sample 9 is a transparent optical component, the measurement laser beam 4 that has passed through the sample 9 is transmitted to the substrate support housing 1.
The signal passes through an opening 139 provided in 31 and passes through a transparent window 14 at the rear, is received by a power meter 15, is amplified by an amplifier 16, and then recorded by a recorder 17. When the power meter 15 is installed at the position of the transmission window 14 or behind the measurement sample 9 in the calorimeter container 8, the transmission window 14 is not necessarily required.
カロリーメーター容器８内の試料９に、測定用
レーザー光４の通過に伴つて発生する熱を測定す
るために、試料９の外周面に第１の接点を有する
とともに、カロリーメーター容器８に接触する第
２の接点を有し、第２の接点を基準温度とする熱
電対１８が設置され、その出力を増幅器１９を介
して、レコーダー１７で記録される構成となつて
いる。カロリーメーター容器８は、２重構造にし
てあり、内壁８′と外壁８″の間に冷却水２０が流
せる構造となつている。冷却水２０は、入口、出
口にそれぞれバルブ２１，２２を有し必要に応じ
て止めた状態でも測定が可能なようになつてい
る。この冷却水は、温度コントロールしてある場
合は流水状態で、特にコントロールしていない場
合は冷却水を流動させないで断熱剤として利用す
るものであり、測定精度への効果は、長時間測定
の場合は前者が、短時間測定時には後者が有効で
ある。この場合、カロリーメーター容器８の２重
構造は、カロリーメーター容器８の形状によつて
は、必ずしも全壁に設ける必要はなく、例えば、
円筒形あるいは角筒形のような場合には、少なく
とも、入出射端面を２重構造にする事により、同
様な効果が得られる。 In order to measure the heat generated as the measurement laser beam 4 passes through the sample 9 in the calorimeter container 8, the first contact point is provided on the outer peripheral surface of the sample 9 and is in contact with the calorimeter container 8. A thermocouple 18 having a second contact and using the second contact as a reference temperature is installed, and its output is recorded by a recorder 17 via an amplifier 19. The calorimeter container 8 has a double structure so that cooling water 20 can flow between the inner wall 8' and the outer wall 8''.The cooling water 20 has valves 21 and 22 at the inlet and outlet, respectively. If necessary, measurements can be taken even when the cooling water is stopped.If the temperature is controlled, the cooling water is kept flowing, and if the temperature is not controlled, the cooling water is not allowed to flow and the heat insulating material is used. The former is effective for long-term measurements, and the latter is effective for short-term measurements.In this case, the double structure of the calorimeter container 8 is effective for measuring accuracy. Depending on the shape of the wall, it may not necessarily be necessary to provide it on the entire wall; for example,
In the case of a cylindrical shape or a prismatic shape, a similar effect can be obtained by at least making the entrance and exit end surfaces have a double structure.
更にカロリーメーター容器８はその中を真空状
態に保持する機能を持ち、熱伝導性の悪い大きな
試料（KCl）の測定において測定の高精度化と安
定性に重要な役割りをはたしている。 Furthermore, the calorimeter container 8 has a function of maintaining the interior in a vacuum state, and plays an important role in increasing the precision and stability of measurement when measuring a large sample (KCl) with poor thermal conductivity.
なお、２３は透明な窓であり、反射光４″の角
度あるいは、測定試料９の測定時の異常状態が観
測できるようにカロリーメーター容器８に設けら
れている。 Note that 23 is a transparent window, which is provided in the calorimeter container 8 so that the angle of the reflected light 4'' or the abnormal state of the measurement sample 9 during measurement can be observed.
本装置を用いて、測定したCO2レーザ用反射
鏡、透明窓の測定結果を以下に示す。 The measurement results of the CO 2 laser reflector and transparent window measured using this device are shown below.
(1) 全反射鏡 φ75×13mm
ダイヤモンド切削、銅基板
吸収率：0.70±0.05％ 反射率99.3％
測定条件 大気圧 レーザパワー 200W
冷却水 18°±0.1℃
測定時間 １時間
人射角度 5°
(2) 透明窓 φ75×10mm、透過率92.7％
両面鏡面ポリツシ KCl基板
吸収率：0.11±0.03％
測定条件 真空中
レーザー照射パワー 180W
冷却水 18±0.1℃ 流水
測定時間 １時間
入射角度 5°
(3) 透明窓 φ25.4×３mm、透過率82.9％
両面鏡面ポリツシ ZnSe基板
片面 AR coating（PbF2λ／４）
吸収率：0.12±0.01％
測定条件 大気中
レーザーパワー 179W
冷却水 OFF
測定時間 10分
入射角度 5°
このように、本実施例によれば、種々の形状、
材質、反射率の光学製品について、安定にかつ、
高精度で測定が可能となつた。これは、He−Ne
光（可視）とCO2レーザー光との重畳により測定
位置、ビーム入射角度の再現性が高く、又、大き
な出力のレーザー光源が使用出来るため、吸収の
少ない透明光学製品についても容易に測定出来、
さらに、熱伝導性の悪い大きな光学製品において
も、容器を真空に保つため、試料表面での熱放散
を最少限におさえ、一定に出来る。さらに、容器
の囲りを、冷却水で満すことにより、基準温度の
安定性が図れたことなどが挙げられ、レーザ光学
製品の品質の確保と、レーザ共振器の設計に大き
く貢献するものである。(1) Total reflection mirror φ75×13mm Diamond cutting, copper substrate Absorption rate: 0.70±0.05% Reflectance 99.3% Measurement conditions Atmospheric pressure Laser power 200W Cooling water 18°±0.1℃ Measurement time 1 hour Human radiation angle 5° (2 ) Transparent window φ75×10mm, transmittance 92.7% Mirror polished on both sides KCl substrate absorption rate: 0.11±0.03% Measurement conditions In vacuum Laser irradiation power 180W Cooling water 18±0.1℃ Running water Measurement time 1 hour Incident angle 5° (3) Transparent Window φ25.4×3mm, transmittance 82.9% Mirror polish on both sides ZnSe substrate single side AR coating (PbF 2 λ/4) Absorption rate: 0.12±0.01% Measurement conditions In the atmosphere Laser power 179W Cooling water OFF Measurement time 10 minutes Incident angle 5 ° As described above, according to this embodiment, various shapes,
Regarding optical products of material and reflectance, stable and
It has become possible to measure with high precision. This is He−Ne
The superposition of light (visible) and CO 2 laser light provides high reproducibility of the measurement position and beam incidence angle, and since a high output laser light source can be used, it is possible to easily measure transparent optical products with low absorption.
Furthermore, even in large optical products with poor thermal conductivity, since the container is kept in a vacuum, heat dissipation on the sample surface can be kept to a minimum and constant. Furthermore, by filling the area around the container with cooling water, we were able to stabilize the reference temperature, which greatly contributed to ensuring the quality of laser optical products and designing laser resonators. be.
発明の効果
以上のように本発明は赤外レーザー測定光と可
視レーザー光とを重畳するための穴付反射鏡と、
被測定物を収納する筐体と、前記筐体に設けら
れ、可視レーザー光重畳赤外レーザー測定光を被
測定物に導くたみの窓部と、被測定物に対し、窓
部と反対側に設けられたパワー測定手段と、被測
定物の温度上昇を測定する温度測定手段と、前記
被測定物の外周面を少なくとも３ケ所で保持する
支持機構とを備え、前記支持機構が互いに略直交
する二つの回転軸を有する角度調整機構を有して
いることを特徴とする光学測定装置を提供するも
ので、種々の形状、材質、反射率の光学製品につ
いて、安定にかつ高精度の測定が可能となる利点
を有する。Effects of the Invention As described above, the present invention includes a reflecting mirror with a hole for superimposing infrared laser measurement light and visible laser light;
a casing for storing an object to be measured; a window provided in the casing for guiding visible laser beam superimposed infrared laser measurement light to the object to be measured; and a side opposite to the window with respect to the object to be measured; a temperature measuring means for measuring a temperature rise of the object to be measured; and a support mechanism for holding the outer peripheral surface of the object to be measured at at least three positions, the support mechanisms being substantially orthogonal to each other; This optical measurement device is characterized by having an angle adjustment mechanism with two rotation axes, and is capable of stably and highly accurate measurements of optical products of various shapes, materials, and reflectances. It has the advantage of being possible.
第１図は従来の光学測定装置の概略構成図、第
２図は本発明による光学測定装置の概略構成図、
第３図ａ，ｂは同一部の側面随および平面図であ
る。
１……CO2レーザ光源、２……ビーム
（10.6μ）、３……穴あき反射鏡（φ25.5 穴径１mm
φ cu／Au蒸着）、４……反射鏡（10.6μとHe−
Ne光重畳）、４′……通過光（10.6μ）、４″……測
定物からの反射光、５……吸収体、６……ビーム
シヤツター、６′……アパーチヤ、７……透明窓、
８……カロリーメーター容器、８′……内壁、
８″……外壁、９……測定物、１０……He−Ne
レーザー、１１……可視レーザー光（6328〓）、
１２……吸収体、１３……試料支持具、１４……
透明窓、１５……パワーメーター、１６……増幅
器、１７……２ペンレコーダー、１８……熱電
対、１９……増幅器、２０……冷却液、２１，２
２……ストツプバルブ。
FIG. 1 is a schematic configuration diagram of a conventional optical measurement device, and FIG. 2 is a schematic configuration diagram of an optical measurement device according to the present invention.
Figures 3a and 3b are a side view and a plan view of the same part. 1... CO 2 laser light source, 2... Beam (10.6μ), 3... Hole reflector (φ25.5 hole diameter 1mm)
φ cu/Au vapor deposition), 4...Reflector (10.6μ and He−
Ne light superimposition), 4'... Passing light (10.6μ), 4''... Reflected light from the measurement object, 5... Absorber, 6... Beam shutter, 6'... Aperture, 7... Transparent window,
8...Calorimeter container, 8'...Inner wall,
8″...Outer wall, 9...Measurement object, 10...He-Ne
Laser, 11... Visible laser light (6328〓),
12...Absorber, 13...Sample support, 14...
Transparent window, 15...Power meter, 16...Amplifier, 17...2 pen recorder, 18...Thermocouple, 19...Amplifier, 20...Cooling liquid, 21,2
2...stop valve.
Claims (1)
畳するための穴付反射鏡と、被測定物を収納する
筐体と、前記筐体に設けられ、可視レーザー光重
畳赤外レーザー測定光を被測定物に導くための窓
部と、被測定物に対し、窓部と反対側に設けられ
たパワー測定手段と、被測定物の温度上昇を測定
する温度測定手段と、前記被測定物の外周面を少
なくとも３ケ所で保持する支持機構とを備え、前
記支持機構が互いに略直交する２つの回転軸を有
する角度調整機構を有することを特徴とする光学
測定装置。 ２ パワー測定手段が筐体に取り付けられている
ことを特徴とする特許請求の範囲第１項記載の光
学測定装置。 ３ パワー測定手段が筐体の外部に設けられてお
り、前記パワー測定手段と被測定物との間の筐体
の一部にもう一つの窓部を設けたことを特徴とす
る特許請求の範囲第１項記載の光学測定装置。 ４ 筐体の一部又は全部が二重構造を有すること
を特徴とする特許請求の範囲第１項及至第３項の
いずれかに記載の光学測定装置。[Scope of Claims] 1. A reflecting mirror with a hole for superimposing an infrared laser measurement light and a visible laser beam, a casing for accommodating an object to be measured, and a casing provided in the casing for superimposing an infrared laser beam and a visible laser beam. a window for guiding external laser measurement light to the object to be measured, a power measuring means provided on the opposite side of the object to the window, and a temperature measuring means for measuring a temperature rise of the object to be measured; An optical measurement device comprising: a support mechanism that holds the outer circumferential surface of the object to be measured at at least three locations; and the support mechanism has an angle adjustment mechanism having two rotation axes that are substantially orthogonal to each other. 2. The optical measuring device according to claim 1, wherein the power measuring means is attached to a housing. 3. Claims characterized in that the power measuring means is provided outside the casing, and another window is provided in a part of the casing between the power measuring means and the object to be measured. The optical measuring device according to item 1. 4. The optical measuring device according to any one of claims 1 to 3, wherein a part or all of the housing has a double structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58057557A JPS59182338A (en) | 1983-03-31 | 1983-03-31 | Optical measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58057557A JPS59182338A (en) | 1983-03-31 | 1983-03-31 | Optical measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59182338A JPS59182338A (en) | 1984-10-17 |
| JPH043494B2 true JPH043494B2 (en) | 1992-01-23 |
Family
ID=13059112
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58057557A Granted JPS59182338A (en) | 1983-03-31 | 1983-03-31 | Optical measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59182338A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1436591A2 (en) * | 2001-10-09 | 2004-07-14 | Glucon Inc. | Method and apparatus for determining absorption of electromagnetic radiation by a material |
| US7646484B2 (en) | 2002-10-07 | 2010-01-12 | Intellidx, Inc. | Method and apparatus for performing optical measurements of a material |
-
1983
- 1983-03-31 JP JP58057557A patent/JPS59182338A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59182338A (en) | 1984-10-17 |
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